Patents by Inventor Katherine H. Chiang

Katherine H. Chiang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230369107
    Abstract: An integrated circuit device includes a dielectric structure within a metal interconnect over a substrate. The dielectric structure includes a cavity. A first dielectric layer provides a roof for the cavity. A second dielectric layer provides a floor for the cavity. A material distinct from the first dielectric layer and the second dielectric layer provides a side edge for the cavity. In a central area of the cavity, the cavity has a constant height. The height may be selected to provide a low parasitic capacitance between features above and below the cavity. The roof of the cavity may be flat. A gate dielectric may be formed over the roof. The dielectric structure is particularly useful for reducing parasitic capacitances when employing back-end-of-line (BEOL) transistors.
    Type: Application
    Filed: July 24, 2023
    Publication date: November 16, 2023
    Inventors: Li-Shyue Lai, Gao-Ming Wu, Katherine H. Chiang, Chung-Te Lin
  • Publication number: 20230371239
    Abstract: A first thin film transistor and a second thin film transistor include a semiconducting metal oxide plate located over a substrate, and a set of electrode structures located on the semiconducting metal oxide plate and comprising, from one side to another, a first source electrode, a first gate electrode, a drain electrode, a second gate electrode, and a second source electrode. A bit line is electrically connected to the drain electrode, and laterally extends along a horizontal direction. A first capacitor structure includes a first conductive node that is electrically connected to the first source electrode. A second capacitor structure includes a second conductive node that is electrically connected to the second source electrode.
    Type: Application
    Filed: July 27, 2023
    Publication date: November 16, 2023
    Inventors: Katherine H. CHIANG, Ken-Ichi GOTO, Chia Yu LING, Neil MURRAY, Chung-Te LIN
  • Publication number: 20230369429
    Abstract: A semiconductor device includes a metal oxide semiconductor channel layer, a first gate dielectric layer contacting a first portion of a major surface of the metal oxide semiconductor channel layer, a first gate electrode overlying the first gate dielectric layer and contacting a second portion of the major surface of the metal oxide semiconductor channel layer, a drain region and a backside gate dielectric layer contacting another major surface of the metal oxide semiconductor channel layer, a backside gate electrode contacting the backside gate dielectric layer, a second gate dielectric layer contacting an end surface of the metal oxide semiconductor channel layer, a second gate electrode contacting a surface of the second gate dielectric layer, and a source region contacting another end surface of the metal oxide semiconductor channel layer.
    Type: Application
    Filed: July 25, 2023
    Publication date: November 16, 2023
    Inventors: Katherine H. CHIANG, Chung-Te LIN
  • Patent number: 11818894
    Abstract: Provided is a memory cell including a channel material contacting a source line and a bit line; a ferroelectric (FE) material contacting the channel material; and a word line contacting the FE material. The FE material is disposed between the channel material and the word line. The word line includes a bulk layer. The bulk layer includes a first metal layer; and a second metal layer. The second metal layer is sandwiched between the first metal layer and the FE material.
    Type: Grant
    Filed: August 29, 2021
    Date of Patent: November 14, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Yu Ling, Katherine H. Chiang, Chung-Te Lin
  • Publication number: 20230363180
    Abstract: In some embodiments, the present disclosure relates to an integrated chip. The integrated chip includes a magnetic tunnel junction (MTJ) disposed on a first electrode within a dielectric structure over a substrate. A first unipolar selector is disposed within the dielectric structure and is electrically coupled to the first electrode. A second unipolar selector is disposed within the dielectric structure and is electrically coupled to the first electrode. The first unipolar selector laterally extends between a first vertical line intersecting the MTJ and the substrate and a second vertical line intersecting the second unipolar selector and the substrate.
    Type: Application
    Filed: July 17, 2023
    Publication date: November 9, 2023
    Inventors: Katherine H. Chiang, Chung-Te Lin, Mauricio Manfrini
  • Publication number: 20230360698
    Abstract: A memory device may include at least one multinary memory cell. Each multinary memory cell includes a parallel connection of N sub-bit units. N is an integer greater than 1. Each of the N sub-bit units includes a series connection of a respective transistor and a respective capacitor. A first sub-bit unit includes a first capacitor having a capacitance of C, and each i-th sub-unit includes an i-th capacitor having a capacitance of about 2i?1×C. A multinary bit having 2N values may be stored. A device network including multiple multinary logic units is also provided. Each of multiple multinary logic unit includes a parallel connection of N sub-bit units. Each sub-bit unit includes a series connection of a respective transistor and a respective capacitor having capacitance ratios of powers of 2.
    Type: Application
    Filed: July 18, 2023
    Publication date: November 9, 2023
    Inventors: Katherine H. CHIANG, Chung-Te LIN
  • Publication number: 20230361216
    Abstract: A semiconductor device includes a substrate and a transistor structure disposed on the substrate. The transistor structure includes a channel region and a source/drain electrode disposed on the channel region. The channel region includes a lower channel portion and a plurality of upper channel portions protruding from the lower channel portion into the source/drain electrode to form an uneven interface between the channel region and the source/drain electrode.
