Patents by Inventor Katherine H. Chiang
Katherine H. Chiang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230141313Abstract: Semiconductor structures and methods of forming the same are provided. A semiconductor structure includes gate electrodes and first insulation patterns laterally disposed and alternately arranged on a substrate, a gate dielectric layer disposed on the gate electrodes and the first insulation patterns, at least one channel pattern disposed on the gate dielectric layer, source electrodes and drain electrodes laterally disposed and alternately arranged on the channel pattern, and second insulation patterns disposed on the channel pattern between the source and drain electrodes. Besides, from a top view, each of the drain electrodes is overlapped with one of the first insulation patterns.Type: ApplicationFiled: January 17, 2022Publication date: May 11, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chien-Hao Huang, Gao-Ming Wu, Katherine H CHIANG, Chung-Te Lin
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Publication number: 20230138939Abstract: A plurality of vertical stacks may be formed over a substrate. Each of the vertical stacks includes, from bottom to top, a bottom electrode, a dielectric pillar, and a top electrode. A continuous active layer and a gate dielectric layer may be formed over the plurality of vertical stacks. Sacrificial spacers are formed around the plurality of vertical stacks. At least one dielectric wall structure may be formed around the sacrificial spacers by filling gaps between neighboring pairs of the sacrificial spacers with a dielectric fill material. The sacrificial spacers are replaced with gate electrodes. Each of the gate electrodes may laterally surround a respective row of vertical stacks that are arranged along a first horizontal direction.Type: ApplicationFiled: February 10, 2022Publication date: May 4, 2023Inventors: Gao-Ming WU, Li-Shyue LAI, Katherine H. CHIANG, Chung-Te LIN
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Publication number: 20230134802Abstract: A memory system including a plurality of memory cells, a plurality of word lines, a plurality of bit lines, and a plurality of source lines. The plurality of memory cells are arranged in rows and columns, each of the plurality of memory cells having a gate, a drain, and a source. In the plurality of word lines, each of the word lines having a corresponding row, wherein each of the word lines is coupled to the gates of the memory cells in the corresponding row. In the plurality of bit lines and the plurality of source lines, each of the bit lines and each of the source lines having a corresponding column, where each of the bit lines is connected to the drain of the memory cells in the corresponding column and each of the source lines is connected to the source of the memory cells in the corresponding column.Type: ApplicationFiled: March 16, 2022Publication date: May 4, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Katherine H. CHIANG, Chung-Te LIN
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Publication number: 20230132910Abstract: A memory device having a capacitor structure and a method of forming the same are provided. The memory device includes a substrate; a dielectric layer disposed on the substrate; and a plurality of capacitor structures respectively disposed in the dielectric layer. Each capacitor structure includes: a cup-shaped lower electrode; a first upper electrode conformally covering an outer surface of the cup-shaped lower electrode; a first capacitor dielectric layer disposed between the outer surface of the cup-shaped lower electrode and the first upper electrode; a second upper electrode conformally covering an inner surface of the cup-shaped lower electrode, wherein the second upper electrode is electrically connected to the first upper electrode by at least one connection via; and a second capacitor dielectric layer disposed between the inner surface of the cup-shaped lower electrode and the second upper electrode.Type: ApplicationFiled: January 25, 2022Publication date: May 4, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yun-Feng Kao, Katherine H CHIANG
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Patent number: 11610640Abstract: Various aspects include methods and devices for implementing the methods for error checking a memory system. Aspects may include receiving, from a row buffer of a memory, access data corresponding to a column address of a memory access, in which the row buffer has data of an activation unit of the memory corresponding to a row address of the memory access, determining multiple error correction codes (ECCs) for the access data using the column address, and checking the access data for an error utilizing at least one of the multiple ECCs. In some aspects, the multiple ECCs may include a first ECC having data from an access unit of the memory corresponding with the column address, and at least one second ECC having data from the access unit and data from the activation unit other than from the access unit.Type: GrantFiled: August 30, 2021Date of Patent: March 21, 2023Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventor: Katherine H. Chiang
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Publication number: 20230060621Abstract: Various aspects include methods and devices for implementing the methods for error checking a memory system. Aspects may include receiving, from a row buffer of a memory, access data corresponding to a column address of a memory access, in which the row buffer has data of an activation unit of the memory corresponding to a row address of the memory access, determining multiple error correction codes (ECCs) for the access data using the column address, and checking the access data for an error utilizing at least one of the multiple ECCs. In some aspects, the multiple ECCs may include a first ECC having data from an access unit of the memory corresponding with the column address, and at least one second ECC having data from the access unit and data from the activation unit other than from the access unit.Type: ApplicationFiled: August 30, 2021Publication date: March 2, 2023Inventor: Katherine H. CHIANG
