Abstract: A molded article includes 10 to 40% by mass of reinforcing fibers (A); and 60 to 90% by mass of a matrix resin (B) mainly including a polyarylene sulfide, the molded article satisfying conditions (I) to (IV) and having a tensile strength of 240 MPa or more in a main orientation direction of the reinforcing fibers (A) in the molded article, wherein (I) strand tensile strength of the reinforcing fibers (A) is 1.5 to 5.5 GPa, (II) number average fiber length of the reinforcing fibers (A) is 0.4 to 10 mm, (III) tensile elongation of the matrix resin (B) is 1.5 to 10%, and (IV) interfacial shear strength between the reinforcing fibers (A) and the matrix resin (B) is 20 MPa or more.

Abstract: A resin composition including 10 to 90% by mass of (A) a component to be polymerized containing a compound represented by Formula (1), and 90 to 10% by mass of (B) a thermosetting resin, the (A) and (B) each being capable of undergoing a reaction to increase molecular weight by itself when heated: wherein, Ar represents an aryl; and X represents at least one selected from the group consisting of ethers, ketones, sulfides, sulfones, amides, carbonates and esters.

Abstract: A measuring device of air flow rate for an air conditioning system which accurately measures the flow rate of cooling air blowing out of the openings of some rectangular units and in which the locations of the openings can be changed according to the location of equipment. The measuring system includes a plurality of panels constituting a floor surface, ceiling surface, or wall surface, a rectangular vent unit with openings located in place of a given one of the panels, a space with a given height formed by pillars on the back sides of the rectangular vent unit and the panels, and an air conditioner for supplying cooking air to the space. The cooling air from the space passes through the openings. A measuring means for measuring the flow rate of cooling air passing through the openings is located in a rib which forms the openings.

Abstract: The present invention provides a drawing apparatus which performs drawing on a substrate with a plurality of charged particle beams, including an aperture array configured to include a plurality of apertures for shaping the respective charged particle beams, a deflection unit configured to include a plurality of first deflectors which are arranged on a side, with respect to the aperture array, of a charged particle source for radiating a charged particle beam and which deflect the respective charged particle beams, and to individually change irradiated positions of the respective charged particle beams on the aperture array by driving the respective first deflectors, and a controller configured to control deflection of the charged particle beams by the first deflectors to reduce a dispersion of intensities of the respective charged particle beams on the substrate.

Abstract: A drawing apparatus for performing drawing on a substrate includes: a decelerating electrostatic lens configured to decelerate a charged particle beam emitted by a charged particle source; a division unit having a plurality of apertures and configured to divide the charged particle beam decelerated by the decelerating electrostatic lens into a plurality of charged particle beams; and an accelerating electrostatic lens configured to accelerate the plurality of charged particle beams divided by the division unit.

Abstract: A molded article excellent in dynamic characteristics and water degradation resistance can be obtained by using a fiber-reinforced polypropylene resin composition including a carbodiimide-modified polyolefin (a), a polypropylene resin (b) and reinforcing fibers (c), wherein the content of the carbodiimide group contained in a resin component in the fiber-reinforced polypropylene resin composition is 0.0005 to 140 mmol based on 100 g of a matrix resin component, and the reinforcing fibers (c) are sizing-treated with a polyfunctional compound (s); and a molding material using the fiber-reinforced polypropylene resin composition.

Abstract: The present invention provides a drawing apparatus which performs drawing on a substrate with a plurality of charged particle beams, including an aperture array configured to include a plurality of apertures for shaping the respective charged particle beams, a deflection unit configured to include a plurality of first deflectors which are arranged on a side, with respect to the aperture array, of a charged particle source for radiating a charged particle beam and which deflect the respective charged particle beams, and to individually change irradiated positions of the respective charged particle beams on the aperture array by driving the respective first deflectors, and a controller configured to control deflection of the charged particle beams by the first deflectors to reduce a dispersion of intensities of the respective charged particle beams on the substrate.

Abstract: A drawing apparatus includes a first aperture array configured to split a diverging charged particle beam, a converging lens array configured to form a plurality of first crossovers of a plurality of charged particle beams from the first aperture array, a collimator lens having a principal plane where the plurality of first crossovers are to be formed, a correcting system configured to correct angles of a plurality of charged particle beams from the collimator lens and to form a plurality of second crossovers, and an element having a plurality of apertures respectively corresponding to the plurality of second crossovers. The first aperture array and the converging lens array have apertures such that an arrangement of the plurality of first crossovers is different from an arrangement of the plurality of apertures, and that the plurality of second crossovers are aligned with the plurality of apertures on the element.

Abstract: The present invention provides a charged particle optical system which emits a charged particle beam, the system including an electrostatic lens, and a grid electrode opposed to the electrostatic lens along an optical axis of the electrostatic lens, and configured to form an electrostatic field in cooperation with the electrostatic lens, wherein the grid electrode is configured such that an electrode surface, opposed to the electrostatic lens, of the grid electrode has a distance, from the electrostatic lens in a direction of the optical axis, which varies with a position in the electrode surface.

Abstract: A drawing apparatus includes an aperture array, a lens array configured to form a plurality of crossovers of a plurality of charged particle beams from the aperture array, and a projection system including an element having a single aperture and configured to converge the plurality of charged particle beams corresponding to the plurality of crossovers and to project the plurality of charged particle beams having passed through the single aperture onto the substrate. The lens array includes a correction lens array including a converging lens eccentric relative to corresponding one of a plurality of apertures of the aperture array such that the plurality of charged particle beams converged according to aberration of the projection system are converged to the single aperture. The lens array includes a magnifying lens array configured, so as to form the plurality of crossovers, to magnify a plurality of crossovers formed by the correction lens array.

