Patents by Inventor Katuhiko Iwabuchi

Katuhiko Iwabuchi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5048800
    Abstract: A vertical heat treatment apparatus includes a reaction furnace constituted by a reaction chamber having an inner tube and an outer tube and a heater arranged outside the reaction chamber, a manifold communicating with a lower portion of the reaction chamber to support the reaction chamber and a gas being supplied and exhausted through the mainfold, a hollow vessel, arranged together with the boat in the reaction furnace, for supporting a lower end of a boat having objects, and a plurality of first heat-insulating members detachably arranged in the hollow vessel, wherein the number of the first insulating members is adjusted to adjust a heat-insulating effect. The first heat-insulating member includes a fin unit constituted by fins horizontally arranged at predetermined intervals and spacers for keeping the intervals between the fins.
    Type: Grant
    Filed: August 7, 1990
    Date of Patent: September 17, 1991
    Assignees: Kabushiki Kaisha Toshiba, Tokyo Electron Sagami Limited
    Inventors: Shinji Miyazaki, Takahiko Moriya, Yasushi Yagi, Mituaki Komino, Katuhiko Iwabuchi