Patents by Inventor Kazuyuki Kasumi

Kazuyuki Kasumi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20170115560
    Abstract: An imprint apparatus forms a pattern of an imprint material on a substrate by using a mold, while effecting alignment control of a mold and a substrate with respect to an in-plane direction of the substrate. A mold holding portion holds the mold. A substrate holding portion holds the substrate. A control portion effects control so that the mold and the substrate are brought near to each other while effecting the alignment control, based on a driving profile, after the alignment control is started, to bring the mold and the imprint material into contact with each other. The imprint material is then cured. The control portion changes the driving profile for the alignment control after the alignment control is started and at least one of before and after the mold contacts the imprint material.
    Type: Application
    Filed: January 10, 2017
    Publication date: April 27, 2017
    Inventors: Shingo Okushima, Nobuhito Suehira, Junichi Seki, Kazuyuki Kasumi
  • Patent number: 9579843
    Abstract: An imprint apparatus performs alignment control of a mold and a substrate. A pattern formed on the mold is transferred onto a pattern forming layer on the substrate. A mold holding portion holds the mold, a substrate holding portion holds the substrate, and a control portion effects control so that the mold and the substrate are brought near to each other during the alignment control. The mold and the pattern forming layer are brought into contact with each other and then the pattern forming layer is cured. The control portion changes a driving profile for the alignment control after the alignment control is started and at least one of before and after the mold contacts the pattern forming layer. The driving profile used to move at least one of the mold holding portion and the substrate holding portion to a target position, and includes at least one of acceleration, speed, driving voltage, and driving current.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: February 28, 2017
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Shingo Okushima, Nobuhito Suehira, Junichi Seki, Kazuyuki Kasumi
  • Patent number: 9573319
    Abstract: An imprinting method in which alignment control of a mold and a substrate is effected and a pattern formed on the mold is transferred onto a pattern forming layer provided on the substrate. The imprinting method includes a step in which the mold and the substrate are brought near to each other while effecting the alignment control, after the alignment control is started, to bring the mold and the pattern forming layer into contact with each other, and then, the pattern forming layer is cured, and a step in which the gap between the mold and the substrate is increased, after the pattern forming layer is cured. Further, the alignment control is stopped after the alignment control is started, and at least one of before and after the mold contacts the pattern forming layer.
    Type: Grant
    Filed: February 5, 2008
    Date of Patent: February 21, 2017
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Shingo Okushima, Nobuhito Suehira, Junichi Seki, Kazuyuki Kasumi
  • Publication number: 20150123301
    Abstract: The imprint apparatus presses resin disposed on a substrate and a mold to each other to form a resin pattern on the substrate. The apparatus includes a driving device configured to move the mold and the substrate relatively to apply a pressing force between the mold and the resin, a measuring device configured to measure a position of at least one of the mold and the substrate, a detector configured to detect the pressing force, and a controller configured to control the driving device. The controller is configured to control the driving device using the position as a controlled variable in a first period, and to control the driving device using the pressing force as a controlled variable in a second period after the first period.
    Type: Application
    Filed: January 6, 2015
    Publication date: May 7, 2015
    Inventor: Kazuyuki Kasumi
  • Patent number: 8973495
    Abstract: There is provided an imprint apparatus configured to perform an imprint in which a resin on a substrate is molded using a mold and a pattern is formed on the substrate. The apparatus includes a press unit configured to press the resin on the substrate and the mold to each other, a cure unit configured to irradiate light to the resin molded by the mold to cure the resin, and a movement unit configured to move the mold and the substrate, from a position at which the press is performed by the press unit to a position at which the light is irradiated by the cure unit, and from the position at which the light is irradiated by the cure unit to a position at which the mold is released.
    Type: Grant
    Filed: August 5, 2009
    Date of Patent: March 10, 2015
    Assignee: Canon Kabushiki Kaisha
    Inventors: Kazuyuki Kasumi, Hideki Ina
  • Patent number: 8951031
    Abstract: The imprint apparatus presses resin disposed on a substrate and a mold to each other to form a resin pattern on the substrate. The apparatus includes a driving device configured to move the mold and the substrate relatively to apply a pressing force between the mold and the resin, a measuring device configured to measure a position of at least one of the mold and the substrate, a detector configured to detect the pressing force, and a controller configured to control the driving device. The controller is configured to control the driving device using the position as a controlled variable in a first period, and to control the driving device using the pressing force as a controlled variable in a second period after the first period.
    Type: Grant
    Filed: August 24, 2009
    Date of Patent: February 10, 2015
    Assignee: Canon Kabushiki Kaisha
    Inventor: Kazuyuki Kasumi
  • Patent number: 8834144
    Abstract: An imprinting machine that brings a mold having a pattern into contact with an object and transfers the pattern onto the object includes a measurement unit that measures a position of the mold when the mold contacts the object.
