Patents by Inventor Kenji Aikawa

Kenji Aikawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10962513
    Abstract: A method for detecting the concentration of a specified gas contained in a mixed gas includes, in a pressure-type flow rate control device including a restriction portion, an upstream valve provided upstream of the restriction portion, and a pressure sensor for measuring the pressure between the restriction portion and the upstream valve, a step of flowing the mixed gas from the upstream side of the upstream valve in a state in which the pressure on the downstream side of the restriction portion is lower than the pressure on the upstream side of the restriction portion, a step of determining with a pressure sensor pressure drop characteristics occurring after the upstream valve is changed from an open to a closed state, and a step of determining the concentration of the specified gas in the mixed gas based on the pressure drop characteristics.
    Type: Grant
    Filed: September 27, 2017
    Date of Patent: March 30, 2021
    Assignee: FUJIKIN INCORPORATED
    Inventors: Masaaki Nagase, Kenji Aikawa, Kaoru Hirata, Takahiro Imai, Tetsuo Naritomi, Tsutomu Shinohara, Takahiro Matsuda, Kouji Nishino
  • Publication number: 20200393060
    Abstract: To enable accurate and simple diagnosis of an operation abnormality of a valve. A valve V1 capable of detecting an operation abnormality has a magnet M1 that is attached in the vicinity of a pressing adapter 52 of a stem 53 that slides according to an opening/closing operation of the valve V1, and a magnetic sensor M2 that is attached to a surface acing the stem 53, inside the pressing adapter 52 that presses a peripheral edge of a diaphragm 51, and detects a change in a distance between the magnet M1 and the magnetic sensor M2. Further, an abnormality determination mechanism compares the change in the distance between the magnet M1 and the magnetic sensor M2 at the time of abnormality diagnosis detected by the magnetic sensor M2 and a previously measured change in the distance between the magnet M and the magnetic sensor M2 at the time of normality, and determines whether or not there is an abnormality.
    Type: Application
    Filed: October 5, 2018
    Publication date: December 17, 2020
    Applicant: Fujikin Incorporated
    Inventors: Ryutaro Tanno, Kenji Aikawa, Akihiro Harada, Yuya Suzuki, Takahiro Matsuda, Katsunori Komehana, Masahiko Ochiishi, Tsutomu Shinohara
  • Publication number: 20200363826
    Abstract: To diagnose an abnormality of a fluid control device from an operation of an entire fluid supply line including a plurality of fluid control devices. Provided is an abnormality diagnosis method of a fluid supply line including a plurality of fluid control devices F, V1, and V2 communicating with each other fluid-tightly.
    Type: Application
    Filed: October 5, 2018
    Publication date: November 19, 2020
    Applicant: Fujikin Incorporated
    Inventors: Ryutaro Tanno, Kenji Aikawa, Akihiro Harada, Yuya Suzuki, Takahiro Matsuda, Katsunori Komehana, Masahiko Ochiishi, Tsutomu Shinohara
  • Publication number: 20200354835
    Abstract: A valve device with a built-in orifice is manufacturable with low-cost. The valve body defines an accommodation recess which opens at the surface of the valve body and contains a valve element therein, a primary flow path and a secondary flow path connected to the accommodation recess, the valve element having a sealing portion for blocking direct communication between the primary flow path and the secondary flow path through the accommodation recess, and a through flow passage for making the primary flow path and the secondary flow path communicate through the valve element, wherein an orifice is formed in the through flow passage.
    Type: Application
    Filed: November 12, 2018
    Publication date: November 12, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Kazunari WATANABE, Kohei SHIGYOU, Kenji AIKAWA, Tomohiro NAKATA, Takahiro MATSUDA, Tsutomu SHINOHARA
  • Patent number: 10830367
    Abstract: A fluid flow path of a joining block includes a vertical flow path and a horizontal flow path. The joining block is constrained on a rail member so as to be capable of moving in a longitudinal direction. A fluid control device is supported by the rail member via the joining block and includes a screw hole, and a tightening bolt that has passed through a body of the fluid control device is screwed into the screw hole. A gasket between the joining block and the body is compressed between the body and the joining block by a tightening force of the tightening bolt. The screw hole includes the tip portion closed above the horizontal flow path and at least partially overlaps the horizontal flow path in a planar view.
