Abstract: A method for manufacturing a vibrator includes a preparation step of preparing a quartz crystal substrate having a first surface and a second surface which are in a front and back relationship, a first film formation step of forming a first stacked body by sequentially stacking a first underlying film, a second underlying film, and a first protective film at the first surface, a first patterning step of patterning the first stacked body in a manner in which the first underlying film, the second underlying film, and the first protective film remain in a region of an element formation region other than a first groove formation region and a second groove formation region, the first underlying film and the second underlying film remain in the first groove formation region, and the first underlying film remains in the second groove formation region, and a first dry etching step of dry etching the quartz crystal substrate from the first surface through the first stacked body.

Abstract: A method for manufacturing a vibrator includes a preparation step of preparing a quartz crystal substrate having a first surface and a second surface that are in a front and back relationship, a first protective film formation step of forming a first protective film in an element formation region of the first surface, the first protective film having a first opening overlapping a first groove formation region and a second opening overlapping a second groove formation region, in which a region of the quartz crystal substrate where the vibrator is formed is referred to as the element formation region, a region where the first groove is formed is referred to as the first groove formation region, and a region where the second groove is formed is referred to as the second groove formation region, and a first dry etching step of dry etching the quartz crystal substrate from the first surface through the first protective film.

Abstract: A method for manufacturing a vibrator includes a preparation step of preparing a quartz crystal substrate having a first surface and a second surface which are in a front and back relationship, a first protective film formation step of forming a first protective film in an element formation region of the quartz crystal substrate at the first surface where the vibrator is formed; and a first dry etching step of dry etching the quartz crystal substrate from the first surface through the first protective film. R1>R2, in which R1 is a thickness of the first protective film in a first groove formation region of the quartz crystal substrate where the first groove is formed and R2 is a thickness of the first protective film in the second groove formation region where the second groove is formed.

Abstract: A method for manufacturing a vibrator includes a preparation step of preparing a quartz crystal substrate having a first surface and a second surface which are in a front and back relationship, a first protective film formation step of forming a first protective film in a second groove formation region when a region of the quartz crystal substrate where the vibrator is formed is referred to as an element formation region, a region where the first groove is formed is referred to as a first groove formation region, and a region where the second groove is formed is referred to as the second groove formation region, a second protective film formation step of forming, in the first groove formation region, a second protective film having a lower etching rate than the first protective film, a third protective film formation step of forming a third protective film in a region of the element formation region other than the first groove formation region and the second groove formation region, and a first dry etching st

Abstract: A method for manufacturing a vibrator includes a preparation step of preparing a quartz crystal substrate having a first surface and a second surface which are in a front and back relationship, a first protective film formation step of forming a first protective film in a region of an element formation region other than a first groove formation region and a second groove formation region when a region of the quartz crystal substrate where the vibrator is formed is referred to as the element formation region, a region where the first groove is formed is referred to as the first groove formation region, and a region where the second groove is formed is referred to as the second groove formation region, a first dry etching step of dry etching the quartz crystal substrate from the first surface through the first protective film, a second protective film formation step of forming a second protective film in the first groove formation region, and a second dry etching step of dry etching the quartz crystal substrate

Abstract: A viscosity measuring system is equipped with a tank, a flow pathway, an external force applying unit, and a pump. The viscosity measuring system further comprises a first pressure detection unit which detects a pressure of the electrode ink, and a second pressure detection unit which detects the pressure of the electrode ink on a more downstream side than the first pressure detection unit. A detection processing unit calculates a viscosity of the electrode ink based on the pressure detected by the first pressure detection unit and the pressure detected by the second pressure detection unit.

Abstract: A sheet attaching apparatus includes a gripping mechanism that grips one end portion, in a longitudinal direction, of a first sheet that has been drawn out from a first supply roll; a moving mechanism that allows the first sheet to be attached to a second sheet by moving the gripping mechanism to cause the first sheet to approach and contact the second sheet that passes through an attaching portion provided in a feeding path; and a releasing mechanism that releases a grip of the gripping mechanism on the first sheet, after the first sheet has contacted the second sheet.

