Patents by Inventor Koji Komatsu

Koji Komatsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210265170
    Abstract: A substrate processing method performed in a chamber of a substrate processing apparatus is provided. The chamber includes a substrate support, an upper electrode, and a gas supply port. The substrate processing method includes (a) providing the substrate on the substrate support; (b) supplying a first processing gas into the chamber; (c) continuously supplying an RF signal into the chamber while continuously supplying a negative DC voltage to the upper electrode, to generate plasma from the first processing gas in the chamber; and (d) supplying a pulsed RF signal while continuously supplying the negative DC voltage to the upper electrode, to generate plasma from the first processing gas in the chamber. The process further includes repeating alternately repeating the steps (c) and (d), and a time for performing the step (c) once is 30 second or shorter.
    Type: Application
    Filed: February 19, 2021
    Publication date: August 26, 2021
    Applicant: Tokyo Electron Limited
    Inventors: Seiichi WATANABE, Kazuki NARISHIGE, Xinhe Jerry LIM, Jianfeng XU, Yi Hao NG, Zhenkang Max LIANG, Yujun Nicholas LOO, Chiew Wah YAP, Bin ZHAO, Chai Jin CHUA, Takehito WATANABE, Koji KAWAMURA, Kenji KOMATSU, Li JIN, Wee Teck TAN, Dali LIU
  • Patent number: 9787964
    Abstract: There is provided an information processing device including an acquisition unit that acquires incidental information, and a control unit that associates the incidental information with content, until a state is turned into a state in which a predetermined condition is satisfied after the acquisition of the incidental information.
    Type: Grant
    Filed: May 22, 2013
    Date of Patent: October 10, 2017
    Assignee: SONY CORPORATION
    Inventors: Koji Komatsu, Nozomu Endo
  • Patent number: 9735906
    Abstract: A demultiplexing device includes a first demultiplexer configured to demultiplex a first input signal, a second demultiplexer configured to demultiplex a second input signal, and a switching circuit configured to set an input destination of signals demultiplexed and output by each of the first demultiplexer and the second demultiplexer based on data rates of the first and second input signals. A multiplexing device includes a first multiplexer configured to multiplex a first input signal, a second multiplexer configured to multiplex a second input signal, and a switching circuit configured to set an input destination of signals multiplexed and output by the first multiplexer and the second multiplexer based on data rates of the first and second input signals.
    Type: Grant
    Filed: July 16, 2015
    Date of Patent: August 15, 2017
    Assignee: FUJITSU LIMITED
    Inventors: Masao Sugahara, Kenji Fukunaga, Koji Komatsu
  • Publication number: 20160050042
    Abstract: A demultiplexing device includes: a first demultiplexer configured to demultiplex a first input signal; a second demultiplexer configured to demultiplex a second input signal; and a switching unit configured to set an input destination of signals demultiplexed by each of the first demultiplexer and the second demultiplexer to one of the first demultiplexer and the second demultiplexer, based on a configuration of each of the first input signal and the second input signal.
    Type: Application
    Filed: July 16, 2015
    Publication date: February 18, 2016
    Applicant: FUJITSU LIMITED
    Inventors: Masao SUGAHARA, Kenji FUKUNAGA, Koji KOMATSU
  • Publication number: 20130322840
    Abstract: There is provided an information processing device including an acquisition unit that acquires incidental information, and a control unit that associates the incidental information with content, until a state is turned into a state in which a predetermined condition is satisfied after the acquisition of the incidental information.
    Type: Application
    Filed: May 22, 2013
    Publication date: December 5, 2013
    Inventors: KOJI KOMATSU, NOZOMU ENDO
  • Patent number: 8289417
    Abstract: There is provided an imaging device including a first processor having a list creating unit for, when a group is specified and a creation process of a data list is requested for data divided to one or a plurality of groups, creating a data list related to data of the specified group, and a list transmission unit for transmitting a data list created by the list creating unit through a first line when a transmission request of the data list based on the PTP is acquired through the first line; and a second processor having a list creation requesting unit for specifying the group and requesting for the creation process of the data list with respect to the first processor through a second line different from the first line, and a list transmission requesting unit for transmitting the transmission request of the data list to the first processor.