    Type: Grant
    Filed: June 19, 2017
    Date of Patent: November 10, 2020
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kenji Aikawa, Tsutomu Shinohara, Hajime Nakagawa, Takahiro Matsuda, Akihiro Harada
  • Publication number: 20200340591
    Abstract: A flow path assembly incorporating functional components, such as orifices and filters, is provided in which gaps between the functional components and the flow path components defining the flow path are sealed for an extended period of time. An annular elastic member interposed between the flow path members is provided outside the opposing surfaces of the flow path members, the flow path member has a caulking portion, the caulking portion integrates the flow path members and the plate-like member, exerts a force on the flow path member such that one of the opposing surfaces faces the other of the opposing surfaces, seals the gaps between the orifice plate and the opposing surfaces, and the elastic member is crushed between the flow path members to seal the gap between the flow path members.
    Type: Application
    Filed: October 24, 2018
    Publication date: October 29, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Kazunari WATANABE, Kohei SHIGYOU, Kenji AIKAWA, Tomohiro NAKATA, Takahiro MATSUDA, Tsutomu SHINOHARA
  • Publication number: 20200325887
    Abstract: A valve device includes valve elements each having a valve seat, a valve seat support, and a diaphragm provided so as to be able to abut on and separate from the seat surface of the valve seat, the diaphragm making the flow passage of the valve seat and the corresponding secondary flow path communicate through the gap between the diaphragm and the valve seat, and the valve seat support has seal surfaces that cooperate with a part of the inner wall surface of the corresponding accommodation recess to shut off the communication between the corresponding primary flow path and the secondary flow path, and a detour passage that connects the primary flow path and the flow passage of the valve seat, and the valve body defines a communication passage that makes the secondary flow paths communicates with each other.
    Type: Application
    Filed: October 22, 2018
    Publication date: October 15, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Kazunari WATANABE, Kohei SHIGYOU, Kenji AIKAWA, Tomohiro NAKATA, Takahiro MATSUDA, Tsutomu SHINOHARA
  • Publication number: 20200285256
    Abstract: An entire fluid supply line constituted by a plurality of fluid control devices is precisely monitored. In addition, the control accuracy of the fluid supply line is improved by suppressing variations in operations of the fluid control devices. A fluid supply line L1 formed from a plurality of fluid control devices F1 and V11 to V14 communicating with each other in a fluid-tight manner includes: a first connection means that connects between a mechanism outside the fluid supply line L1 and a fluid control device on the fluid supply line L1 and F1; and a second connection means that branches from the first connection means on the fluid supply line L1 and is connected to other fluid control devices F1 and V11 to V14.
    Type: Application
    Filed: August 28, 2018
    Publication date: September 10, 2020
    Applicant: Fujikin Incorporated
    Inventors: Ryutaro Tanno, Kenji Aikawa, Akihiro Harada, Yuya Suzuki, Takahiro Matsuda, Katsunori Komehana, Masahiko Ochiishi, Tsutomu Shinohara
  • Publication number: 20200278049
    Abstract: A valve device can be compact, low cost and has a bleed function. A valve body defines an accommodation recess which opens at a surface of the valve body and contains a valve element therein, a primary flow path and a secondary flow path connected to the accommodation recess, the valve element having a sealing portion for blocking direct communication between the primary flow path and the secondary flow path through the accommodation recess, a detour passage for making the primary flow path and the secondary flow path communicate through the valve element, and a bleed hole for making the detour passage and the secondary flow path communicate through the accommodation recess.
    Type: Application
    Filed: November 13, 2018
    Publication date: September 3, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Kazunari WATANABE, Kohei SHIGYOU, Kenji AIKAWA, Tomohiro NAKATA, Takahiro MATSUDA, Tsutomu SHINOHARA
  • Publication number: 20200278033
    Abstract: A valve device is capable of precisely adjusting a flow rate variation due to aging, aging, etc. without using an external sensor. An adjusting actuator includes a piezoelectric element for adjusting the position of the operating member positioned at the open position, and the drive circuit of the adjusting actuator includes a detecting unit for detecting an electric signal related to the amount of strain generated in the piezoelectric element, and a control unit for controlling the adjusting actuator so that the opening degree of the flow path by the valve element becomes the target opening degree based on the electric signal related to the amount of strain of the piezoelectric element.
