Patents by Inventor Kinya Kato
Kinya Kato has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240106265Abstract: A backup power supply control system includes: a first semiconductor switch that switches a main power supply line to an electrically conductive state or an electrically non-conductive state; and an auxiliary power supply switch that switches an auxiliary power supply line to the electrically conductive state or the electrically non-conductive state. A first driving unit controls, in a non-failure state, a second semiconductor switch, connected between a gate and source of a first semiconductor switch, OFF and thereby controls the first semiconductor switch ON. The first driving unit ensures, in the failure state, at least a gate-plateau voltage of the first semiconductor switch as a drive voltage for the second semiconductor switch. When a failure detection unit detects the failure state, the first driving unit controls the first semiconductor switch OFF by controlling the second semiconductor switch ON and a second driving unit controls the auxiliary power supply switch ON.Type: ApplicationFiled: December 20, 2021Publication date: March 28, 2024Inventors: Hiroki AKASHI, Masafumi NAKAMURA, Masatoshi NAKASE, Yuta NAGATOMI, Kinya KATO
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Publication number: 20240079886Abstract: An electrical storage device control system includes a plurality of electrical storage devices and a plurality of charger circuits. The plurality of electrical storage devices are charged by a main power supply. The plurality of charger circuits are connected between the main power supply and the plurality of electrical storage devices. A mode of connection between the plurality of electrical storage devices being charged is switched to either a first connection mode or a second connection mode, depending on a voltage difference between an input voltage for the main power supply and a charging voltage based on respective voltages at the plurality of electrical storage devices. In the first connection mode, the plurality of electrical storage devices are connected together in series. In the second connection mode, the plurality of electrical storage devices are connected in parallel to the main power supply.Type: ApplicationFiled: December 27, 2021Publication date: March 7, 2024Inventors: Kinya KATO, Yuta NAGATOMI, Masafumi NAKAMURA, Masatoshi NAKASE, Hiroki AKASHI
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Publication number: 20230420981Abstract: A backup power supply system is designed to supply, when a power supply has caused a failure, power from a first electrical storage device to a plurality of loads. The plurality of loads includes a first load and a second load. The first load is connected to a first power supply line. The backup power supply system includes a backflow prevention switch provided between the first load and the second load on the first power supply line and making the first power supply line electrically conductive or non-conductive by turning ON and OFF. The backflow prevention switch includes an internal diode having an anode connected to one side including the first load and a cathode connected to the other side including the second load.Type: ApplicationFiled: November 29, 2021Publication date: December 28, 2023Inventors: Yuta NAGATOMI, Masafumi NAKAMURA, Masatoshi NAKASE, Hiroki AKASHI, Kinya KATO
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Patent number: 10691026Abstract: An illumination optical system which illuminates an illumination objective surface with a light from a light source. The illumination optical system includes a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in an illumination pupil of the illumination optical system; and a polarization unit which is arranged in a position optically conjugate with the predetermined plane, and which polarizes an incident light beam having a first and second partial light beams, coming into the polarization unit such that the first and second partial light beams have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam, wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional areas of the first and second partial light beams.Type: GrantFiled: January 2, 2019Date of Patent: June 23, 2020Assignee: NIKON CORPORATIONInventors: Osamu Tanitsu, Hirohisa Tanaka, Kinya Kato, Takashi Mori
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Patent number: 10564550Abstract: An illumination optical system includes a first spatial light modulator having a plurality of optical elements into which the light from the light source comes, a polarizing member having a first polarizing element into which a first light of a light from the first spatial light modulator comes and a second polarizing element into which a second light of the light from the first spatial light modulator comes, so as to allow the first light traveled via the first polarizing element and the second light traveled via the second polarizing element to have polarizing states different from each other, the first and second lights traveling through positions relative to an optical axis of the illumination optical system different from each other, and a second spatial light modulator having a plurality of optical elements into which the first and second lights from the polarizing member come.Type: GrantFiled: January 10, 2019Date of Patent: February 18, 2020Assignee: NIKON CORPORATIONInventors: Norio Miyake, Kinya Kato
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Patent number: 10353294Abstract: An illumination optical system includes a fly's-eye lens having a back focal plane arranged on a pupil plane of the illumination optical system or in a vicinity of the pupil plane; a first spatial light modulator which is arranged on an incident side of the fly's-eye lens and which includes a plurality of first mirror elements; a first optical system arranged in an optical path between the first spatial light modulator and the fly's-eye lens; a second spatial light modulator arranged in an optical path between the first optical system and the fly's-eye lens and which includes a plurality of second mirror elements; and a polarizing element arranged in the optical path between the first spatial light modulator and the fly's-eye lens.Type: GrantFiled: December 14, 2016Date of Patent: July 16, 2019Assignee: NIKON CORPORATIONInventors: Norio Miyake, Kinya Kato
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Publication number: 20190163068Abstract: An illumination optical system includes a first spatial light modulator having a plurality of optical elements into which the light from the light source comes, a polarizing member having a first polarizing element into which a first light of a light from the first spatial light modulator comes and a second polarizing element into which a second light of the light from the first spatial light modulator comes, so as to allow the first light traveled via the first polarizing element and the second light traveled via the second polarizing element to have polarizing states different from each other, the first and second lights traveling through positions relative to an optical axis of the illumination optical system different from each other, and a second spatial light modulator having a plurality of optical elements into which the first and second lights from the polarizing member come.Type: ApplicationFiled: January 10, 2019Publication date: May 30, 2019Applicant: NIKON CORPORATIONInventors: Norio MIYAKE, Kinya KATO
