Patents by Inventor Makoto Miura

Makoto Miura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210082766
    Abstract: In a manufacturing process of a three-dimensional structure device such as a GAA type FET or a nanosheet fork type FET having stacked channels in which channels having a shape of a wire or a sheet are stacked in a direction vertical to a substrate, a work function control metal is separately formed without expanding a space between FETs having different threshold voltages. Therefore, a first step S10 of performing anisotropic etching to open the mask material 23 until the work function control metal film 22 is exposed; a second step S11 of depositing a protective film 26; a third step S12 of performing anisotropic etching to remove the protective film while remaining the protective film deposited on sidewalls of the mask material opened in the first step; and a fourth step S13 of performing isotropic etching to selectively remove the mask material between the channels relative to the protective film and the work function control metal film are executed.
    Type: Application
    Filed: September 13, 2019
    Publication date: March 18, 2021
    Applicant: Hitachi High-Tech Corporation
    Inventors: Makoto Miura, Kiyohiko Sato, Yasushi Sonoda, Satoshi Sakai
  • Publication number: 20210048572
    Abstract: Provided is a light control film capable of gradually changing the in-plane transmittance and thereby adding an in-plane gradation between light and dark. A light control film 10 according to the present invention includes: a first electrode 22A and a second electrode 22B disposed facing each other; a light control material 14 disposed between the first electrode 22A and the second electrode 22B and changing the transmittance in accordance with the potential difference between the first electrode 22A and the second electrode 22B; and a potential gradient forming part for providing the gradient of the potential difference in the extension direction of the first electrode 22A and the second electrode 22B.
    Type: Application
    Filed: November 4, 2020
    Publication date: February 18, 2021
    Applicant: DAI NIPPON PRINTING CO., LTD.
    Inventors: Keisuke Miura, Yusuke Hagiwara, Yasunori Hayashida, Makoto Yamaki
  • Patent number: 10902849
    Abstract: A non-transitory computer-readable storage medium storing a program that causes a computer to execute a process, the computer controlling an utterance of a robot, the process including detecting an utterance of a person by using a microphone, obtaining, in response to the detecting, pieces of response information for the utterance of the person based on first information indicating a content of the utterance of the person, obtaining second information relating to at least one of the person and a motion of the person other than the utterance of the person, selecting specified response information among the pieces of response information based on the second information, and transmitting, to the robot, an instruction that causes the robot to execute a response in accordance with the specified response information.
    Type: Grant
    Filed: March 26, 2018
    Date of Patent: January 26, 2021
    Assignee: FUJITSU LIMITED
    Inventors: Kenichiro Maeda, Masaki Miura, Makoto Hyuga
  • Patent number: 10892158
    Abstract: A manufacturing process of a semiconductor device including a SiGe channel can form a Si segregation layer for protecting the SiGe channel without damaging the SiGe channel. A manufacturing method of a semiconductor device includes: a first step for performing plasma processing on a semiconductor substrate having a silicon layer and a silicon germanium layer formed on the silicon layer under a first condition to expose the silicon germanium layer; and a second step for performing plasma processing on the semiconductor substrate under a second condition to segregate silicon on the surface of the exposed silicon germanium layer. The silicon germanium layer or layers lying adjacent to the silicon germanium layer can be etched under the first condition, hydrogen plasma processing is performed under the second condition, and the first step and the second step are executed in series in the same processing chamber of a plasma processing apparatus.
    Type: Grant
    Filed: April 1, 2019
    Date of Patent: January 12, 2021
    Assignee: HITACHI HIGH-TECH CORPORATION
    Inventors: Makoto Miura, Yohei Ishii, Satoshi Sakai, Kenji Maeda
  • Patent number: 10870431
    Abstract: A vehicle control device includes an imaging unit that images surroundings of an own-vehicle, a detector that detects a state of an external appearance of an oncoming vehicle facing the own-vehicle in a tunnel on the basis of an image captured by the imaging unit, and a determiner that determines whether or not the state of the external appearance of the oncoming vehicle satisfies a predetermined condition on the basis of the state of the external appearance of the oncoming vehicle detected by the detector and determines that the outside of the tunnel toward which the own-vehicle is traveling has bad weather if the state of the external appearance of the oncoming vehicle satisfies the predetermined condition.
    Type: Grant
    Filed: November 14, 2018
    Date of Patent: December 22, 2020
    Assignee: HONDA MOTOR CO., LTD.
