Patents by Inventor Kazushige Toriyama

Kazushige Toriyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10424510
    Abstract: A method for filling a through hole with solder includes mounting a substrate having a through hole formed therein on a permeable barrier layer having pores that enable gas to flow through the permeable barrier. A solder source is positioned over the through hole. Molten solder is delivered in the through hole with a positive pressure from the solder source such that gas in the through holes passes the permeable barrier while the molten solder remains in the through hole.
    Type: Grant
    Filed: August 7, 2017
    Date of Patent: September 24, 2019
    Assignee: International Business Machines Corporation
    Inventors: Toyohiro Aoki, Akihiro Horibe, Kuniaki Sueoka, Kazushige Toriyama
  • Patent number: 10388566
    Abstract: A method for filling a through hole with solder includes mounting a substrate having a through hole formed therein on a permeable barrier layer having pores that enable gas to flow through the permeable barrier. A solder source is positioned over the through hole. Molten solder is delivered in the through hole with a positive pressure from the solder source such that gas in the through holes passes the permeable barrier while the molten solder remains in the through hole.
    Type: Grant
    Filed: March 11, 2016
    Date of Patent: August 20, 2019
    Assignee: International Business Machines Corporation
    Inventors: Toyohiro Aoki, Akihiro Horibe, Kuniaki Sueoka, Kazushige Toriyama
  • Patent number: 10252363
    Abstract: Forming a solder joint between metal layers by preparing a structure having solder material placed between two metal layers and heating the structure to grow an intermetallic compound in a space between the two metal layers. Growing the intermetallic compound includes setting a first surface, in contact with the solder material between the two metal layers, to a first temperature, thereby enabling growth of the intermetallic compound; setting a second surface, in contact with the solder material between the two metal layers, to a second temperature, wherein the second temperature is higher than the first temperature; and maintaining a temperature gradient (temperature/unit thickness) between the two metal layers at a predetermined value or higher until the intermetallic compound substantially fills the space between the two metal layers.
    Type: Grant
    Filed: January 10, 2017
    Date of Patent: April 9, 2019
    Assignee: International Business Machines Corporation
    Inventors: Toyohiro Aoki, Akihiro Horibe, Hiroyuki Mori, Yasumitsu Orii, Kazushige Toriyama, Ting-Li Yang
  • Patent number: 10141278
    Abstract: Highly reliable chip mounting is accomplished by using a substrate having such a shape that a stress exerted on a flip-chip-connected chip can be reduced, so that the stress exerted on the chip is reduced and separation of an interlayer insulating layer having a low dielectric constant (low-k) is minimized. Specifically, in a chip mounting structure, a chip including an interlayer insulating layer having a low dielectric constant (low-k) is flip-chip connected to a substrate via bumps is shown. In the chip mounting structure, the substrate has such a shape that a mechanical stress exerted on the interlayer insulating layer at corner portions of the chip due to a thermal stress is reduced, the thermal stress occurring due to a difference in coefficient of thermal expansion between the chip and the substrate.
    Type: Grant
    Filed: November 6, 2017
    Date of Patent: November 27, 2018
    Assignee: International Business Machines Corporation
    Inventors: Akihiro Horibe, Keiji Matsumoto, Keishi Okamoto, Kazushige Toriyama
  • Patent number: 10090586
    Abstract: A joined structure which is configured such that a space between adjacent substrates is filled with a filling material. The joined structure includes a first substrate having a first conductor formed on a surface of the first substrate, a second substrate having a second conductor formed on a surface of the second substrate, arranged so that a surface of the first substrate faces a surface of the second substrate, a connecting conductor which electrically connects the first conductor and the second conductor, and a filling material between the first substrate and the second substrate. The filling material is formed into such a shape that a space is provided which corresponds to at least one of the first conductor, the second and the connecting conductor.
