Abstract: An imprint apparatus comprising a plurality of gas supply units configured to supply a gas to a space between a mold and a substrate; and a control unit configured to control the gas supply units and an imprint operation to sequentially imprint on a plurality of imprint regions of the substrate; wherein the control unit acquires position information of the imprint regions on the substrate, imprint order information, and predetermined gas supply amount information for each of the imprint regions, and wherein, at the time of an imprint operation of the imprint region just before a movement direction between the imprint regions of the substrate is to be changed from a first direction to a second direction, the control unit controls both of a first direction side and a second direction side of the plurality of gas supply units to supply a predetermined amount of the gas based on the gas supply amount information.

Abstract: In a substrate polishing apparatus where a polishing liquid passes through inside a rotary joint, the rotary joint requires maintenance. There is provided a substrate polishing apparatus that includes: a polishing head for holding a substrate; a rotary table that has a surface to which a first opening portion is provided; a polishing liquid discharge mechanism disposed to the rotary table; and a controller configured to control at least the polishing liquid discharge mechanism. The polishing liquid discharge mechanism includes a first cylinder, a first piston, and a driving mechanism that drives the first piston. The first opening portion is communicated with a liquid holding space defined by the first cylinder and the first piston. The controller controls the driving of the first piston by the driving mechanism to increase and decrease a volume of the liquid holding space.

Abstract: A resist composition containing: (A) a resin containing a repeating unit having an acid-labile group; (B) a photo-acid generator shown by a general formula (B-1); and (C) a solvent, where W1 represents a cyclic divalent hydrocarbon group having 4 to 12 carbon atoms and containing a heteroatom; W2 represents a cyclic monovalent hydrocarbon group having 4 to 14 carbon atoms and not containing a heteroatom; Rf represents a divalent organic group shown by the following general formula; and M+ represents an onium cation. This provides a resist composition and a patterning process that uses the resist composition that show a particularly favorable mask dimension dependency (mask error factor: MEF), LWR, and critical dimension uniformity (CDU) particularly in photolithography where a high-energy beam such as an ArF excimer laser beam is used as a light source.

Abstract: A separation membrane complex includes a support, a separation membrane, and a coating membrane. The support includes a porous portion and a dense portion that are arranged continuously. The separation membrane is provided on the porous portion of the support. The separation membrane has an end portion that is in contact with the dense portion. The coating membrane is composed by a layered inorganic compound. The coating membrane coats a boundary portion between the dense portion and the separation membrane.

Abstract: A piezoelectric laminate and a piezoelectric element, including on a substrate in the following order, a lower electrode layer, and a piezoelectric film, in which a region of the lower electrode layer, the region being in contact with the piezoelectric film, is constituted of a metal layer, where a (111) plane of the metal layer has an inclination of 1° or more with respect to a surface of the substrate, and the piezoelectric film contains a perovskite-type oxide containing Pb.

Abstract: Provided is a laser machining method with which strain occurring in a workpiece can be reduced even when a large number of through-holes are formed. The laser machining method includes: a gas supply step (S3) of making a gas pressure on the back surface side of a workpiece 1 higher than a gas pressure on the front surface side of the workpiece 1; a deep hole machining step (S5) of irradiating the workpiece 1 from the front surface side with a pulsed laser having a first repetition frequency f1, thereby forming through-holes A in the workpiece 1; and a hole finishing step (S7) of irradiating the inner surface of the through-holes A with a pulsed laser having a second repetition frequency f2 that is lower than the first repetition frequency f1.

Abstract: An object of the present invention is to provide a new nanogranular structure material having magneto-optical properties different from those of existing nanogranular structure materials, and a method for producing the same. The nanogranular structure material has a composition represented by L-M-F—O wherein L is at least one element selected from the group consisting of Fe, Co, and Ni, and M is at least one element selected from the group consisting of Li, Be, Mg, Al, Si, Ca, Sr, Ba, Bi, and rare earth elements, F is fluorine, and O is oxygen. The nanogranular structure material according to the present invention is composed of a matrix formed of a fluorine compound having a composition represented by M-F and metal oxide nanoparticles dispersed in the matrix and having a composition represented by L-O.

Abstract: A brain image analysis apparatus (2000) acquires input data (40) including a structural brain image (42) and a functional brain image (44) for a subject (10). The brain image analysis apparatus (2000) obtains analysis data (20) by inputting the input data (40) into an analysis model (2020). The analysis model (2020) has been trained in advance so as to output the analysis data (20) representing information about brain dysfunction in response to an input of the input data (40). The brain image analysis apparatus (2000) outputs, based on the analysis data (20), output data (30) representing information about the brain dysfunction of the subject (10).

Abstract: A resin composition comprises: a modified vinyl alcohol-based polymer (A) containing from 1 to 20 mol % of a structural unit represented by a formula (1) below; and a layered inorganic compound (B). Such a resin composition is excellent in water vapor barrier properties, recyclability, and productivity during coating.

