Patents by Inventor Kei Nakayama

Kei Nakayama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9803286
    Abstract: Provided is a method of etching a copper layer. The method includes generating plasma of a processing gas within a processing container which accommodates an object to be processed that includes the copper layer and a metal mask formed on the copper layer. The metal mask contains titanium. In addition, the processing gas includes CH4 gas, oxygen gas, and a noble gas. In an exemplary embodiment, the metal mask may include a layer made of TiN.
    Type: Grant
    Filed: October 13, 2014
    Date of Patent: October 31, 2017
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Eiichi Nishimura, Keiichi Shimoda, Kei Nakayama
  • Patent number: 9312105
    Abstract: Disclosed is a method for etching an insulation film of a processing target object. The method includes: in a first term, periodically switching ON and OFF of a high frequency power so as to excite a processing gas containing fluorocarbon and supplied into a processing container of a plasma processing apparatus; and in a second term subsequent to the first term, setting the high frequency power to be continuously turned ON so as to excite the processing gas supplied into the processing container. In one cycle consisting of a term where the high frequency is turned ON and a term where the high frequency power is turned OFF in the first term, the second term is longer than the term where the high frequency power is turned ON.
    Type: Grant
    Filed: June 4, 2015
    Date of Patent: April 12, 2016
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Akira Takahashi, Kei Nakayama, Yoshiki Igarashi, Shin Hirotsu
  • Publication number: 20150371830
    Abstract: Disclosed is a method for etching an insulation film of a processing target object. The method includes: in a first term, periodically switching ON and OFF of a high frequency power so as to excite a processing gas containing fluorocarbon and supplied into a processing container of a plasma processing apparatus; and in a second term subsequent to the first term, setting the high frequency power to be continuously turned ON so as to excite the processing gas supplied into the processing container. In one cycle consisting of a term where the high frequency is turned ON and a term where the high frequency power is turned OFF in the first term, the second term is longer than the term where the high frequency power is turned ON.
    Type: Application
    Filed: June 4, 2015
    Publication date: December 24, 2015
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Akira TAKAHASHI, Kei NAKAYAMA, Yoshiki IGARASHI, Shin HIROTSU
  • Patent number: 9166816
    Abstract: In the case of forming an audio network system in which a plurality of processors each having two sets of transmission I/Fs and reception I/Fs are connected and a TL frame generated by a master node and including a plurality of storage regions for audio signals circulates among the processors in each constant period to transport audio signals the among processors, the system is configured such that when a transmitted TL frame does not return to the reception I/F on the forward side but returns to the reception I/F on the backward side in a single mode of transmitting the TL frame to the forward side and circulating the TL frame through one transmission route, the system shifts to a twin mode of transmitting and circulating TL frames through two transmission routes.
    Type: Grant
    Filed: October 15, 2009
    Date of Patent: October 20, 2015
    Assignee: Yamaha Corporation
    Inventor: Kei Nakayama
  • Publication number: 20150104951
    Abstract: Provided is a method of etching a copper layer. The method includes generating plasma of a processing gas within a processing container which accommodates an object to be processed that includes the copper layer and a metal mask formed on the copper layer. The metal mask contains titanium. In addition, the processing gas includes CH4 gas, oxygen gas, and a noble gas. In an exemplary embodiment, the metal mask may include a layer made of TiN.
    Type: Application
    Filed: October 13, 2014
    Publication date: April 16, 2015
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Eiichi NISHIMURA, Keiichi SHIMODA, Kei NAKAYAMA
  • Patent number: 8811414
    Abstract: An IO3 that is a connecting node reads waveform data from respective regions, in a TL frame circulated in a first sub-network system, corresponding to transmission channels allocated to any node belonging to the first sub-network system and writes the read waveform data into the regions, in a TL frame circulated in a second sub-network system, corresponding to the same transmission channels, and reads waveform data from regions, in the TL frame circulated in the second sub-network system, corresponding to the transmission channels allocated to any node constituting the second sub-network system and writes the read waveform data into the regions, in the TL frame circulated in the first sub-network system, corresponding to the same transmission channels.
    Type: Grant
    Filed: September 28, 2010
    Date of Patent: August 19, 2014
    Assignee: Yamaha Corporation
    Inventor: Kei Nakayama
  • Patent number: 8761165
    Abstract: A connecting node in a first sub-network system reserves a transmission channel in a connecting network, reads waveform data having a designated signal name from a TL frame in the first sub-network system, and writes the read waveform data into the reserved transmission channel in a TL frame in the connecting network, and a connecting node in a second sub-network system reserves a transmission channel in the second sub-network system, reads the waveform data having the designated signal name from the TL frame in the connecting network, and writes the read waveform data into the reserved transmission channel in a TL frame in the second sub-network system.
