Abstract: A method of measuring a crystallographic orientation of an object using an ultrasonic transducer and a detector array including a plurality of ultrasonic detectors includes: determining a minimum distance between the transducer and the detector of the detector array closest to the transducer; placing the transducer and the detector array in contact with a surface of the object such that the transducer and the detector of the detector array closest to the transducer are separated by at least the minimum distance; using the transducer to generate an ultrasonic surface wave pulse in the surface of the object, the ultrasonic surface wave pulse having a pulse duration and including a longitudinal surface wave and a Rayleigh wave; and measuring a time of flight of a surface wave generated by the transducer between the transducer and each detector of the array to determine the crystallographic orientation of the object.

Abstract: A method of measuring a crystallographic orientation of an object using an ultrasonic transducer and a detector array including a plurality of ultrasonic detectors includes: determining a minimum distance between the transducer and the detector of the detector array closest to the transducer; placing the transducer and the detector array in contact with a surface of the object such that the transducer and the detector of the detector array closest to the transducer are separated by at least the minimum distance; using the transducer to generate an ultrasonic surface wave pulse in the surface of the object, the ultrasonic surface wave pulse having a pulse duration and including a longitudinal surface wave and a Rayleigh wave; and measuring a time of flight of a surface wave generated by the transducer between the transducer and each detector of the array to determine the crystallographic orientation of the object.

Abstract: As a rotating spoked substrate wheel passes across a beam stop during a scan cycle, a series of pulses are generated by the beam stop. These pulses are analysed to determine characteristics about the ion bam in an implanter. A digital signal processor (DSP) samples the beam stop current at regular intervals. By comparing the magnitude of successive samples, a dose uniformity map may be generated, so that identification of particular substrates on the wheel which have been dosed incorrectly is possible. The time taken for the beam to move between two points during the scan can also be measured from the sampled beam stop current. This provides a measurement of ion beam width. Similarly, by measuring, from the sample beam stop current, the time taken for the ion beam to pass between the middle of two adjacent substrates, the beam height may be ascertained.

Abstract: A data analysis computer system stores measurement data obtained from a multiplicity of distinct predefined processes. The system can store definitions for many data analysis charts, each of which depicts stored measurement data for a specified process. Further, chart groups can be defined. Each chart group comprises a set of data analysis charts that grouped together for convenient access. Charts are displayed by either (1) selecting a defined chart, or (2) by selecting a chart group and then selecting one or more charts from the selected group for, and then simultaneously displaying the selected data analysis charts. A data display gallery feature divides the computer system's display into a two dimensional array of cells, and assigns cell definitions to at least a subset of the cells. Each cell definition consists of either a set of measurement data which can be displayed as a unit, or a mathematical combination of a plurality of specified sets of measurement data.

Abstract: A system and method for computer control of machine processes. The system and method provide a set of predefined data management or data analysis tasks which an operator of the system can use when using the system to run a selected process.Measurement data structures for storing data measured during the running of processes, and related data, for a multiplicity of processes are defined and stored. Data is added to these data structures each time a process is run, and this data is automatically accessed when the operator requests data analysis on the data collected during previous uses of a selected process.Access to measurement data for detailed data management tasks is provided graphically through the use of trend charts and statistical quality control charts. These charts depict trends in the measurement data for selected processes. By pointing at any data point in the chart, the user can access the corresponding record of data for detailed data analysis or for use in a data management task.

Abstract: A method of selecting items from a hierarchy of items and then performing a selected task on the selected set of items. An engineering set up control program includes a procedure for denoting processes, groups of processes, and subgroups of processes which are available for use by operators of the system. The processes, groups and subgroups are visually presented in a three level menu. Subgroups and groups of processes can be selected using the three level menu, and then operated on as a group.

Abstract: A system and method for computer control of machine processes. The operator of the system selects and specifies process control parameters through the use of a three level dynamic menu. The first level of the menu is used to select a group of process parameters. The second and third menus together have the visual appearance of a set of index cards, the second menu forming tabs on the index cards, and the third menu comprising the set of process parameters listed on each index card. Each process parameter has a preassigned entry status: operator unalterable, operator alterable, forced operator entry, or single time forced entry (value must be entered only once when the process is run several times). The selected process cannot be run until values have been entered for all parameters having an entry status of forced operator entry or single time forced entry. Edit field parameters limit the operator's options to a predefined set of parameter values.

Abstract: A process control interface includes a multi-level dynamic menu for selecting processes from a set of processes that are organized into groups and subgroups. An engineering set up control program enables an engineer to denote which of these groups, subgroups and processes are available for selection by an operator using the process control interface. Only those groups, subgroups and processes which are available for selection are displayed in the dynamic menu. The set of processes defined by the engineering set up control program can be stored on individual operator-related disks so that each operator has access to a distinct set of available processes. Process subgroups and groups can be duplicated by the engineering setup control program to facilitate the setting up of new control processes.

Abstract: A method of controlling a process using a programmed digital computer with a set of process control programs. An operator control program allows the user to select and run a specified process and to collect measurement data while the selected process is run. A data analysis program enables interactive computer controlled data analysis, including displaying a trand chart depicting a sequence of data points, each data point representing at least a portion of the measurement data collected and stored while running a selected process. A selectably positionable pointer is displayed on the trend chart for pointing at an individual data point so that the user can select and perform a predefined task on the measurement data stored in the data structure corresponding to the data point being pointed at by said selectably positionable pointer.

Abstract: A system and method for computer control of machine processes, including a dynamic menu feature used in the selection of processes and the definition and selection of operating parameters used by a process control program to direct the performance of the process by the machine.Data structures for a multiplicity of processes are defined and stored. Values stored in the data structures indicate which processes are available for use and the process control program associated with each process. Furthermore, for each parameter of each process a data structure contains an indicia of whether the parameter is a forced entry parameter (which must be given a value before the process is run), a may change parameter (with a default value that may be changed when the process is run), or a locked parameter which has a fixed value.

Abstract: The folding blade or knife of a quarter folder apparatus for paper such as newsprint includes a pair of air jets, one on each side of the top portion of the blade, directed toward the paper being folded. The air jets are supplied from a compressed air source through a flexible tubing. The air jets maintain the ends of the pages being folded in a flattened and aligned configuration throughout the folding operation, thereby preventing wrinkled and dog-eared pages in the folded paper.