    Type: Grant
    Filed: September 30, 2009
    Date of Patent: October 16, 2012
    Assignee: Sony Corporation
    Inventor: Koji Komatsu
  • Patent number: 8176073
    Abstract: There is provided an imaging device including a first processor for, when a group and a data position in a group are specified for data divided to one or plurality of groups, transmitting data of the specified data position through a first signal line; and a second processor including a first display for displaying a group element for selecting each group by a number determined based on number of groups, a second display for displaying, when the group element displayed is selected, data element for selecting each data by a number determined based on number of data belonging to the group of the selected group element, and a data transmission requesting unit for, when the data element is selected, specifying a group to which the data of the selected data element belongs and the data position in the group, and requesting data transmission to the first processor.
    Type: Grant
    Filed: September 30, 2009
    Date of Patent: May 8, 2012
    Assignee: Sony Corporation
    Inventor: Koji Komatsu
  • Publication number: 20100278302
    Abstract: An apparatus for detecting a specific element for detecting presence or content concentration of a specific element contained in a measurement target, which includes a raw material, such as soil or ore, a product in the form of powder, granule or gravel, and an intermediate product, a by-product, a waste material and the like generated during a process for producing the product, the apparatus comprising fluorescent X-ray measuring means that radiates an X-ray to the measurement target and measures a fluorescent X-ray generated thereby to detect the presence of the content concentration of the specific element, and film feeding means that inserts a resin film between a measuring window of the fluorescent X-ray measuring means and the measurement target, and feeds a fresh resin film between the measuring window and the measurement target along with repetition of detection of the specific element, whereby the intensity of the fluorescent X-ray can be prevented from being attenuated by measuring with the measurin
    Type: Application
    Filed: September 6, 2007
    Publication date: November 4, 2010
    Applicants: SUMITOMO METAL MINING CO., LTD., INTERNATIONAL CENTER FOR ENVIRONMENTAL TECHNOLOGY TRANSFER
    Inventors: Jun Yokoyama, Ryozo Ushio, Koji Komatsu
  • Patent number: 7743005
    Abstract: A method and apparatus that detects a multiplicity of normal data sets, each of which includes values of n parameters, for each of the operation modes of an object having a plurality of operation modes. Self-organizing maps are provided for each operation mode using the normal data sets. Abnormal data sets representing virtual abnormal states are created by modifying the values of the n parameters of each of the multiple normal data sets so that as many abnormal data sets as the number of deviation vectors are created for each of the multiple normal data sets. Abnormal operation mode proportion vectors are then created by selecting a self-organizing map from the above noted self-organizing maps which has the highest similarity degree to each of the abnormal data sets.
    Type: Grant
    Filed: April 28, 2005
    Date of Patent: June 22, 2010
    Assignee: Shin Caterpillar Mitsubishi Ltd.
    Inventors: Gantcho Lubenov Vatchkov, Koji Komatsu, Satoshi Fujii, Isao Murota
  • Publication number: 20100145980
    Abstract: There is provided an imaging device including a first processor for, when a group and a data position in a group are specified for data divided to one or plurality of groups, transmitting data of the specified data position through a first signal line; and a second processor including a first display for displaying a group element for selecting each group by a number determined based on number of groups, a second display for displaying, when the group element displayed is selected, data element for selecting each data by a number determined based on number of data belonging to the group of the selected group element, and a data transmission requesting unit for, when the data element is selected, specifying a group to which the data of the selected data element belongs and the data position in the group, and requesting data transmission to the first processor.
    Type: Application
    Filed: September 30, 2009
    Publication date: June 10, 2010
    Applicant: Sony Corporation
    Inventor: Koji KOMATSU
  • Publication number: 20100141793
    Abstract: There is provided an imaging device including a first processor having a list creating unit for, when a group is specified and a creation process of a data list is requested for data divided to one or a plurality of groups, creating a data list related to data of the specified group, and a list transmission unit for transmitting a data list created by the list creating unit through a first line when a transmission request of the data list based on the PTP is acquired through the first line; and a second processor having a list creation requesting unit for specifying the group and requesting for the creation process of the data list with respect to the first processor through a second line different from the first line, and a list transmission requesting unit for transmitting the transmission request of the data list to the first processor.
