Patents by Inventor Kenichi Goshima

Kenichi Goshima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8973615
    Abstract: Rails 20 corresponding to lines A, B, C are provided in parallel on a bass plate 1, and coupling members 21, 22 are slidably mounted on each of the rails 20. Each of fluid controllers 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14 is mounted generally on two of these coupling members 21, 22.
    Type: Grant
    Filed: June 29, 2001
    Date of Patent: March 10, 2015
    Assignees: Tokyo Electron Limited, CKD Corporation, Fujikin Incorporated
    Inventors: George Hoshi, Tsuneyuki Okabe, Kenichi Goshima, Hideo Kobayashi, Akinori Nagaya, Michio Yamaji, Kazuhiro Yoshikawa, Yuji Kawano
  • Patent number: 7726333
    Abstract: Each of lines A, B is provided on each of opposite sides thereof with a tape heater 11, and a space for positioning a tape heater holding clip 13 therein is provided in each of locations between adjacent fluid control devices. The tape heaters 11 are held from opposite sides thereof to the line by the clip 13. The lines A, B provided with the heaters are each mounted on a line support member 10 removably attached to a base member 1. The line support member 10 has a heater insertion bore 14 formed therein and extending longitudinally thereof. A sheath heater 12 is inserted into the bore 14.
    Type: Grant
    Filed: April 23, 2002
    Date of Patent: June 1, 2010
    Assignees: CKD Corporation, Fujikin Incorporated
    Inventors: George Hoshi, Tsuneyuki Okabe, Kenichi Goshima, Hideo Kobayashi, Akinori Nagaya, Michio Yamaji, Kazuhiro Yoshikawa, Yuji Kawano
  • Publication number: 20050229972
    Abstract: Each of lines A, B is provided on each of opposite sides thereof with a tape heater 11, and a space for positioning a tape heater holding clip 13 therein is provided in each of locations between adjacent fluid control devices. The tape heaters 11 are held from opposite sides thereof to the line by the clip 13. The lines A, B provided with the heaters are each mounted on a line support member 10 removably attached to a base member 1. The line support member 10 has a heater insertion bore 14 formed therein and extending longitudinally thereof. A sheath heater 12 is inserted into the bore 14.
    Type: Application
    Filed: April 23, 2002
    Publication date: October 20, 2005
    Inventors: George Hoshi, Tsuneyuki Okabe, Kenichi Goshima, Hideo Kobayashi, Akinori Nagaya, Michio Yamaji, Kazuhiro Yoshikawa, Yuji Kawano
  • Publication number: 20020031417
    Abstract: Rails 20 corresponding to lines A, B, C are provided in parallel on a bass plate 1, end Coupling members 21, 22 are slidably mounted on each of the rails 20. Each of fluid controllers 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14 is mounted generally on two of these coupling members 21, 22.
    Type: Application
    Filed: June 29, 2001
    Publication date: March 14, 2002
    Inventors: George Hoshi, Tsuneyuki Okabe, Kenichi Goshima, Hideo Kobayashi, Akinori Nagaya, Michio Yamaji, Kazuhiro Yoshikawa, Yuji Kawano
  • Patent number: 6264246
    Abstract: A purge system has a purge gas piping system for substituting inert gas for process gas when a device connected in a process gas piping system is detached therefrom. In the purge system, a purge joint for connecting two pipes in the purge gas piping system is provided with an opening formed in alignment with the position where the two pipes are connected in the purge joint.
    Type: Grant
    Filed: February 29, 2000
    Date of Patent: July 24, 2001
    Assignee: CKD Corporation
    Inventors: Kenichi Goshima, Yoshihisa Sudo
  • Patent number: 6062605
    Abstract: In a weldless joint 13, screwing a fastening member 13 into a joint body allows two pipes to move closer to each other in an axial direction without rotating. The two pipes can be thus connected without welded. Packings and disposed in the joint body prevent the leakage of gas through the contact surfaces of the pipes and, further, the leakage of gas from the inside of the joint body to the outside thereof. Accordingly, no packing or sealing element is needed on the periphery of the fastening member.
    Type: Grant
    Filed: October 5, 1998
    Date of Patent: May 16, 2000
    Assignee: CKD Corporation
    Inventors: Kenichi Goshima, Hiroshi Itafuji, Shigenobu Nishida
  • Patent number: 6050287
    Abstract: A purge system has a purge gas piping system for substituting inert gas for process gas when a device connected in a process gas piping system is detached therefrom. In the purge system, a purge joint for connecting two pipes in the purge gas piping system is provided with an opening formed in alignment with the position where the two pipes are connected in the purge joint.
    Type: Grant
    Filed: June 23, 1998
    Date of Patent: April 18, 2000
    Assignee: CKD Corporation
    Inventors: Kenichi Goshima, Yoshihisa Sudo
  • Patent number: 5401065
    Abstract: A fluid coupling provides a cap nut having an internal screw formed inside, a pipe having a mirror-finished surface formed at an end face and a groove in an outer periphery, a device for preventing rotation of the pipe together with the cap nut, in contact with the inner end face of the cap nut, a ferrule fitted in the groove formed in the outer periphery of the pipe, in contact with the device for preventing the rotation of the pipe together with the cap nut, the ferrule which transmits to the pipe a thrust of the cap nut in the pipe's longitudinal direction, a gasket fitted on an end part of the pipe, with the end face of the pipe in contact with the gasket through the entire circumference, and a body mirror-finished at the end face and provided with an external screw formed on the outer periphery, wherein the end face of the body is in contact with one side of the gasket the other side of which is in contact with the pipe, and the external screw of the body and the internal screw of the cap nut is tightene
    Type: Grant
    Filed: May 6, 1993
    Date of Patent: March 28, 1995
    Assignees: Kabushiki Kaisha Toshiba, CKD Corporation
    Inventors: Katsuya Okumura, Kenichi Goshima
  • Patent number: 5368062
    Abstract: A gas supplying system for supplying a corrosive gas or the like to a semiconductor manufacturing apparatus or the like. A plurality of kinds of component gases are introduced into a chamber and mixed therein to form a desired supply gas. After supplying the desired supply gas, the chamber is evacuated and an inert gas is charged into the chamber to substitute a residual supply gas remaining in the chamber by the inert gas. The evacuation of the chamber and the charging of the inert gas into the chamber are repeated two or more times. Accordingly, the residual supply gas can be efficiently removed from the chamber and substituted by the inert gas.
    Type: Grant
    Filed: January 28, 1993
    Date of Patent: November 29, 1994
    Assignees: Kabushiki Kaisha Toshiba, CKD Corporation
    Inventors: Katsuya Okumura, Yoshihisa Sudo, Kenichi Goshima, Hiroshi Itafuji, Akihiro Kojima