Abstract: In a method, a mask is formed on a microstructure over a substrate. The mask includes a first pattern over a first region of the microstructure and a second pattern over a second region of the microstructure. A first etching process is performed to etch the microstructure by providing an etching gas and applying a first bias voltage to the substrate according to the first and second patterns of the mask. A protective layer is subsequently formed by providing a deposition gas and applying a second bias voltage to the substrate to cover the first pattern of the mask. A second etching process is performed to transfer the second pattern of the mask further into the second region of the microstructure. The deposition gas has a higher carbon to fluorine ratio than the etching gas, and the second bias voltage is smaller than the first bias voltage.

Abstract: A drilling device for surveying front rock-mass intactness of a tunnel face for a tunnel constructed by a TBM and a method using the same are provided. The drilling device includes a drilling assembly, a drill-attitude control assembly, a data monitoring assembly and a TBM-platform fixing seat. The drilling assembly is connected to a TBM hydraulic system to obtain power, to drill the rock mass by an alloy bit through rotation and translation thereof. The drill-attitude control assembly controls an angle, a direction and a position of a drill rod and maintains drilling accuracy and stability. The data monitoring assembly acquires and stores a drilling dynamic-response signal by a high-accuracy sensor and a data recorder, to analyze an intactness characteristic of the rock mass. The TBM-platform fixing seat mounts the drilling device on the TBM.

Abstract: The disclosure discloses an adaptive lining structure of a tunnel in complex environment and a construction method thereof, and relates to the technical field of tunnel construction, comprising a lining, a pressure regulating layer and a connecting cylinder; wherein the pressure regulating layer is provided between the lining and a surrounding rock; and the connecting cylinder is provided in the tunnel and runs through the top of the lining. The adaptive lining structure of a tunnel in complex environment and the construction method in the disclosure are simple in structure, reasonable in design and convenient for efficient construction; it can deal with engineering problems such as lining cracking caused by high internal water and high external water in the tunnel, and can ensure the safety of tunnel lining in different periods.

Abstract: The disclosure discloses an adaptive lining structure of a tunnel in complex environment and a construction method thereof, and relates to the technical field of tunnel construction, comprising a lining, a pressure regulating layer and a connecting cylinder; wherein the pressure regulating layer is provided between the lining and a surrounding rock; and the connecting cylinder is provided in the tunnel and runs through the top of the lining. The adaptive lining structure of a tunnel in complex environment and the construction method in the disclosure are simple in structure, reasonable in design and convenient for efficient construction; it can deal with engineering problems such as lining cracking caused by high internal water and high external water in the tunnel, and can ensure the safety of tunnel lining in different periods.

Abstract: A drilling device for surveying front rock-mass intactness of a tunnel face for a tunnel constructed by a TBM and a method using the same are provided. The drilling device includes a drilling assembly, a drill-attitude control assembly, a data monitoring assembly and a TBM-platform fixing seat. The drilling assembly is connected to a TBM hydraulic system to obtain power, to drill the rock mass by an alloy bit through rotation and translation thereof. The drill-attitude control assembly controls an angle, a direction and a position of a drill rod and maintains drilling accuracy and stability. The data monitoring assembly acquires and stores a drilling dynamic-response signal by a high-accuracy sensor and a data recorder, to analyze an intactness characteristic of the rock mass. The TBM-platform fixing seat mounts the drilling device on the TBM.

Abstract: An advanced monitoring device and an implementation method for a whole-process deformation curve of a surrounding rock during tunnel excavation is disclosed, comprising a steel pipe elastic body, a cathetometer structure and an embedded optical fiber, and an implementation step; the cathetometer is an equidistant series structure, and fixed in the steel pipe; the embedded optical fiber is encapsulated in the surface slot of the steel pipe; the cathetometer and the embedded optical fiber and the steel pipe form a deformation coordination structure, and the deformation of the surrounding rock can be deduced by calculating the variation of the cathetometer and the deformation of the optical fiber. The invention can test and calculate the deformation curve of the surrounding rock in front of the excavation face during tunnel excavation, and provide support for engineering dynamic design, construction and safety.

Abstract: In a method, a mask is formed on a microstructure over a substrate. The mask includes a first pattern over a first region of the microstructure and a second pattern over a second region of the microstructure. A first etching process is performed to etch the microstructure by providing an etching gas and applying a first bias voltage to the substrate according to the first and second patterns of the mask. A protective layer is subsequently formed by providing a deposition gas and applying a second bias voltage to the substrate to cover the first pattern of the mask. A second etching process is performed to transfer the second pattern of the mask further into the second region of the microstructure. The deposition gas has a higher carbon to fluorine ratio than the etching gas, and the second bias voltage is smaller than the first bias voltage.

Abstract: In the disclosed method, a mask is formed on a microstructure. The mask includes a first pattern positioned over a first region of the microstructure and a second pattern positioned over a second region of the microstructure. A first etching process is performed to etch the microstructure according to the first and second patterns formed in the mask. The first etching process transfers the first and second patterns of the mask into the first and second regions of the microstructure, respectively. A protective layer is subsequently formed over the first pattern of the mask that is positioned over the first region of the microstructure. When the protective layer is formed, a second etching process is performed to etch the microstructure and transfer the second pattern of the mask further into the second region of the microstructure. The method also includes removing the mask and the protective layer from the microstructure.

Abstract: In the disclosed method, a mask is formed on a microstructure. The mask includes a first pattern positioned over a first region of the microstructure and a second pattern positioned over a second region of the microstructure. A first etching process is performed to etch the microstructure according to the first and second patterns formed in the mask. The first etching process transfers the first and second patterns of the mask into the first and second regions of the microstructure, respectively. A protective layer is subsequently formed over the first pattern of the mask that is positioned over the first region of the microstructure. When the protective layer is formed, a second etching process is performed to etch the microstructure and transfer the second pattern of the mask further into the second region of the microstructure. The method also includes removing the mask and the protective layer from the microstructure.

Abstract: An advanced monitoring device and an implementation method for a whole-process deformation curve of a surrounding rock during tunnel excavation is disclosed, comprising a steel pipe elastic body, a cathetometer structure and an embedded optical fiber, and an implementation step; the cathetometer is an equidistant series structure, and fixed in the steel pipe; the embedded optical fiber is encapsulated in the surface slot of the steel pipe; the cathetometer and the embedded optical fiber and the steel pipe form a deformation coordination structure, and the deformation of the surrounding rock can be deduced by calculating the variation of the cathetometer and the deformation of the optical fiber. The invention can test and calculate the deformation curve of the surrounding rock in front of the excavation face during tunnel excavation, and provide support for engineering dynamic design, construction and safety.