    Type: Application
    Filed: May 5, 2022
    Publication date: November 9, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ming-Yen CHUANG, Katherine H. CHIANG
  • Publication number: 20230343789
    Abstract: A semiconductor structure is provided. The semiconductor structure includes an interconnection structure, a first transistor, and a second transistor. The interconnection structure includes a first metal line layer, a second metal line layer and a third metal line layer arranged over one another. The first transistor includes a gate structure. The second transistor is disposed adjacent to the first transistor, and includes a source/drain structure. The gate structure of the first transistor is disposed over and electrically connected to the first metal line layer, and the source/drain structure of the second transistor is arranged below and electrically connected to the second metal line layer through the third metal line layer. A manufacturing method of a semiconductor structure is also provided.
    Type: Application
    Filed: April 25, 2022
    Publication date: October 26, 2023
    Inventors: YUN-FENG KAO, KATHERINE H. CHIANG
  • Patent number: 11778836
    Abstract: In some embodiments, the present disclosure relates to an integrated chip. The integrated chip has a magnetic tunnel junction (MTJ) disposed on a first electrode that is within a dielectric structure over a substrate. A first unipolar selector is disposed within the dielectric structure and is coupled to the first electrode. A second unipolar selector is disposed within the dielectric structure and is coupled to the first electrode. The first unipolar selector and the second unipolar selector have different widths.
    Type: Grant
    Filed: August 25, 2021
    Date of Patent: October 3, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Katherine H. Chiang, Chung-Te Lin, Mauricio Manfrini
  • Patent number: 11776647
    Abstract: A semiconductor device is provided, which contains a memory bank including M primary word lines and R replacement word lines, a row/column decoder, and an array of redundancy fuse elements. A sorted primary failed bit count list is generated in a descending order for the bit fail counts per word line. A sorted replacement failed bit count list is generated in an ascending order of the M primary word lines in an ascending order. The primary word lines are replaced with the replacement word lines from top to bottom on the lists until a primary failed bit count equals a replacement failed bit count or until all of the replacement word lines are used up. Optionally, the sorted primary failed bit count list may be re-sorted in an ascending or descending order of the word line address prior to the replacement process.
    Type: Grant
    Filed: November 7, 2022
    Date of Patent: October 3, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Chien-Hao Huang, Cheng-Yi Wu, Katherine H. Chiang, Chung-Te Lin
  • Publication number: 20230307351
    Abstract: A three-dimensional integrated structure and the manufacturing method(s) thereof are described. The three-dimensional integrated structure includes a substrate having conductive features therein, and a component array disposed over the substrate and on the conductive features. The component array includes a metallic material layer and capacitor structures separated by the metallic material layer. Each of the capacitor structures includes a first metallic pillar, a first dielectric sheath surrounding the first metallic pillar, a second metallic sheath surrounding the first dielectric sheath, and a second dielectric sleeve surrounding the second metallic sheath. The metallic material layer laterally encapsulates the capacitor structures.
    Type: Application
    Filed: March 25, 2022
    Publication date: September 28, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yun-Feng Kao, Chien-Hao Huang, Gao-Ming Wu, Katherine H CHIANG
  • Patent number: 11769568
    Abstract: Various embodiments of the present disclosure are directed towards a method for memory repair using a lookup table (LUT)-free dynamic memory allocation process. An array of memory cells having a plurality of rows and a plurality of columns is provided. Further, each memory cell of the array has multiple data states and a permanent state. One or more abnormal memory cells is/are identified in a row of the array and, in response to identifying an abnormal memory cell, the abnormal memory cell is set to the permanent state. The abnormal memory cells include failed memory cells and, in some embodiments, tail memory cells having marginal performance. During a read or write operation on the row, the one or more abnormal memory cells is/are identified by the permanent state and data is read from or written to a remainder of the memory cells while excluding the abnormal memory cell(s).
    Type: Grant
    Filed: May 24, 2022
    Date of Patent: September 26, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Katherine H. Chiang
  • Publication number: 20230301052
    Abstract: Various embodiments of the present application are directed towards a memory device including a memory cell. The memory cell includes a plurality of semiconductor devices disposed on a substrate. A lower inter-metal dielectric (IMD) structure overlies the semiconductor devices. A plurality of conductive vias and a plurality of conductive wires are disposed within the IMD structure and are electrically coupled to the semiconductor devices. A data backup unit overlies the plurality of conductive vias and wires. The data backup unit includes a first source/drain structure, a second source/drain structure, a channel layer, a first memory gate structure, and a second memory gate structure. The first and second memory gate structures include an upper gate electrode over a ferroelectric layer. The first and second source/drain structures are directly electrically coupled to the semiconductor devices by way of the conductive vias and wires.
