Patents by Inventor Kinya Kato

Kinya Kato has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10787725
    Abstract: An object of the invention is to provide: an HEA article that has excellent homogeneity in the alloy composition and microstructure as well as significant shape controllability, using an HEA with significant mechanical strength and high corrosion resistance; a method for manufacturing the HEA article; and a product using the HEA article. There is provided an HEA article comprising: Co, Cr, Fe, Ni, and Ti elements, each element in content of 5 to 35 atomic %; more than 0 atomic % to 8 atomic % of Mo %; and remainder substances of unavoidable impurities.
    Type: Grant
    Filed: November 8, 2016
    Date of Patent: September 29, 2020
    Assignee: Hitachi Metals, Ltd.
    Inventors: Tadashi Fujieda, Kousuke Kuwabara, Mamoru Hirota, Kinya Aota, Takahiko Kato, Akihiko Chiba, Yuichiro Koizumi, Kenta Yamanaka
  • Patent number: 10702944
    Abstract: An alloy structure has an arbitrary shape dimension which has high uniformity in the distribution of the element composition. The alloy structure contains Fe and at least four elements, which are selected from the group consisting of elements from atomic number 13 to atomic number 79 included in Group 3 to Group 16 of the periodic table of the elements and have a ratio of the atomic radius to an Fe atom of 0.83 or more but 1.17 or less, each of Fe and the four elements is contained in an atomic concentration range of 5 at % or more but 30 at % or less, a difference in atomic concentration between at least four elements among the at least four elements and Fe is in a range of less than 3 at %, and the alloy structure has, a column crystal in which the at least four elements and Fe are solid-dissolved.
    Type: Grant
    Filed: July 17, 2015
    Date of Patent: July 7, 2020
    Assignee: HITACHI METALS, LTD.
    Inventors: Takahiko Kato, Kousuke Kuwabara, Tadashi Fujieda, Kinya Aota, Isamu Takahashi, Hiroyuki Satake, Kenji Yamaga, Hajime Murakami
  • Patent number: 10691026
    Abstract: An illumination optical system which illuminates an illumination objective surface with a light from a light source. The illumination optical system includes a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in an illumination pupil of the illumination optical system; and a polarization unit which is arranged in a position optically conjugate with the predetermined plane, and which polarizes an incident light beam having a first and second partial light beams, coming into the polarization unit such that the first and second partial light beams have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam, wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional areas of the first and second partial light beams.
    Type: Grant
    Filed: January 2, 2019
    Date of Patent: June 23, 2020
    Assignee: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Hirohisa Tanaka, Kinya Kato, Takashi Mori
  • Patent number: 10576538
    Abstract: An alloy structure which has high uniformity in the distribution of the element composition and the mechanical strength and excellent high-temperature strength and corrosion resistance, contains Fe and at least four elements, which are selected from the group consisting of elements from atomic number 13 to atomic number 79, included in Group 3 to Group 16 of the periodic table of the elements, and have a ratio of the atomic radius to an Fe atom of 0.83 or more but 1.17 or less, each of the elements in an atomic concentration range of 5 at % or more but 30 at % or less, a difference in atomic concentration among the at least four elements and Fe is in a range of less than 3 at %, and the alloy structure has, as a main crystal, a column crystal in which the at least four elements and Fe are solid-dissolved.
    Type: Grant
    Filed: July 17, 2015
    Date of Patent: March 3, 2020
    Assignee: HITACHI METALS, LTD.
    Inventors: Takahiko Kato, Kousuke Kuwabara, Tadashi Fujieda, Kinya Aota, Isamu Takahashi, Kenji Yamaga, Hiroyuki Satake, Hajime Murakami
  • Patent number: 10564550
    Abstract: An illumination optical system includes a first spatial light modulator having a plurality of optical elements into which the light from the light source comes, a polarizing member having a first polarizing element into which a first light of a light from the first spatial light modulator comes and a second polarizing element into which a second light of the light from the first spatial light modulator comes, so as to allow the first light traveled via the first polarizing element and the second light traveled via the second polarizing element to have polarizing states different from each other, the first and second lights traveling through positions relative to an optical axis of the illumination optical system different from each other, and a second spatial light modulator having a plurality of optical elements into which the first and second lights from the polarizing member come.
