Patents by Inventor Makoto Furuhata

Makoto Furuhata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240092528
    Abstract: Provided is a cushioning material obtained by stacking a plurality of cushioning sheets, in which the plurality of cushioning sheets include a first cushioning sheet, a second cushioning sheet having a strength stronger than that of the first cushioning sheet, and a third cushioning sheet having a strength stronger than that of the second cushioning sheet.
    Type: Application
    Filed: September 13, 2023
    Publication date: March 21, 2024
    Inventors: Michiko KAWAJI, Makoto FURUHATA
  • Publication number: 20240092554
    Abstract: A cushioning sheet includes a first portion provided in a first area, and a second portion provided in a second area and having a strength stronger than that of the first portion.
    Type: Application
    Filed: September 13, 2023
    Publication date: March 21, 2024
    Inventors: Michiko KAWAJI, Sanshiro TAKESHITA, Makoto FURUHATA
  • Patent number: 11690594
    Abstract: A piezoelectric actuator includes: a vibrating plate including a first surface configured to close an opening provided in a substrate and also including a second surface including a plurality of piezoelectric elements; a suppressing portion configured to suppress vibration of the vibrating plate; and a plurality of walls sticking out into the opening from the first surface, in which, when an active portion of a piezoelectric element is set as a portion where a first electrode, a piezoelectric layer, and a second electrode overlap, the walls are provided between adjacent active portions in plan view from a direction in which the first electrode, the piezoelectric layer, and the second electrode are stacked, and a distance between adjacent walls is longer than a distance between adjacent active portions in a plane perpendicular to the stacking direction.
    Type: Grant
    Filed: November 15, 2021
    Date of Patent: July 4, 2023
    Inventors: Chikara Kojima, Koji Ohashi, Makoto Furuhata
  • Patent number: 11561101
    Abstract: A physical quantity sensor includes a substrate, a movable body that includes a movable drive electrode, a movable detection electrode, and a connection portion for connecting the movable drive electrode and the movable detection electrode and is allowed to vibrate along a first axis with respect to the substrate, a fixed drive electrode that is fixed to the substrate, is disposed to face the movable drive electrode, and vibrates the movable body along the first axis, and a fixed monitor electrode that is fixed to the substrate, is disposed to face the movable detection electrode and detects vibration of the movable body along the first axis.
    Type: Grant
    Filed: September 28, 2018
    Date of Patent: January 24, 2023
    Inventors: Makoto Furuhata, Takayuki Kikuchi, Kazuyuki Nagata
  • Publication number: 20220160331
    Abstract: A piezoelectric actuator includes a vibrating plate including a first surface that closes an opening provided in a substrate and a second surface in which a plurality of piezoelectric elements is provided, a suppression part configured to suppress a vibration of the vibrating plate, and a first wall and a second wall protruding from the first surface to the opening. When a portion where the first electrode, the piezoelectric layer and the second electrode overlap each other is an active part of the piezoelectric element, the first wall and the second wall are provided to sandwich the active part in plan view from the stacking direction of the first electrode, the piezoelectric layer and the second electrode, and the second wall is different from the first wall at least in one of the width, height, length and physical property.
    Type: Application
    Filed: November 24, 2021
    Publication date: May 26, 2022
    Inventors: Koji OHASHI, Chikara KOJIMA, Makoto FURUHATA, Tomohide ONOGI, Tomohiro SAYAMA
  • Publication number: 20220151590
    Abstract: A piezoelectric actuator includes: a vibrating plate including a first surface configured to close an opening provided in a substrate and also including a second surface including a plurality of piezoelectric elements; a suppressing portion configured to suppress vibration of the vibrating plate; and a plurality of walls sticking out into the opening from the first surface, in which, when an active portion of a piezoelectric element is set as a portion where a first electrode, a piezoelectric layer, and a second electrode overlap, the walls are provided between adjacent active portions in plan view from a direction in which the first electrode, the piezoelectric layer, and the second electrode are stacked, and a distance between adjacent walls is longer than a distance between adjacent active portions in a plane perpendicular to the stacking direction.
    Type: Application
    Filed: November 15, 2021
    Publication date: May 19, 2022
    Inventors: Chikara KOJIMA, Koji Ohashi, Makoto Furuhata
  • Patent number: 11181547
    Abstract: An inertial sensor includes a substrate, a first detection movable body and a second detection movable body which overlap the substrate in a direction along the Z-axis and are disposed side by side in a direction along the X-axis, a first detection spring that supports the first detection movable body to be displaceable in the direction along the X-axis, a second detection spring that supports the second detection movable body to be displaceable in the direction along the X-axis, a first drive portion that drives the first detection movable body with a drive component in the direction along the X-axis, a second drive portion that drives the second detection movable body with the drive component in the direction along the X-axis, and a first and second fixed detection electrodes disposed on the substrate and facing the first and second detection movable bodies.