    Inventors: Koji Kawabe, Hiroshi Miura, Makoto Ishikawa, Masamitsu Tsuchiya
  • Patent number: 10865692
    Abstract: A cooling control system for a working machine includes a fan, a housing to which the fan is attached, a prime mover having an output shall, a rotor to be rotated by a rotating power of the output shaft and to be rotated with the housing by a fluid introduced to a gap formed between the housing and the rotor, a fluid setting circuit to set an introduction amount of the fluid introduced to the gap, and a control device to control the fluid setting circuit to control the fan. The control device includes a setting circuit to set a target rotation speed of the fan based on a responsiveness of an actual rotation speed of the fan at time of changing of the target rotation speed of the fan.
    Type: Grant
    Filed: June 21, 2018
    Date of Patent: December 15, 2020
    Assignee: KUBOTA CORPORATION
    Inventors: Ryosuke Kinugawa, Nozomu Minagawa, Hiroshi Tatsumi, Keisuke Miura, Makoto Noguchi
  • Publication number: 20200384520
    Abstract: A crowning method applied to a press brake including an upper table and a lower table as being vertically opposed to each other and including first slits opened in right and left directions on both right and left sides of the upper table or the lower table, is by deforming end sides of upper portions or lower portions of the first slits of the upper table or the lower table upward or downward to carry out a crowning regulation.
    Type: Application
    Filed: February 14, 2019
    Publication date: December 10, 2020
    Inventors: Taishi SUZUKI, Koutaku MIURA, Makoto AOKI
  • Publication number: 20200385860
    Abstract: A disclosed metal oxide thin film formation apparatus is equipped with: a vacuum vessel; a treatment vessel which is disposed inside the vacuum vessel, is capable of horizontally rotating about a central axis inclined from the horizontal direction, and has an opening on one end face thereof; an oxidizing gas supply device which supplies an oxidizing gas into the vacuum vessel; an organic metal gas supply device which is inserted inward from the opening and supplies an organic metal gas; and a control unit for executing a series of steps, namely, an organic metal gas supply step, a first gas discharge step, an oxidizing gas supply step, and a second gas discharge step, and repeating the series of steps through for a predetermined number of times in accordance with the film thickness of the metal oxide thin film to be formed on the surfaces of microparticles.
    Type: Application
    Filed: November 15, 2018
    Publication date: December 10, 2020
    Inventors: Fumihiko HIROSE, Makoto ISHIKAWA, Masanori MIURA
  • Patent number: 10854481
    Abstract: A substrate processing method includes holding a substrate horizontally, supplying water-containing processing liquid to an upper surface of the substrate, forming a low surface tension liquid film, covering the upper surface by supplying that liquid to the substrate's upper surface, supplying a gas to a center region of the liquid film to form an opening in the center, widening the opening in order to remove the film, rotating the substrate around a predetermined rotational axis along a vertical direction, blowing, in the opening widening step, the gas toward a gas supply position that is set further inward than a peripheral edge of the opening on the upper surface of the substrate, and moving the gas supply position toward the peripheral edge of the upper surface of the substrate, and supplying, the low surface tension liquid toward a liquid landing position that is set further outward and moving the liquid landing position toward the peripheral edge of the upper surface of the substrate.
    Type: Grant
    Filed: July 23, 2018
    Date of Patent: December 1, 2020
    Inventors: Shigeki Tanizawa, Nobuyuki Miyaji, Makoto Takaoka, Naoki Sawazaki, Tsuyoshi Okumura, Atsuyasu Miura
  • Patent number: 10845522
    Abstract: A light control film is capable of gradually changing the in-plane transmittance and thereby adding an in-plane gradation between light and dark. A light control film includes: a first electrode and a second electrode disposed facing each other; a light control material disposed between the first electrode and the second electrode and changing the transmittance in accordance with the potential difference between the first electrode and the second electrode; and a potential gradient forming part for providing the gradient of the potential difference in the extension direction of the first electrode and the second electrode.
    Type: Grant
    Filed: June 16, 2017
    Date of Patent: November 24, 2020
    Assignee: DAI NIPPON PRINTING CO., LTD.
    Inventors: Keisuke Miura, Yusuke Hagiwara, Yasunori Hayashida, Makoto Yamaki
  • Patent number: 10847298
    Abstract: A coil device includes a conductor and a terminal electrode. The conductor is embedded in a core body and wound in a coil shape. The terminal electrode is formed on an end surface of the core body and connected with a lead end of the conductor. The coil device further includes a dummy conductor embedded in the core body separately from the conductor. An end part of the dummy conductor exposed from the end surface of the core body separately from the lead end is connected with the terminal electrode.