Abstract: A viscosity measuring system is equipped with a tank, a flow pathway, an external force applying unit, and a pump. The viscosity measuring system further comprises a first pressure detection unit which detects a pressure of the electrode ink, and a second pressure detection unit which detects the pressure of the electrode ink on a more downstream side than the first pressure detection unit. A detection processing unit calculates a viscosity of the electrode ink based on the pressure detected by the first pressure detection unit and the pressure detected by the second pressure detection unit.

Abstract: A method for inspecting a membrane electrode structure (1) which includes a first step in which detection medium capable of detecting elements of a first electrode catalyst layer (12) and a second electrode catalyst layer (22) and an element of a metal foreign matter (40) is sent along a thickness direction from the side of a first electrode layer (10) to a second electrode layer (20) side to obtain a thickness direction profile of a detection signal, and a second step in which an analysis unit identifies a thickness direction position of the metal foreign matter (40), from intensity of the detection signal in the thickness direction profile, and in which the analysis unit identifies thickness direction positions of the first and second electrode catalyst layer (12)(22), or a thickness direction position of an electrolyte membrane (30), from the intensity of the detection signal in the thickness direction profile.

Abstract: Provided is an electric-assist supercharger configured such that a motor (30) is attached to the end portion of a rotor shaft (15) close to a silencer (26), the rotor shaft (15) being connected to a compressor portion. Such a supercharger includes a suction air introduction path (24) formed in the silencer 26 such that a main suction air flow flows in the radial direction of the silencer (26) toward a connection portion between the silencer (26) and the compressor portion, and a cooling air intake path (40) formed in the silencer (26) in which at least an outlet thereof is on the center axis of the rotor shaft (15).

Abstract: A method for inspecting a membrane electrode structure (1) which includes a first step in which detection medium capable of detecting elements of a first electrode catalyst layer (12) and a second electrode catalyst layer (22) and an element of a metal foreign matter (40) is sent along a thickness direction from the side of a first electrode layer (10) to a second electrode layer (20) side to obtain a thickness direction profile of a detection signal, and a second step in which an analysis unit identifies a thickness direction position of the metal foreign matter (40), from intensity of the detection signal in the thickness direction profile, and in which the analysis unit identifies thickness direction positions of the first and second electrode catalyst layer (12)(22), or a thickness direction position of an electrolyte membrane (30), from the intensity of the detection signal in the thickness direction profile.

Abstract: A sheet attaching apparatus includes a gripping mechanism that grips one end portion, in a longitudinal direction, of a first sheet that has been drawn out from a first supply roll; a moving mechanism that allows the first sheet to be attached to a second sheet by moving the gripping mechanism to cause the first sheet to approach and contact the second sheet that passes through an attaching portion provided in a feeding path; and a releasing mechanism that releases a grip of the gripping mechanism on the first sheet, after the first sheet has contacted the second sheet.

Abstract: An electric motor support mechanism having a cylindrical member that is attached to the end part of the intake opening side of an air inlet guide, and is formed in a cylindrical shape around an axis line extending along a rotation shaft, a plurality of struts connected to multiple locations on the inner circumferential surface of the cylindrical member, the plurality of struts extending in the radial direction from the inner circumferential surface toward the axis line, and connecting members that connect pairs of struts disposed adjacently in the circumferential direction around the axis line. The end parts of the plurality of struts on the axis-line side in the radial direction are connected in multiple locations on the outer circumferential surface of the electric motor, whereby the electric motor is supported on the axis line.

Abstract: A hybrid turbocharger includes a first power conversion unit to convert direct-current power into alternating-current power to be output to a generator motor, a smoothing capacitor between direct-current buses, and a control unit that controls the first power conversion unit so as to cause actual generator motor speed to comply with an engine speed command of the generator motor input from an upstream controller during a motoring operation of the generator motor. The control unit changes the engine speed command to a value which is equal to or greater than the actual generator motor speed if the engine speed command of the generator motor is less than the actual generator motor speed and a direct-current bus voltage is equal to or greater than a predetermined first threshold value during the motoring operation. Accordingly, the direct-current bus voltage can be prevented from increasing during the motoring operation.

