Patents by Inventor Kenji Nagai

Kenji Nagai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210287876
    Abstract: A light interference system is provided. The light interference system includes a light source configured to generate a measurement light; a fiber configured to propagate therethrough the measurement light; and a measurement device. The fiber includes a single-mode fiber, a multimode fiber and a connector connecting the single-mode fiber and the multimode fiber. A tip end of the fiber is formed of the multimode fiber, and an end surface of the tip end of the fiber is configured to emit the measurement light to a measurement target object and receive a reflection light from the measurement target object. The measurement device is configured to measure physical property of the measurement target object based on the reflection light.
    Type: Application
    Filed: March 12, 2021
    Publication date: September 16, 2021
    Inventors: Kenji Nagai, Hideaki Nagasaki, Satoshi Suzuki
  • Publication number: 20210271294
    Abstract: A connection rod and a swing arm are separately rotatably connected to a primary shaft component, and an axis around which the swing arm rotates and an axis around which the connection rod rotates are different, so that the swing arm and the connection rod rotate and slide relative to each other. The swing arm or the connection rod drives a support plate to rotate, so that the primary shaft component and the support plates can encircle to form, when the mobile terminal is completely folded, space that accommodates a folded part of a flexible display.
    Type: Application
    Filed: May 17, 2021
    Publication date: September 2, 2021
    Inventors: Li Liao, Kenji Nagai, Changliang Liao, Ding Zhong, Tao Huang
  • Publication number: 20210183628
    Abstract: A transfer system configured to transfer a focus ring includes a processing system and a position detection system. The processing system includes a processing apparatus including a chamber main body and a placing table having a substrate placing region and a focus ring placing region; and a transfer device configured to transfer the focus ring. The position detection system includes a light source; multiple optical elements configured to output light and receive reflected light; a driving unit configured to move each optical element to allow each optical element to scan a scanning range; and a controller configured to calculate, based on the reflected light in the scanning range, a positional relationship between the placing table and the focus ring for each optical element. The transfer device is configured to adjust a transfer position of the focus ring onto the focus ring placing region based on the calculated positional relationship.
    Type: Application
    Filed: December 4, 2020
    Publication date: June 17, 2021
    Inventors: Kippei Sugita, Kenji Nagai
  • Publication number: 20210181808
    Abstract: A hinge and a mobile terminal to resolve poor use effect of a foldable electronic device. The hinge includes a main body, and a first folding assembly and a second folding assembly that are symmetrically disposed along the main body. When the first folding assembly and the second folding assembly are rotated toward each other, a length of the hinge can be extended, and an accommodation space for accommodating the flexible display can be formed. When the first folding assembly and the second folding assembly are rotated away from each other, the length of the hinge can be reduced, and a support surface for supporting the flexible display can be formed, so that the flexible display cannot be stretched, compressed, or the like during folding and unfolding, thereby improving the use effect and safety of the mobile terminal.
    Type: Application
    Filed: December 11, 2020
    Publication date: June 17, 2021
    Inventors: Changliang LIAO, Weifeng WU, Li LIAO, Kenji NAGAI, Ding ZHONG, Qiao DENG
  • Publication number: 20210102847
    Abstract: A temperature measurement system configured to measure a temperature of a target object having a first main surface and a second main surface includes a light source unit configured to emit output light penetrating the target object and including a first wavelength range and a second wavelength range; a measurement unit configured to measure a spectrum of reflected light; an optical path length ratio calculator configured to calculate an optical path length ratio between the output light of the first wavelength range and the output light of the second wavelength range; and a temperature calculator configured to calculate the temperature of the target object based on the optical path length ratio and a previously investigated relationship between the temperature of the target object and a refractive index ratio between the output light of the first wavelength range and the output light of the second wavelength range.
