Patents by Inventor Kazuya Ohta
Kazuya Ohta has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10428840Abstract: The blower of the present invention comprises a gas blowing part which holds an impeller which blows gas, a motor part which holds a rotor which makes the impeller rotate, and a partition wall part which partitions the gas blowing part from the motor part. The top end part of the rotor in the axial direction passes through the partition wall part and supports the center of rotation part of the impeller present inside the gas blowing part. At the through hole of the partition wall part through which the top end part of the rotor in the axial direction passes, a noncontact type shaft seal is arranged. Further, the surface of the partition wall part facing the impeller is formed with a groove for trapping foreign matter.Type: GrantFiled: March 24, 2016Date of Patent: October 1, 2019Assignee: FANUC CORPORATIONInventors: Kazuya Ohta, Satoru Kawai
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Patent number: 9849547Abstract: A manufacturing apparatus for manufacturing a blower blade including a plurality of blade portions having the same shape and arranged around a rotation axis line includes a machining device for machining the blower blade and a control device for controlling the machining device. The control device includes a command creation unit for creating an operation command to the machining device according to a machining program and a machining parameter, a balance measurement unit for measuring balance of the blower blade, and a machining amount adjustment unit configured to individually adjust a machining amount of each of the blade portions without changing the machining program, based on data of the balance of the blower blade measured by the balance measurement unit so as to reduce unbalance of the blower blade. A manufacturing method using the above-described manufacturing apparatus is also provided.Type: GrantFiled: June 29, 2015Date of Patent: December 26, 2017Assignee: FANUC CORPORATIONInventors: Kazuya Ohta, Satoru Kawai
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Publication number: 20160281744Abstract: The blower of the present invention comprises a gas blowing part which holds an impeller which blows gas, a motor part which holds a rotor which makes the impeller rotate, and a partition wall part which partitions the gas blowing part from the motor part. The top end part of the rotor in the axial direction passes through the partition wall part and supports the center of rotation part of the impeller present inside the gas blowing part. At the through hole of the partition wall part through which the top end part of the rotor in the axial direction passes, a noncontact type shaft seal is arranged. Further, the surface of the partition wall part facing the impeller is formed with a groove for trapping foreign matter.Type: ApplicationFiled: March 24, 2016Publication date: September 29, 2016Applicant: FANUC CORPORATIONInventors: Kazuya Ohta, Satoru Kawai
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Patent number: 9416664Abstract: An impeller (10) where each of the blades (34) includes a first part (14) which is positioned at a base end side of the hub (5) and a second part (24) which is positioned at a distal end side of the hub, the first part being formed by connecting a first hub surface curve (12) which extends along a hub surface of the hub and a first shroud surface curve (11) which extends along a shroud surface of the blade by a first group of lines (13), and the second part is formed by connecting a second hub surface curve (22) which extends along a hub surface of the hub and connects with the first hub surface curve and a second shroud surface curve (21) which extends along the shroud surface and connects with the first shroud surface curve by a second group of lines (23).Type: GrantFiled: January 3, 2014Date of Patent: August 16, 2016Assignee: FANUC CORPORATIONInventors: Satoru Kawai, Kazuya Ohta
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Publication number: 20150375347Abstract: A manufacturing apparatus for manufacturing a blower blade including a plurality of blade portions having the same shape and arranged around a rotation axis line includes a machining device for machining the blower blade and a control device for controlling the machining device. The control device includes a command creation unit for creating an operation command to the machining device according to a machining program and a machining parameter, a balance measurement unit for measuring balance of the blower blade, and a machining amount adjustment unit configured to individually adjust a machining amount of each of the blade portions without changing the machining program, based on data of the balance of the blower blade measured by the balance measurement unit so as to reduce unbalance of the blower blade. A manufacturing method using the above-described manufacturing apparatus is also provided.Type: ApplicationFiled: June 29, 2015Publication date: December 31, 2015Applicant: FANUC CORPORATIONInventors: Kazuya Ohta, Satoru Kawai
