Abstract: A system, method, and apparatus for real-time characterization of drilled particles during a drilling operation can be comprised of a light illumination source to output short-wave-infrared (SWIR) light toward the drilled particles as the drilled particles exit a drill hole being drilled by a drilling machine; a sensor to sense reflected short-wave-infrared (SWIR) light reflected from the drilled particles exiting the drill hole; and processing circuitry operatively coupled to at least the sensor. The processing circuitry can be configured to determine a spectrum of the reflected short-wave-infrared light sensed by the sensor, and determine particle characterization for a portion of the drilled particles by performing hyperspectral analysis on the determined spectrum and based on predetermined candidate particle characterizations.

Abstract: A system, method, and apparatus for real-time characterization of drilled particles during a drilling operation can be comprised of a light illumination source to output short-wave-infrared (SWIR) light toward the drilled particles as the drilled particles exit a drill hole being drilled by a drilling machine; a sensor to sense reflected short-wave-infrared (SWIR) light reflected from the drilled particles exiting the drill hole; and processing circuitry operatively coupled to at least the sensor. The processing circuitry can be configured to determine a spectrum of the reflected short-wave-infrared light sensed by the sensor, and determine particle characterization for a portion of the drilled particles by performing hyperspectral analysis on the determined spectrum and based on predetermined candidate particle characterizations.

Abstract: An interlevel dielectric layer, such as a silicon oxide layer, is selectively etched using a plasma etch chemistry including a silicon species and a halide species and also preferably a carbon species and an oxygen species. The silicon species can be generated from a silicon compound, such as SixMyHz, where “Si” is silicon, “M” is one or more halogens, “H” is hydrogen and x?1, y?0 and z?0. The carbon species can be generated from a carbon compound, such as C?M?H?, where “C” is carbon, “M” is one or more halogens, “H” is hydrogen, and ??1, ??0 and ??0. The oxygen species can be generated from an oxygen compound, such as O2, which can react with carbon to form a volatile compound.