    Type: Grant
    Filed: September 28, 2010
    Date of Patent: June 24, 2014
    Assignee: Yamaha Corporation
    Inventors: Kei Nakayama, Ayumi Fukata
  • Patent number: 8744095
    Abstract: A method is designed for controlling a total mixing system including a first mixing system and a second mixing system, which are operated in a linked manner. In the method, the first mixing system stores first scene data specifying contents of a mixing process matching a scene. The second mixing system stores second scene data specifying contents of a mixing process matching a scene. The first mixing system transmits a scene recall request to the second mixing system when a recall event of the first scene data occurs. The second mixing system transmits back a recall enabling response to the first mixing system after receipt of the scene recall request. The first mixing system reconstructs the contents of the mixing process on the basis of the first scene data after the reception of the recall enabling response. The second mixing system reconstructs the contents of the mixing process on the basis of the second scene data after the transmission of the recall enabling response.
    Type: Grant
    Filed: July 24, 2008
    Date of Patent: June 3, 2014
    Assignee: Yamaha Corporation
    Inventors: Takamitsu Aoki, Kei Nakayama
  • Patent number: 8737638
    Abstract: An audio signal processing device includes multiple input reception units to which analog audio signals, on which watermark information indicating identification information is superimposed, are input, an extraction unit that is adapted to extract the identification information from each of the analog audio signals input to the multiple input reception units, and a display unit for performing display depending on the identification information extracted by the extraction unit in correspondence with the input reception unit to which the analog audio signal, from which the identification information is extracted, is input, or signal processing unit for performing signal processing depending on the identification information extracted by the extraction unit for the analog audio signal, from which the relevant identification information is extracted, and outputting the processed analog audio signal.
    Type: Grant
    Filed: July 29, 2009
    Date of Patent: May 27, 2014
    Assignee: Yamaha Corporation
    Inventors: Shinya Sakurada, Kei Nakayama, Takashi Suzuki, Mitsuru Fukui, Hiroyuki Iwase, Takuro Sone
  • Patent number: 8682461
    Abstract: Region having a same size in a audio signal region of a transmission frame is allocated to each of an active engine and passive engine. The active engine reads out input signals written into regions of the frame, performs signal processing on the read-out signals, and writes resultant signals into the region allocated to the active engine. The passive engine reads out the input signals written into the regions, performs the same signal processing as the active engine on the read-out signals, and writes resultant output signals into the region allocated to the passive engine. When a flag of the active engine is indicative of a normal state, an output device reads out the output signals from the region allocated to the active engine, but, when the flag is indicative of an abnormal state, the output device reads out the output signals from the region allocated to the passive engine.
    Type: Grant
    Filed: July 22, 2010
    Date of Patent: March 25, 2014
    Assignee: Yamaha Corporation
    Inventor: Kei Nakayama
  • Patent number: 8560725
    Abstract: In the case where an audio network system that performs transport of audio signals between a plurality of processors is constructed such that the plurality of processors each including two sets of transmission I/Fs and reception I/Fs are connected in series, and a TL frame generated by a master node is circulated along a ring transmission route formed among the processors in each fixed period, the TL frame including a plurality of storage regions for audio signals, when one of the processors is required to be the master node, the one processor resets in sequence processors which are connected on both sides thereof and processors behind the processors connected on both sides to once remove each of those processors from a ring transmission route if it belong to any ring transmission route, then incorporates the processors into a ring transmission route in which the one processor belongs to.
    Type: Grant
    Filed: August 12, 2010
    Date of Patent: October 15, 2013
    Assignee: Yamaha Corporation
    Inventor: Kei Nakayama
  • Patent number: 8538567
    Abstract: Even when a system is made to have a configuration in which a plurality of transmission paths are connected to each other, a transmission-impossible time in each transmission path caused by changing a clock source to a device of a different transmission path can be shortened. In an audio signal processing system including first and second networks connected to each other through a bridge device, the bridge device operates as a slave in the first network and as a master in the second network. When the second network is reset, the bridge device starts to operate as a slave in the second network. Then, when continuous reception of an audio transmission frame that another device operating as a master in the second network has transmitted is started, the bridge device resets the first network and starts to operate as a master in the first network.
    Type: Grant
    Filed: March 15, 2011
    Date of Patent: September 17, 2013
    Assignee: Yamaha Corporation
    Inventors: Kei Nakayama, Yuki Furumoto
  • Patent number: 8424083
    Abstract: User operates a selection switch to instruct temporary activation of an application. For the application of which the temporary activation has been instructed, a CPU of a console allocates resources necessary for signal processing by a DSP of an engine and for a parameter editing function of the console. In the DSP, a bypass parameter is set to ON. Thus, there is provided a state capable of accepting various parameter setting operation related to the application, but the signal processing based on the application program is prevented from being started in a substantive manner. In response to a full activation instruction of an application via a full activation instruction switch, the bypass parameter is set to OFF, so that audio signal processing based on the application can be started. In this way, preparatory work for setting parameters related to the application can be performed efficiently.