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Publication number: 20140193268Abstract: An impeller (10) where each of the blades (34) includes a first part (14) which is positioned at a base end side of the hub (5) and a second part (24) which is positioned at a distal end side of the hub, the first part being formed by connecting a first hub surface curve (12) which extends along a hub surface of the hub and a first shroud surface curve (11) which extends along a shroud surface of the blade by a first group of lines (13), and the second part is formed by connecting a second hub surface curve (22) which extends along a hub surface of the hub and connects with the first hub surface curve and a second shroud surface curve (21) which extends along the shroud surface and connects with the first shroud surface curve by a second group of lines (23).Type: ApplicationFiled: January 3, 2014Publication date: July 10, 2014Applicant: FANUC CORPORATIONInventors: SATORU KAWAI, KAZUYA OHTA
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Patent number: 7668221Abstract: A gas laser apparatus including a laser oscillating section including a blower forcibly circulating a medium gas in a medium circuit, and a blower monitoring section monitoring a maintenance state of the blower. The blower includes a lubricant storage chamber storing a lubricant, and a lubricant monitoring chamber connected to the lubricant storage chamber to ensure fluidic communication therebetween at a position lower than an oil level of a lubricant having a predetermined appropriate volume and stored in the lubricant storage chamber.Type: GrantFiled: September 4, 2007Date of Patent: February 23, 2010Assignee: Fanuc LtdInventors: Kazuya Ohta, Akira Egawa
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Patent number: 7342948Abstract: In an laser oscillator (100), a blower (10, 20, 120) for circulating a laser medium between an electric discharge tube (102) and a circulating passage (104) includes: a casing (12) having a suction port (12a) and an exhaust port (12b); and a blade (18) pivotally supported in the casing (12) so that the blade (18) can face the suction port (12a) and the exhaust port (12b). The blade (18) is formed into a shape in which a diameter of the blade (18) is different at a position on a cross section perpendicular to a rotary central line (O), and a gap (Go) between a portion, in which a diameter of the blade (18) is relatively large, and the casing is larger than a gap (Gi) between a portion, in which a diameter of the blade (18) is relatively small, and the casing. Due to the foregoing, a highly reliable blower used for a laser oscillator, the reduction of the blower efficiency of which is suppressed to be as small as possible, can be provided.Type: GrantFiled: April 13, 2006Date of Patent: March 11, 2008Assignee: Fanuc LtdInventors: Kazuya Ohta, Michinori Maeda, Akira Egawa
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Publication number: 20080056325Abstract: A gas laser apparatus including a laser oscillating section including a blower forcibly circulating a medium gas in a medium circuit, and a blower monitoring section monitoring a maintenance state of the blower. The blower includes a lubricant storage chamber storing a lubricant, and a lubricant monitoring chamber connected to the lubricant storage chamber to ensure fluidic communication therebetween at a position lower than an oil level of a lubricant having a predetermined appropriate volume and stored in the lubricant storage chamber.Type: ApplicationFiled: September 4, 2007Publication date: March 6, 2008Inventors: Kazuya Ohta, Akira Egawa
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Publication number: 20070128044Abstract: A fluid machine including a shaft and an impeller, wherein the impeller has a shaft bore into which the shaft is inserted, and wherein the impeller is coupled to the shaft by an interference fit. The fluid machine further includes a positioning part provided between the shaft and the impeller, for positioning the impeller at a predetermined position on the shaft; a fitting part provided inside the shaft bore and adjacent to the positioning part, for forming the interference fit between the shaft and the impeller; and a loose-insertion part provided inside the shaft bore and adjacent to the fitting part, for forming a clearance between the shaft and the impeller.Type: ApplicationFiled: November 29, 2006Publication date: June 7, 2007Applicant: FANUC LTDInventors: Satoru KAWAI, Kazuya OHTA, Akira EGAWA
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Publication number: 20070071057Abstract: A blower (10) includes: at least two or at least three acoustic sensors or vibration sensors (31a to 31c) attached to a casing (12); and a position specifying means (34) for specifying a position of a source of abnormal sound or abnormal vibration from signals detected by the acoustic sensors or vibration sensors. When the position of the abnormal portion is specified in this way, a proper countermeasure can be taken quickly. Further, the blower (10) preferably includes an alarm output judging means (35) for judging whether or not an alarm should be outputted according to the position of the source of the abnormal sound or abnormal vibration specified by the position specifying means. A laser oscillator (100) having the blower (10) is also provided.Type: ApplicationFiled: September 19, 2006Publication date: March 29, 2007Applicant: FANUC LTDInventors: Kazuya Ohta, Akira Egawa, Atsushi Mori