    Type: Grant
    Filed: July 10, 2017
    Date of Patent: October 2, 2018
    Assignee: International Business Machines Corporation
    Inventors: Toyohiro Aoki, Noam Kaminski, Keishi Okamoto, Kazushige Toriyama
  • Patent number: 9941230
    Abstract: The present invention provides an electrical connecting structure between a substrate 21 and a semiconductor chip 22. The electrical connecting structure comprises a metal bump 26 formed on a contact pad 28 of a semiconductor chip 22 and a coating layer 25 formed on the metal bump 26 of the semiconductor chip 22. The coating layer includes material not wettable with solder. The electrical connecting structure further comprises a metal pad 24 formed on the substrate 21. The electrical connecting structure further comprises a solder 29 connecting to a side surface of the metal bump 26 and an outer surface of the metal pad 24. The outer surface is not covered by the coating layer 25.
    Type: Grant
    Filed: December 30, 2015
    Date of Patent: April 10, 2018
    Assignee: International Business Machines Corporation
    Inventors: Keiji Matsumoto, Keishi Okamoto, Yasumitsu K. Orii, Kazushige Toriyama
  • Publication number: 20180076162
    Abstract: Highly reliable chip mounting is accomplished by using a substrate having such a shape that a stress exerted on a flip-chip-connected chip can be reduced, so that the stress exerted on the chip is reduced and separation of an interlayer insulating layer having a low dielectric constant (low-k) is minimized. Specifically, in a chip mounting structure, a chip including an interlayer insulating layer having a low dielectric constant (low-k) is flip-chip connected to a substrate via bumps is shown. In the chip mounting structure, the substrate has such a shape that a mechanical stress exerted on the interlayer insulating layer at corner portions of the chip due to a thermal stress is reduced, the thermal stress occurring due to a difference in coefficient of thermal expansion between the chip and the substrate.
    Type: Application
    Filed: November 6, 2017
    Publication date: March 15, 2018
    Inventors: Akihiro HORIBE, Keiji MATSUMOTO, Keishi OKAMOTO, Kazushige TORIYAMA
  • Patent number: 9893031
    Abstract: Highly reliable chip mounting is accomplished by using a substrate having such a shape that a stress exerted on a flip-chip-connected chip can be reduced, so that the stress exerted on the chip is reduced and separation of an interlayer insulating layer having a low dielectric constant (low-k) is minimized. Specifically, in a chip mounting structure, a chip including an interlayer insulating layer having a low dielectric constant (low-k) is flip-chip connected to a substrate via bumps is shown. In the chip mounting structure, the substrate has such a shape that a mechanical stress exerted on the interlayer insulating layer at corner portions of the chip due to a thermal stress is reduced, the thermal stress occurring due to a difference in coefficient of thermal expansion between the chip and the substrate.
    Type: Grant
    Filed: September 2, 2016
    Date of Patent: February 13, 2018
    Assignee: International Business Machines Corporation
    Inventors: Akihiro Horibe, Keiji Matsumoto, Keishi Okamoto, Kazushige Toriyama
  • Publication number: 20170338152
    Abstract: A method for filling a through hole with solder includes mounting a substrate having a through hole formed therein on a permeable barrier layer having pores that enable gas to flow through the permeable barrier. A solder source is positioned over the through hole. Molten solder is delivered in the through hole with a positive pressure from the solder source such that gas in the through holes passes the permeable barrier while the molten solder remains in the through hole.
    Type: Application
    Filed: August 7, 2017
    Publication date: November 23, 2017
    Inventors: Toyohiro Aoki, Akihiro Horibe, Kuniaki Sueoka, Kazushige Toriyama
  • Publication number: 20170309998
    Abstract: A joined structure which is configured such that a space between adjacent substrates is filled with a filling material. The joined structure includes a first substrate having a first conductor formed on a surface of the first substrate, a second substrate having a second conductor formed on a surface of the second substrate, arranged so that a surface of the first substrate faces a surface of the second substrate, a connecting conductor which electrically connects the first conductor and the second conductor, and a filling material between the first substrate and the second substrate. The filling material is formed into such a shape that a space is provided which corresponds to at least one of the first conductor, the second and the connecting conductor.