    Type: Application
    Filed: September 30, 2009
    Publication date: June 10, 2010
    Applicant: SONY CORPORATION
    Inventor: Koji KOMATSU
  • Patent number: 7664715
    Abstract: There are provided an apparatus and a method for compressing data, an apparatus and a method for analyzing data and a data management system, which are capable of compressing huge data and accurately reproducing the characteristics of the original data from the compressed data. The data compressing apparatus includes detection means for detecting a multiplicity of data sets, each including n parameter values that vary according to an operation of an object, where n is a natural number; and data compressing means for compressing the data sets by inputting the data sets into an n-dimensional space, arranging neurons smaller in number than the data sets in the n-dimensional space, carrying out unsupervised learning for a neural network on the neurons, and converting the data sets into a neuron model parameter characterizing a neuron model obtained by the unsupervised learning.
    Type: Grant
    Filed: April 28, 2005
    Date of Patent: February 16, 2010
    Assignee: Caterpillar Japan Ltd.
    Inventors: Gantcho Lubenov Vatchkov, Koji Komatsu, Satoshi Fujii, Isao Murota
  • Publication number: 20090004885
    Abstract: An object of the present invention is to provide a method for fabricating a semiconductor device capable of implementing planarization of an insulating film formed on a semiconductor substrate formed thereon with a circuit pattern and inhibiting unevenness of a film thickness of the insulating film, and a device thereof. According to the present invention, when etching is progressed to an A-A line, a part of a BPSG film 14 is exposed from an SOG film 16. A point at which the part of the BPSG film 14 is exposed is an “exposure start point”. A change of a plasma emission intensity of oxygen atoms during etching is observed to detect the “exposure start point”. An EPD detection in which an “etching end point” is set using the “exposure start point” as a reference is performed. The etching is continued even after a start of exposure of the BPSG film 14. Before a B-B line at which an entire surface of the BPSG film 14 is exposed is reached, the etching is ended at a C-C line.
    Type: Application
    Filed: June 6, 2008
    Publication date: January 1, 2009
    Applicant: OKI ELECTRIC INDUSTRY CO., LTD.
    Inventor: Koji Komatsu
  • Patent number: 7464063
    Abstract: An information processor, a state judging unit, a diagnostic unit, an information processing method, a state judging method and a diagnosing method aim at precisely recognizing each operation carried out by an object that functions in a number of operation modes. For this purpose, a number of combinations of n parameter values, concerning each of the operation modes, that vary with operation are detected by sensors (1a-1d) during the operation of the object, and a Self-Organizing Map creating means (2) creates Self-Organizing Maps, which corresponds one to each of the operation modes and which serve as individual separation models, regarding detection data based on the detected combination of parameter values as learning data.
    Type: Grant
    Filed: June 28, 2004
    Date of Patent: December 9, 2008
    Assignee: Caterpillar Japan Ltd.
    Inventors: Gantcho Lubenov Vatchkov, Koji Komatsu, Satoshi Fujii, Isao Murota
  • Patent number: 7443843
    Abstract: An apparatus has a cross connection circuit, first switching sections located on the input side of the cross connection circuit to switch a presently-used transmission path and a reserve transmission path, and second switching sections located on the output side of the cross connection circuit to switch the presently-used transmission path and the reserve transmission path and comprises slot sections, first selecting section selectively connecting any one of the slot sections to the input side of the first switching section, second selecting section connecting the output side of the first switching section to the input side of the cross connection circuit, third selecting section selectively connecting the output side of the cross connection circuit to the input side of any of the second switching sections, and fourth selecting section connecting the output side of the second switching section to any one of the slot sections.
