Abstract: A sensor includes a first substrate, a first protruding portion provided on an upper surface of the first substrate, a support portion provided on the upper surface of the first substrate, a beam portion supported at a first end of the beam portion by the support portion, and a weight portion provided to a second end of the beam portion. The upper surface of the first protruding portion has a first surface and a second surface. The second surface is located above the first surface with the upper surface of the first substrate as a reference.

Abstract: A manufacturing method of an organic EL device, comprising: providing a substrate on which a pixel electrode is arranged, forming a liquid repellent organic film on the substrate and the pixel electrode, radiating a light selectively to an area of the pixel electrode to be coated with an organic functional layer, to oxidize a surface of the pixel electrode, and to change the liquid repellent organic film on the area to a lyophilic organic film or to remove the liquid repellent organic film on the area, applying an ink containing an organic functional material on the area defined by the liquid repellent organic film to form the organic functional layer on the pixel electrode.

Abstract: Provided is a technique which easily forms a bank the inner lateral surface of which has a part (lower part of the inner lateral surface) made to be lyophilic. The technique provides an organic EL display panel containing a plurality of organic EL elements in which each organic EL element comprises a substrate, an anode disposed on the substrate, an organic light emitting layer disposed on the anode, a cathode disposed on the organic light emitting layer, and a forward-tapered bank which regulates the area of the organic light emitting layer. A lyophobic organic film is disposed on the upper surface of the bank and the surface of the upper part of the tapered portion of the bank but not disposed on the surface of the lower part of the tapered portion of the bank of the organic EL element.

Abstract: A manufacturing method of an organic EL device, comprising: providing a substrate on which a pixel electrode is arranged, forming a liquid repellent organic film on the substrate and the pixel electrode, radiating a light selectively to an area of the pixel electrode to be coated with an organic functional layer, to oxidize a surface of the pixel electrode, and to change the liquid repellent organic film on the area to a lyophilic organic film or to remove the liquid repellent organic film on the area, applying an ink containing an organic functional material on the area defined by the liquid repellent organic film to form the organic functional layer on the pixel electrode.

Abstract: Disclosed is an organic EL display panel which includes: a substrate; a linear first bank which is disposed over the substrate and defines a linear region; a second bank which defines two or more pixel regions arranged in the linear region; a pixel electrode disposed in the pixel region; a linear organic layer which is formed by coating method in the linear region over the pixel electrode and second bank; and a counter electrode over the organic layer, wherein the first bank is larger in height than the second bank, the first and second banks are made of resin, anisole contact angle at the top of the first bank is 30-60°, and anisole contact angle at the top of the second bank is 5-30°.

Abstract: Provided is a technique which easily forms a bank the inner lateral surface of which has a part (lower part of the inner lateral surface) made to be lyophilic. The technique provides an organic EL display panel containing a plurality of organic EL elements in which each organic EL element comprises a substrate, an anode disposed on the substrate, an organic light emitting layer disposed on the anode, a cathode disposed on the organic light emitting layer, and a forward-tapered bank which regulates the area of the organic light emitting layer. A lyophobic organic film is disposed on the upper surface of the bank and the surface of the upper part of the tapered portion of the bank but not disposed on the surface of the lower part of the tapered portion of the bank of the organic EL element.

Abstract: Disclosed is an organic EL display panel which includes: a substrate; a linear first bank which is disposed over the substrate and defines a linear region; a second bank which defines two or more pixel regions arranged in the linear region; a pixel electrode disposed in the pixel region; a linear organic layer which is formed by coating method in the linear region over the pixel electrode and second bank; and a counter electrode over the organic layer, wherein the first bank is larger in height than the second bank, the first and second banks are made of resin, anisole contact angle at the top of the first bank is 30-60°, and anisole contact angle at the top of the second bank is 5-30°.

Abstract: In dry etching process wherein a substrate having a multi-layer film is etched, the etching process is monitored by determining a layer being processed. CHF3 gas is added to the processing gas during a period from the time when the lowermost layer on the substrate is etched until the etching is completed.

Abstract: In dry etching process wherein a substrate having a multi-layer film is etched, the etching process is monitored by determining a layer being processed. CHF3 gas is added to the processing gas during a period from the time when the lowermost layer on the substrate is etched until the etching is completed.