Abstract: A cathode unit for a magnetron sputtering apparatus includes a backing plate joined to an upper side opposed to a sputtering surface of a target set in a posture facing an inside of a vacuum chamber and a magnet unit disposed above the backing plate at an interval, a refrigerant passage through which a refrigerant can flow being formed in the backing plate, in which a surface pressure applying unit is provided, the surface pressure applying unit applying, toward an upper outer surface of the backing plate from above the backing plate, a surface pressure equivalent to pressure applied to an upper inner surface of the backing plate when the refrigerant is circulated.

Abstract: Provided is an actuator including a shaft, a drive part that moves the shaft, a fixing part disposed around the shaft, the shaft being moved relative to the fixing part, a detecting part that detects a force applied to the shaft on a side closer to the drive part than to the fixing part, and a control device that obtains a first force that is detected by the detecting part in a predetermined period of a period during which the shaft is being moved before the shaft applies the force to a workpiece, and after the predetermined period, controls the drive part based on the force detected by the detecting part and the first force.

Abstract: Provided is a sensing device to be applied to an actuator including a shaft that is movable in an axial direction, the shaft including a hollow part formed on at least a tip side of the shaft such that an interior of the shaft is hollow, the actuator being configured to generate a negative pressure in the hollow part to suction a workpiece to a tip of the shaft, thereby picking up the workpiece. The sensing device includes a flow sensor provided in a middle of an air passage to detect a flow rate of air flowing through the air passage, the air passage being a passage through which air sucked out from the hollow part flows when the negative pressure is applied to the hollow part, and a pressure sensor provided in a middle of the air passage, to detect a pressure in the air passage.

Abstract: The present invention reduces tact time for a pick-and-place operation by an actuator. In a housing of the actuator, an air passage being a passage of air when sucking air from a hollow part of a shaft is provided. Furthermore, a sucking valve that sucks air from the hollow part of the shaft through the air passage and a suction detecting sensor to detect that a workpiece is suctioned onto a tip of the shaft are provided in the air passage. Then, in the housing, the air passage is disposed at a position on a side opposite to a linear motion motor that moves the shaft in an axial direction of the shaft, via the shaft.

Abstract: A cathode unit for a magnetron sputtering apparatus includes a backing plate joined to an upper side opposed to a sputtering surface of a target set in a posture facing an inside of a vacuum chamber and a magnet unit disposed above the backing plate at an interval, a refrigerant passage through which a refrigerant can flow being formed in the backing plate, in which a surface pressure applying unit is provided, the surface pressure applying unit applying, toward an upper outer surface of the backing plate from above the backing plate, a surface pressure equivalent to pressure applied to an upper inner surface of the backing plate when the refrigerant is circulated.

Abstract: A heat-assisted magnetic recording medium includes a substrate, a plurality of foundation layers, and a magnetic layer. The plurality of foundation layers are provided on the substrate and include a first layer containing MnO. The magnetic layer is provided on the plurality of layers and includes an alloy as a main ingredient. The alloy has an L10 structure.

Abstract: A heat-assisted magnetic recording medium includes a substrate, a plurality of foundation layers, and a magnetic layer. The plurality of foundation layers are provided on the substrate and include a first layer containing MnO. The magnetic layer is provided on the plurality of layers and includes an alloy as a main ingredient. The alloy has an L10 structure.

Abstract: A vehicle equipped with a brake booster that uses the negative pressure in an intake pipe of an internal combustion engine includes an automatic stop-start apparatus that performs an automatic stop-start control of the engine while securing a sufficient brake booster negative pressure in accordance with changes in the atmospheric pressure. The apparatus detects the pressure in the brake booster. If the detected pressure exceeds a predetermined reference value during the automatically stopped state of the engine, the apparatus outputs warning information or automatically restarts the engine. The reference value is changed in accordance with the magnitude of the atmospheric pressure around the vehicle.