    Type: Grant
    Filed: February 23, 2010
    Date of Patent: September 16, 2014
    Assignee: Canon Kabushiki Kaisha
    Inventors: Takashi Nakamura, Hirohisa Ota, Eigo Kawakami, Kazuyuki Kasumi, Toshinobu Tokita
  • Publication number: 20140151936
    Abstract: A pattern transferring apparatus is disclosed which can prevent damage to a transferred pattern and realize fast mold release regardless of the type of resist. The pattern transferring apparatus transfers a pattern formed on a mold to an object by bringing the mold into contact with the apparatus has a deformer which causes deformation in the mold for releasing the mold from the object. The apparatus transfers a pattern formed on a mold to a photo-curing resin by bringing the mold into contact with the photo-curing resin and applying light thereto to cure the photo-curing resin. The apparatus has an optical system which applies light at an irradiation light intensity to a non-transfer area other than a transfer area where the pattern is to be transferred in the photo-curing resin, the intensity being different from an irradiation light intensity of light applied to the transfer area.
    Type: Application
    Filed: November 27, 2013
    Publication date: June 5, 2014
    Applicant: CANON KABUSHIKI KAISHA
    Inventors: Kazuyuki KASUMI, Hirohisa OTA, Eigo KAWAKAMI, Takashi NAKAMURA, Toshinobu TOKITA
  • Patent number: 8616874
    Abstract: A pattern transferring apparatus is disclosed which can prevent damage to a transferred pattern and realize fast mold release regardless of the type of resist. The pattern transferring apparatus transfers a pattern formed on a mold to an object by bringing the mold into contact with the apparatus has a deformer which causes deformation in the mold for releasing the mold from the object. The apparatus transfers a pattern formed on a mold to a photo-curing resin by bringing the mold into contact with the photo-curing resin and applying light thereto to cure the photo-curing resin. The apparatus has an optical system which applies light at an irradiation light intensity to a non-transfer area other than a transfer area where the pattern is to be transferred in the photo-curing resin, the intensity being different from an irradiation light intensity of light applied to the transfer area.
    Type: Grant
    Filed: February 27, 2006
    Date of Patent: December 31, 2013
    Assignee: Canon Kabushiki Kaisha
    Inventors: Kazuyuki Kasumi, Hirohisa Ota, Eigo Kawakami, Takashi Nakamura, Toshinobu Tokita
  • Patent number: 8564891
    Abstract: The present invention provides a holding apparatus for holding an optical element with an edge whose thickness increases or decreases inwardly, the apparatus including a barrel having an internal diameter larger than an external diameter of the optical element, a support configured to support and position the optical element relative to the barrel via a first surface of the edge in a direction of an axis of the barrel, and a restriction device including a regulation member which faces a second surface of the edge opposite to the first surface in the direction of the axis, is apart from the second surface if an amount of decentering of the optical element is less than a predetermined amount within a tolerance, and contacts with the second surface if the amount of decentering reaches the predetermined amount, and configured to restrict decentering of the optical element.
    Type: Grant
    Filed: April 19, 2011
    Date of Patent: October 22, 2013
    Assignee: Canon Kabushiki Kaisha
    Inventors: Kazuyuki Kasumi, Kouhei Imoto
  • Patent number: 8414279
    Abstract: An imprint apparatus molds resin dispensed on a shot region of a substrate with a mold and forms a pattern of resin on the shot region. The apparatus includes a mold stage configured to hold the mold, a substrate stage configured to hold the substrate, a drive mechanism configured to change a relative positional relationship between the mold stage and the substrate stage in an X-Y plane that defines a coordinate of the shot region and a Z-axis direction perpendicular to the X-Y plane, and a controller. The controller is configured to control the drive mechanism so that the mold and the shot region perform relative vibration, in the X-Y plane, with respect to a relative position where the mold and the shot region align, and a distance between the mold and the shot region decreases in the Z-axis direction in parallel with the vibration, and the resin is molded by the mold.
    Type: Grant
    Filed: September 17, 2009
    Date of Patent: April 9, 2013
    Assignee: Canon Kabushiki Kaisha
    Inventors: Eigo Kawakami, Kazuyuki Kasumi, Hideki Ina
  • Patent number: 8393885
    Abstract: A processing apparatus for transferring a relief pattern on a mold to a resist on a substrate through a compression of the mold against the resist, includes a supplier for supplying the resist between the substrate and the mold, and a recovery unit for recovering the resist.
    Type: Grant
    Filed: May 15, 2008
    Date of Patent: March 12, 2013
    Assignee: Canon Kabushiki Kaisha
    Inventors: Kazuyuki Kasumi, Hirohisa Ota, Eigo Kawakami, Takashi Nakamura, Toshinobu Tokita
  • Patent number: 8347915
    Abstract: A method of exhausting a gas in a chamber of a load-lock system having a first valve defining an opening for supplying a gas and a second valve defining an opening for conveyance of an article. The method includes a gas supplying step for supplying a gas heated by a heater into the chamber through the first valve, while the first valve and the second valve are kept open, a conveying step for conveying the article into the chamber while the second valve is kept open, and an exhausting step to be carried out after the gas supplying step and the conveying step are executed and the first and second valves are closed, to exhaust the gas inside the chamber while the first valve and the second valve are kept closed.
