Patents by Inventor Katsuyuki Nakada
Katsuyuki Nakada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230392253Abstract: A film deposition system according to the present embodiment includes a film deposition apparatus, and a computer, in which the film deposition apparatus includes a film deposition chamber in which a plurality of deposition species are installable, and the computer includes a calculation region that calculates based on a calculation model having an Ising model or QUBO, and predict a time required for film deposition when a disposition of the deposition species is set.Type: ApplicationFiled: August 2, 2023Publication date: December 7, 2023Applicant: TDK CORPORATIONInventors: Tsuyoshi SUZUKI, Katsuyuki NAKADA, Tomoyuki SASAKI
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Publication number: 20230337549Abstract: The magnetoresistive effect element includes a first ferromagnetic layer, a second ferromagnetic layer, and a nonmagnetic layer positioned between the first ferromagnetic layer and the second ferromagnetic layer, and at least one of the first ferromagnetic layer and the second ferromagnetic layer includes a Heusler alloy layer including a crystal region and an amorphous region.Type: ApplicationFiled: June 23, 2023Publication date: October 19, 2023Applicant: TDK CORPORATIONInventors: Kazuumi INUBUSHI, Katsuyuki NAKADA, Shinto ICHIKAWA
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Publication number: 20230309415Abstract: A magneto resistive element includes a laminate including a first ferromagnetic layer, a second ferromagnetic layer, and a non-magnetic layer and an insulating layer configured to cover at least a part of a side surface of the laminate and including an insulator. The first ferromagnetic layer has a first non-nitride region and a first nitride region that is closer to the insulating layer than the first non-nitride region and contains nitrogen.Type: ApplicationFiled: March 23, 2022Publication date: September 28, 2023Applicant: TDK CorporationInventors: Katsuyuki NAKADA, Tomoyuki SASAKI
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Patent number: 11769523Abstract: A magnetoresistance effect element includes a first ferromagnetic layer, a second ferromagnetic layer, and a non-magnetic layer positioned between the first ferromagnetic layer and the second ferromagnetic layer, and at least one of the first ferromagnetic layer and the second ferromagnetic layer is a Heusler alloy represented by the following General Formula (1): Co2Fe?X???(1) (in Formula (1), X represents one or more elements selected from the group consisting of Mn, Cr, Si, Al, Ga and Ge, and ? and ? represent numbers that satisfy 2.3??+?, ?<?, and 0.5<?<1.9).Type: GrantFiled: June 29, 2022Date of Patent: September 26, 2023Assignee: TDK CORPORATIONInventors: Kazuumi Inubushi, Katsuyuki Nakada, Tetsuya Uemura
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Publication number: 20230292625Abstract: This magnetoresistance effect element includes a first ferromagnetic layer, a second ferromagnetic layer, and a nonmagnetic layer provided between the first ferromagnetic layer and the second ferromagnetic layer. At least one of the first ferromagnetic layer and the second ferromagnetic layer has an alloy obtained by adding an additive element to a Heusler alloy. The additive element is any one or more elements selected from the group consisting of H, He, N, O, F, Ne, P, Cl, Ar, Kr, and Xe.Type: ApplicationFiled: December 21, 2020Publication date: September 14, 2023Applicant: TDK CORPORATIONInventors: Katsuyuki NAKADA, Kazuumi INUBUSHI, Shinto ICHIKAWA
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Patent number: 11728082Abstract: A magnetoresistive effect element includes: a first ferromagnetic layer; a second ferromagnetic layer; and a non-magnetic layer located between the first ferromagnetic layer and the second ferromagnetic layer, wherein a crystal structure of the non-magnetic layer is a spinel structure, wherein the non-magnetic layer contains Mg, Al, X, and O as elements constituting the spinel structure, and wherein the X is at least one or more elements selected from a group consisting of Ti, Pt, and W.Type: GrantFiled: March 26, 2021Date of Patent: August 15, 2023Assignee: TDK CORPORATIONInventors: Tsuyoshi Suzuki, Shinto Ichikawa, Katsuyuki Nakada
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Patent number: 11730063Abstract: The magnetoresistive effect element includes a first ferromagnetic layer, a second ferromagnetic layer, and a nonmagnetic layer positioned between the first ferromagnetic layer and the second ferromagnetic layer, and at least one of the first ferromagnetic layer and the second ferromagnetic layer includes a Heusler alloy layer including a crystal region and an amorphous region.Type: GrantFiled: December 8, 2020Date of Patent: August 15, 2023Assignee: TDK CORPORATIONInventors: Kazuumi Inubushi, Katsuyuki Nakada, Shinto Ichikawa