    Type: Grant
    Filed: November 25, 2019
    Date of Patent: November 23, 2021
    Assignee: Seiko Epson Corporation
    Inventor: Makoto Furuhata
  • Patent number: 11084712
    Abstract: A physical quantity sensor includes a movable body and a spring that supports the movable body. The spring includes an arm having an elongate shape in a first direction, and a first beam and a second beam that are adjacent to the arm and are disposed in the first direction. An end portion of the first beam on the second beam side and an end portion of the second beam on the first beam side are disposed side by side in a second direction orthogonal to the first direction. The beams preferably are protective of the side surfaces of the spring arm, function to enable arm machining accuracy, reduce shape deviations, and reduce the occurrence of quadrature. The sensor exemplarily may detect angular rate or acceleration.
    Type: Grant
    Filed: November 27, 2018
    Date of Patent: August 10, 2021
    Inventor: Makoto Furuhata
  • Patent number: 10969224
    Abstract: A physical quantity sensor includes a movable body and first and second detection electrodes facing the movable body with a separation distance between the movable body and the second detection electrode that is different from that between the movable body and the first detection electrode. The movable body and the first detection electrode are aligned to face one another in a first direction. Vibration of the movable body includes a drive vibration mode in which vibration in the first direction and vibration in a second direction orthogonal to the first direction are combined. To account for this drive vibration mode, an area of the second detection electrode is shifted to be greater in the second direction from its center in a plan view.
    Type: Grant
    Filed: January 30, 2019
    Date of Patent: April 6, 2021
    Inventors: Makoto Furuhata, Hajime Tomiyama
  • Patent number: 10823570
    Abstract: A physical quantity sensor includes: a base substrate; a first wiring portion that is fixed to the base substrate; a second wiring portion that is fixed to the base substrate and has at least a part disposed in parallel to the first wiring portion; and an electrode portion that is disposed in the base substrate and has a reference potential. The electrode portion is disposed between the base substrate, and the first and second wiring portions. At least parts of the first and second wiring portions overlap the electrode portion in a plan view.
    Type: Grant
    Filed: March 21, 2018
    Date of Patent: November 3, 2020
    Assignee: Seiko Epson Corporation
    Inventors: Kei Kanemoto, Makoto Furuhata
  • Patent number: 10697773
    Abstract: A physical quantity sensor includes a driven section and a drive spring that supports the driven section so that the driven section is displaceable in a first direction. The drive spring has a serpentine shape and includes a plurality of spring structures extending in a second direction that intersects a first direction. At least one of the spring structures has a thin section that is thinner in a third direction that intersects the first and second directions than the other portions of the drive spring.
    Type: Grant
    Filed: April 9, 2018
    Date of Patent: June 30, 2020
    Assignee: Seiko Epson Corporation
    Inventors: Makoto Furuhata, Kei Kanemoto
  • Publication number: 20200166539
    Abstract: An inertial sensor includes a substrate, a first detection movable body and a second detection movable body which overlap the substrate in a direction along the Z-axis and are disposed side by side in a direction along the X-axis, a first detection spring that supports the first detection movable body to be displaceable in the direction along the X-axis, a second detection spring that supports the second detection movable body to be displaceable in the direction along the X-axis, a first drive portion that drives the first detection movable body with a drive component in the direction along the X-axis, a second drive portion that drives the second detection movable body with the drive component in the direction along the X-axis, and a first and second fixed detection electrodes disposed on the substrate and facing the first and second detection movable bodies.
    Type: Application
    Filed: November 25, 2019
    Publication date: May 28, 2020
    Inventor: Makoto FURUHATA
  • Patent number: 10386186
    Abstract: A physical quantity sensor includes a substrate, a detection flap plate which is disposed facing the substrate, a mass portion which supports the detection flap plate, a beam portion which connects the detection flap plate and the mass portion, and a first regulating portion which is positioned between the detection flap plate and the mass portion and regulates displacement of the detection flap plate in an in-plane direction. In addition, the first regulating portion is provided in a corner portion of the detection flap plate which is formed in a rectangular shape.