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Publication number: 20230065891Abstract: Provided is a memory cell including a channel material contacting a source line and a bit line; a ferroelectric (FE) material contacting the channel material; and a word line contacting the FE material. The FE material is disposed between the channel material and the word line. The word line includes a bulk layer. The bulk layer includes a first metal layer; and a second metal layer. The second metal layer is sandwiched between the first metal layer and the FE material.Type: ApplicationFiled: August 29, 2021Publication date: March 2, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chia-Yu Ling, Katherine H. CHIANG, Chung-Te Lin
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Publication number: 20230066482Abstract: A semiconductor device is provided, which contains a memory bank including M primary word lines and R replacement word lines, a row/column decoder, and an array of redundancy fuse elements. A sorted primary failed bit count list is generated in a descending order for the bit fail counts per word line. A sorted replacement failed bit count list is generated in an ascending order of the M primary word lines in an ascending order. The primary word lines are replaced with the replacement word lines from top to bottom on the lists until a primary failed bit count equals a replacement failed bit count or until all of the replacement word lines are used up. Optionally, the sorted primary failed bit count list may be re-sorted in an ascending or descending order of the word line address prior to the replacement process.Type: ApplicationFiled: November 7, 2022Publication date: March 2, 2023Inventors: Chien-Hao HUANG, Cheng-Yi WU, Katherine H. CHIANG, Chung-Te LIN
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Publication number: 20230063673Abstract: The present disclosure describes an embodiment of a thin film transistor based light sensor circuit. The thin film transistor based light sensor circuit includes two thin film transistors, in which a channel region of one of the thin film transistors includes a light sensing area and a channel region of the other thin film transistor has a capping material disposed thereon. The thin film transistor based light sensor circuit further includes a comparator device electrically coupled to the two thin film transistors and configured to detect a current difference between the thin film transistors in response to the thin film transistor with the channel region having the light sensing area being exposed to light.Type: ApplicationFiled: August 30, 2021Publication date: March 2, 2023Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Shih-Llen Linus LU, Katherine H. Chiang
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Publication number: 20230061108Abstract: The present disclosure describes an embodiment of a thin film transistor based temperature sensor circuit. The thin film transistor based temperature sensor circuit includes a first frequency generator with thin film transistors, a second frequency generator with complementary metal oxide semiconductor transistors, first and second counter devices, and a processor device. The first and second counter devices are configured to count a number of first pulses and a number of second pulses from the first frequency generator and second frequency generator, respectively. The processor device is configured to determine a frequency based on the number of first and second pulses.Type: ApplicationFiled: August 30, 2021Publication date: March 2, 2023Applicant: Taiwan Semiconductor Manufacturing Co., LTD.Inventors: Shih-Lien Linus LU, Katherine H. CHIANG
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Publication number: 20230058626Abstract: A transistor includes a gate electrode, a gate dielectric layer covering the gate electrode, an active layer covering the gate dielectric layer and including a first metal oxide material, and source/drain electrodes disposed on the active layer and made of a second metal oxide material with an electron concentration of at least about 1018 cm?3. A semiconductor structure and a manufacturing method are also provided.Type: ApplicationFiled: August 19, 2021Publication date: February 23, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ming-Yen Chuang, Chang-Lin Yang, Katherine H. CHIANG, Mauricio MANFRINI
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Publication number: 20230046138Abstract: A physically unclonable function (PUF) device includes first and second inverters, each of which includes a common gate node and a common drain node. The common drain node of the first inverter is electrically connected to the common gate node of the second inverter. The PUF device also includes a common output node, a first resistive memory device (RMD) electrically connected to the common drain node of the first inverter and the common output node, and a second RMD electrically connected to the common drain node of the second inverter and the common output node.Type: ApplicationFiled: January 14, 2022Publication date: February 16, 2023Inventors: Yun-Feng KAO, Katherine H. CHIANG
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Publication number: 20230041409Abstract: A memory integrated circuit is provided. The memory integrated circuit includes a first memory array, a second memory array and a driving circuit. The first and second memory arrays are laterally spaced apart, and respectively include: memory cells, each including an access transistor and a storage capacitor coupled to the access transistor; bit lines, respectively coupled to a row of the memory cells; and word lines, respectively coupled to a column of the memory cells. The driving circuit is disposed below the first and second memory arrays, and includes sense amplifiers. Each of the bit lines in the first memory array and one of the bit lines in the second memory array are routed to input lines of one of the sense amplifiers.Type: ApplicationFiled: August 6, 2021Publication date: February 9, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yun-Feng Kao, Ming-Yen Chuang, Katherine H. CHIANG, Chia-En Huang
