Abstract: Hybrid methods for classifying defects in semiconductor manufacturing are provided. The methods include applying a flexible sequence of rules for defects to inspection data. The sequence of rules includes deterministic rules, statistical rules, hybrid rules, or some combination thereof. The rules included in the sequence may be selected by a user using a graphical interface. The method also includes classifying the defects based on results of applying the sequence of rules to the inspection data.

Abstract: Hybrid methods for classifying defects in semiconductor manufacturing are provided. The methods include applying a flexible sequence of rules for defects to inspection data. The sequence of rules includes deterministic rules, statistical rules, hybrid rules, or some combination thereof. The rules included in the sequence may be selected by a user using a graphical interface The method also includes classifying the defects based on results of applying the sequence of rules to the inspection data.

Abstract: Disclosed are methods and apparatus for efficiently setting up and maintaining a defect classification system. In general terms, the setup procedure optionally includes automatically grouping a set of provided defects (e.g., defect images) and presenting a representative set from each defect group to the user for classification. Alternatively, a representative set from the whole defect set may be presented to the user for classification without first grouping the defects into groups. The representative set does not include all of the defects and is selected to optimize manual classification efficiency. After the initial manual classification of the representative defects, the setup procedure includes an automatic procedure for classifying the non-reviewed or unclassified defects based on the manual class codes from the user-reviewed defects. After the automatic classification operation, the user may also be presented with defects from each class which may require re-classification.

Abstract: A system and method for intra-operatively providing a surgeon with visual evaluations of possible surgical outcomes ahead of time, and generating simulated data, includes a medical imaging camera, a registration device for registering data to a physical space, and to the medical imaging camera, and a fusion mechanism for fusing the data and the images to generate simulated data, without correcting for distortion. The simulated data (e.g., such as augmented X-ray images) is natural and easy for a surgeon to interpret. In an exemplary implementation, the system preferably includes a data processor which receives a three-dimensional surgical plan or three-dimensional plan of therapy delivery, one or a plurality of two-dimensional intra-operative images, a three-dimensional model of pre-operative data, registration data, and image calibration data.

Abstract: A system and method for intra-operatively providing a surgeon with visual evaluations of possible surgical outcomes ahead of time, and generating simulated data, includes a medical imaging camera, a registration device for registering data to a physical space, and to the medical imaging camera, and a fusion mechanism for fusing the data and the images to generate simulated data, without correcting for distortion. The simulated data (e.g., such as augmented X-ray images) is natural and easy for a surgeon to interpret. In an exemplary implementation, the system preferably includes a data processor which receives a three-dimensional surgical plan or three-dimensional plan of therapy delivery, one or a plurality of two-dimensional intra-operative images, a three-dimensional model of pre-operative data, registration data, and image calibration data.