Abstract: A method of forming a semiconductor fin structure is provided. A substrate is provided, which has at least two sub regions and a dummy region disposed between the two sub regions. A recess is disposed in each sub region. A semiconductor layer is formed to fill the recesses. A patterned mask layer is formed on the semiconductor layer in the sub regions and on the substrate in the dummy region. The substrate and the semiconductor layer are removed by using the patterned mask layer as a mask, thereby forming a plurality of fin structures in the sub regions and a plurality of dummy fin structures in the dummy region.

Abstract: An etching method including the following steps is provided. A substrate is provided first. A first region and a second region adjacent to the first region are defined on the substrate. A material layer is formed on the substrate. A pattern mask is formed on the material layer. The patterned mask includes a first part covering the material layer on the first region and a second part including a lattice structure. The lattice structure includes a plurality of openings and a plurality of shielding parts. Each opening exposes a part of the material layer on the second region. Each shielding part is located between the openings adjacent to one another. Each shielding part covers a part of the material layer on the second region. An isotropic etching process is then performed to remove the material layer exposed by the openings and the material layer covered by the shielding parts.

Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate having a first fin-shaped structure thereon; forming a spacer adjacent to the first fin-shaped structure; using the spacer as mask to remove part of the substrate for forming a second fin-shaped structure, wherein the second fin-shaped structure comprises a top portion and a bottom portion; and forming a doped portion in the bottom portion of the second fin-shaped structure.

Abstract: The present invention proposes a method of manufacturing a semiconductor device, which includes the steps of providing a substrate with a memory region and a logic region, forming bit lines and logic gates respectively in the memory region and the logic region, wherein storage node regions are defined between bit lines, forming a first low-K dielectric layer on sidewalls of bit lines, forming a doped silicon layer in the storage node regions between bit lines, wherein the top surface of doped silicon layer is lower than the top surface of bit line, forming a second low-K dielectric layer on sidewalls of storage node regions, and filling up storage node regions with metal plugs.

Abstract: A semiconductor memory device includes a semiconductor substrate, a gate structure, a first spacer structure, and a gate connection structure. The semiconductor substrate includes a memory cell region and a peripheral region. The gate structure is disposed on the semiconductor substrate and disposed on the peripheral region. The gate structure includes a first conductive layer and a gate capping layer. The gate capping layer is disposed on the first conductive layer. The first spacer structure is disposed on a sidewall of the first conductive layer and a sidewall of the gate capping layer. The gate connection structure includes a first part and a second part. The first part penetrates the gate capping layer and is electrically connected with the first conductive layer. The second part is connected with the first part, and the second part is disposed on and contacts a top surface of the gate capping layer.

Abstract: A semiconductor device and method of manufacturing the same is provided in the present invention. The method includes the step of forming first mask patterns on a substrate, wherein the first mask patterns extend in a second direction and are spaced apart in a first direction to expose a portion of first insulating layer, removing the exposed first insulating layer to form multiple recesses in the first insulating layer, performing a surface treatment to the recess surface, filling up the recesses with a second insulating layer and exposing a portion of the first insulating layer, removing the exposed first insulating layer to form a mesh-type isolation structure, and forming storage node contact plugs in the openings of mesh-type isolation structure.

Abstract: A method of forming insulating structures in a semiconductor device is provided in the present invention, which includes the steps of forming a first mask layer with mandrels and a peripheral portion surrounding the mandrels, forming spacers on sidewalls of first mask layer, filling up the space between spacers with a second mask layer, removing the spacers to form opening patterns, performing an etch process with the first mask layer and the second mask layer as an etch mask to form trenches in the substrate, and filling up the trenches with an insulating material to form insulating structures.

Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate having a memory region and a periphery region; forming a first buried gate and a second buried gate in the substrate on the memory region; forming a first silicon layer on the substrate on the periphery region; forming a stacked layer on the first silicon layer; forming an epitaxial layer on the substrate between the first buried gate and the second buried gate; and forming a second silicon layer on the epitaxial layer on the memory region and the stacked layer on the periphery region.

Abstract: A manufacturing method of a semiconductor memory device includes the following steps. A semiconductor substrate is provided. A memory cell region and a peripheral region are defined on the semiconductor substrate. A dielectric layer is formed on the semiconductor substrate. A first trench penetrating the dielectric layer is formed on the memory cell region, and a second trench penetrating the dielectric layer is formed on the peripheral region. A metal conductive layer is formed. The first trench and the second trench are filled with the metal conductive layer for forming a bit line metal structure in the first trench and a first metal gate structure in the second trench. In the present invention, the replacement metal gate process is used to form the bit line metal structure for reducing the electrical resistance of the bit lines.

Abstract: A semiconductor device includes a substrate, plural active areas, plural bit lines and plural dummy bit lines. The substrate includes a cell region and a periphery region, and the active areas are defined on the substrate. The bit lines are disposed on the substrate, within the cell region and across the active areas. The dummy bit lines are disposed at a side of the bit lines, wherein the dummy bit lines are in contact with each other and have different pitches therebetween.