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Publication number: 20230225222Abstract: A magnetoresistance effect element has a first ferromagnetic metal layer, a second ferromagnetic metal layer, and a tunnel barrier layer that is sandwiched between the first and second ferromagnetic metal layers, and the tunnel barrier layer has a spinel structure represented by a composition formula of AIn2Ox (0<x?4), and an A-site is a non-magnetic divalent cation which is one or more selected from a group consisting of magnesium, zinc and cadmium.Type: ApplicationFiled: December 13, 2022Publication date: July 13, 2023Applicant: TDK CORPORATIONInventors: Tomoyuki SASAKI, Katsuyuki NAKADA, Tatsuo SHIBATA
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Patent number: 11694714Abstract: A magnetoresistance effect element and a Heusler alloy in which a state change due to annealing does not easily occur. The element includes a first ferromagnetic layer, a second ferromagnetic layer, and a non-magnetic layer positioned between the first ferromagnetic layer and the second ferromagnetic layer, in which at least one of the first ferromagnetic layer and the second ferromagnetic layer is a Heusler alloy in which a portion of elements of an alloy represented by Co2Fe?Z? is substituted with a substitution element, in which Z is one or more elements selected from the group consisting of Al, Si, Ga, Ge, and Sn, ? and ? satisfy 2.3??+?, ?<?, and 0.5<?<1.9, and the substitution element is one or more elements selected from the group consisting of elements having a melting point higher than that of Fe among elements of Groups 4 to 10.Type: GrantFiled: April 6, 2022Date of Patent: July 4, 2023Assignee: TDK CORPORATIONInventors: Kazuumi Inubushi, Katsuyuki Nakada
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Patent number: 11696513Abstract: This magnetoresistance effect element includes a first ferromagnetic layer, a second ferromagnetic layer, and a tunnel barrier layer which is interposed between the first and second ferromagnetic layers, wherein the tunnel barrier layer has a spinel structure represented by a compositional formula X1-?Y?O?, and the tunnel barrier layer contains one or more additional elements selected from the group consisting of He, Ne, Ar, Kr, Xe, P, C, B, and Si, and in the compositional formula, X represents one or more elements selected from the group consisting of Mg, Zn, Cd, Ag, Pt, and Pb, Y represents one or more elements selected from the group consisting of Al, Ga, and In, a range of ? is 0<??1, and a range of ? is 0.35???1.7.Type: GrantFiled: February 5, 2021Date of Patent: July 4, 2023Assignee: TDK CORPORATIONInventors: Katsuyuki Nakada, Shinto Ichikawa
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Publication number: 20230210016Abstract: A magnetoresistance effect element includes: a first ferromagnetic layer; a second ferromagnetic layer; and a non-magnetic layer provided between the first ferromagnetic layer and the second ferromagnetic layer, wherein at least one of the first ferromagnetic layer and the second ferromagnetic layer includes a first layer and a second layer in order from the side closer to the non-magnetic layer, the first layer contains a crystallized Co-based Heusler alloy, at least a part of the second layer is crystallized, the second layer contains a ferromagnetic element, boron element and an additive element, and the additive element is any element selected from a group consisting of Ti, V, Cr, Cu, Zn, Zr, Mo, Ru, Pd, Ta, W, Ir, Pt, and Au.Type: ApplicationFiled: February 28, 2023Publication date: June 29, 2023Applicant: TDK CORPORATIONInventors: Shinto ICHIKAWA, Kazuumi INUBUSHI, Katsuyuki NAKADA
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Publication number: 20230157183Abstract: A tunnel barrier layer includes a non-magnetic oxide, wherein a crystal structure of the tunnel barrier layer includes both an ordered spinel structure and a disordered spinel structure.Type: ApplicationFiled: January 13, 2023Publication date: May 18, 2023Applicant: TDK CORPORATIONInventors: Shinto ICHIKAWA, Katsuyuki NAKADA
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Publication number: 20230144429Abstract: A magnetoresistance effect element includes a first ferromagnetic layer, a second ferromagnetic layer, and a nonmagnetic layer. The nonmagnetic layer is between the first ferromagnetic layer and the second ferromagnetic layer. At least one of the first ferromagnetic layer and the second ferromagnetic layer is a Heusler alloy layer. The nonmagnetic layer includes a first region and a second region in a plane. Both of the first region and the second region are formed of a metal. The second region is different in constituent material from the first region. The second region has a crystal structure of a body-centered cubic lattice structure (bcc).Type: ApplicationFiled: November 4, 2022Publication date: May 11, 2023Applicant: TDK CORPORATIONInventors: Shinto ICHIKAWA, Katsuyuki NAKADA, Kazuumi INUBUSHI
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Patent number: 11621392Abstract: A magnetoresistance effect element includes: a first ferromagnetic layer; a second ferromagnetic layer; and a non-magnetic layer provided between the first ferromagnetic layer and the second ferromagnetic layer, wherein at least one of the first ferromagnetic layer and the second ferromagnetic layer includes a first layer and a second layer in order from the side closer to the non-magnetic layer, the first layer contains a crystallized Co-based Heusler alloy, at least a part of the second layer is crystallized, the second layer contains a ferromagnetic element, boron element and an additive element, and the additive element is any element selected from a group consisting of Ti, V, Cr, Cu, Zn, Zr, Mo, Ru, Pd, Ta, W, Ir, Pt, and Au.Type: GrantFiled: September 21, 2021Date of Patent: April 4, 2023Assignee: TDK CORPORATIONInventors: Shinto Ichikawa, Kazuumi Inubushi, Katsuyuki Nakada