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Publication number: 20190137887Abstract: An illumination optical system which illuminates an illumination objective surface with a light from a light source. The illumination optical system includes a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in an illumination pupil of the illumination optical system; and a polarization unit which is arranged in a position optically conjugate with the predetermined plane, and which polarizes an incident light beam having a first and second partial light beams, coming into the polarization unit such that the first and second partial light beams have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam, wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional areas of the first and second partial light beams.Type: ApplicationFiled: January 2, 2019Publication date: May 9, 2019Applicant: NIKON CORPORATIONInventors: Osamu TANITSU, Hirohisa TANAKA, Kinya KATO, Takashi MORI
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Patent number: 10175583Abstract: An illumination optical system which illuminates an illumination objective surface with a light from a light source. The illumination optical system includes a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in an illumination pupil of the illumination optical system; and a polarization unit which is arranged in a position optically conjugate with the predetermined plane, and which polarizes an incident light beam having a first and second partial light beams, coming into the polarization unit such that the first and second partial light beams have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam, wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional areas of the first and second partial light beams.Type: GrantFiled: February 3, 2017Date of Patent: January 8, 2019Assignee: NIKON CORPORATIONInventors: Osamu Tanitsu, Hirohisa Tanaka, Kinya Kato, Takashi Mori
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Publication number: 20170184978Abstract: An illumination optical system which illuminates an illumination objective surface with a light from a light source. The illumination optical system includes a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in an illumination pupil of the illumination optical system; and a polarization unit which is arranged in a position optically conjugate with the predetermined plane, and which polarizes an incident light beam having a first and second partial light beams, coming into the polarization unit such that the first and second partial light beams have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam, wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional areas of the first and second partial light beams.Type: ApplicationFiled: February 3, 2017Publication date: June 29, 2017Applicant: NIKON CORPORATIONInventors: Osamu TANITSU, Hirohisa TANAKA, Kinya KATO, Takashi MORI
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Publication number: 20170090297Abstract: An illumination optical system includes a fly's-eye lens having a back focal plane arranged on a pupil plane of the illumination optical system or in a vicinity of the pupil plane; a first spatial light modulator which is arranged on an incident side of the fly's-eye lens and which includes a plurality of first mirror elements; a first optical system arranged in an optical path between the first spatial light modulator and the fly's-eye lens; a second spatial light modulator arranged in an optical path between the first optical system and the fly's-eye lens and which includes a plurality of second mirror elements; and a polarizing element arranged in the optical path between the first spatial light modulator and the fly's-eye lens.Type: ApplicationFiled: December 14, 2016Publication date: March 30, 2017Applicant: NIKON CORPORATIONInventors: Norio MIYAKE, Kinya KATO
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Patent number: 9599905Abstract: An illumination optical system which illuminates an illumination objective surface with a light from a light source. The illumination optical system includes a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in an illumination pupil of the illumination optical system; and a polarization unit which is arranged in a position optically conjugate with the predetermined plane, and which polarizes an incident light beam having a first and second partial light beams, coming into the polarization unit such that the first and second partial light beams have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam, wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional areas of the first and second partial light beams.Type: GrantFiled: November 25, 2011Date of Patent: March 21, 2017Assignee: NIKON CORPORATIONInventors: Osamu Tanitsu, Hirohisa Tanaka, Kinya Kato, Takashi Mori
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Patent number: 9523918Abstract: There is provided an illumination optical system for illuminating an illumination objective surface. The illumination optical system includes a first spatial light modulator which has a plurality of optical elements arranged on a first plane, a polarizing member which is arranged in an optical path on an illumination objective surface side with respect to the first plane and which gives a polarization state change to a first light beam passes through a first area in a plane intersecting an optical axis of the illumination optical system, the polarization state change being different from a polarization state change given to a second light beam passes through a second area in the intersecting plane, and a second spatial light modulator which has a plurality of optical elements controlled individually and arranged on a second plane, and which variably forms a light intensity distribution on an illumination pupil of the illumination optical system.Type: GrantFiled: November 25, 2011Date of Patent: December 20, 2016Assignee: NIKON CORPORATIONInventors: Norio Miyake, Kinya Kato