    Type: Grant
    Filed: August 22, 2007
    Date of Patent: January 8, 2013
    Assignee: Canon Kabushiki Kaisha
    Inventor: Kazuyuki Kasumi
  • Publication number: 20110261448
    Abstract: The present invention provides a holding apparatus for holding an optical element with an edge whose thickness increases or decreases inwardly, the apparatus including a barrel having an internal diameter larger than an external diameter of the optical element, a support configured to support and position the optical element relative to the barrel via a first surface of the edge in a direction of an axis of the barrel, and a restriction device including a regulation member which faces a second surface of the edge opposite to the first surface in the direction of the axis, is apart from the second surface if an amount of decentering of the optical element is less than a predetermined amount within a tolerance, and contacts with the second surface if the amount of decentering reaches the predetermined amount, and configured to restrict decentering of the optical element.
    Type: Application
    Filed: April 19, 2011
    Publication date: October 27, 2011
    Applicant: CANON KABUSHIKI KAISHA
    Inventors: Kazuyuki KASUMI, Kouhei IMOTO
  • Patent number: 7846346
    Abstract: A processing method for transferring a relief pattern of a mold to a resist includes the steps of compressing the mold having the relief pattern against the resist on a substrate, irradiating an exposure light onto the resist through the mold, vibrating the mold and the substrate relative to each other during the irradiating step, and releasing the mold from the resist.
    Type: Grant
    Filed: September 14, 2006
    Date of Patent: December 7, 2010
    Assignee: Canon Kabushiki Kaisha
    Inventors: Eigo Kawakami, Hirohisa Ota, Takashi Nakamura, Kazuyuki Kasumi, Toshinobu Tokita
  • Publication number: 20100289190
    Abstract: A processing method for transferring a relief pattern of a mold to a resist includes the steps of compressing the mold having the relief pattern against the resist on a substrate, irradiating an exposure light onto the resist through the mold, vibrating the mold and the substrate relative to each other during the irradiating step, and releasing the mold from the resist.
    Type: Application
    Filed: September 14, 2006
    Publication date: November 18, 2010
    Inventors: Eigo Kawakami, Hirohisa Ota, Takashi Nakamura, Kazuyuki Kasumi, Toshinobu Tokita
  • Publication number: 20100270705
    Abstract: An imprint method for imprinting an imprint pattern provided to a mold onto a pattern forming layer formed on a substrate is constituted by a first step of effecting alignment between the substrate and the mold with feedback control; a second step of bringing the mold and the pattern forming layer into contact with each other; a third step of curing the pattern forming layer; and a fourth step of increasing a gap between the substrate and the mold. The imprint method further includes a step of stopping the feedback control between the first step and the second step and/or between the second step and the third step.
    Type: Application
    Filed: February 5, 2008
    Publication date: October 28, 2010
    Applicant: CANON KABUSHIKI KAISHA
    Inventors: Shingo Okushima, Nobuhito Suehira, Junichi Seki, Kazuyuki Kasumi
  • Patent number: 7815425
    Abstract: A processing apparatus for transferring a relief pattern on a mold to a resist on a substrate through a compression of the mold against the resist, includes a supplier for supplying the resist between the substrate and the mold, and an illumination optical system for illuminating ultraviolet light onto the resist via the mold so as to cure the resist.
    Type: Grant
    Filed: March 28, 2005
    Date of Patent: October 19, 2010
    Assignee: Canon Kabushiki Kaisha
    Inventors: Toshinobu Tokita, Hirohisa Ota, Eigo Kawakami, Takashi Nakamura, Kazuyuki Kasumi
  • Patent number: 7815424
    Abstract: An imprinting machine that brings a mold having a pattern into contact with an object and transfers the pattern onto the object includes a measurement unit that measures a position of the mold when the mold contacts the object.
    Type: Grant
    Filed: December 7, 2005
    Date of Patent: October 19, 2010
    Assignee: Canon Kabushiki Kaisha
    Inventors: Takashi Nakamura, Hirohisa Ota, Eigo Kawakami, Kazuyuki Kasumi, Toshinobu Tokita
  • Patent number: 7807065
    Abstract: A processing method for forming a first pattern on a substrate to which a resist is applied includes the steps of pressing an original having a second pattern that has a relief reverse to that of the first pattern, against the resist on the substrate, and irradiating light onto the resist via the original, wherein a size of a concave of the second pattern is greater than a size of a convex of the first pattern corresponding to the concave of the second pattern, and a size of a convex of the second pattern is smaller than a size of a concave of the first pattern corresponding to the convex of the second pattern.
    Type: Grant
    Filed: December 7, 2006
    Date of Patent: October 5, 2010
    Assignee: Canon Kabushiki Kaisha
    Inventors: Toshinobu Tokita, Hirohisa Ota, Eigo Kawakami, Kazuyuki Kasumi