Abstract: A hybrid turbocharger includes a first power conversion unit to convert direct-current power into alternating-current power to be output to a generator motor, a smoothing capacitor between direct-current buses, and a control unit that controls the first power conversion unit so as to cause actual generator motor speed to comply with an engine speed command of the generator motor input from an upstream controller during a motoring operation of the generator motor. The control unit changes the engine speed command to a value which is equal to or greater than the actual generator motor speed if the engine speed command of the generator motor is less than the actual generator motor speed and a direct-current bus voltage is equal to or greater than a predetermined first threshold value during the motoring operation. Accordingly, the direct-current bus voltage can be prevented from increasing during the motoring operation.

Abstract: An electric motor support mechanism having a cylindrical member that is attached to the end part of the intake opening side of an air inlet guide, and is formed in a cylindrical shape around an axis line extending along a rotation shaft, a plurality of struts connected to multiple locations on the inner circumferential surface of the cylindrical member, the plurality of struts extending in the radial direction from the inner circumferential surface toward the axis line, and connecting members that connect pairs of struts disposed adjacently in the circumferential direction around the axis line. The end parts of the plurality of struts on the axis-line side in the radial direction are connected in multiple locations on the outer circumferential surface of the electric motor, whereby the electric motor is supported on the axis line.

Abstract: A hybrid turbocharger includes a first power conversion unit to convert direct-current power into alternating-current power to be output to a generator motor, a smoothing capacitor between direct-current buses, and a control unit that controls the first power conversion unit so as to cause actual generator motor speed to comply with an engine speed command of the generator motor input from an upstream controller during a motoring operation of the generator motor. The control unit changes the engine speed command to a value which is equal to or greater than the actual generator motor speed if the engine speed command of the generator motor is less than the actual generator motor speed and a direct-current bus voltage is equal to or greater than a predetermined first threshold value during the motoring operation. Accordingly, the direct-current bus voltage can be prevented from increasing during the motoring operation.

Abstract: A hybrid turbocharger includes a first power conversion unit to convert direct-current power into alternating-current power to be output to a generator motor, a smoothing capacitor between direct-current buses, and a control unit that controls the first power conversion unit so as to cause actual generator motor speed to comply with an engine speed command of the generator motor input from an upstream controller during a motoring operation of the generator motor. The control unit changes the engine speed command to a value which is equal to or greater than the actual generator motor speed if the engine speed command of the generator motor is less than the actual generator motor speed and a direct-current bus voltage is equal to or greater than a predetermined first threshold value during the motoring operation. Accordingly, the direct-current bus voltage can be prevented from increasing during the motoring operation.

Abstract: A hybrid turbocharger includes a first power conversion unit to convert a direct-current power into alternating-current power to be output to a generator motor, a smoothing capacitor between direct-current buses, and a control unit that controls the first power conversion unit so as to cause actual generator motor speed to comply with an engine speed command of the generator motor input from an upstream controller during a motoring operation of the generator motor. The control unit changes the engine speed command to a value which is equal to or greater than the actual generator motor speed if the engine speed command of the generator motor is less than the actual generator motor speed and a direct-current bus voltage is equal to or greater than a predetermined first threshold value during the motoring operation. Accordingly, the direct-current bus voltage can be prevented from increasing during the motoring operation.

Abstract: Provided is an electric-assist supercharger configured such that a motor (30) is attached to the end portion of a rotor shaft (15) close to a silencer (26), the rotor shaft (15) being connected to a compressor portion. Such a supercharger includes a suction air introduction path (24) formed in the silencer 26 such that a main suction air flow flows in the radial direction of the silencer (26) toward a connection portion between the silencer (26) and the compressor portion, and a cooling air intake path (40) formed in the silencer (26) in which at least an outlet thereof is on the center axis of the rotor shaft (15).