    Type: Grant
    Filed: January 10, 2019
    Date of Patent: February 18, 2020
    Assignee: NIKON CORPORATION
    Inventors: Norio Miyake, Kinya Kato
  • Patent number: 10353294
    Abstract: An illumination optical system includes a fly's-eye lens having a back focal plane arranged on a pupil plane of the illumination optical system or in a vicinity of the pupil plane; a first spatial light modulator which is arranged on an incident side of the fly's-eye lens and which includes a plurality of first mirror elements; a first optical system arranged in an optical path between the first spatial light modulator and the fly's-eye lens; a second spatial light modulator arranged in an optical path between the first optical system and the fly's-eye lens and which includes a plurality of second mirror elements; and a polarizing element arranged in the optical path between the first spatial light modulator and the fly's-eye lens.
    Type: Grant
    Filed: December 14, 2016
    Date of Patent: July 16, 2019
    Assignee: NIKON CORPORATION
    Inventors: Norio Miyake, Kinya Kato
  • Publication number: 20190163068
    Abstract: An illumination optical system includes a first spatial light modulator having a plurality of optical elements into which the light from the light source comes, a polarizing member having a first polarizing element into which a first light of a light from the first spatial light modulator comes and a second polarizing element into which a second light of the light from the first spatial light modulator comes, so as to allow the first light traveled via the first polarizing element and the second light traveled via the second polarizing element to have polarizing states different from each other, the first and second lights traveling through positions relative to an optical axis of the illumination optical system different from each other, and a second spatial light modulator having a plurality of optical elements into which the first and second lights from the polarizing member come.
    Type: Application
    Filed: January 10, 2019
    Publication date: May 30, 2019
    Applicant: NIKON CORPORATION
    Inventors: Norio MIYAKE, Kinya KATO
  • Publication number: 20190137887
    Abstract: An illumination optical system which illuminates an illumination objective surface with a light from a light source. The illumination optical system includes a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in an illumination pupil of the illumination optical system; and a polarization unit which is arranged in a position optically conjugate with the predetermined plane, and which polarizes an incident light beam having a first and second partial light beams, coming into the polarization unit such that the first and second partial light beams have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam, wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional areas of the first and second partial light beams.
    Type: Application
    Filed: January 2, 2019
    Publication date: May 9, 2019
    Applicant: NIKON CORPORATION
    Inventors: Osamu TANITSU, Hirohisa TANAKA, Kinya KATO, Takashi MORI
  • Patent number: 10175583
    Abstract: An illumination optical system which illuminates an illumination objective surface with a light from a light source. The illumination optical system includes a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in an illumination pupil of the illumination optical system; and a polarization unit which is arranged in a position optically conjugate with the predetermined plane, and which polarizes an incident light beam having a first and second partial light beams, coming into the polarization unit such that the first and second partial light beams have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam, wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional areas of the first and second partial light beams.
    Type: Grant
    Filed: February 3, 2017
    Date of Patent: January 8, 2019
    Assignee: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Hirohisa Tanaka, Kinya Kato, Takashi Mori
  • Publication number: 20170184978
    Abstract: An illumination optical system which illuminates an illumination objective surface with a light from a light source. The illumination optical system includes a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in an illumination pupil of the illumination optical system; and a polarization unit which is arranged in a position optically conjugate with the predetermined plane, and which polarizes an incident light beam having a first and second partial light beams, coming into the polarization unit such that the first and second partial light beams have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam, wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional areas of the first and second partial light beams.
