Patents by Inventor Lo-Heng Chang

Lo-Heng Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220367280
    Abstract: During a front side process of a wafer, a hard mask layer is formed under a metal portion of a semiconductor device, and an epitaxial layer is deposited to form epitaxial portions of the semiconductor device. In a back side process of the wafer to cut the epitaxial layer, the metal portion is covered and protected by the hard mask layer from damages during etching of the epitaxial layer.
    Type: Application
    Filed: July 26, 2022
    Publication date: November 17, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chun-Yuan CHEN, Li-Zhen YU, Huan-Chieh SU, Lo-Heng CHANG, Cheng-Chi CHUANG, Chih-Hao WANG
  • Publication number: 20220367463
    Abstract: A semiconductor device according to the present disclosure includes a bottom dielectric feature on a substrate, a plurality of channel members directly over the bottom dielectric feature, a gate structure wrapping around each of the plurality of channel members, two first epitaxial features sandwiching the bottom dielectric feature along a first direction, and two second epitaxial features sandwiching the plurality of channel members along the first direction.
    Type: Application
    Filed: July 27, 2022
    Publication date: November 17, 2022
    Inventors: Jung-Hung Chang, Lo-Heng Chang, Zhi-Chang Lin, Shih-Cheng Chen, Kuo-Cheng Chiang, Chih-Hao Wang
  • Patent number: 11502034
    Abstract: Corner portions of a semiconductor fin are kept on the device while removing a semiconductor fin prior to forming a backside contact. The corner portions of the semiconductor fin protect source/drain regions from etchant during backside processing. The corner portions allow the source/drain features to be formed with a convex profile on the backside. The convex profile increases volume of the source/drain features, thus, improving device performance. The convex profile also increases processing window of backside contact recess formation.
    Type: Grant
    Filed: September 21, 2020
    Date of Patent: November 15, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Lo-Heng Chang, Kuo-Cheng Chiang, Zhi-Chang Lin, Jung-Hung Chang, Shih-Cheng Chen, Shi-Ning Ju, Chih-Hao Wang
  • Publication number: 20220359397
    Abstract: Corner portions of a semiconductor fin are kept on the device while removing a semiconductor fin prior to forming a backside contact. The corner portions of the semiconductor fin protect source/drain regions from etchant during backside processing. The corner portions allow the source/drain features to be formed with a convex profile on the backside. The convex profile increases volume of the source/drain features, thus, improving device performance. The convex profile also increases processing window of backside contact recess formation.
    Type: Application
    Filed: July 27, 2022
    Publication date: November 10, 2022
    Inventors: LO-HENG CHANG, KUO-CHENG CHIANG, ZHI-CHANG LIN, JUNG-HUNG CHANG, SHIH-CHENG CHEN, SHI-NING JU, CHIH-HAO WANG
  • Publication number: 20220320348
    Abstract: A method of forming a semiconductor device includes forming a fin of alternating layers of semiconductor nanostructures and sacrificial layers, laterally etching sidewall portions of the sacrificial layers, and depositing additional semiconductor material over the sidewalls of the semiconductor nanostructures and sacrificial layers. Following deposition of a dielectric material over the additional semiconductor material and additional etching, the remaining portions of the semiconductor structures and additional semiconductor material collectively form a hammer shape at each opposing side of the fin. Epitaxial source/drain regions formed on the opposing sides of the fin will contact the heads of the hammer shapes.
    Type: Application
    Filed: June 17, 2022
    Publication date: October 6, 2022
    Inventors: Lo-Heng Chang, Jung-Hung Chang, Zhi-Chang Lin, Kuo-Cheng Chiang, Chih-Hao Wang
  • Patent number: 11437279
    Abstract: During a front side process of a wafer, a hard mask layer is formed under a metal portion of a semiconductor device, and an epitaxial layer is deposited to form epitaxial portions of the semiconductor device. In a back side process of the wafer to cut the epitaxial layer, the metal portion is covered and protected by the hard mask layer from damages during etching of the epitaxial layer.