Abstract: A semiconductor manufacturing system includes: a local operation terminal that displays an apparatus screen of a semiconductor manufacturing apparatus; at least one remote operation terminals that are connected to the semiconductor manufacturing apparatus via a network, and display the apparatus screen; and a controller that controls the semiconductor manufacturing apparatus based on an operation received from a user by the local operation terminal and the remote operation terminal that display the apparatus screen. The control device includes: a login state managing unit; an apparatus screen display state managing unit; and a screen data creating unit that creates screen data of the apparatus screen based on the simultaneous login state and the apparatus screen display state.

Abstract: A method and system for imprinting a substrate supported on a moveable stage is provided and includes contacting a liquid resist on the substrate with a template and aligning the substrate with the template using a feedback-feedforward control process with a first set of control parameters. Calibration data is obtained and the viscosity of at least a portion of the resist is increased. The substrate is then with the template using the feedback-feedforward control process with a second set of control parameters after the viscosity of the resist has increased, the second set of control parameters are determined based on the calibration data and the resist is cured under the template.

Abstract: A storage unit stores user information for identifying a plurality of users that are employees of a corporation, and vehicle information including a lending status of a plurality of vehicles that travel by electric power. An identification unit identifies a first user on a basis of the user information. A first receiving unit receives a renting request from the first user. A lending unit executes lending processing of lending a first vehicle among the plurality of vehicles to the first user in accordance with the reception of the renting request. The lending processing includes processing of selecting, from the plurality of vehicles, the first vehicle that is not selected before the reception of the renting request on a basis of the lending status, and processing of updating the lending status so as to reflect the lending of the first vehicle.

Abstract: The present disclosure relates to a titanium or titanium alloy member and to a surface hardening method for the titanium or titanium alloy member. The titanium or titanium alloy member includes a base material of titanium or titanium alloy, and at a surface of the base material, a hardened layer formed by diffusion of oxygen into the surface.

Abstract: A composition comprising (A) a polymer comprising recurring units (a1) having a carboxyl group protected with an acid labile group and recurring units (a2) having a cyclic ester, cyclic carbonate or cyclic sulfonate structure, (B) a thermal acid generator, and (C) an organic solvent is suited to form a protective film between a substrate and a resist film. Even when a metal-containing resist film is used, the protective film is effective for preventing the substrate from metal contamination.

Abstract: In a substrate polishing apparatus where a polishing liquid passes through inside a rotary joint, the rotary joint requires maintenance. There is provided a substrate polishing apparatus that includes: a polishing head for holding a substrate; a rotary table that has a surface to which a first opening portion is provided; a polishing liquid discharge mechanism disposed to the rotary table; and a controller configured to control at least the polishing liquid discharge mechanism. The polishing liquid discharge mechanism includes a first cylinder, a first piston, and a driving mechanism that drives the first piston. The first opening portion is communicated with a liquid holding space defined by the first cylinder and the first piston. The controller controls the driving of the first piston by the driving mechanism to increase and decrease a volume of the liquid holding space.

Abstract: An elastic member that includes a plurality of pressure chambers is manufactured without using a mold having a complicated shape. According to one embodiment, a laminated membrane used in a substrate holder of a substrate processing apparatus is provided. Such a laminated membrane includes a first sheet material and a second sheet material disposed on the first sheet material. A part of the first sheet material is secured to a part of the second sheet material.

Abstract: An imprint apparatus includes an ejection device which ejects ejection material and a substrate stage which moves a substrate in a first direction and a second direction intersecting with the first direction. The imprint apparatus causes the ejection device to eject ejection material to the substrate while moving the substrate stage. At the time of ejecting ejection material to a second field adjacent to a first field in succession to an ejection to the first field in the first direction, the ejection device accepts an ejection start signal for the second field and determines an ejection start timing in the second field before ejection operation in the first field is completed.

Abstract: A relevance searching method performed by a computer, the relevance searching method includes generating a combined database by combining a plurality of databases each including a plurality of elements and relevance information indicating direct relevance between two elements in the plurality of elements; and searching for relevance between two elements that do not have direct relevance by using the combined database.

Abstract: Provided is a positive electrode active material for a non-aqueous electrolyte secondary battery. Also provided is a method for producing a positive electrode active material for a non-aqueous electrolyte secondary battery, comprising: providing a lithium transition metal composite oxide having a ratio D50/DSEM of 1 or more and 4 or less, having a layered structure, and having a ratio of a number of moles of nickel to a total number of moles of metals other than lithium of 0.3 or more and less than 1, and a ratio of a number of moles of cobalt to the total number of moles of metals other than lithium of 0 or more and less than 0.5; bringing the lithium transition metal composite oxide into contact with a cobalt compound to obtain an adhered material; and heat-treating the adhered material at a temperature higher than 700° C. and lower than 1100° C.

Abstract: A method and system for imprinting a substrate supported on a moveable stage is provided and includes contacting a liquid resist on the substrate with a template and aligning the substrate with the template using a feedback-feedforward control process with a first set of control parameters. Calibration data is obtained and the viscosity of at least a portion of the resist is increased. The substrate is then with the template using the feedback-feedforward control process with a second set of control parameters after the viscosity of the resist has increased, the second set of control parameters are determined based on the calibration data and the resist is cured under the template.