Abstract: A level shifting circuit has an input configured to receive an input signal, wherein the input signal has symmetrical maximum and minimum voltages. The level shifting circuit further includes an output configured to provide an output signal, wherein the output signal has asymmetrical maximum and minimum voltages. The output signal is generated in response to the input signal. The output signal is applied to drive a gate terminal of a SiC MOSFET.

Abstract: A level shifting circuit has an input configured to receive an input signal, wherein the input signal has symmetrical maximum and minimum voltages. The level shifting circuit further includes an output configured to provide an output signal, wherein the output signal has asymmetrical maximum and minimum voltages. The output signal is generated in response to the input signal. The output signal is applied to drive a gate terminal of a SiC MOSFET.

Abstract: A level shifting circuit has an input configured to receive an input signal, wherein the input signal has symmetrical maximum and minimum voltages. The level shifting circuit further includes an output configured to provide an output signal, wherein the output signal has asymmetrical maximum and minimum voltages. The output signal is generated in response to the input signal. The output signal is applied to drive a gate terminal of a SiC MOSFET.

Abstract: A level shifting circuit has an input configured to receive an input signal, wherein the input signal has symmetrical maximum and minimum voltages. The level shifting circuit further includes an output configured to provide an output signal, wherein the output signal has asymmetrical maximum and minimum voltages. The output signal is generated in response to the input signal. The output signal is applied to drive a gate terminal of a SiC MOSFET.

Abstract: There is a difficulty in workability of installing an optical fiber cable on a concrete structure, and when the optical fiber cable is installed on the surface of the concrete structure, the appearance of the concrete structure is spoilt by cutting the surface of the concrete structure or the like. Accordingly, there are provided a sheet-like strain sensor for confirming progress of damage of a concrete structure, in which one or a plurality of optical fiber cables are fixedly held between sheet-like bodies which are easy for the adhesive to permeate while one end/ends of the optical fiber cable/cables are pulled out; and a method for confirming progress of damage of a concrete structure by measuring strain by use of the one end of the optical fiber cable pulled out between the sheet-like bodies.

Abstract: Disclosed herein is a method of detecting an end point of plasma process performed on an object, and a plasma process apparatus. The method includes the steps of detecting an emission spectrum over a wavelength region specific to C.sub.2 in the plasma, by optical detecting means, and determining the end point of the plasma process from the emission intensity of the emission spectrum detected by the optical detector. The apparatus has a process chamber, a pair of electrodes, a light-collecting device, an optical detector, and a determining device. The chamber has a monitor window. The electrodes are located in the process chamber. The first electrode is used to support the object. A high-frequency power is supplied between the electrodes to change a process gas into plasma. The light-collecting device collects the light from the plasma through the monitor window. The optical detector detects an emission spectrum from the light collected.

Abstract: A vacuum chamber contains a first electrode for supporting a wafer, and a second electrode opposing the first electrode. A supply system and an exhaustion system are connected to the vacuum chamber. The system supplies a reactive gas into the chamber, and the system exhaust the used gas from the chamber. A radio-frequency power supply is connected to the first electrode, for supplying power between the electrodes to generate an electric field E. An annular magnet assembly is provided around the chamber, for generating a magnetic field B which has a central plane intersecting with the electric field E. The magnet assembly has a plurality of magnet elements which have different magnetization axes in the central plane of the magnetic field. Electrons drift due to a force resulting from an outer product (E.times.B) of the electric field E and the magnetic field B.

Abstract: This invention provides an end point detection method including the steps of sequentially detecting, when a process using a plasma is performed for an object to be processed, emission spectra in a specific wavelength band of an active species in the plasma by using a photodetector, calculating sum average values of emission intensities of the emission spectra, calculating the ratio or the difference between the sum average values to obtain a calculated value, and determining a point at which the calculated value exceeds a predetermined reference value as an end point of the process.

Abstract: An improved thermopile is provided. A plurality of thermocouples constituting the thermopile are composed of segments of one metal and segments of the other metal, and the segments of different metals are connected to one another alternately so that the thermocouples are arranged in series on a heat-resistant, electrically non-conductive substrate. Each segment has a portion plated on one surface of the substrate, a portion plated on the other surface of the substrate and a portion plated on the inner wall of through holes formed in the substrate to connect the two portions plated on the two surfaces of the substrate with each other. The thermopile is prepared advantageously by utilizing plating and photo-etching techniques.

Abstract: In a pallet exchange apparatus for a machine tool, a rotary member carried to be rotatable in a horizontal plane mounts thereon a pallet support means which in turn supports a pallet unloaded from the machine tool and a pallet to be loaded into the machine tool. Each pallet is provided with an engaging hook. A transfer member is provided with a transfer hook engageable with the engaging hook to move the pallet to be loaded on the machine tool toward the machine tool. A fixed hook is provided to be engageable with the engaging hook. The rotary member is rotated to move the engaging hook of the pallet to be loaded on the machine tool into engagement with the transfer hook and to move the engaging hook of the pallet unloaded from the machine tool into engagement with the fixed hook.