Abstract: A method for forming a contact plug layout include following steps. (a) Receiving a plurality of active region patterns and a plurality of buried gate patterns that are parallel with each other, and each active region pattern overlaps two buried gate patterns to form two overlapping regions and one contact plug region in between the two overlapping regions in each active region pattern; and (b) forming a contact plug pattern in each contact plug region, the contact plug pattern respectively includes a parallelogram, and an included angle of the parallelogram is not equal to 90°. The contact plug pattern in each active region pattern partially overlaps the two buried gate pattern, respectively. The step (a) to the step (b) are implemented using a computer.

Abstract: A semiconductor memory device and a method of forming the same, the semiconductor memory device includes a substrate, a plurality of bit lines, a gate, a spacer layer and a first spacer. The substrate has a memory cell region and a periphery region, the a plurality of bit lines are disposed on the substrate, within the memory cell region, and the gate is disposed on the substrate, within the periphery. The spacer layer covers the bit lines and a sidewall of the gate. The first spacer is disposed at two sides of the gate, covers on the spacer layer.

Abstract: A method for forming patterns of semiconductor device is provided in the present invention, with steps of filling up first self-assembly material in first openings in a dielectric layer, phase-separating the first self-assembly material to form a first portion and a second portion surrounding the first portion, removing the first portion and performing a first etch process to form a first mask pattern in a mask layer, forming a second dielectric layer and repeating the above steps to form a second mask pattern in the mask layer, wherein the second mask pattern is aligned with the first mask pattern to form a common mask pattern.

Abstract: A manufacturing method of a semiconductor memory device includes following steps. Bit line structures and storage node contacts are formed on a semiconductor substrate. A first sidewall spacer is formed on sidewalls of each bit line structure. A conductive layer covering the bit line structures, the first sidewall spacer, and the storage node contacts is formed. A first patterning process is preformed to the conductive layer for forming stripe contact structures. Each stripe contact structure is elongated in the first direction and corresponding to the storage node contacts. The first sidewall spacer at a first side of each bit line structure is exposed by the first patterning process. The first sidewall spacer at a second side of each bit line structure is covered by the stripe contact structures. The first sidewall spacer exposed by the first patterning process is removed for forming first air spacers.

Abstract: A semiconductor device includes: a substrate having a first region and a second region; a first fin-shaped structure on the first region and a second fin-shaped structure on the second region, wherein each of the first fin-shaped structure and the second fin-shaped structure comprises a top portion and a bottom portion; a first doped layer around the bottom portion of the first fin-shaped structure; a second doped layer around the bottom portion of the second fin-shaped structure; a first liner on the first doped layer; and a second liner on the second doped layer.

Abstract: A method of forming a layout pattern is disclosed. First, an array comprising a plurality of main features is provided wherein the main features are arranged into a plurality of rows along a first direction and are parallel and staggered along a second direction. Assistant features are inserted into each row of the main features. A shortest distance d1 between the main features in row n to the main features in row n+1 and a shortest distance d2 between the main feature in row n?1 to the main feature in row n+1 are obtained. The assistance features inserted in row n of the main features are then adjusted according to the difference between the distances d1 and d2. After that, the main features and the assistant features are output to a photo mask.

Abstract: A method for fabricating semiconductor device includes the steps of first forming a first trench and a second trench in a substrate and then forming a shallow trench isolation (STI) in the first trench, in which the STI comprises a top portion and a bottom portion and a top surface of the top portion is even with or higher than a bottom surface of the second trench. Next, a conductive layer is formed in the first trench and the second trench to form a first gate structure and a second gate structure.

Abstract: A semiconductor device preferably includes a substrate, a fin-shaped structure on the substrate, a buffer layer on the fin-shaped structure, and an epitaxial layer on the buffer layer. Preferably, the buffer layer is made of silicon germanium and including three or more than three elements. The buffer layer also includes dopants selected from the group consisting of P, As, Sb, Bi, C, and F.

Abstract: A semiconductor memory device includes a semiconductor substrate, a first support layer, a first electrode, a capacitor dielectric layer, and a second electrode. The first support layer is disposed on the semiconductor substrate. The first electrode is disposed on the semiconductor substrate and penetrates the first support layer. The capacitor dielectric layer is disposed on the first electrode. The second electrode is disposed on the semiconductor substrate, and at least a part of the capacitor dielectric layer is disposed between the first electrode and the second electrode. The first support layer includes a carbon doped nitride layer, and a carbon concentration of a bottom portion of the first support layer is higher than a carbon concentration of a top portion of the first support layer.

Abstract: The present invention provides a storage node contact structure of a memory device comprising a substrate having a dielectric layer comprising a recess, a first tungsten metal layer, and an adhesive layer on the first tungsten metal layer and a second tungsten metal layer on the adhesive layer, wherein the second tungsten metal layer is formed by a physical vapor deposition (PVD).