Abstract: A teaching device is a teaching device for a robot including a base, an arm having a plurality of links coupled to each other and coupled to the base, and a hand coupled to the arm. The teaching device includes a setter that sets a predetermined condition including start and end points of the hand in predetermined movement of the arm, and a deriver that derives a movement trajectory of the hand from the start point to the end point and a movement trajectory of the arm according to the movement trajectory of the hand based on the predetermined condition while changing the position of the base.

Abstract: A teaching device is a teaching device for a robot including a base, an arm having a plurality of links coupled to each other and coupled to the base, and a hand coupled to the arm. The teaching device includes a setter that sets a predetermined condition including start and end points of the hand in predetermined movement of the arm; a deriver that derives a movement trajectory of the hand from the start point to the end point and a movement trajectory of the arm according to the movement trajectory of the hand based on the predetermined condition; a display that displays at least one of the movement trajectory of the arm or the movement trajectory of the hand, the movement trajectories being derived by the deriver; and a corrector that corrects the movement trajectory displayed on the display according to user's input operation.

Abstract: A video confirmation computer for confirming video related to robot operation includes a storage unit and a processor. The storage unit stores information on the position of the electric motor that drives a link body of the robot received from the controller of the robot and information on the video obtained by a camera attached to the robot. The processor makes at least one of the video confirmation computer itself and a computer connected to the video confirmation computer display a model area and a video area side by side. In the model area, a two-dimensional or three-dimensional model reproducing the posture of the robot is displayed by computer graphics. In the video area, the video is displayed.

Abstract: A diagnostic system of a substrate transfer hand including a base part coupled to a hand tip portion of a robot arm and a substrate holding part coupled to the base part to hold a substrate, includes a camera which is secured to the base part and takes an image of the substrate holding part; and a diagnostic device which obtains image information of the image taken by the camera and diagnoses normality of the substrate holding part based on the image information.

Abstract: A state monitoring system for monitoring a state of a robot configured to perform work on a workpiece executes: a step of obtaining state data from a sensor and deriving a deterioration index parameter based on the obtained state data; a step of determining whether or not the deterioration index parameter is greater than a first threshold that is preset to a level lower than a level at which corrective maintenance is required; a step of further determining whether or not a frequency of having determined that the deterioration index parameter is greater than the first threshold is greater than a preset frequency threshold; and a step of suppressing an operation of the robot without stopping the robot if it is determined that the frequency is greater than the frequency threshold.

Abstract: A control device of robot includes: image data acquirer configured to acquire image data taken by camera, image data including a teaching substrate and a substrate placing portion of a hand, the teaching substrate arranged as a teaching target at substrate target position; a virtual substrate information generator configured to generate information of a virtual substrate virtually arranged at the substrate placing portion of the hand in image data of the camera; distance information calculator configured to calculate distance information from substrate placing portion to the teaching substrate based on image data of the camera; operation control unit configured to control operation of robot arm based on distance information from the substrate placing portion to the teaching substrate such that the virtual substrate coincides with the teaching substrate; and storage unit configured to store, as teaching data, position of the hand when the virtual substrate coincides with the teaching substrate.

Abstract: A control device of a robot includes: an image data acquirer acquiring image data taken by a camera, the image data including a hand teaching substrate and substrate placing portion, the teaching substrate arranged as a teaching target at a substrate target position; a virtual substrate information generator generating information of a virtual substrate virtually arranged at the hand substrate placing portion in the image data; an operating unit receiving an input and generate operation information corresponding to the input; a screen display unit displaying an image of the teaching substrate and an image of the virtual substrate on a screen; a robot operation control unit controlling an operation of the robot arm in accordance with the operation information; and a teaching data record unit storing, as teaching data, a position of the hand when the virtual substrate has coincided with the teaching substrate.

Abstract: A state monitoring system for monitoring a state of a robot configured to perform work on a workpiece executes: a step of obtaining state data from a sensor and deriving a deterioration index parameter based on the obtained state data; a step of determining whether or not the deterioration index parameter is greater than a first threshold that is preset to a level lower than a level at which corrective maintenance is required; a step of further determining whether or not a frequency of having determined that the deterioration index parameter is greater than the first threshold is greater than a preset frequency threshold; and a step of suppressing an operation of the robot without stopping the robot if it is determined that the frequency is greater than the frequency threshold.

Abstract: A control device of a robot includes: an image data acquirer acquiring image data taken by a camera, the image data including a hand teaching substrate and substrate placing portion, the teaching substrate arranged as a teaching target at a substrate target position; a virtual substrate information generator generating information of a virtual substrate virtually arranged at the hand substrate placing portion in the image data; an operating unit receiving an input and generate operation information corresponding to the input; a screen display unit displaying an image of the teaching substrate and an image of the virtual substrate on a screen; a robot operation control unit controlling an operation of the robot arm in accordance with the operation information; and a teaching data record unit storing, as teaching data, a position of the hand when the virtual substrate has coincided with the teaching substrate.

Abstract: A diagnostic system of a substrate transfer hand including a base part coupled to a hand tip portion of a robot arm and a substrate holding part coupled to the base part to hold a substrate, includes a camera which is secured to the base part and takes an image of the substrate holding part; and a diagnostic device which obtains image information of the image taken by the camera and diagnoses normality of the substrate holding part based on the image information.

Abstract: A control device of robot includes: image data acquirer configured to acquire image data taken by camera, image data including a teaching substrate and a substrate placing portion of a hand, the teaching substrate arranged as a teaching target at substrate target position; a virtual substrate information generator configured to generate information of a virtual substrate virtually arranged at the substrate placing portion of the hand in image data of the camera; distance information calculator configured to calculate distance information from substrate placing portion to the teaching substrate based on image data of the camera; operation control unit configured to control operation of robot arm based on distance information from the substrate placing portion to the teaching substrate such that the virtual substrate coincides with the teaching substrate; and storage unit configured to store, as teaching data, position of the hand when the virtual substrate coincides with the teaching substrate.

Abstract: A robot diagnosing method of detecting a deviation amount caused by a lost motion includes: a first step of preparing a robot and a line sensor, the robot including a robot arm including one or a plurality of joint portions including a first joint portion, the line sensor including a detecting portion configured to detect a position of a detected portion based on a light receiving state of a light receiver, the detected portion being inserted between a light emitter and the light receiver; and a sixth step of detecting the deviation amount caused by the lost motion at the first joint portion based on (i) the position of the detected portion based on the position of the detected portion detected in a third step and a command value from a robot control portion in a fourth step and (ii) the position of the detected portion detected in a fifth step.

Abstract: A robot shakes automatically adjusting device includes a parameter optimizing part configured to newly set any one of a plurality of control parameters to a control parameter setter when a shakes evaluation value is above a given threshold, and optimize a combination of the plurality of control parameters by causing the control parameter setter, a robot control part, a shakes acquiring part, and a determining part to repeat the new setting of the control parameters, a linear movement of an end effector, an acquisition of the shakes, and a determination, respectively, until the shakes evaluation value becomes below the given threshold.

Abstract: An apparatus for detecting cracks possibly produced in a workpiece whose distortion is being removed under pressure exerted by a pressing rod of a distortion removing machine. A detection signal produced by a sensor embedded in the pressing rod during a first predetermined period is compared with a first predetermined signal level for determining whether or not the cracking occurs in the workpiece. A detection signal produced by the acoustic emission sensor during a second predetermined period in which the workpiece is subjected to the pressure of the pressing rod without involving cracks is compared with a second predetermined signal level to determine whether or not the detecting apparatus itself operates normally.