Patents by Inventor Keith Zawadzki

Keith Zawadzki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230197538
    Abstract: Embodiments described herein may be related to apparatuses, processes, and techniques for providing a hermetic seal for a layer of transistors with metal on both sides that are on a substrate. The layer of transistors may be within a die or within a portion of a die. The hermetic seal may include a hermetic layer on one side of the layer of transistors and a hermetic layer on the opposite side of the transistors. In embodiments, one or more metal walls may be constructed through the transistor layer, with metal rings placed around either side of the layer of transistors and hermetically coupling with the two hermetic layers. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: December 20, 2021
    Publication date: June 22, 2023
    Inventors: Mohammad Enamul KABIR, Conor P. PULS, Tofizur RAHMAN, Keith ZAWADZKI, Hannes GREVE
  • Publication number: 20230197638
    Abstract: Embodiments described herein may be related to apparatuses, processes, and techniques for a barrier that surrounds one or more dies which are electrically coupled with one or more electrical connections on a wafer. The barrier may be a hermetic barrier that is formed on a wafer prior to singulation to prevent moisture intrusion from a side of the wafer that may compromise the one or more electrical connections. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: December 21, 2021
    Publication date: June 22, 2023
    Inventors: Mohammad Enamul KABIR, Keith ZAWADZKI, Shakul TANDON, Christopher M. PELTO, John Kevin TAYLOR, Babita DHAYAL
  • Patent number: 8394687
    Abstract: The present invention discloses a method including: providing a substrate; forming recessed regions adjacent to both sides of a gate on the substrate; performing an angled co-implant of a species in two steps with two different energies and two different doses into the recessed regions; forming Silicon-Germanium in the recessed regions; forming source/drain extensions adjacent to both sides of the gate with a dopant; and performing an anneal to activate the dopant.
    Type: Grant
    Filed: March 30, 2007
    Date of Patent: March 12, 2013
    Assignee: Intel Corporation
    Inventors: Pushkar Ranade, Keith Zawadzki, Leif Paulson
  • Patent number: 7691752
    Abstract: Methods and associated structures of forming a microelectronic device are described. Those methods may include plasma etching a portion of a source/drain region of a transistor, and then selectively wet etching the source drain region along a (100) plane to form at least one (111) region in the recessed source/drain region.
    Type: Grant
    Filed: March 30, 2007
    Date of Patent: April 6, 2010
    Assignee: Intel Corporation
    Inventors: Pushkar Ranade, Keith Zawadzki, Christopher Auth
  • Publication number: 20090315120
    Abstract: An apparatus comprising a semiconductor substrate; a conductively doped source or drain (source/drain) region at the surface of the substrate; a raised semiconductor layer deposited over the source/drain region to form a raised source/drain region; a via formed in the raised source/drain region having substantially vertical sidewalls reaching partly or substantially to the source/drain region; and a metal contact filling the via.
    Type: Application
    Filed: June 24, 2008
    Publication date: December 24, 2009
    Inventors: Lucian Shifren, Keith Zawadzki, Martin Giles, Cory Weber
  • Publication number: 20080237661
    Abstract: The present invention discloses a method including: providing a substrate; forming recessed regions adjacent to both sides of a gate on the substrate; performing an angled co-implant of a species in two steps with two different energies and two different doses into the recessed regions; forming Silicon-Germanium in the recessed regions; forming source/drain extensions adjacent to both sides of the gate with a dopant; and performing an anneal to activate the dopant.
    Type: Application
    Filed: March 30, 2007
    Publication date: October 2, 2008
    Inventors: Pushkar Ranade, Keith Zawadzki, Leif Paulson
  • Publication number: 20080237742
    Abstract: Methods and associated structures of forming a microelectronic device are described. Those methods may include plasma etching a portion of a source/drain region of a transistor, and then selectively wet etching the source drain region along a (100) plane to form at least one (111) region in the recessed source/drain region.
    Type: Application
    Filed: March 30, 2007
    Publication date: October 2, 2008
    Inventors: Pushkar Ranade, Keith Zawadzki, Christopher Auth
  • Publication number: 20080237741
    Abstract: Methods and associated structures of forming a microelectronic device are described. Those methods may include plasma etching a portion of a source/drain region of a transistor, and then selectively wet etching the source drain region along a (100) plane to form at least one (111) region in the recessed source/drain region.
    Type: Application
    Filed: March 30, 2007
    Publication date: October 2, 2008
    Inventors: Pushkar Ranade, Keith Zawadzki, Christopher Auth
  • Publication number: 20070077739
    Abstract: Carbon may be implanted into a p-type silicon channel to form a carbon region in an n-type metal oxide semiconductor (NMOS) transistor. After an annealing process, the implanted carbon may diffuse from the channel into an interface of a gate dielectric layer and the channel. The diffusion may cause an increase in fixed charge at the silicon surface. Thus, the threshold voltage of the NMOS transistor may be reduced.
    Type: Application
    Filed: September 30, 2005
    Publication date: April 5, 2007
    Inventors: Cory Weber, Keith Zawadzki
  • Publication number: 20070034945
    Abstract: Optimal strain in the channel region of a PMOS transistor is provided by silicon alloy material in the junction regions of the device in a non-planar relationship with the surface of the substrate. The silicon alloy material, the dimensions of the silicon alloy material, as well as the non-planar relationship of the silicon alloy material with the surface of the substrate are selected so that the difference between the lattice spacing of the silicon alloy material and of the substrate causes strains in the silicon alloy material below the substrate surface, as well as above the substrate surface, to affect an optimal silicon alloy induced strain in the substrate channel. In addition, the non-planar relationship may be selected so that any strains caused by different lattice spaced layers formed over the silicon alloy material have a reduced effect on the strain in the channel region.
    Type: Application
    Filed: October 24, 2006
    Publication date: February 15, 2007
    Inventors: Mark Bohr, Tahir Ghani, Stephen Cea, Kaizad Mistry, Christopher Auth, Mark Armstrong, Keith Zawadzki