Abstract: The present invention provides a drawing apparatus for performing drawing on a substrate using a plurality of charged particle beams, the apparatus including an aperture array including an opening region including a region in which a plurality of openings are formed to generate the plurality of charged particle beams, and a peripheral region surrounding the opening region, wherein the aperture array has a shielding structure for shielding at least part of an electric field generated by charging of a contaminant in the peripheral region with respect to the plurality of charged particle beams passing through the plurality of openings.

Abstract: A lithography apparatus writes with a charged particle beam on a substrate scanned in a first direction. The apparatus includes a shielding device which individually shields a plurality of charged particle beams in first and second charged particle beam groups, a holder for the substrate movable in the first direction, and a controller. If a defective beam that does not satisfy a condition exists in the first charged particle beam group, the controller is configured to cause the shielding device to shield the defective beam and to transmit a compensating beam, of the second charged particle beam group, for compensating for the defective beam, and to control writing with the compensating beam based on relative positions, in the first direction, between the compensating beam and a charged particle beam to be compensated for by the compensating beam.

Abstract: A measuring device of air flow rate for an air conditioning system which accurately measures the flow rate of cooling air blowing out of the openings of some rectangular units and in which the locations of the openings can be changed according to the location of equipment. The measuring system includes a plurality of panels constituting a floor surface, ceiling surface, or wall surface, a rectangular vent unit with openings located in place of a given one of the panels, a space with a given height formed by pillars on the back sides of the rectangular vent unit and the panels, and an air conditioner for supplying cooking air to the space. The cooling air from the space passes through the openings. A measuring means for measuring the flow rate of cooling air passing through the openings is located in a rib which forms the openings.

Abstract: A drawing apparatus performs drawing on a substrate with charged particle beams. The drawing apparatus includes an irradiation optical system including a collimator lens; an aperture array configured to split the charged particle beam into a plurality of charged particle beams; a converging lens array configured to form a plurality of crossovers of the plurality of charged particle beams; and a projection optical system including an element in which a plurality of apertures corresponding to the plurality of crossovers are formed, and a plurality of projection lenses corresponding to the apertures. The converging lens array includes converging lenses disposed such that each of the plurality of crossovers, which are formed by the converging lenses from the charged particle beam incident on the aperture array at incidence angles associated with aberration of the irradiation optical system, is aligned with corresponding one of the apertures in the element.

Abstract: The present invention provides a charged particle optical system which emits a charged particle beam, the system including an electrostatic lens, and a grid electrode opposed to the electrostatic lens along an optical axis of the electrostatic lens, and configured to form an electrostatic field in cooperation with the electrostatic lens, wherein the grid electrode is configured such that an electrode surface, opposed to the electrostatic lens, of the grid electrode has a distance, from the electrostatic lens in a direction of the optical axis, which varies with a position in the electrode surface.

Abstract: A resin composition including 10 to 90% by mass of (A) a component to be polymerized containing a compound represented by Formula (1), and 90 to 10% by mass of (B) a thermosetting resin, the (A) and (B) each being capable of undergoing a reaction to increase molecular weight by itself when heated: wherein, Ar represents an aryl; and X represents at least one selected from the group consisting of ethers, ketones, sulfides, sulfones, amides, carbonates and esters.

Abstract: A drawing apparatus includes a first aperture array configured to split a diverging charged particle beam, a converging lens array configured to form a plurality of first crossovers of a plurality of charged particle beams from the first aperture array, a collimator lens having a principal plane where the plurality of first crossovers are to be formed, a correcting system configured to correct angles of a plurality of charged particle beams from the collimator lens and to form a plurality of second crossovers, and an element having a plurality of apertures respectively corresponding to the plurality of second crossovers. The first aperture array and the converging lens array have apertures such that an arrangement of the plurality of first crossovers is different from an arrangement of the plurality of apertures, and that the plurality of second crossovers are aligned with the plurality of apertures on the element.

Abstract: A drawing apparatus includes an aperture array, a lens array configured to form a plurality of crossovers of a plurality of charged particle beams from the aperture array, and a projection system including an element having a single aperture and configured to converge the plurality of charged particle beams corresponding to the plurality of crossovers and to project the plurality of charged particle beams having passed through the single aperture onto the substrate. The lens array includes a correction lens array including a converging lens eccentric relative to corresponding one of a plurality of apertures of the aperture array such that the plurality of charged particle beams converged according to aberration of the projection system are converged to the single aperture. The lens array includes a magnifying lens array configured, so as to form the plurality of crossovers, to magnify a plurality of crossovers formed by the correction lens array.

Abstract: A drawing apparatus performs drawing on a substrate with charged particle beams. The drawing apparatus includes an irradiation optical system including a collimator lens; an aperture array configured to split the charged particle beam into a plurality of charged particle beams; a converging lens array configured to form a plurality of crossovers of the plurality of charged particle beams; and a projection optical system including an element in which a plurality of apertures corresponding to the plurality of crossovers are formed, and a plurality of projection lenses corresponding to the apertures. The converging lens array includes converging lenses disposed such that each of the plurality of crossovers, which are formed by the converging lenses from the charged particle beam incident on the aperture array at incidence angles associated with aberration of the irradiation optical system, is aligned with corresponding one of the apertures in the element.