Abstract: A stacked electrode is provided on a strain resistance film, wherein: the strain resistance film contains Cr and Al; the stacked electrode has a contact layer that overlaps the strain resistance film, a diffusion prevention layer that overlaps the contact layer, and a mounting layer that overlaps the diffusion prevention layer; and the diffusion prevention layer or the mounting layer covers the contact layer so that an end surface of the contact layer is not exposed.

Abstract: A strain resistance film containing a composition represented by Cr100-x-y-zAlxNyOz, satisfying 5?x?50, 0.1?y?20, 0.1?z?17, and y+z?25.

Abstract: There is provided a sensor member capable of suitably preventing a problem such as the intrusion of moisture or the like through an interface between an electrode and a protective film. A sensor member includes: a protected portion provided on one surface of a metal base and including a detection portion; a protective film including a first protective film portion having a first thickness and a second protective film portion having a second thickness thicker than the first thickness and formed at an opening peripheral edge of an opening leading to the protected portion, and covering at least a part of the protected portion from above; and an electrode portion including a first electrode portion disposed in the opening and connected to the protected portion, and a second electrode portion connected to the first electrode portion at an outer peripheral edge of the first electrode portion and formed on the second protective film portion.

Abstract: There is provided a sensor member with a small risk of damage. A sensor member includes: a membrane; a protective film covering a part of the membrane; and an electrode portion connected to the membrane. The electrode portion 5 covers at least a part of the protective film.

Abstract: A fluid pressure detection device capable of accurately detecting a pressure change of a fluid flowing inside a tube includes a substrate, a piezoelectric element formed on the top surface of the substrate, a support body which is annular and surrounds the piezoelectric element and supports the top surface of the substrate, and a lid body which is provided to close the top opening of the support body, and deforms the tube with the bottom surface of the substrate by pressing the substrate through the support body.

Abstract: A metal member with insulating film includes a metal member, an insulating film, and a reinforcement portion. The metal member includes a film formation surface and a connection surface facing in a different direction from the film formation surface and connecting to the film formation surface. The insulating film covers at least a part of the film formation surface and the connection surface over a connection position between the film formation surface and the connection surface. The reinforcement portion is formed along a periphery of the insulating film at the connection position and covers at least a part of the periphery of the insulating film from an opposite side to the metal member.

Abstract: [Problem] To provide a pressure sensor that has a plurality of detection parts in a lamination direction, and moreover has improved detection accuracy. [Solution] A pressure sensor 10 has a membrane 22 in which deformation corresponding to pressure occurs, a first gauge layer 40 which is formed on the membrane 22, an intermediate insulation layer 50 which is formed on the first gauge layer 40, and a second gauge layer 60 which is formed on the intermediate insulation layer 50. The first gauge layer 40 and the second gauge layer 60 respectively include a first detection part 42 and a second detection part 62 which detect the deformation of the membrane. The distance from the surface of the membrane 22 to the second detection part 62 is no more than 30 ?m.

Abstract: A sensor element suitable for miniaturization. This pressure sensor element has: a metal plate; an insulating film provided on a first surface, which is one surface of the metal plate, so as to form a covered region in which the first plate is covered and an exposed region in which the first surface is exposed; and a pressure detection circuit formed on the insulating film so as to be insulated from the first surface by means of the insulating film.

Abstract: A pressure sensor configured to prevent tearing or cracking of an insulating film for insulating between a stem and a detection circuit from occurring. A stem having a planar outer bottom surface, an outer side surface intersecting the outer bottom surface, and a pressure receiving inner surface that is the opposite surface to the outer bottom surface and receives pressure from a fluid to be measured; and a detection circuit provided to the outer bottom surface with an insulating film interposed therebetween. The stem has a foot part that: is formed to surround the outer bottom surface; consists of a surface which, when observed parallel to the outer bottom surface, faces a direction different from the direction of the outer bottom surface and the outer side surface; and connects between the outer bottom surface and the outer side surface. The insulating film covers a portion of the foot part.

Abstract: A fluid pressure detection device capable of accurately detecting a pressure change of a fluid flowing inside a tube includes a substrate, a piezoelectric element formed on the top surface of the substrate, a support body which is annular and surrounds the piezoelectric element and supports the top surface of the substrate, and a lid body which is provided to close the top opening of the support body, and deforms the tube with the bottom surface of the substrate by pressing the substrate through the support body.

Abstract: The present invention provides an electronic device with improved characteristics and a method of making the electronic device. In a method of making an electronic device (piezoelectric device) 74 according to the present invention, an outer edge R1 of a piezoelectric film 52A formed on an electrode film 46A of a laminate 60 is located inside an outer edge R2 of the electrode film 46A. For this reason, in removal of a monocrystalline Si substrate 14 from a multilayer board 61, where an etching solution permeates between polyimide 72 and laminate 60, the etching solution circumvents the electrode film 46A before it reaches the piezoelectric film 52A. Namely, a route A of the etching solution to the piezoelectric film 52A is significantly extended by the electrode film 46A. In the method of making the electronic device 74, therefore, the etching solution is less likely to reach the piezoelectric film 52A.