    Type: Grant
    Filed: February 25, 2021
    Date of Patent: September 6, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chun-Yuan Chen, Li-Zhen Yu, Huan-Chieh Su, Lo-Heng Chang, Cheng-Chi Chuang, Chih-Hao Wang
  • Publication number: 20220271139
    Abstract: A semiconductor device includes nanostructures vertically arranged and spaced apart from one another along a first direction. The semiconductor device also includes a dielectric fin structure of a dielectric material of uniform composition and an isolation structure on opposite sides of the nanostructures. Moreover, the semiconductor device also includes a gate structure wrapping around the nanostructures. The gate structure extends between the nanostructure and the dielectric fin structure, and extends between the nanostructures and the isolation structure. Furthermore, the nanostructures are spaced apart from the dielectric fin structure along a second direction perpendicular to the first direction by a first distance, and from the isolation structure along the second direction by a second distance, where the first distance is greater than the second distance. Additionally, the gate structure interfaces with the dielectric fin structure on a surface extending perpendicular to the first direction.
    Type: Application
    Filed: September 1, 2021
    Publication date: August 25, 2022
    Inventors: Huan-Chieh Su, Chun-Yuan Chen, Li-Zhen Yu, Lo-Heng Chang, Cheng-Chi Chuang, Kuan-Lun Cheng, Chih-Hao Wang
  • Publication number: 20220270929
    Abstract: During a front side process of a wafer, a hard mask layer is formed under a metal portion of a semiconductor device, and an epitaxial layer is deposited to form epitaxial portions of the semiconductor device. In a back side process of the wafer to cut the epitaxial layer, the metal portion is covered and protected by the hard mask layer from damages during etching of the epitaxial layer.
    Type: Application
    Filed: February 25, 2021
    Publication date: August 25, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chun-Yuan CHEN, Li-Zhen YU, Huan-Chieh SU, Lo-Heng CHANG, Cheng-Chi CHUANG, Chih-Hao WANG
  • Publication number: 20220271138
    Abstract: Semiconductor structures and methods of forming the same are provided. A semiconductor according to one embodiment includes first nanostructures, a first gate structure wrapping around each of the first nanostructures and disposed over an isolation structure, and a backside gate contact disposed below the first nanostructures and adjacent to the isolation structure. A bottom surface of the first gate structure is in direct contact with the backside gate contact.
    Type: Application
    Filed: April 13, 2021
    Publication date: August 25, 2022
    Inventors: Huan-Chieh Su, Chun-Yuan Chen, Li-Zhen Yu, Lin-Yu Huang, Lo-Heng Chang, Cheng-Chi Chuang, Chih-Hao Wang
  • Publication number: 20220262915
    Abstract: Semiconductor devices and methods of forming the same are provided. A method according to the present disclosure includes providing a workpiece that has a substrate, a first plurality of channel members, a second plurality of channel members, a first gate structure engaging the first plurality of channel members, a second gate structure engaging the second plurality of channel members, a hybrid fin disposed between the first and second gate structures, and an isolation feature disposed under the hybrid fin. The method also includes forming a metal cap layer at a frontside of the workpiece. The metal cap layer electrically connects the first and second gate structures. The method also includes etching the isolation feature, etching the hybrid fin, etching the metal cap layer, and depositing a dielectric material to form a gate isolation feature disposed between the first and second gate structures.
    Type: Application
    Filed: September 1, 2021
    Publication date: August 18, 2022
    Inventors: Huan-Chieh Su, Li-Zhen Yu, Chun-Yuan Chen, Lo-Heng Chang, Cheng-Chi Chuang, Kuan-Lun Cheng, Chih-Hao Wang
  • Patent number: 11417777
    Abstract: A method of forming a semiconductor device includes forming a fin of alternating layers of semiconductor nanostructures and sacrificial layers, laterally etching sidewall portions of the sacrificial layers, and depositing additional semiconductor material over the sidewalls of the semiconductor nanostructures and sacrificial layers. Following deposition of a dielectric material over the additional semiconductor material and additional etching, the remaining portions of the semiconductor structures and additional semiconductor material collectively form a hammer shape at each opposing side of the fin. Epitaxial source/drain regions formed on the opposing sides of the fin will contact the heads of the hammer shapes.