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Patent number: 9395525Abstract: A catadioptric imaging lens includes: a first reflecting mirror; a second reflecting mirror; and a lens group. A reflecting surface of the first reflecting mirror is a rotationally asymmetrical aspherical, with concavity on the object side within the reference and the first orthogonal plane. A reflecting surface of the second reflecting mirror is a rotationally asymmetrical aspherical, with convexity toward the first reflecting mirror within the reference and within the second orthogonal plane. A surface in the lens group closest to the second reflecting mirror is a rotationally asymmetrical aspherical, with concavity toward the second reflecting mirror within the reference plane and convexity toward the second reflecting mirror within the third orthogonal plane.Type: GrantFiled: December 30, 2013Date of Patent: July 19, 2016Assignee: Nikon CorporationInventors: Miho Matsumoto, Yoshikazu Hirayama, Kinya Kato, Yoshikazu Sugiyama
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Publication number: 20140233008Abstract: An illumination optical system which illuminates an illumination objective surface with a light from a light source. The illumination optical system includes a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in an illumination pupil of the illumination optical system; and a polarization unit which is arranged in a position optically conjugate with the predetermined plane, and which polarizes an incident light beam having a first and second partial light beams, coming into the polarization unit such that the first and second partial light beams have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam, wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional areas of the first and second partial light beams.Type: ApplicationFiled: November 25, 2011Publication date: August 21, 2014Applicant: NIKON CORPORATIONInventors: Osamu Tanitsu, Hirohisa Tanaka, Kinya Kato, Takashi Mori
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Publication number: 20140211174Abstract: There is provided an illumination optical system for illuminating an illumination objective surface. The illumination optical system includes a first spatial light modulator which has a plurality of optical elements arranged on a first plane, a polarizing member which is arranged in an optical path on an illumination objective surface side with respect to the first plane and which gives a polarization state change to a first light beam passes through a first area in a plane intersecting an optical axis of the illumination optical system, the polarization state change being different from a polarization state change given to a second light beam passes through a second area in the intersecting plane, and a second spatial light modulator which has a plurality of optical elements controlled individually and arranged on a second plane, and which variably forms a light intensity distribution on an illumination pupil of the illumination optical system.Type: ApplicationFiled: November 25, 2011Publication date: July 31, 2014Applicant: NIKON CORPORATIONInventors: Norio Miyake, Kinya Kato
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Publication number: 20140211330Abstract: A catadioptric imaging lens includes: a first reflecting mirror; a second reflecting mirror; and a lens group. A reflecting surface of the first reflecting mirror is a rotationally asymmetrical aspherical, with concavity on the object side within the reference and the first orthogonal plane. A reflecting surface of the second reflecting mirror is a rotationally asymmetrical aspherical, with convexity toward the first reflecting mirror within the reference and within the second orthogonal plane. A surface in the lens group closest to the second reflecting mirror is a rotationally asymmetrical aspherical, with concavity toward the second reflecting mirror within the reference plane and convexity toward the second reflecting mirror within the third orthogonal plane.Type: ApplicationFiled: December 30, 2013Publication date: July 31, 2014Inventors: Miho Matsumoto, Yoshikazu Hirayama, Kinya Kato, Yoshikazu Sugiyama
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Patent number: 8314939Abstract: A reference sphere detecting device used for a reference sphere position detecting device comprises an optical unit having a laser light source, a collective lens for collecting light from the laser light source and irradiating the light to a reference sphere positioned at or near a front focal position, a first image pickup device for receiving and detecting reflected light from the reference sphere, the first image pickup device being disposed at a rear focal position of the collective lens; driving units for rotationally moving the optical unit about a reference point; and a control unit for controlling the driving units on the basis of the position at which the reflected light is received and rotationally moving the optical unit so that the reflected light reaches a predetermined reference position of the first image pickup device.Type: GrantFiled: September 1, 2010Date of Patent: November 20, 2012Assignee: Nikon CorporationInventor: Kinya Kato
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Patent number: 7956984Abstract: An apparatus includes a plurality of projection optical systems, each including optical elements arranged in an optical path between a first plane and a second plane and forming a radiation pattern from the first plane onto an exposure field on the second plane via the optical elements. A movable portion is disposed in the side of the second plane with respect to the projection optical systems, which holds an object to be moved relative to the exposure field in a first direction in the second plane during scanning exposure of the object in which the radiation patterns are formed on the object as the object is moved in the first direction. The projection optical systems may include an adjustable wedge prism. The projection optical systems may include first and second optical units, optical axes of the first and second optical units being decentered from each other.Type: GrantFiled: April 7, 2008Date of Patent: June 7, 2011Assignee: Nikon CorporationInventors: Masashi Tanaka, Kinya Kato, Masaki Kato, Hiroshi Chiba
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Publication number: 20110013200Abstract: A reference sphere detecting device used for a reference sphere position detecting device comprises an optical unit having a laser light source, a collective lens for collecting light from the laser light source and irradiating the light to a reference sphere positioned at or near a front focal position, a first image pickup device for receiving and detecting reflected light from the reference sphere, the first image pickup device being disposed at a rear focal position of the collective lens; driving units for rotationally moving the optical unit about a reference point; and a control unit for controlling the driving units on the basis of the position at which the reflected light is received and rotationally moving the optical unit so that the reflected light reaches a predetermined reference position of the first image pickup device.Type: ApplicationFiled: September 1, 2010Publication date: January 20, 2011Applicant: Nikon CorporationInventor: Kinya KATO