Abstract: A piezoelectric vibration type yaw rate sensor including driving arms and detection arms. A detection sensitivity spectrum of the detection arms has a first peak with a first resonance frequency in a first detection vibration mode, in which the driving and detection arms vibrate in opposite phases, and a second peak with a second resonance frequency in a second detection vibration mode, in which the driving and detection arms vibrate in the same phase. A detection sensitivity at a frequency higher by ?f than one smaller resonance frequency of the first and second resonance frequency is larger than a detection sensitivity at a frequency lower by ?f than the one resonance frequency. A detection sensitivity at a frequency lower by ?f than other larger resonance frequency of the first and second resonance frequency is larger than a detection sensitivity at a frequency higher by ?f than the other resonance frequency.

Abstract: An angular velocity sensor element is provided which is capable of preventing even transmission of sudden externally-applied vibration to an element portion by absorbing the vibration. An angular velocity sensor element 2 according to the present embodiment has a fixing portion 21 in the form of a frame, an element portion 20 disposed in the frame of the fixing portion 21 and having vibrating arms 21 to 24 in a drive system and a detection system, and a connecting portion 25 formed as a fixed-fixed beam having its both ends connected to the fixing portion 21 and having its intermediate portion connected to the element portion 20.

Abstract: A piezoelectric element having a crystal structure that enables a piezoelectric film to be formed in an unstressed state is provided. The piezoelectric film contains an a-axis oriented crystal and a c-axis oriented crystal, where a difference in lattice constant between the a-axis oriented crystal and the c-axis oriented crystal is not more than 0.06 ?. The present inventors have newly found that a stress accumulated in the piezoelectric film can be reduced while maintaining favorable piezoelectric properties when a condition that the difference in lattice constant between the a-axis oriented crystal and the c-axis oriented crystal is not more than 0.06 ? is satisfied. When the condition is satisfied, the c-axis oriented crystal and the a-axis oriented crystal are properly balanced and as a result crystal particles of the piezoelectric film are closest-packed on its base in an ideal state, which contributes to a reduced stress.

Abstract: An angular velocity sensing element is provided, which is able to prevent breakage of an oscillation arm even when an excessively large shock is given. An angular velocity sensing element 2 according to the present embodiment includes oscillation arms 22, 23 and 24 formed of a semiconductor material, and a stopper member provided to limit the oscillation range of the oscillation arms. As such a stopper member, a first stopper member 25 is provided, for example, which limits the oscillation range of the oscillation arms at least within a single plane of the arms. Fixing portions 21, the oscillation arms 22, 23 and 24 and the first stopper member 25 are integrally formed by processing a semiconductor material, such as silicon.

Abstract: An angular velocity sensor of a horizontally located type, in which influence of a translational acceleration applied thereto from a lateral direction is readily removed and a fixed portion thereof is easily fixed, is provided. It includes a fixed portion fixed to the top surface of a sensor element supporting portion of a casing, an upper detection arm portion and a lower detection arm portion respectively connected to the fixed portion on sides opposite to each other and extending along a plane parallel to the top surface of the sensor element supporting portion, and a pair of upper vibration arms connected to the fixed portion with the upper detection arm portion in between. The fixed portion includes one or more slits extending at least in a direction intersecting with the extending direction of the upper detection arm portion.

Abstract: An angular velocity sensor of a horizontally located type, which can easily remove the translational acceleration influence thereto from the lateral direction, is provided. It includes a fixed portion fixed to the surface of a sensor element supporting portion of a casing, an upper detection arm and a lower detection arm, each of them being connected to the fixed portion on sides opposite to each other and extending along a plane parallel to the surface place of the sensor element supporting portion, and a pair of upper vibration arms connected to the fixed portion in such a manner as to form a pair of arms with the upper detection arm in between and extending in a direction parallel to the extending direction of the upper detection arm.

Abstract: Proposed is a horizontally located angular velocity sensor hardly affected by a translational acceleration in a lateral direction, and in which a fixed section is easily fixed. The angular velocity sensor includes a fixed section fixed on a support surface. On both sides of the fixed section, an arm section of an upper detection arm and a pair of upper drive arms extending along a plane parallel to the support surface, and an arm section of a lower detection arm and a pair of lower drive arms extending along the plane parallel to the support surface are coupled, respectively. The upper detection arm and the pair of upper drive arms are coupled without the fixed section in between, and the lower detection arm and the pair of lower drive arms are coupled without the fixed section in between.

Abstract: Provided is a horizontally located sensitive angular velocity sensor capable of easily eliminating influence of acceleration in a lateral direction and whose fixed section is easily fixed. The angular velocity sensor includes a pair of fixed sections fixed on a top of an sensor support section of a case, a detection arm extending along a plane parallel to the sensor support section, and a pair of upper drive arm and lower drive arm extending along the plane parallel to the sensor support section and extending in a direction opposite to each other so as to intersect an extending direction of the detection arm.

Abstract: A piezoelectric element having a crystal structure that enables a piezoelectric film to be formed in an unstressed state is provided. The piezoelectric film contains an a-axis oriented crystal and a c-axis oriented crystal, where a difference in lattice constant between the a-axis oriented crystal and the c-axis oriented crystal is not more than 0.06 ?. The present inventors have newly found that a stress accumulated in the piezoelectric film can be reduced while maintaining favorable piezoelectric properties when a condition that the difference in lattice constant between the a-axis oriented crystal and the c-axis oriented crystal is not more than 0.06 ? is satisfied. When the condition is satisfied, the c-axis oriented crystal and the a-axis oriented crystal are properly balanced and as a result crystal particles of the piezoelectric film are closest-packed on its base in an ideal state, which contributes to a reduced stress.