    Type: Grant
    Filed: April 6, 2005
    Date of Patent: October 28, 2008
    Assignee: Fujitsu Limited
    Inventors: Hiroyuki Matsuo, Mitsuhiro Kawaguchi, Shosaku Yamasaki, Takashi Umegaki, Koji Komatsu, Yoshimasa Itsuki
  • Publication number: 20070244841
    Abstract: There are provided a method and an apparatus for data processing and a method and an apparatus which are able to precisely diagnose each parameter of an object, such as a machine, capable of operating in a plurality of operation modes.
    Type: Application
    Filed: April 28, 2005
    Publication date: October 18, 2007
    Applicants: National University Corporation Kagawa University, SHIN CATERPILLAR MITSUBISHI LTD.,
    Inventors: Gantcho Vatchkov, Koji Komatsu, Satoshi Fujii, Isao Murota
  • Publication number: 20070233623
    Abstract: There are provided an apparatus and a method for compressing data, an apparatus and a method for analyzing data and a data management system, which are capable of compressing huge data and accurately reproducing the characteristics of the original data from the compressed data. The data compressing apparatus includes detection means for detecting a multiplicity of data sets, each including n parameter values that vary according to an operation of an object, where n is a natural number; and data compressing means for compressing the data sets by inputting the data sets into an n-dimensional space, arranging neurons smaller in number than the data sets in the n-dimensional space, carrying out unsupervised learning for a neural network on the neurons, and converting the data sets into a neuron model parameter characterizing a neuron model obtained by the unsupervised learning.
    Type: Application
    Filed: April 28, 2005
    Publication date: October 4, 2007
    Inventors: Gantcho Vatchkov, Koji Komatsu, Satoshi Fujii, Isao Murota
  • Patent number: 7150612
    Abstract: A gear•rear shaft containing main body of a bottomed type is penetrated with a bearing hole and a rear face of the gear•rear shaft containing main body is coupled with a closing plate to form an airtight seal from an outside environment. Shafts extended from two gears to a side of the rear face are set to be shorter than a length of the bearing hole in an axis core direction. Bushes are also set to a length that is the same as that of the shafts. The gear•rear shaft containing main body is formed with a recess portion at the rear face and the bearing hole is penetrated to open to the recess portion. The gear•rear shaft containing main body is bored to penetrate with a low pressure port communicating with a low pressure region in an axis core direction.
    Type: Grant
    Filed: May 26, 2004
    Date of Patent: December 19, 2006
    Assignee: Shimadzu Corporation
    Inventors: Koji Komatsu, Nobuo Mukai, Takumi Ishihara, Yoshiyuki Hirose
  • Publication number: 20060142990
    Abstract: An information processor, a state judging unit, a diagnostic unit, an information processing method, a state judging method and a diagnosing method aim at precisely recognizing each operation carried out by an object that functions in a number of operation modes. For this purpose, a number of combinations of n parameter values, concerning each of the operation modes, that vary with operation are detected by sensors (1a-1d) during the operation of the object, and a Self-Organizing Map creating means (2) creates Self-Organizing Maps, which corresponds one to each of the operation modes and which serve as individual separation models, regarding detection data based on the detected combination of parameter values as learning data.
    Type: Application
    Filed: June 28, 2004
    Publication date: June 29, 2006
    Inventors: Gantcho Vatchkov, Koji Komatsu, Satoshi Fujii, Isao Murota
  • Publication number: 20050195864
    Abstract: An apparatus has a cross connection circuit, first switching sections located on the input side of the cross connection circuit to switch a presently-used transmission path and a reserve transmission path, and second switching sections located on the output side of the cross connection circuit to switch the presently-used transmission path and the reserve transmission path and comprises slot sections, first selecting section selectively connecting any one of the slot sections to the input side of the first switching section, second selecting section connecting the output side of the first switching section to the input side of the cross connection circuit, third selecting section selectively connecting the output side of the cross connection circuit to the input side of any of the second switching sections, and fourth selecting section connecting the output side of the second switching section to any one of the slot sections.
    Type: Application
    Filed: April 6, 2005
    Publication date: September 8, 2005
    Inventors: Hiroyuki Matsuo, Mitsuhiro Kawaguchi, Shosaku Yamasaki, Takashi Umegaki, Koji Komatsu, Yoshimasa Itsuki