    Type: Application
    Filed: October 6, 2020
    Publication date: April 8, 2021
    Inventors: Tong Wu, Kenji Nagai
  • Patent number: 10964575
    Abstract: A transfer robot system includes a transfer robot configured to transfer a wafer under an operational instruction; a controller configured to output the operational instruction to the transfer robot; a wafer receptacle; and an interferometer. The wafer receptacle comprises a receptacle body having an open front through which an end effector and the wafer pass; a first reflector disposed under a support space; and a first optical element disposed above the support space to face the first reflector, configured to output the light toward the first reflector and receive received light therefrom. The interferometer calculates an optical interference peak, which is generated between the wafer and the first reflector, based on the received light. The controller determines a taught position of the transfer robot based on a variation of the optical interference peak during an operation of the transfer robot.
    Type: Grant
    Filed: September 10, 2019
    Date of Patent: March 30, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Kippei Sugita, Kenji Nagai
  • Publication number: 20210074564
    Abstract: A system configured to inspect a processing apparatus includes a temperature adjusting device configured to adjust a temperature of a component within a processing chamber of the processing apparatus; a light source configured to emit measurement light; multiple optical elements configured to output the measurement light emitted from the light source to the component within the processing chamber of the processing apparatus as output light and configured to receive reflected light from the component during a temperature adjustment of the component by the temperature adjusting device; and a controller configured to measure temperatures of the component at measurement points respectively corresponding to the multiple optical elements based on the reflected light, and make a determination upon abnormality of the processing apparatus based on comparisons of the temperatures of the component at the respective measurement points.
    Type: Application
    Filed: September 3, 2020
    Publication date: March 11, 2021
    Inventors: Kippei Sugita, Kenji Nagai
  • Publication number: 20200323091
    Abstract: The present invention discloses a rotating mechanism and a foldable terminal. The rotating mechanism includes a guide shaft, at least two rotating parts, and at least two constant-length units. The rotating parts are disposed on two sides of the guide shaft. An arc-shaped slot is disposed on the guide shaft. An arc-shaped part is disposed on the rotating part, and the arc-shaped part is disposed in the arc-shaped slot in a sliding manner. The constant-length unit is a long strip that has a fixed length and can be bent. A positioning end of the constant-length unit is fixedly connected to or rotationally connected to a rotating part on one side of the guide shaft, and a sliding end is connected to a rotating part on the other side of the guide shaft in a sliding manner. The foldable terminal has the foregoing rotating mechanism.
    Type: Application
    Filed: June 17, 2020
    Publication date: October 8, 2020
    Inventors: Kenji Nagai, Lexiong Peng
  • Publication number: 20200303235
    Abstract: A substrate processing apparatus includes a stage, a light source, an optical assembly, a light receiver, and controller circuitry. The stage includes a first placing surface on which a substrate is to be placed, and a second placing surface that surrounds the first placing surface and on which a focus ring is to be placed. The optical assembly focuses light from the light source on a lower surface position, which is a position of a lower surface of the focus ring placed on the second placing surface. The light receiver receives light from the lower surface position. The controller circuitry detects at least one of a presence and an absence of the focus ring on the second placing surface, based on light received by the light receiver.
    Type: Application
    Filed: March 10, 2020
    Publication date: September 24, 2020
    Applicant: Tokyo Electron Limited
    Inventors: Takaharu MIYADATE, Takashi Taira, Kenji Nagai, Hideaki Nagasaki
  • Publication number: 20200161154
    Abstract: A transfer robot system includes a transfer robot configured to transfer a wafer under an operational instruction; a controller configured to output the operational instruction to the transfer robot; a wafer receptacle; and an interferometer. The wafer receptacle comprises a receptacle body having an open front through which an end effector and the wafer pass; a first reflector disposed under a support space; and a first optical element disposed above the support space to face the first reflector, configured to output the light toward the first reflector and receive received light therefrom. The interferometer calculates an optical interference peak, which is generated between the wafer and the first reflector, based on the received light. The controller determines a taught position of the transfer robot based on a variation of the optical interference peak during an operation of the transfer robot.