    Type: Application
    Filed: March 15, 2022
    Publication date: September 21, 2023
    Inventors: Yun-Feng Kao, Katherine H. Chiang
  • Patent number: 11749341
    Abstract: A memory device may include at least one multinary memory cell. Each multinary memory cell includes a parallel connection of N sub-bit units. N is an integer greater than 1. Each of the N sub-bit units includes a series connection of a respective transistor and a respective capacitor. A first sub-bit unit includes a first capacitor having a capacitance of C, and each i-th sub-unit includes an i-th capacitor having a capacitance of about 2i-1×C. A multinary bit having 2N values may be stored. A device network including multiple multinary logic units is also provided. Each of multiple multinary logic unit includes a parallel connection of N sub-bit units. Each sub-bit unit includes a series connection of a respective transistor and a respective capacitor having capacitance ratios of powers of 2.
    Type: Grant
    Filed: March 21, 2022
    Date of Patent: September 5, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Katherine H. Chiang, Chung-Te Lin
  • Publication number: 20230269948
    Abstract: An active device, a semiconductor device and a semiconductor chip are provided. The active device includes: a channel layer; a top source/drain electrode, disposed at a top side of the channel layer; a first bottom source/drain electrode and a second bottom source/drain electrode, disposed at a bottom side of the channel layer; a first gate structure and a second gate structure, located between the top source/drain electrode and the first bottom source/drain electrode, wherein the first gate structure comprises a non-ferroelectric dielectric layer, and the second gate structure comprises a ferroelectric layer; and a third gate structure and a fourth gate structure, located between the top source/drain electrode and the second bottom source/drain electrode, wherein the third gate structure comprises a non-ferroelectric dielectric layer, and the fourth gate structure comprises a ferroelectric layer.
    Type: Application
    Filed: February 18, 2022
    Publication date: August 24, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yun-Feng Kao, Katherine H. CHIANG
  • Patent number: 11715546
    Abstract: A method of testing a non-volatile memory (NVM) array includes obtaining a current distribution of a subset of NVM cells of the NVM array, the current distribution including first and second portions corresponding to respective logically high and low states of the subset of NVM cells, programming an entirety of the NVM cells of the NVM array to one of the logically high or low states, determining an initial bit error rate (BER) by performing first and second pass/fail (P/F) tests on each NVM cell of the NVM array, and using the current distribution to adjust the initial BER rate. Each of obtaining the current distribution, programming the entirety of the NVM cells, and performing the first and second P/F tests is performed while the NVM array is heated to a target temperature.
    Type: Grant
    Filed: August 10, 2022
    Date of Patent: August 1, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chien-Hao Huang, Katherine H. Chiang, Cheng-Yi Wu, Chung-Te Lin
  • Patent number: 11716855
    Abstract: In an embodiment, a device includes: a pair of dielectric layers; a word line between the dielectric layers, sidewalls of the dielectric layers being recessed from a sidewall of the word line; a tunneling strip on a top surface of the word line, the sidewall of the word line, a bottom surface of the word line, and the sidewalls of the dielectric layers; a semiconductor strip on the tunneling strip; a bit line contacting a sidewall of the semiconductor strip; and a source line contacting the sidewall of the semiconductor strip.
    Type: Grant
    Filed: December 24, 2020
    Date of Patent: August 1, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia Yu Ling, Chung-Te Lin, Katherine H. Chiang
  • Patent number: 11716862
    Abstract: A memory device includes a plurality of memory cells. A first memory cell of the plurality of memory cells includes a first write transistor includes a first write gate, a first write source, and a first write drain. A first read transistor includes first read gate, a first read source, a first read drain, and a first body region separating the first read source from the first read drain. The first read source is coupled to the first write source. A first capacitor has a first upper capacitor plate coupled to the first write drain and a first lower capacitor plate coupled to the first body region of the first read transistor.
    Type: Grant
    Filed: December 9, 2020
    Date of Patent: August 1, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Katherine H Chiang, Chung-Te Lin
  • Publication number: 20230230637
    Abstract: In some embodiments, the present disclosure relates to a memory device, including a plurality of content addressable memory (CAM) units arranged in rows and columns and configured to store a plurality of data states, respectively. A CAM unit of the plurality of CAM units includes a first ferroelectric memory element, a plurality of word lines extending along the rows and configured to provide a search query to the plurality of CAM units for bitwise comparison between the search query and the data states of the plurality of CAM units, and a plurality of match lines extending along the columns and configured to output a plurality of match signals, respectively from respective columns of CAM units. A match signal of a column is asserted when the data states of the respective CAM units of the column match corresponding bits of the search query.
    Type: Application
    Filed: January 19, 2022
    Publication date: July 20, 2023
    Inventor: Katherine H. Chiang
  • Publication number: 20230214296
    Abstract: Various aspects include methods and devices for implementing the methods for error checking a memory system. Aspects may include receiving, from a row buffer of a memory, access data corresponding to a column address of a memory access, in which the row buffer has data of an activation unit of the memory corresponding to a row address of the memory access, determining multiple error correction codes (ECCs) for the access data using the column address, and checking the access data for an error utilizing at least one of the multiple ECCs. In some aspects, the multiple ECCs may include a first ECC having data from an access unit of the memory corresponding with the column address, and at least one second ECC having data from the access unit and data from the activation unit other than from the access unit.
    Type: Application
    Filed: March 14, 2023
    Publication date: July 6, 2023
    Inventor: Katherine H. CHIANG