Patents by Inventor Loring G. Davis

Loring G. Davis has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Load lock having secondary isolation chamber
    Patent number: 8927435
    Abstract: A load lock includes a chamber including an upper portion, a lower portion, and a partition between the upper portion and the lower portion, the partition including an opening therethrough. The load lock further includes a first port in communication with the upper portion of the chamber and a second port in communication with the lower portion of the chamber. The load lock includes a rack disposed within the chamber and a workpiece holder mounted on a first surface of the rack, wherein the rack and the workpiece holder are movable by an indexer that is capable of selectively moving wafer slots of the rack into communication with the second port. The indexer can also move the rack into an uppermost position, at which the first surface of the boat and the partition sealingly separate the upper portion and the lower portion to define an upper chamber and a lower chamber. Auxiliary processing, such as wafer pre-cleaning, or metrology can be conducted in the upper portion.
    Type: Grant
    Filed: May 8, 2013
    Date of Patent: January 6, 2015
    Assignee: ASM America, Inc.
    Inventors: Ravinder K. Aggarwal, Jeroen Stoutjesdijk, Eric R. Hill, Loring G. Davis, John T. DiSanto
  • LOAD LOCK HAVING SECONDARY ISOLATION CHAMBER
    Publication number: 20130239879
    Abstract: A load lock includes a chamber including an upper portion, a lower portion, and a partition between the upper portion and the lower portion, the partition including an opening therethrough. The load lock further includes a first port in communication with the upper portion of the chamber and a second port in communication with the lower portion of the chamber. The load lock includes a rack disposed within the chamber and a workpiece holder mounted on a first surface of the rack, wherein the rack and the workpiece holder are movable by an indexer that is capable of selectively moving wafer slots of the rack into communication with the second port. The indexer can also move the rack into an uppermost position, at which the first surface of the boat and the partition sealingly separate the upper portion and the lower portion to define an upper chamber and a lower chamber. Auxiliary processing, such as wafer pre-cleaning, or metrology can be conducted in the upper portion.
    Type: Application
    Filed: May 8, 2013
    Publication date: September 19, 2013
    Applicant: ASM AMERICA, INC.
    Inventors: Ravinder K. Aggarwal, Jeroen Stoutjesdijk, Eric R. Hill, Loring G. Davis, John T. DiSanto
  • Load lock having secondary isolation chamber
    Patent number: 8440048
    Abstract: A load lock includes a chamber including an upper portion, a lower portion, and a partition between the upper portion and the lower portion, the partition including an opening therethrough. The load lock further includes a first port in communication with the upper portion of the chamber and a second port in communication with the lower portion of the chamber. The load lock includes a rack disposed within the chamber and a workpiece holder mounted on a first surface of the rack, wherein the rack and the workpiece holder are movable by an indexer that is capable of selectively moving wafer slots of the rack into communication with the second port. The indexer can also move the rack into an uppermost position, at which the first surface of the boat and the partition sealingly separate the upper portion and the lower portion to define an upper chamber and a lower chamber. Auxiliary processing, such as wafer pre-cleaning, or metrology can be conducted in the upper portion.
    Type: Grant
    Filed: January 27, 2010
    Date of Patent: May 14, 2013
    Assignee: ASM America, Inc.
    Inventors: Ravinder Aggarwal, Jeroen Stoutjesdijk, Eric Hill, Loring G. Davis, John T. DiSanto
  • LOAD LOCK HAVING SECONDARY ISOLATION CHAMBER
    Publication number: 20100190343
    Abstract: A load lock includes a chamber including an upper portion, a lower portion, and a partition between the upper portion and the lower portion, the partition including an opening therethrough. The load lock further includes a first port in communication with the upper portion of the chamber and a second port in communication with the lower portion of the chamber. The load lock includes a rack disposed within the chamber and a workpiece holder mounted on a first surface of the rack, wherein the rack and the workpiece holder are movable by an indexer that is capable of selectively moving wafer slots of the rack into communication with the second port. The indexer can also move the rack into an uppermost position, at which the first surface of the boat and the partition sealingly separate the upper portion and the lower portion to define an upper chamber and a lower chamber. Auxiliary processing, such as wafer pre-cleaning, or metrology can be conducted in the upper portion.
    Type: Application
    Filed: January 27, 2010
    Publication date: July 29, 2010
    Applicant: ASM AMERICA, INC.
    Inventors: Ravinder Aggarwal, Jeroen Stoutjesdijk, Eric Hill, Loring G. Davis, John T. DiSanto