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Publication number: 20060233212Abstract: In an laser oscillator (100), a blower (10, 20, 120) for circulating a laser medium between an electric discharge tube (102) and a circulating passage (104) includes: a casing (12) having a suction port (12a) and an exhaust port (12b); and a blade (18) pivotally supported in the casing (12) so that the blade (18) can face the suction port (12a) and the exhaust port (12b). The blade (18) is formed into a shape in which a diameter of the blade (18) is different at a position on a cross section perpendicular to a rotary central line (O), and a gap (Go) between a portion, in which a diameter of the blade (18) is relatively large, and the casing is larger than a gap (Gi) between a portion, in which a diameter of the blade (18) is relatively small, and the casing. Due to the foregoing, a highly reliable blower used for a laser oscillator, the reduction of the blower efficiency of which is suppressed to be as small as possible, can be provided.Type: ApplicationFiled: April 13, 2006Publication date: October 19, 2006Inventors: Kazuya Ohta, Michinori Maeda, Akira Egawa
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Publication number: 20050083985Abstract: A turbo-blower for use with a laser oscillator to provide a flow of a laser medium gas under pressure. The turbo-blower includes an impeller with a rotation axis, the impeller sucking a laser medium gas in an axial direction and discharging the laser medium gas in a radial outward direction; a casing including a gas passage for providing a spiral flow of the laser medium gas discharged from the impeller; and a collecting section provided in the casing and including a chamber fluidly communicated with the gas passage, the collecting section collecting particulates contained in the laser medium gas into the chamber due to a centrifugal force generated in the laser medium gas flowing through the gas passage. The chamber of the collecting section is fluidly communicated with the gas passage through a slit locally formed in a wall of the casing.Type: ApplicationFiled: October 15, 2004Publication date: April 21, 2005Applicant: FANUC LTD.Inventors: Akira Egawa, Tsutomu Funakubo, Kazuya Ohta
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Patent number: 6826221Abstract: A laser oscillator capable of effectively collecting and removing particulate foreign matter contained in gas laser medium flowing in a circulating path. An electric discharge section arranged in an optical resonator is incorporated into a circulating path of the gas medium including a heat exchanger and a blower. The gas laser medium flows at a high speed in the circulating path. At least one spiral-flow dust collecting mechanism is provided in the circular path downstream of the heat exchanger, and the gas laser medium discharged from the blower is supplied to the electric discharge section through the spiral-flow dust collecting mechanism. The gas laser medium containing the particulate foreign matter spirally flows around an inner pipe in a cylindrical body of the spiral-flow dust collecting mechanism.Type: GrantFiled: March 12, 2003Date of Patent: November 30, 2004Assignee: Fanuc LtdInventors: Akira Egawa, Michinori Maeda, Kazuya Ohta, Akira Miyake
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Publication number: 20030179797Abstract: A laser oscillator capable of effectively collecting and removing particulate foreign matter contained in gas laser medium flowing in a circulating path. An electric discharge section arranged in an optical resonator is incorporated into a circulating path of the gas medium including a heat exchanger and a blower. The gas laser medium flows at a high speed in the circulating path. At least one spiral-flow dust collecting mechanism is provided in the circular path downstream of the heat exchanger, and the gas laser medium discharged from the blower is supplied to the electric discharge section through the spiral-flow dust collecting mechanism. The gas laser medium containing the particulate foreign matter spirally flows around an inner pipe in a cylindrical body of the spiral-flow dust collecting mechanism.Type: ApplicationFiled: March 12, 2003Publication date: September 25, 2003Applicant: FANUC LTD.Inventors: Akira Egawa, Michinori Maeda, Kazuya Ohta, Akira Miyake