    Type: Application
    Filed: February 3, 2017
    Publication date: June 29, 2017
    Applicant: NIKON CORPORATION
    Inventors: Osamu TANITSU, Hirohisa TANAKA, Kinya KATO, Takashi MORI
  • Publication number: 20170090297
    Abstract: An illumination optical system includes a fly's-eye lens having a back focal plane arranged on a pupil plane of the illumination optical system or in a vicinity of the pupil plane; a first spatial light modulator which is arranged on an incident side of the fly's-eye lens and which includes a plurality of first mirror elements; a first optical system arranged in an optical path between the first spatial light modulator and the fly's-eye lens; a second spatial light modulator arranged in an optical path between the first optical system and the fly's-eye lens and which includes a plurality of second mirror elements; and a polarizing element arranged in the optical path between the first spatial light modulator and the fly's-eye lens.
    Type: Application
    Filed: December 14, 2016
    Publication date: March 30, 2017
    Applicant: NIKON CORPORATION
    Inventors: Norio MIYAKE, Kinya KATO
  • Patent number: 9599905
    Abstract: An illumination optical system which illuminates an illumination objective surface with a light from a light source. The illumination optical system includes a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in an illumination pupil of the illumination optical system; and a polarization unit which is arranged in a position optically conjugate with the predetermined plane, and which polarizes an incident light beam having a first and second partial light beams, coming into the polarization unit such that the first and second partial light beams have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam, wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional areas of the first and second partial light beams.
    Type: Grant
    Filed: November 25, 2011
    Date of Patent: March 21, 2017
    Assignee: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Hirohisa Tanaka, Kinya Kato, Takashi Mori
  • Patent number: 9523918
    Abstract: There is provided an illumination optical system for illuminating an illumination objective surface. The illumination optical system includes a first spatial light modulator which has a plurality of optical elements arranged on a first plane, a polarizing member which is arranged in an optical path on an illumination objective surface side with respect to the first plane and which gives a polarization state change to a first light beam passes through a first area in a plane intersecting an optical axis of the illumination optical system, the polarization state change being different from a polarization state change given to a second light beam passes through a second area in the intersecting plane, and a second spatial light modulator which has a plurality of optical elements controlled individually and arranged on a second plane, and which variably forms a light intensity distribution on an illumination pupil of the illumination optical system.
    Type: Grant
    Filed: November 25, 2011
    Date of Patent: December 20, 2016
    Assignee: NIKON CORPORATION
    Inventors: Norio Miyake, Kinya Kato
  • Patent number: 9395525
    Abstract: A catadioptric imaging lens includes: a first reflecting mirror; a second reflecting mirror; and a lens group. A reflecting surface of the first reflecting mirror is a rotationally asymmetrical aspherical, with concavity on the object side within the reference and the first orthogonal plane. A reflecting surface of the second reflecting mirror is a rotationally asymmetrical aspherical, with convexity toward the first reflecting mirror within the reference and within the second orthogonal plane. A surface in the lens group closest to the second reflecting mirror is a rotationally asymmetrical aspherical, with concavity toward the second reflecting mirror within the reference plane and convexity toward the second reflecting mirror within the third orthogonal plane.
    Type: Grant
    Filed: December 30, 2013
    Date of Patent: July 19, 2016
    Assignee: Nikon Corporation
    Inventors: Miho Matsumoto, Yoshikazu Hirayama, Kinya Kato, Yoshikazu Sugiyama
  • Publication number: 20140233008
    Abstract: An illumination optical system which illuminates an illumination objective surface with a light from a light source. The illumination optical system includes a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in an illumination pupil of the illumination optical system; and a polarization unit which is arranged in a position optically conjugate with the predetermined plane, and which polarizes an incident light beam having a first and second partial light beams, coming into the polarization unit such that the first and second partial light beams have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam, wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional areas of the first and second partial light beams.