    Type: Application
    Filed: September 10, 2019
    Publication date: May 21, 2020
    Inventors: Kippei Sugita, Kenji Nagai
  • Patent number: 10610856
    Abstract: A catalyst for catalytic cracking of a hydrocarbon oil can produce a gasoline fraction having a high octane number in high yield while suppressing an increase in yield of a heavy distillate, and produce LPG having a high propylene content in high yield. The catalyst includes a specific amount of a granulated catalyst A that includes a zeolite having a sodalite cage structure, silicon derived from a silica sol, phosphorus and aluminum derived from mono aluminum phosphate, a clay mineral, and a rare-earth metal, and a specific amount of a granulated catalyst B that includes a pentasil-type zeolite, the ratio of the mass of phosphorus and aluminum derived from mono aluminum phosphate included in the granulated catalyst A to the mass of the pentasil-type zeolite included in the granulated catalyst B being 0.015 to 3000.
    Type: Grant
    Filed: October 8, 2013
    Date of Patent: April 7, 2020
    Assignee: COSMO OIL CO., LTD.
    Inventors: Yuji Saka, Tetsuya Kimura, Norihito Chiyoda, Kenji Nagai, Mitsunori Tabata
  • Publication number: 20200025884
    Abstract: A ranging apparatus for use in a plasma processing chamber having an internal space and a window is disclosed. The ranging apparatus includes at least one external light emitting device disposed external to the plasma processing chamber. The external light emitting device emits at least one source light beam to the internal space through the window. The ranging apparatus includes a base wafer disposed on a stage in the internal space. The ranging apparatus includes at least one optical circuit fixed to the base wafer. The optical circuit deflects the source light beam to a target in the internal space, and deflects a reflection light beam to the window. The ranging apparatus includes at least one external light receiving device disposed external to the plasma processing chamber. The external light receiving device receives the deflected reflection light beam through the window.
    Type: Application
    Filed: July 19, 2019
    Publication date: January 23, 2020
    Inventors: Kippei Sugita, Kenji Nagai
  • Publication number: 20190293964
    Abstract: The invention enables quality of a pinhole image to be improved, any of myopia or hyperopia, astigmatism and presbyopia to be corrected and high functionality to attain.
    Type: Application
    Filed: November 14, 2017
    Publication date: September 26, 2019
    Applicant: Universal View Co., Ltd.
    Inventors: Yu TAKAKI, Taro SUZUKI, Yoshio SUZUKI, Kenji NAGAI, Masaru HASHIMOTO
  • Patent number: 10354896
    Abstract: There is provided a position detection system for use in a processing apparatus including a mounting table configured to mount thereon a disc-shaped target object and a focus ring surrounding a periphery of the mounting table. The system includes a light source configured to generate measurement light, three or more optical elements configured to emit the measurement light as emission light and receive reflected light, a driving unit configured to move each of the optical elements such that a scanning range from the focus ring to the target object is scanned, and a control unit configured to obtain positional relation between the focus ring and the target object based on the reflected light in the scanning range of each of the optical elements.
    Type: Grant
    Filed: September 28, 2017
    Date of Patent: July 16, 2019
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Kippei Sugita, Kenji Nagai
  • Patent number: 10199251
    Abstract: A position detecting system has a transport device, a light source, at least one optical element, a reflective member, a drive unit, and a controller. The transport device transports and places an object on a placement table. The light source generates measurement light. The optical element projects the measurement light, as projection light, generated by the light source and receives reflected light. The reflective member is disposed on the transport device. The reflective member reflects the projection light toward the placement table, and reflects the reflected light of the projection light, which is projected toward the placement table, toward the optical element. The drive unit operates the transport device so that the reflective member scans a plurality of linear scanning ranges. The controller calculates positional relationship between the focus ring and the object placed on the placement table based on the reflected light within the plurality of linear scanning ranges.