    Type: Grant
    Filed: June 11, 2020
    Date of Patent: August 16, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Lo-Heng Chang, Jung-Hung Chang, Zhi-Chang Lin, Kuo-Cheng Chiang, Chih-Hao Wang
  • Publication number: 20220238385
    Abstract: Provided is a semiconductor device including a semiconductor substrate, a plurality of semiconductor nanosheets, a plurality of source/drain (S/D) features and a gate stack. The semiconductor substrate includes a first fin and a second fin. The first fin has a first width less than a second width of the second fin, and a top surface of the first fin is lower than a top surface of the second fin. The plurality of semiconductor nanosheets are disposed on the first fin and the second fin. The plurality of source/drain (S/D) features are located on the first fin and the second fin and abutting the plurality of semiconductor nanosheets. The gate stack wraps each of the plurality of semiconductor nanosheets.
    Type: Application
    Filed: April 12, 2022
    Publication date: July 28, 2022
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Lo-Heng Chang, Chih-Hao Wang, Kuo-Cheng Chiang, Jung-Hung Chang, Pei-Hsun Wang
  • Publication number: 20220181490
    Abstract: A method of independently forming source/drain regions in NMOS regions including nanosheet field-effect transistors (NSFETs), NMOS regions including fin field-effect transistors (FinFETs) PMOS regions including NSFETs, and PMOS regions including FinFETs and semiconductor devices formed by the method are disclosed. In an embodiment, a device includes a semiconductor substrate; a first nanostructure over the semiconductor substrate; a first epitaxial source/drain region adjacent the first nanostructure; a first inner spacer layer adjacent the first epitaxial source/drain region, the first inner spacer layer comprising a first material; a second nanostructure over the semiconductor substrate; a second epitaxial source/drain region adjacent the second nanostructure; and a second inner spacer layer adjacent the second epitaxial source/drain region, the second inner spacer layer comprising a second material different from the first material.
    Type: Application
    Filed: February 28, 2022
    Publication date: June 9, 2022
    Inventors: Jung-Hung Chang, Lo-Heng Chang, Zhi-Chang Lin, Shih-Cheng Chen, Kuo-Cheng Chiang, Chih-Hao Wang
  • Publication number: 20220165730
    Abstract: A semiconductor device structure, along with methods of forming such, are described. The structure includes a stack of semiconductor layers spaced apart from and aligned with each other, a first source/drain epitaxial feature in contact with a first one or more semiconductor layers of the stack of semiconductor layers, and a second source/drain epitaxial feature disposed over the first source/drain epitaxial feature. The second source/drain epitaxial feature is in contact with a second one or more semiconductor layers of the stack of semiconductor layers. The structure further includes a first dielectric material disposed between the first source/drain epitaxial feature and the second source/drain epitaxial feature and a first liner disposed between the first source/drain epitaxial feature and the second source/drain epitaxial feature. The first liner is in contact with the first source/drain epitaxial feature and the first dielectric material.
    Type: Application
    Filed: November 25, 2020
    Publication date: May 26, 2022
    Inventors: Shih-Cheng CHEN, Zhi-Chang LIN, Jung-Hung Chang, Lo-Heng CHANG, Chien Ning YAO, Kuo-Cheng CHIANG, Chih-Hao WANG
  • Patent number: 11322409
    Abstract: Provided is a method of manufacturing a semiconductor device including providing a semiconductor substrate, and forming an epitaxial stack on the semiconductor substrate. The epitaxial stack comprises a plurality of first epitaxial layers interposed by a plurality of second epitaxial layers. The method further includes patterning the epitaxial stack and the semiconductor substrate to form a semiconductor fin, recessing a portion of the semiconductor fin to form source/drain spaces; and laterally removing portions of the plurality of first epitaxial layers exposed by the source/drain spaces to form a plurality of cavities. The method further includes forming inner spacers in the plurality of cavities, performing a treatment process to remove an inner spacer residue in the source/drain spaces, forming S/D features in the source/drain spaces, and forming a gate structure engaging the semiconductor fin.