    Type: Application
    Filed: September 11, 2018
    Publication date: September 3, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Kenta KONDO, Toshihide YOSHIDA, Kenji AIKAWA, Hidenobu SATO, Tomohiro NAKATA, Tsutomu SHINOHARA, Masahiko TAKIMOTO
  • Publication number: 20200248310
    Abstract: A joint block includes a block body, a closing member mounted in a recessed part formed on the other end side of the block body, a seal mechanism that includes a circular projection formed on an opposing surface of the block body, and seals an area between the block body and the closing member by the circular projection biting into the other opposing surface around an opening of a first flow path, a swaging part that is formed on the block body and presses the closing member toward the opposing surface, and an engaging part formed by an inner peripheral part of the recessed part and an outer peripheral part of the closing member that engages with the inner peripheral part. A pressing force that presses the circular projection of the seal mechanism against the other opposing surface is shared by the swaging part and the engaging part.
    Type: Application
    Filed: August 17, 2018
    Publication date: August 6, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Kenji AIKAWA, Kazunari WATANABE, Toshiyuki INADA, Tsutomu SHINOHARA
  • Publication number: 20200225686
    Abstract: The present invention is intended to improve the accuracy of control of a material gas by providing a valve with simplified wiring and a fluid supply line equipped with the valve. A valve V includes a valve body 3 and a driving pressure control device 4 coupled to the valve body 3.
    Type: Application
    Filed: August 28, 2018
    Publication date: July 16, 2020
    Applicant: Fujikin Incorporated
    Inventors: Ryutaro Tanno, Kenji Aikawa, Akihiro Harada, Yuya Suzuki, Takahiro Matsuda, Katsunori Komehana, Masahiko Ochiishi, Tsutomu Shinohara
  • Publication number: 20200149639
    Abstract: To provide a gas-driven type valve device that is capable of mounting various electronic devices, and includes a power generation function that solves problems involving wiring or battery replacement. The problem is solved by a valve device including an actuator including a housing part, and a movable part housed in the housing part and driven by a driving fluid to move a valve element in a closing direction or an opening direction, a spring member that presses the movable part in a direction against a driving force of the driving fluid, and a power-generating and vibration-damping unit including that uses a piezoelectric effect of a piezoelectric element to exercise a power generation function of converting a vibration generated in a vibration system by an activation of the actuator into electric power, and a vibration-damping function of suppressing a vibration applied to a device.
    Type: Application
    Filed: June 12, 2018
    Publication date: May 14, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Kenji AIKAWA, Tsutomu SHINOHARA, Takahiro MATSUDA
  • Publication number: 20200018736
    Abstract: A method for detecting the concentration of a specified gas contained in a mixed gas includes, in a pressure-type flow rate control device including a restriction portion, an upstream valve provided upstream of the restriction portion, and a pressure sensor for measuring the pressure between the restriction portion and the upstream valve, a step of flowing the mixed gas from the upstream side of the upstream valve in a state in which the pressure on the downstream side of the restriction portion is lower than the pressure on the upstream side of the restriction portion, a step of determining with a pressure sensor pressure drop characteristics occurring after the upstream valve is changed from an open to a closed state, and a step of determining the concentration of the specified gas in the mixed gas based on the pressure drop characteristics.
    Type: Application
    Filed: September 27, 2017
    Publication date: January 16, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Masaaki NAGASE, Kenji AIKAWA, Kaoru HIRATA, Takahiro IMAI, Tetsuo NARITOMI, Tsutomu SHINOHARA, Takahiro MATSUDA, Kouji NISHINO
  • Publication number: 20190195378
    Abstract: A fluid flow path of a joining block includes a vertical flow path and a horizontal flow path. The joining block is constrained on a rail member so as to be capable of moving in a longitudinal direction. A fluid control device is supported by the rail member via the joining block and includes a screw hole, and a tightening bolt that has passed through a body of the fluid control device is screwed into the screw hole. A gasket between the joining block and the body is compressed between the body and the joining block by a tightening force of the tightening bolt. The screw hole includes the tip portion closed above the horizontal flow path and at least partially overlaps the horizontal flow path in a planar view.