    Type: Grant
    Filed: October 1, 2010
    Date of Patent: April 16, 2013
    Assignee: Yamaha Corporation
    Inventors: Ayumi Fukata, Kei Nakayama
  • Patent number: 8401684
    Abstract: In the case where an audio network system that performs transport of audio signals between a plurality of processors is constructed such that the plurality of processors each including two sets of transmission I/Fs and reception I/Fs are connected in series, and a TL frame generated by a master node is circulated along a ring transmission route formed among the processors in each fixed period, the TL frame including a plurality of storage regions for audio signals, when one of the processors is required to be the master node, the one processor resets in sequence processors which are connected on both sides thereof and processors behind the processors connected on both sides to once remove each of those processors from a ring transmission route if it belong to any ring transmission route, then incorporates the processors into a ring transmission route in which the one processor belongs to.
    Type: Grant
    Filed: August 12, 2010
    Date of Patent: March 19, 2013
    Assignee: Yamaha Corporation
    Inventor: Kei Nakayama
  • Publication number: 20130010647
    Abstract: In a top row on an audio network view screen, device images corresponding to devices composing a basic network are displayed in such a manner as to be arranged in a horizontal direction according to a connection order along with connection cable images indicative of connections between the device images according to connections between devices in the network. In display rows subsequent under the top row, other device images corresponding to devices composing another network which is connected to a connection node in the basic network with a full bridge are displayed in such a manner as to be arranged in the horizontal direction in a connection order along with connection cable images indicative of connections between the device images according to connections in the other network. As for a network connected to the basic network with a partial bridge setting, a partial bridge image is displayed in a display rows.
    Type: Application
    Filed: March 24, 2011
    Publication date: January 10, 2013
    Applicant: Yamaha Corporation
    Inventors: Ayumi Fukata, Kei Nakayama
  • Patent number: 8345674
    Abstract: An audio network system that performs transport of audio signals between nodes by cascading a plurality of nodes each including two sets of transmission I/Fs and reception I/Fs, and circulating among the nodes in each fixed period an audio transport frame generated by a master node, the audio transport frame including a plurality of storage regions for audio signals, is configured such that when the configuration of the system is changed, loopback of the audio transport frame in each node and release thereof are automatically controlled to automatically loop back the transport of the audio transport frame at nodes at both ends and not loop back it at the other nodes to thereby form a loop transmission route among the nodes.
    Type: Grant
    Filed: September 13, 2007
    Date of Patent: January 1, 2013
    Assignee: Yamaha Corporation
    Inventor: Kei Nakayama
  • Patent number: 8189602
    Abstract: A plurality of partial networks can work independently from each other, and each partial network connects together several nodes including a connection node for transmission of audio signals. A connection network connects respective connection nodes of the respective partial networks so as to connect the plurality of the partial networks with each other through the connection nodes.
    Type: Grant
    Filed: January 20, 2010
    Date of Patent: May 29, 2012
    Assignee: Yamaha Corporation
    Inventors: Kei Nakayama, Henning Kaltheuner, Masahiro Shimizu
  • Patent number: 8103016
    Abstract: An audio network system that performs transport of audio signals among nodes by cascading a plurality of nodes each including two sets of transmission I/Fs and reception I/Fs, and circulating among the nodes in each fixed period an audio transport frame generated by a master node, is configured such that the master node generates the audio transport frame in an S-th period based on the audio transport frame in an (S?k)-th period, and each of the other nodes delays the audio signals written by another node after the audio transport frame is generated by the master node until the audio transport frame is transmitted to the self node, by k period(s) with respect to the other audio signals, for use in signal processing.
    Type: Grant
    Filed: September 13, 2007
    Date of Patent: January 24, 2012
    Assignee: Yamaha Corporation
    Inventor: Kei Nakayama
  • Patent number: 8103369
    Abstract: An audio network system that performs transport of audio signals among nodes by cascading a plurality of nodes each including two sets of transmission I/Fs and reception I/Fs, and circulating among the nodes in each fixed period an audio transport frame generated by a master node, the audio transport frame including a plurality of storage regions for audio signals, is configured such that the master node stores a frame packet after circulating among the nodes and returning thereto into a buffer, so as to generate the audio transport frame in the (S+k)-th period based on the audio transport frame in the S-th period when the audio transport frame in the S-th period has been normally received, or based on a predetermined model otherwise.
    Type: Grant
    Filed: September 13, 2007
    Date of Patent: January 24, 2012
    Assignee: Yamaha Corporation
    Inventors: Kei Nakayama, Naoto Yamaguchi
  • Patent number: D678429
    Type: Grant
    Filed: January 20, 2012
    Date of Patent: March 19, 2013
    Assignee: Sega Toys Co., Ltd.
    Inventors: Wataru Sato, Kei Nakayama