    Type: Grant
    Filed: September 12, 2016
    Date of Patent: August 20, 2019
    Assignee: Seiko Epson Corporation
    Inventor: Makoto Furuhata
  • Publication number: 20190234734
    Abstract: A physical quantity sensor includes a movable body and first and second detection electrodes facing the movable body with a separation distance between the movable body and the second detection electrode that is different from that between the movable body and the first detection electrode. The movable body and the first detection electrode are aligned to face one another in a first direction. Vibration of the movable body includes a drive vibration mode in which vibration in the first direction and vibration in a second direction orthogonal to the first direction are combined. To account for this drive vibration mode, an area of the second detection electrode is shifted to be greater in the second direction from its center in a plan view.
    Type: Application
    Filed: January 30, 2019
    Publication date: August 1, 2019
    Inventors: Makoto FURUHATA, Hajime TOMIYAMA
  • Publication number: 20190162749
    Abstract: A physical quantity sensor includes a movable body and a spring that supports the movable body. The spring includes an arm having an elongate shape in a first direction, and a first beam and a second beam which are adjacent to the arm and are disposed in the first direction. An end portion of the first beam on the second beam side and an end portion of the second beam on the first beam side are disposed side by side in a second direction orthogonal to the first direction.
    Type: Application
    Filed: November 27, 2018
    Publication date: May 30, 2019
    Inventor: Makoto Furuhata
  • Publication number: 20190162619
    Abstract: A physical quantity sensor includes a substrate, a sensor element supported on the substrate, and a lid bonded to the substrate so as to store the sensor element between the substrate and the lid. The lid includes a protrusion on the substrate side. The protrusion is disposed not to overlap the sensor element in plan view of the substrate. The protrusion is separated from the substrate or is in contact with the substrate so as to be capable of being separated from the substrate.
    Type: Application
    Filed: November 20, 2018
    Publication date: May 30, 2019
    Inventor: Makoto FURUHATA
  • Publication number: 20190101395
    Abstract: A physical quantity sensor includes a substrate, a movable body that includes a movable drive electrode, a movable detection electrode, and a connection portion for connecting the movable drive electrode and the movable detection electrode and is allowed to vibrate along a first axis with respect to the substrate, a fixed drive electrode that is fixed to the substrate, is disposed to face the movable drive electrode, and vibrates the movable body along the first axis, and a fixed monitor electrode that is fixed to the substrate, is disposed to face the movable detection electrode and detects vibration of the movable body along the first axis.
    Type: Application
    Filed: September 28, 2018
    Publication date: April 4, 2019
    Inventors: Makoto FURUHATA, Takayuki KIKUCHI, Kazuyuki NAGATA
  • Patent number: 10215566
    Abstract: An oscillator includes a substrate, a detection flap plate which is disposed facing the substrate, and an elastically deformable beam portion which displaceably supports the detection flap plate in a Z axis direction with respect to the substrate, in which the detection flap plate is displaced to the substrate side in a range in which recovery force of the beam portion is larger than the electrostatic force which is formed between the substrate and the detection flap plate. That is, when a boundary at which electrostatic force and recovery force are equal is a pull in critical point, the detection flap plate is displaced within a region above the pull in critical point.
    Type: Grant
    Filed: September 9, 2016
    Date of Patent: February 26, 2019
    Assignee: Seiko Epson Corporation
    Inventor: Makoto Furuhata
  • Publication number: 20180306581
    Abstract: A physical quantity sensor includes a driven section and a drive spring that supports the driven section so that the driven section is displaceable in a first direction. The drive spring has a serpentine shape and includes a plurality of spring structures extending in a second direction that intersects a first direction. At least one of the spring structures has a thin section that is thinner in a third direction that intersects the first and second directions than the other portions of the drive spring.
    Type: Application
    Filed: April 9, 2018
    Publication date: October 25, 2018
    Inventors: Makoto FURUHATA, Kei KANEMOTO
  • Publication number: 20180283868
    Abstract: A physical quantity sensor includes: a base substrate; a first wiring portion that is fixed to the base substrate; a second wiring portion that is fixed to the base substrate and has at least a part disposed in parallel to the first wiring portion; and an electrode portion that is disposed in the base substrate and has a reference potential. The electrode portion is disposed between the base substrate, and the first and second wiring portions. At least parts of the first and second wiring portions overlap the electrode portion in a plan view.
    Type: Application
    Filed: March 21, 2018
    Publication date: October 4, 2018
    Inventors: Kei KANEMOTO, Makoto FURUHATA