Abstract: The invention relates to a spray tool (10) having a source (20, 21) for liquid working medium, a source (22) for control medium and a plurality of spray modules (14). Each spray module (14) has at least one feed (18, 19) for liquid working medium and at least one feed (38) for control medium, and comprises at least one spray element (16) for discharging liquid working medium. The spray modules (14) are combined to form a plurality of spray circuits (K1, K2, . . . ), the supply of control medium to which can be controlled independently of the supply of control medium to the other spray circuits. At least one spray circuit (K1, K2, . . . ) is assigned a distributor unit (28) which has a plurality of connection points (24) for connecting lines (26) which are guided freely to the feeds (38) of the spray modules (14) belonging to this spray circuit.

Abstract: A vacuum coating system has a processing station (2) designed as a sputter-etching station, in which a high-frequency input electrode (25) is mounted between two substrate holders (23, 24), which carry the substrates (5, 6). Between the substrate holders (23, 24) and the high-frequency input electrode (25), a distance (a) is provided, which is smaller than the dark space distance.