    Type: Application
    Filed: November 25, 2011
    Publication date: August 21, 2014
    Applicant: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Hirohisa Tanaka, Kinya Kato, Takashi Mori
  • Publication number: 20140211174
    Abstract: There is provided an illumination optical system for illuminating an illumination objective surface. The illumination optical system includes a first spatial light modulator which has a plurality of optical elements arranged on a first plane, a polarizing member which is arranged in an optical path on an illumination objective surface side with respect to the first plane and which gives a polarization state change to a first light beam passes through a first area in a plane intersecting an optical axis of the illumination optical system, the polarization state change being different from a polarization state change given to a second light beam passes through a second area in the intersecting plane, and a second spatial light modulator which has a plurality of optical elements controlled individually and arranged on a second plane, and which variably forms a light intensity distribution on an illumination pupil of the illumination optical system.
    Type: Application
    Filed: November 25, 2011
    Publication date: July 31, 2014
    Applicant: NIKON CORPORATION
    Inventors: Norio Miyake, Kinya Kato
  • Publication number: 20140211330
    Abstract: A catadioptric imaging lens includes: a first reflecting mirror; a second reflecting mirror; and a lens group. A reflecting surface of the first reflecting mirror is a rotationally asymmetrical aspherical, with concavity on the object side within the reference and the first orthogonal plane. A reflecting surface of the second reflecting mirror is a rotationally asymmetrical aspherical, with convexity toward the first reflecting mirror within the reference and within the second orthogonal plane. A surface in the lens group closest to the second reflecting mirror is a rotationally asymmetrical aspherical, with concavity toward the second reflecting mirror within the reference plane and convexity toward the second reflecting mirror within the third orthogonal plane.
    Type: Application
    Filed: December 30, 2013
    Publication date: July 31, 2014
    Inventors: Miho Matsumoto, Yoshikazu Hirayama, Kinya Kato, Yoshikazu Sugiyama
  • Patent number: 8314939
    Abstract: A reference sphere detecting device used for a reference sphere position detecting device comprises an optical unit having a laser light source, a collective lens for collecting light from the laser light source and irradiating the light to a reference sphere positioned at or near a front focal position, a first image pickup device for receiving and detecting reflected light from the reference sphere, the first image pickup device being disposed at a rear focal position of the collective lens; driving units for rotationally moving the optical unit about a reference point; and a control unit for controlling the driving units on the basis of the position at which the reflected light is received and rotationally moving the optical unit so that the reflected light reaches a predetermined reference position of the first image pickup device.
    Type: Grant
    Filed: September 1, 2010
    Date of Patent: November 20, 2012
    Assignee: Nikon Corporation
    Inventor: Kinya Kato
  • Patent number: 7956984
    Abstract: An apparatus includes a plurality of projection optical systems, each including optical elements arranged in an optical path between a first plane and a second plane and forming a radiation pattern from the first plane onto an exposure field on the second plane via the optical elements. A movable portion is disposed in the side of the second plane with respect to the projection optical systems, which holds an object to be moved relative to the exposure field in a first direction in the second plane during scanning exposure of the object in which the radiation patterns are formed on the object as the object is moved in the first direction. The projection optical systems may include an adjustable wedge prism. The projection optical systems may include first and second optical units, optical axes of the first and second optical units being decentered from each other.
    Type: Grant
    Filed: April 7, 2008
    Date of Patent: June 7, 2011
    Assignee: Nikon Corporation
    Inventors: Masashi Tanaka, Kinya Kato, Masaki Kato, Hiroshi Chiba
  • Publication number: 20110013200
    Abstract: A reference sphere detecting device used for a reference sphere position detecting device comprises an optical unit having a laser light source, a collective lens for collecting light from the laser light source and irradiating the light to a reference sphere positioned at or near a front focal position, a first image pickup device for receiving and detecting reflected light from the reference sphere, the first image pickup device being disposed at a rear focal position of the collective lens; driving units for rotationally moving the optical unit about a reference point; and a control unit for controlling the driving units on the basis of the position at which the reflected light is received and rotationally moving the optical unit so that the reflected light reaches a predetermined reference position of the first image pickup device.
    Type: Application
    Filed: September 1, 2010
    Publication date: January 20, 2011
    Applicant: Nikon Corporation
    Inventor: Kinya KATO