    Type: Grant
    Filed: April 10, 2018
    Date of Patent: February 5, 2019
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Kippei Sugita, Kenji Nagai, Hidetoshi Kimura
  • Publication number: 20180315640
    Abstract: A plasma processing apparatus includes a first mounting table on which a target object to be processed is mounted, a second mounting table provided around the first mounting table, and an elevation mechanism. A focus ring is mounted on the second mounting table. The second mounting table has therein a temperature control mechanism. The elevation mechanism is configured to vertically move the second mounting table.
    Type: Application
    Filed: April 24, 2018
    Publication date: November 1, 2018
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Takehiro UEDA, Kenji NAGAI
  • Publication number: 20180301322
    Abstract: A position detecting system has a transport device, a light source, at least one optical element, a reflective member, a drive unit, and a controller. The transport device transports and places an object on a placement table. The light source generates measurement light. The optical element projects the measurement light, as projection light, generated by the light source and receives reflected light. The reflective member is disposed on the transport device. The reflective member reflects the projection light toward the placement table, and reflects the reflected light of the projection light, which is projected toward the placement table, toward the optical element. The drive unit operates the transport device so that the reflective member scans a plurality of linear scanning ranges. The controller calculates positional relationship between the focus ring and the object placed on the placement table based on the reflected light within the plurality of linear scanning ranges.
    Type: Application
    Filed: April 10, 2018
    Publication date: October 18, 2018
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Kippei SUGITA, Kenji NAGAI, Hidetoshi KIMURA
  • Patent number: 9976129
    Abstract: A fusion protein for protein detection in which are fused: a protein domain including at least one among a C1 domain of protein G, a C2 domain of protein G, and a C3 domain of protein G; and a double mutant D153G/D330N of Escherichia coli alkaline phosphatase (BAP) in which the 153 amino acid residue Asp has been substituted by Gly and the 330 amino acid residue Asp has been substituted by Asn, a double mutant D153H/D330N of Escherichia coli alkaline phosphatase (BAP) in which the 153 amino acid residue Asp has been substituted by His and the 330 amino acid residue Asp has been substituted by Asn, or a double mutant K328R/D330N of Escherichia coli alkaline phosphatase (BAP) in which the 328 amino acid residue Lys has been substituted by Arg and the 330 amino acid residue Asp has been substituted by Asn.
    Type: Grant
    Filed: October 6, 2014
    Date of Patent: May 22, 2018
    Assignees: KYUSHU UNIVERSITY, NATIONAL UNIVERSITY CORPORATION, Hitachi, Ltd.
    Inventors: Noriho Kamiya, Kyoichi Matsuba, Kenji Nagai, Kounosuke Hayashi
  • Publication number: 20180090354
    Abstract: There is provided a position detection system for use in a processing apparatus including a mounting table configured to mount thereon a disc-shaped target object and a focus ring surrounding a periphery of the mounting table. The system includes a light source configured to generate measurement light, three or more optical elements configured to emit the measurement light as emission light and receive reflected light, a driving unit configured to move each of the optical elements such that a scanning range from the focus ring to the target object is scanned, and a control unit configured to obtain positional relation between the focus ring and the target object based on the reflected light in the scanning range of each of the optical elements.
    Type: Application
    Filed: September 28, 2017
    Publication date: March 29, 2018
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Kippei SUGITA, Kenji NAGAI
  • Patent number: 9812996
    Abstract: There are provided a method for obtaining a distance between a base portion of an electrostatic chuck and a back surface of a target object and a method for neutralizing the electrostatic chuck based on the obtained distance. The electrostatic chuck has an upper surface including the base portion and a plurality of convex portions projecting from the base portion. The target object is mounted on apexes of the convex portions of the electrostatic chuck such that the back surface is in contact with the apexes. By processing a first wavelength spectrum output from a spectroscope based on reflected light of light emitted from a light source, a distance between the back surface of the target object and the base portion of the electrostatic chuck is calculated. Based on the calculated distance, a voltage is applied to the electrostatic chuck to neutralize the electrostatic chuck.
    Type: Grant
    Filed: November 17, 2014
    Date of Patent: November 7, 2017
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Kenji Nagai, Yoshinobu Ooya