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Patent number: 6524351Abstract: A semiconductor device mounting jig capable of holding a flexible tape substrate or other board flat and stable, provided with a holding plate having a flat mounting board holding surface integrally formed at an opening of a plate support having a hollow portion inside and having the opening communicated with the hollow portion or fit in the opening of the plate support through an O-ring, suction holes penetrating through the holding plate at the mounting board holding surface, and a suction means for applying suction at the suction holes from the opposite side to the mounting board holding surface such as applying suction at the hollow portion of the plate support, the mounting board being placed on the mounting board holding surface to cover the suction holes and the suction means applying suction to the hollow portion to hold and fix the mounting board by suction, and a method of mounting a semiconductor device using the same.Type: GrantFiled: January 16, 2002Date of Patent: February 25, 2003Assignee: Sony CorporationInventor: Kazuya Ohta
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Patent number: 6444492Abstract: A semiconductor device mounting jig capable of holding a flexible tape substrate or other board flat and stable, provided with a holding plate having a flat mounting board holding surface integrally formed at an opening of a plate support having a hollow portion inside and having the opening communicated with the hollow portion or fit in the opening of the plate support through an O-ring, suction holes penetrating through the holding plate at the mounting board holding surface, and a suction means for applying suction at the suction holes from the opposite side to the mounting board holding surface such as applying suction at the hollow portion of the plate support, the mounting board being placed on the mounting board holding surface to cover the suction holes and the suction means applying suction to the hollow portion to hold and fix the mounting board by suction, and a method of mounting a semiconductor device using the same.Type: GrantFiled: June 7, 2000Date of Patent: September 3, 2002Assignee: Sony CorporationInventor: Kazuya Ohta
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Publication number: 20020108238Abstract: A semiconductor device mounting jig capable of holding a flexible tape substrate or other board flat and stable, provided with a holding plate having a flat mounting board holding surface integrally formed at an opening of a plate support having a hollow portion inside and having the opening communicated with the hollow portion or fit in the opening of the plate support through an O-ring, suction holes penetrating through the holding plate at the mounting board holding surface, and a suction means for applying suction at the suction holes from the opposite side to the mounting board holding surface such as applying suction at the hollow portion of the plate support, the mounting board being placed on the mounting board holding surface to cover the suction holes and the suction means applying suction to the hollow portion to hold and fix the mounting board by suction, and a method of mounting a semiconductor device using the same.Type: ApplicationFiled: January 16, 2002Publication date: August 15, 2002Inventor: Kazuya Ohta
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Patent number: 5754300Abstract: An error in alignment between both positions is obtained from reference position information incorporated in advance in an exposure apparatus for manufacturing a semiconductor and detection position information obtained by physically non-contact measuring a mark formed on an object to be measured such as a wafer, a mask or a wafer stage. This mark has a construction having a periodic pattern at a predetermined pitch in connection with a scanning direction. A periodic signal obtained by non-contact scanning the mark is subjected to Fourier integration processing and a phase angle including not only a fundamental wave component but a high-order component by calculation of a sine wave and a cosine component of Fourier conversion to thereby detect position information of an average center position of the mark with a correction of a mark deformation caused by wafer or process of mask added thereto. An error in alignment is corrected by relatively moving said object to a reference position.Type: GrantFiled: June 28, 1990Date of Patent: May 19, 1998Inventors: Nobutaka Magome, Kazuya Ohta, Hiroki Tateno
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Patent number: 4702606Abstract: An alignment system includes an element bearing a plurality of patterns on the surface thereof, the plurality of patterns being arranged in a predetermined direction, a stage for holding the element, scanning means for scanning the plurality of patterns of the element held by the stage in the predetermined direction and making position signals indicative of the positions of the plurality of patterns in the predetermined direction on the element, and operation means for operating and putting out a signal indicative of a position which is in a predetermined relation with the positions of the plurality of patterns in the predetermined direction, on the basis of the position signals.Type: GrantFiled: May 24, 1985Date of Patent: October 27, 1987Assignee: Nippon Kogaku K.K.Inventors: Toshio Matsuura, Seiro Murakami, Yuji Imai, Kazuya Ohta, Akikazu Tanimoto