Patents by Inventor Katsuhiro KOSUGA

Katsuhiro KOSUGA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10847401
    Abstract: A wafer holding apparatus includes an electrostatic chuck configured to clamp an object, a baseplate made of aluminum and configured to support the electrostatic chuck, a water pathway portion disposed in contact with or inside the baseplate and made of a metal having higher corrosion resistance than aluminum, and a water pathway disposed inside the water pathway portion and having an entire wall surface thereof constituted by the water pathway portion, wherein the baseplate and the water pathway portion are directly bonded to each other.
    Type: Grant
    Filed: June 12, 2017
    Date of Patent: November 24, 2020
    Assignees: SHINKO ELECTRIC INDUSTRIES CO., LTD., TOHOKU SEIMITSU CO., LTD.
    Inventors: Norio Shiraiwa, Syuuichi Andou, Kenji Takatsuka, Katsuhiro Kosuga
  • Publication number: 20170372934
    Abstract: A wafer holding apparatus includes an electrostatic chuck configured to clamp an object, a baseplate made of aluminum and configured to support the electrostatic chuck, a water pathway portion disposed in contact with or inside the baseplate and made of a metal having higher corrosion resistance than aluminum, and a water pathway disposed inside the water pathway portion and having an entire wall surface thereof constituted by the water pathway portion, wherein the baseplate and the water pathway portion are directly bonded to each other.
    Type: Application
    Filed: June 12, 2017
    Publication date: December 28, 2017
    Inventors: Norio SHIRAIWA, Syuuichi ANDOU, Kenji TAKATSUKA, Katsuhiro KOSUGA
  • Publication number: 20150107771
    Abstract: A trap apparatus includes: a first cylindrical member including a space; a second cylindrical member removably disposed in the space and including side opening which allows a gas stream to flow in therethrough, and a downstream side opening which allows the gas stream flowing in from the upstream side opening to flow out therethrough; a downstream side trap member which is disposed inside the second cylindrical member to block the downstream side opening; and an upstream side trap member which is disposed between the downstream side trap member and the upstream side opening of the second cylindrical member and includes a concave portion recessed in a direction approaching the downstream side trap member.
    Type: Application
    Filed: October 20, 2014
    Publication date: April 23, 2015
    Applicants: TOHOKU SEIMITSU CO., LTD., TOKYO ELECTRON LIMITED
    Inventors: Atsushi KOBAYASHI, Shinji AKIYAMA, Shuuichi ANDOU, Katsuhiro KOSUGA, Takahiro YAMAMOTO