    Type: Application
    Filed: July 10, 2017
    Publication date: October 26, 2017
    Inventors: Toyohiro Aoki, Noam Kaminski, Keishi Okamoto, Kazushige Toriyama
  • Patent number: 9780442
    Abstract: A joined structure which is configured such that a space between adjacent substrates is filled with a filling material. The joined structure includes a first substrate having a first conductor formed on a surface of the first substrate, a second substrate having a second conductor formed on a surface of the second substrate, arranged so that a surface of the first substrate faces a surface of the second substrate, a connecting conductor which electrically connects the first conductor and the second conductor, and a filling material between the first substrate and the second substrate. The filling material is formed into such a shape that a space is provided which corresponds to at least one of the first conductor, the second and the connecting conductor.
    Type: Grant
    Filed: June 10, 2015
    Date of Patent: October 3, 2017
    Assignee: International Business Machines Corporation
    Inventors: Toyohiro Aoki, Noam Kaminski, Keishi Okamoto, Kazushige Toriyama
  • Patent number: 9772462
    Abstract: A structure is formed which is prepared as a via for electrical contact passing through layers of an optical waveguide, in a multilayer structure including an electrical substrate and the laminated layers of the optical waveguide. The surface of an electrode pad is plated with solder. The layers of the optical waveguide are formed above the portion plated with solder are removed to expose the portion plated with solder. A device is prepared having both a light-emitter or photoreceptor in optical contact with the optical waveguide, and a stud (pillar). The stud (pillar) is inserted into the portion in which layers of the optical waveguide have been removed, and the plated solder is melted to bond the electrode pad on top of the electrical substrate to the tip of the inserted stud (pillar).
    Type: Grant
    Filed: April 28, 2016
    Date of Patent: September 26, 2017
    Assignee: International Business Machines Corporation
    Inventors: Hirokazu Noma, Keishi Okamoto, Masao Tokunari, Kazushige Toriyama, Yutaka Tsukada
  • Publication number: 20170263498
    Abstract: A method for filling a through hole with solder includes mounting a substrate having a through hole formed therein on a permeable barrier layer having pores that enable gas to flow through the permeable barrier. A solder source is positioned over the through hole. Molten solder is delivered in the through hole with a positive pressure from the solder source such that gas in the through holes passes the permeable barrier while the molten solder remains in the through hole.
    Type: Application
    Filed: March 11, 2016
    Publication date: September 14, 2017
    Inventors: Toyohiro Aoki, Akihiro Horibe, Kuniaki Sueoka, Kazushige Toriyama
  • Publication number: 20170194277
    Abstract: The present invention provides an electrical connecting structure between a substrate 21 and a semiconductor chip 22. The electrical connecting structure comprises a metal bump 26 formed on a contact pad 28 of a semiconductor chip 22 and a coating layer 25 formed on the metal bump 26 of the semiconductor chip 22. The coating layer includes material not wettable with solder. The electrical connecting structure further comprises a metal pad 24 formed on the substrate 21. The electrical connecting structure further comprises a solder 29 connecting to a side surface of the metal bump 26 and an outer surface of the metal pad 24. The outer surface is not covered by the coating layer 25.
    Type: Application
    Filed: December 30, 2015
    Publication date: July 6, 2017
    Inventors: Keji Matsumodo, Keishi Okamoto, Yasumitsu K. Orii, Kazushige Toriyama
  • Patent number: 9698119
    Abstract: A method of forming a structure for an interfacial alloy layer which is able to improve the electromigration (EM) resistance of a solder joint. More specifically, in this structure, a controlled interfacial alloy layer is provided on both sides of a solder joint. In order to form this structure, aging (maintenance of high-temperature conditions) is performed until an interfacial alloy layer of Cu3Sn has a thickness of at least 1.5 ?m.
    Type: Grant
    Filed: May 19, 2016
    Date of Patent: July 4, 2017
    Assignee: International Business Machines Corporation
    Inventors: Hirokazu Noma, Yasumitsu Orii, Kazushige Toriyama
  • Publication number: 20170120361
    Abstract: Forming a solder joint between metal layers by preparing a structure having solder material placed between two metal layers and heating the structure to grow an intermetallic compound in a space between the two metal layers. Growing the intermetallic compound includes setting a first surface, in contact with the solder material between the two metal layers, to a first temperature, thereby enabling growth of the intermetallic compound; setting a second surface, in contact with the solder material between the two metal layers, to a second temperature, wherein the second temperature is higher than the first temperature; and maintaining a temperature gradient (temperature/unit thickness) between the two metal layers at a predetermined value or higher until the intermetallic compound substantially fills the space between the two metal layers.
