Patents by Inventor Kazuya Ohta

Kazuya Ohta has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 4655598
    Abstract: Position detecting method and a apparatus detect a position of substrate formed with a diffraction grating mark and a linearly extending stepped edge mark spaced from the diffraction grating. In the method and apparatus, those marks are relatively scanned by light beam, and position of the substrate is detected based on light information generated by both the marks and the scanning position.
    Type: Grant
    Filed: November 18, 1985
    Date of Patent: April 7, 1987
    Assignee: Nippon Kogaku K.K.
    Inventors: Seiro Murakami, Toshio Matsuura, Yuji Imai, Kazuya Ohta