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Publication number: 20230038958Abstract: A memory device includes an alternating stack of dielectric layers and word line layers, pairs of bit lines and source lines spaced apart from one another, a data storage layer covering a sidewall of the alternating stack, and channel layers interposed between the data storage layer and the pairs of bit lines and source lines. The alternating stack includes a staircase structure in a staircase-shaped region, and the staircase structure steps downward from a first direction and includes at least one turn. The pairs of bit lines and source lines extend in a second direction that is substantially perpendicular to the first direction and are in lateral contact with the data storage layer through the channel layers. A semiconductor structure and a method are also provided.Type: ApplicationFiled: February 11, 2022Publication date: February 9, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Li-Shyue Lai, Chien-Hao Huang, Chia-Yu Ling, Katherine H CHIANG, Chung-Te Lin
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Patent number: 11574909Abstract: A semiconductor device includes a transistor, a bit line and a bit-line via structure. The transistor is located in a transistor layer, and has a source contact and a drain contact. The bit line is electrically connected to one of the source contact and the drain contact. The bit-line via structure is located in the transistor layer, and electrically interconnects the bit line and a periphery device.Type: GrantFiled: May 27, 2021Date of Patent: February 7, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ming-Yen Chuang, Katherine H. Chiang
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Publication number: 20230032528Abstract: Provided are a semiconductor device and method of forming the same. The semiconductor device includes active components and a first barrier pattern. The active components are on a substrate. Each of the active components includes base insulation patterns on the substrate, gate electrodes on the substrate and spaced apart from each other with the base insulation patterns interposed therebetween, a gate dielectric layer on the gate electrodes and the base insulation patterns, a channel pattern on the gate dielectric layer, source electrodes on the channel pattern and spaced apart from each other, a drain electrode on the channel pattern and between the source electrodes, and second insulation patterns between the source electrodes and the drain electrode. The first barrier pattern disposed on the gate dielectric layer surrounds the channel patterns, the source electrodes, the drain electrodes, and the second insulation patterns of each of the active components.Type: ApplicationFiled: July 30, 2021Publication date: February 2, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chien-Hao Huang, Gao-Ming Wu, Yun-Feng Kao, Ming-Yen Chuang, Katherine H. Chiang
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Publication number: 20230028561Abstract: A semiconductor die includes a semiconductor substrate and a transistor array disposed over the semiconductor substrate. The transistor array includes unit cells and spacers. The unit cells are disposed along rows of the transistor array extending in a first direction and columns of the transistor array extending in a second direction perpendicular to the first direction. The spacers encircle the unit cells. The unit cells include source contacts and drain contacts separated by interlayer dielectric material portions. First sections of the spacers contacting the interlayer dielectric material portions are thicker than second sections of the spacers contacting the source contacts and the drain contacts.Type: ApplicationFiled: July 23, 2021Publication date: January 26, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Gao-Ming Wu, Katherine H. CHIANG, Chien-Hao Huang, Chung-Te Lin
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Publication number: 20230025820Abstract: A plurality of vertical stacks may be formed over a substrate. Each of the vertical stacks includes, from bottom to top, a bottom electrode, a dielectric pillar, and a top electrode. A continuous active layer may be formed over the plurality of vertical stacks. A gate dielectric layer may be formed over the continuous active layer. The continuous active layer and the gate dielectric layer may be patterned into a plurality of active layers and a plurality of gate dielectrics. Each of the plurality of active layers laterally surrounds a respective one of the vertical stacks that are arranged along a first horizontal direction, and each of the plurality of gate dielectrics laterally surrounds a respective one of the active layers. Gate electrodes may be formed over the plurality of gate dielectrics.Type: ApplicationFiled: July 22, 2021Publication date: January 26, 2023Inventors: Ming-Yen CHUANG, Katherine H. CHIANG
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Publication number: 20230027039Abstract: In an embodiment, a device includes: a pair of dielectric layers; a word line between the dielectric layers, sidewalls of the dielectric layers being recessed from a sidewall of the word line; a tunneling strip on a top surface of the word line, the sidewall of the word line, a bottom surface of the word line, and the sidewalls of the dielectric layers; a semiconductor strip on the tunneling strip; a bit line contacting a sidewall of the semiconductor strip; and a source line contacting the sidewall of the semiconductor strip.Type: ApplicationFiled: August 10, 2022Publication date: January 26, 2023Inventors: Chia Yu Ling, Chung-Te Lin, Katherine H. Chiang
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Publication number: 20230018869Abstract: A semiconductor die includes semiconductor substrate and interconnection structure. Interconnection structure includes first conductive lines, first conductive patterns, first pillar stacks, second pillar stacks, gate patterns. First conductive lines extend parallel to each other in first direction and are embedded in interlayer dielectric layer. First conductive patterns are disposed in row along first direction and are embedded in interlayer dielectric layer beside first conductive lines. First pillar stacks include first pairs of metallic blocks separated by first dielectric material blocks. Second pillar stacks include second pairs of metallic blocks separated by second dielectric material blocks. Each second pillar stack is electrically connected to respective first conductive pattern. Gate patterns extend substantially perpendicular to first conductive lines. Each gate pattern directly contacts one respective second pillar stack and extends over a group of first pillar stacks.Type: ApplicationFiled: July 15, 2021Publication date: January 19, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ming-Yen Chuang, Katherine H. CHIANG