Patents by Inventor Karen Townsend

Karen Townsend has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for teaching a workpiece transfer robot
    Patent number: 8099192
    Abstract: A method is provided for teaching a transfer robot used in conjunction with a workpiece processing system including a pedestal assembly, a light sensor having an optical input fixedly coupled to the pedestal assembly, a transfer robot having an end effector, and a processing chamber containing the pedestal assembly and light sensor. The method includes the steps of producing light within the processing chamber, moving the end effector over the optical input such that amount of light reaching the light sensor varies in relation to the position of the end effector, and recording the signal gain as the end effector is moved over the optical input. The method also includes the step of establishing from the recorded signal gain a desired position of the end effector relative to the pedestal assembly.
    Type: Grant
    Filed: November 6, 2007
    Date of Patent: January 17, 2012
    Assignee: Novellus Systems, Inc.
    Inventors: Damon Genetti, Heinrich Von Bunau, Tarek Radwan, Karen Townsend
  • METHOD AND APPARATUS FOR TEACHING A WORKPIECE TRANSFER ROBOT
    Publication number: 20090118862
    Abstract: A method is provided for teaching a transfer robot used in conjunction with a workpiece processing system including a pedestal assembly, a light sensor having an optical input fixedly coupled to the pedestal assembly, a transfer robot having an end effector, and a processing chamber containing the pedestal assembly and light sensor. The method includes the steps of producing light within the processing chamber, moving the end effector over the optical input such that amount of light reaching the light sensor varies in relation to the position of the end effector, and recording the signal gain as the end effector is moved over the optical input. The method also includes the step of establishing from the recorded signal gain a desired position of the end effector relative to the pedestal assembly.
    Type: Application
    Filed: November 6, 2007
    Publication date: May 7, 2009
    Applicant: NOVELLUS SYSTEMS, INC.
    Inventors: Damon GENETTI, Heinrich VON BUNAU, Tarek RADWAN, Karen TOWNSEND