    Type: Application
    Filed: January 10, 2017
    Publication date: May 4, 2017
    Inventors: Toyohiro Aoki, Akihiro Horibe, Hiroyuki Mori, Yasumitsu Orii, Kazushige Toriyama, Ting-Li Yang
  • Patent number: 9586281
    Abstract: Forming a solder joint between metal layers by preparing a structure having solder material placed between two metal layers and heating the structure to grow an intermetallic compound in a space between the two metal layers. Growing the intermetallic compound includes setting a first surface, in contact with the solder material between the two metal layers, to a first temperature, thereby enabling growth of the intermetallic compound; setting a second surface, in contact with the solder material between the two metal layers, to a second temperature, wherein the second temperature is higher than the first temperature; and maintaining a temperature gradient (temperature/unit thickness) between the two metal layers at a predetermined value or higher until the intermetallic compound substantially fills the space between the two metal layers.
    Type: Grant
    Filed: August 21, 2015
    Date of Patent: March 7, 2017
    Assignee: International Business Machines Corporation
    Inventors: Toyohiro Aoki, Akihiro Horibe, Hiroyuki Mori, Yasumitsu Orii, Kazushige Toriyama, Ting-Li Yang
  • Publication number: 20170005053
    Abstract: Highly reliable chip mounting is accomplished by using a substrate having such a shape that a stress exerted on a flip-chip-connected chip can be reduced, so that the stress exerted on the chip is reduced and separation of an interlayer insulating layer having a low dielectric constant (low-k) is minimized. Specifically, in a chip mounting structure, a chip including an interlayer insulating layer having a low dielectric constant (low-k) is flip-chip connected to a substrate via bumps is shown. In the chip mounting structure, the substrate has such a shape that a mechanical stress exerted on the interlayer insulating layer at corner portions of the chip due to a thermal stress is reduced, the thermal stress occurring due to a difference in coefficient of thermal expansion between the chip and the substrate.
    Type: Application
    Filed: September 2, 2016
    Publication date: January 5, 2017
    Inventors: Akihiro HORIBE, Keiji MATSUMOTO, Keishi OKAMOTO, Kazushige TORIYAMA
  • Patent number: 9520375
    Abstract: A method of forming a solder bump on a substrate includes: forming a conductive layer(s) on the substrate having a surface on which an electrode pad is prepared; forming a resist layer on the conductive layer(s) having an opening over the electrode pad; forming a metal pillar in the opening of the resist layer, wherein the metal pillar includes a first conductive material; forming a space between sidewalls of the resist layer and the metal pillar; forming a metal barrier layer in the space and on a top surface of the metal pillar, the metal barrier layer including a second conductive material that is different from the first conductive material of the metal pillar; forming a solder layer on the metal barrier layer over the top surface of the metal pillar; removing the resist layer; removing the conductive layer(s); and forming the solder bump by reflowing the solder layer.
    Type: Grant
    Filed: April 30, 2015
    Date of Patent: December 13, 2016
    Assignee: International Business Machines Corporation
    Inventors: Toyohiro Aoki, Hiroyuki Mori, Yasumitsu K. Orii, Kazushige Toriyama, Shintaro Yamamichi
  • Patent number: 9508594
    Abstract: A substrate bonding method is able to reliably bond substrates while avoiding a reduction in yield made worse by finer pitches. The substrate bonding method can include: forming an adhesive resin layer on a surface of a first substrate on which a pad has been formed; forming an opening on the adhesive resin layer above the pad; filling the opening with molten solder to form a pillar-shaped solder bump; and applying heat and pressure to the first substrate and a second substrate while a terminal formed on the second substrate is aligned with the solder bump.
    Type: Grant
    Filed: November 3, 2015
    Date of Patent: November 29, 2016
    Assignee: International Business Machines Corporation
    Inventors: Toyohiro Aoki, Hiroyuki Mori, Kazushige Toriyama