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Patent number: 11600771Abstract: A magnetoresistance effect element has an underlayer, a first ferromagnetic metal layer, a second ferromagnetic metal layer, and a tunnel barrier layer that is sandwiched between the first and second ferromagnetic metal layers. The tunnel barrier layer has a spinel structure and includes at least one lattice-matched portion, and at least one lattice-mismatched portion. The underlayer is made of a nitride layer; a layer having a (001)-oriented tetragonal or cubic structure; or a layer having a stacked structure with a combination of a nitride layer having a (001)-oriented NaCl structure and a layer having a (001)-oriented tetragonal or cubic structure.Type: GrantFiled: May 28, 2021Date of Patent: March 7, 2023Assignee: TDK CORPORATIONInventors: Tomoyuki Sasaki, Katsuyuki Nakada, Tatsuo Shibata
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Patent number: 11594674Abstract: A tunnel barrier layer includes a non-magnetic oxide, wherein a crystal structure of the tunnel barrier layer includes both an ordered spinel structure and a disordered spinel structure.Type: GrantFiled: March 18, 2020Date of Patent: February 28, 2023Assignee: TDK CORPORATIONInventors: Shinto Ichikawa, Katsuyuki Nakada
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Magnetoresistive effect element containing two non-magnetic layers with different crystal structures
Patent number: 11585873Abstract: A magnetoresistive effect element includes: a first ferromagnetic layer; a second ferromagnetic layer; and a non-magnetic layer provided between the first ferromagnetic layer and the second ferromagnetic layer, wherein the non-magnetic layer includes a first layer and a second layer, and wherein a lattice constant ? of the first layer and a lattice constant ? of the second layer satisfy a relationship of ??0.04×??2×???+0.04×?.Type: GrantFiled: July 8, 2021Date of Patent: February 21, 2023Assignees: TDK CORPORATION, NATIONAL INSTITUTE FOR MATERIALS SCIENCEInventors: Shinto Ichikawa, Katsuyuki Nakada, Hiroaki Sukegawa, Seiji Mitani, Tadakatsu Ohkubo, Kazuhiro Hono -
Patent number: 11581365Abstract: Provided are magnetoresistance effect element and a Heusler alloy in which an amount of energy required to rotate magnetization can be reduced. The magnetoresistance effect element includes a first ferromagnetic layer, a second ferromagnetic layer, and a non-magnetic layer positioned between the first ferromagnetic layer and the second ferromagnetic layer, in which at least one of the first ferromagnetic layer and the second ferromagnetic layer is a Heusler alloy in which a portion of elements of an alloy represented by Co2Fe?Z? is substituted with a substitution element, in which Z is one or more elements selected from the group consisting of Mn, Cr, Al, Si, Ga, Ge, and Sn, ? and ? satisfy 2.3??+?, ?<?, and 0.5<?<1.9, and the substitution element is an element different from the Z element and has a smaller magnetic moment than Co.Type: GrantFiled: August 6, 2020Date of Patent: February 14, 2023Assignee: TDK CORPORATIONInventors: Katsuyuki Nakada, Kazuumi Inubushi
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Publication number: 20230025589Abstract: A magnetoresistance effect element of the present disclosure includes a first Ru alloy layer, a first ferromagnetic layer, a non-magnetic metal layer, and a second ferromagnetic layer in order, wherein the first Ru alloy layer contains one or more Ru alloys represented by the following general formula (1), Ru?X1-???(1) where, in the general formula (1), the symbol X represents one or more elements selected from the group consisting of Be, B, Ti, Y, Zr, Nb, Mo, Rh, In, Sn, La, Ce, Nd, Sm, Gd, Dy, Er, Ta, W, Re, Os, and Ir, and the symbol ? represents a number satisfying 0.5<?<1, the first ferromagnetic layer contains a Heusler alloy, and the second ferromagnetic layer contains a Heusler alloy.Type: ApplicationFiled: July 6, 2022Publication date: January 26, 2023Applicant: TDK CORPORATIONInventors: Kazuumi INUBUSHI, Katsuyuki NAKADA, Shinto ICHIKAWA
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MAGNETORESISTIVE EFFECT ELEMENT CONTAINING TWO NON-MAGNETIC LAYERS WITH DIFFERENT CRYSTAL STRUCTURES
Publication number: 20230009284Abstract: A magnetoresistive effect element includes: a first ferromagnetic layer; a second ferromagnetic layer; and a non-magnetic layer provided between the first ferromagnetic layer and the second ferromagnetic layer, wherein the non-magnetic layer includes a first layer and a second layer, and wherein a lattice constant ? of the first layer and a lattice constant ? of the second layer satisfy a relationship of ??0.04×??2×???+0.04 ×?.Type: ApplicationFiled: July 8, 2021Publication date: January 12, 2023Applicants: TDK CORPORATION, NATIONAL INSTITUTE FOR MATERIALS SCIENCEInventors: Shinto ICHIKAWA, Katsuyuki NAKADA, Hiroaki SUKEGAWA, Seiji MITANI, Tadakatsu OHKUBO, Kazuhiro HONO