    Type: Grant
    Filed: March 2, 2020
    Date of Patent: May 3, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Lo-Heng Chang, Chih-Hao Wang, Kuo-Cheng Chiang, Jung-Hung Chang, Pei-Hsun Wang
  • Patent number: 11315925
    Abstract: According to one example, a semiconductor device includes a substrate and a fin stack that includes a plurality of nanostructures, a gate device surrounding each of the nanostructures, and inner spacers along the gate device and between the nanostructures. A width of the inner spacers differs between different layers of the fin stack.
    Type: Grant
    Filed: July 17, 2020
    Date of Patent: April 26, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Jui-Chien Huang, Shih-Cheng Chen, Chih-Hao Wang, Kuo-Cheng Chiang, Zhi-Chang Lin, Jung-Hung Chang, Lo-Heng Chang, Shi Ning Ju, Guan-Lin Chen
  • Patent number: 11309424
    Abstract: A semiconductor device includes a substrate, a semiconductor layer, a gate structure, source/drain regions, a bottom isolation layer, and a bottom spacer. The semiconductor layer is above the substrate. The gate structure is above the substrate and surrounds the semiconductor layer. The source/drain regions are on opposite sides of the semiconductor layer. The bottom isolation layer is between the substrate and the semiconductor layer. The bottom spacer is on a sidewall of the bottom isolation layer.
    Type: Grant
    Filed: April 13, 2020
    Date of Patent: April 19, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Zhi-Chang Lin, Shih-Cheng Chen, Jung-Hung Chang, Lo-Heng Chang, Chien-Ning Yao
  • Publication number: 20220093785
    Abstract: Embodiments of the present disclosure relate to an un-doped or low-doped epitaxial layer formed below the source/drain features. The un-doped or low-doped epitaxial layer protects the source/drain features from damage during replacement gate processes, and also prevent leakage currents in the mesa device. A semiconductor device is disclosed. The semiconductor device includes an epitaxial feature having a dopant of a first concentration, and a source/drain feature in contact with the epitaxial feature. The source/drain feature comprises the dopant of a second concentration, and the second concentration is higher than the first concentration.
    Type: Application
    Filed: September 18, 2020
    Publication date: March 24, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shih-Cheng CHEN, Zhi-Chang LIN, Jung-Hung CHANG, Lo-Heng CHANG, Chien-Ning YAO, Kuo-Cheng CHIANG, Chih-Hao WANG
  • Publication number: 20220093512
    Abstract: Corner portions of a semiconductor fin are kept on the device while removing a semiconductor fin prior to forming a backside contact. The corner portions of the semiconductor fin protect source/drain regions from etchant during backside processing. The corner portions allow the source/drain features to be formed with a convex profile on the backside. The convex profile increases volume of the source/drain features, thus, improving device performance. The convex profile also increases processing window of backside contact recess formation.
    Type: Application
    Filed: September 21, 2020
    Publication date: March 24, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Lo-Heng CHANG, Kuo-Cheng CHIANG, Zhi-Chang LIN, Jung-Hung CHANG, Shih-Cheng CHEN, Shi-Ning JU, Chih-Hao WANG
  • Patent number: 11264502
    Abstract: A method of independently forming source/drain regions in NMOS regions including nanosheet field-effect transistors (NSFETs), NMOS regions including fin field-effect transistors (FinFETs) PMOS regions including NSFETs, and PMOS regions including FinFETs and semiconductor devices formed by the method are disclosed. In an embodiment, a device includes a semiconductor substrate; a first nanostructure over the semiconductor substrate; a first epitaxial source/drain region adjacent the first nanostructure; a first inner spacer layer adjacent the first epitaxial source/drain region, the first inner spacer layer comprising a first material; a second nanostructure over the semiconductor substrate; a second epitaxial source/drain region adjacent the second nanostructure; and a second inner spacer layer adjacent the second epitaxial source/drain region, the second inner spacer layer comprising a second material different from the first material.
    Type: Grant
    Filed: February 27, 2020
    Date of Patent: March 1, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jung-Hung Chang, Lo-Heng Chang, Zhi-Chang Lin, Shih-Cheng Chen, Kuo-Cheng Chiang, Chih-Hao Wang