    Type: Application
    Filed: June 19, 2017
    Publication date: June 27, 2019
    Applicant: FUJIKIN INCORPORATED
    Inventors: Kenji AIKAWA, Tsutomu SHINOHARA, Hajime NAKAGAWA, Takahiro MATSUDA, Akihiro HARADA
  • Publication number: 20190162323
    Abstract: A screw hole of an upstream side joining block is formed only on an upstream side of a flow path port thereof in a longitudinal direction, a screw hole of a downstream side joining block is formed only on a downstream side of a flow path port thereof in the longitudinal direction and, between a guide part and an engaging part, an alignment mechanism aligns the positions of the upstream side and the downstream side joining blocks in a horizontal direction orthogonal to the longitudinal direction of the guide part to a center position of the guide part by using a portion of a reaction force that resists a bending force produced by the tightening force of a tightening bolt on a body and the upstream side and the downstream side joining blocks connected to each other.
    Type: Application
    Filed: June 19, 2017
    Publication date: May 30, 2019
    Applicant: FUJIKIN INCORPORATED
    Inventors: Kenji AIKAWA, Tsutomu SHINOHARA, Hajime NAKAGAWA, Takahiro MATSUDA, Akihiro HARADA
  • Patent number: 10125803
    Abstract: A fluid control apparatus having a fixing device is provided. A through hole of a lower level member includes a large diameter portion opening to an upper surface and a small diameter portion continuing from a lower side of the large diameter portion and opening to a lower surface. A fixing member includes a head portion that is to be inserted into the large diameter portion of the through hole of the lower level member, an upper shaft portion to be inserted into the small diameter portion of the through hole of the lower level member, and a lower shaft portion inserted at an upper end portion into a through hole of a supporting member. The lower shaft portion is provided with an engaging projection that engages a lower opening edge of the through hole of the supporting member and prevents the fixing member from dropping off the supporting member.
    Type: Grant
    Filed: January 8, 2015
    Date of Patent: November 13, 2018
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kenji Aikawa, Takahiro Matsuda
  • Patent number: 9810252
    Abstract: To provide a lower member fixing device that eliminates the need for a fixation tool and reduces the time and effort for fixation, and a fluid control device provided with the lower member fixing device. A through hole of a lower member is formed by a large-diameter section opened in an upper surface and a small-diameter section continued from the lower part of the large-diameter section and opened in a lower surface. A fixation member includes a shaft section inserted into the small-diameter section of the through hole, a head inserted into the large-diameter section of the through hole, and a magnet section provided at a lower end of the shaft section. The support member is made of a magnetic substance and a recess into which the magnet section of the fixation member is fitted is formed in the upper surface of the support member.
    Type: Grant
    Filed: November 12, 2014
    Date of Patent: November 7, 2017
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kenji Aikawa, Takahiro Matsuda
  • Publication number: 20160333917
    Abstract: A fluid control apparatus having a fixing device is provided. A through hole of a lower level member includes a large diameter portion opening to an upper surface and a small diameter portion continuing from a lower side of the large diameter portion and opening to a lower surface. A fixing member includes a head portion that is to be inserted into the large diameter portion of the through hole of the lower level member, an upper shaft portion to be inserted into the small diameter portion of the through hole of the lower level member, and a lower shaft portion inserted at an upper end portion into a through hole of a supporting member. The lower shaft portion is provided with an engaging projection that engages a lower opening edge of the through hole of the supporting member and prevents the fixing member from dropping off the supporting member.
    Type: Application
    Filed: January 8, 2015
    Publication date: November 17, 2016
    Inventors: Kenji Aikawa, Takahiro Matsuda
  • Publication number: 20160138630
    Abstract: To provide a lower member fixing device that eliminates the need for a fixation tool and reduces the time and effort for fixation, and a fluid control device provided with the lower member fixing device. A through hole of a lower member is formed by a large-diameter section opened in an upper surface and a small-diameter section continued from the lower part of the large-diameter section and opened in a lower surface. A fixation member includes a shaft section inserted into the small-diameter section of the through hole, a head inserted into the large-diameter section of the through hole, and a magnet section provided at a lower end of the shaft section. The support member is made of a magnetic substance and a recess into which the magnet section of the fixation member is fitted is formed in the upper surface of the support member.
    Type: Application
    Filed: November 12, 2014
    Publication date: May 19, 2016
    Inventors: Kenji Aikawa, Takahiro Matsuda