    Type: Grant
    Filed: February 1, 2018
    Date of Patent: November 24, 2020
    Assignee: TDK CORPORATION
    Inventors: Takashi Kudo, Makoto Morita, Fuyuki Miura, Naoki Satou, Kyohei Tonoyama, Yasunori Chiba, Masanori Sugai, Junichi Aoyado
  • Patent number: 10839680
    Abstract: A vehicle control device (100) comprising: a recognizer (130) recognizing surrounding situations of a vehicle; a setting unit (154) setting a virtual lane in an area inside a crossing that is present in an advancement direction of the vehicle on the basis of a recognition result acquired by the recognizer; and a driving controller (150, 160) controlling one or both of steering and acceleration/deceleration of the vehicle and causing the vehicle to run within the virtual lane and pass through the crossing in a case in which an object recognized by the recognizer is not present on the virtual lane, wherein, in a case in which an area inside the crossing has a width for which only one virtual lane is settable, the driving controller handles an oncoming vehicle recognized by the recognizer as an object present on the virtual lane.
    Type: Grant
    Filed: September 5, 2018
    Date of Patent: November 17, 2020
    Assignee: HONDA MOTOR CO., LTD.
    Inventors: Koji Kawabe, Hiroshi Miura, Makoto Ishikawa, Masamitsu Tsuchiya
  • Patent number: 10835875
    Abstract: A peak intensity of a (110) plane is greater than or equal to 2.5 times a peak intensity of a (004) plane in an X-ray diffraction pattern obtained by irradiation of X-rays to a membrane surface of the AFX membrane.
    Type: Grant
    Filed: September 17, 2019
    Date of Patent: November 17, 2020
    Assignee: NGK Insulators, Ltd.
    Inventors: Takeshi Hagio, Kenichi Noda, Makoto Miyahara, Katsuya Shimizu, Aya Miura, Ryotaro Yoshimura
  • Publication number: 20200339156
    Abstract: A vehicle control device includes: a recognizer configured to recognize a surrounding environment of an own vehicle; and a driving controller configured to perform driving control of the own vehicle with reference to a recognition result by the recognizer and configured to determine whether the own vehicle is caused to travel behind a first vehicle or the own vehicle is caused to travel behind a second vehicle traveling in a second traveling lane based on a state of the second traveling lane of a destination to which the first vehicle moves to avoid an obstacle by steering when the recognizer recognizes the first vehicle which is traveling in front of the own vehicle in a first traveling lane in which the own vehicle is traveling and the obstacle which is in front of the first vehicle.
    Type: Application
    Filed: December 27, 2017
    Publication date: October 29, 2020
    Inventors: Masamitsu Tsuchiya, Hiroshi Miura, Makoto Ishikawa, Koji Kawabe
  • Patent number: 10796570
    Abstract: A vehicle control device (100) includes: a detection device having a detection area in an advancement direction of a vehicle; and a crossing recognizer (132) determining whether or not a concave part extending in a direction intersecting the advancement direction is present on the basis of an output of the detection device and recognizing presence of a crossing in the advancement direction of the vehicle in a case in which a concave part is determined as being present.
    Type: Grant
    Filed: September 5, 2018
    Date of Patent: October 6, 2020
    Assignee: HONDA MOTOR CO., LTD.
    Inventors: Hiroshi Miura, Makoto Ishikawa, Masamitsu Tsuchiya, Koji Kawabe
  • Publication number: 20200312658
    Abstract: A manufacturing process of a semiconductor device including a SiGe channel can form a Si segregation layer for protecting the SiGe channel without damaging the SiGe channel. A manufacturing method of a semiconductor device includes: a first step for performing plasma processing on a semiconductor substrate having a silicon layer and a silicon germanium layer formed on the silicon layer under a first condition to expose the silicon germanium layer; and a second step for performing plasma processing on the semiconductor substrate under a second condition to segregate silicon on the surface of the exposed silicon germanium layer. The silicon germanium layer or layers lying adjacent to the silicon germanium layer can be etched under the first condition, hydrogen plasma processing is performed under the second condition, and the first step and the second step are executed in series in the same processing chamber of a plasma processing apparatus.
    Type: Application
    Filed: April 1, 2019
    Publication date: October 1, 2020
    Inventors: Makoto MIURA, Yohei ISHII, Satoshi SAKAI, Kenji MAEDA
  • Patent number: 10777077
    Abstract: A vehicle control device (100) includes: an imager imaging the vicinity of a vehicle; a position identifying unit identifying a position of the vehicle; and a crossing recognizer (132) recognizing the presence of a crossing ahead in running of the vehicle on the basis of the position identified by the position identifying unit and map information and raising a degree of certainty in the presence of the crossing ahead in running of the vehicle on the basis of an element of a specific color, which represents the presence of a crossing, included in an image captured by the imager.
    Type: Grant
    Filed: September 5, 2018
    Date of Patent: September 15, 2020
    Assignee: HONDA MOTOR CO., LTD.
    Inventors: Makoto Ishikawa, Hiroshi Miura, Masamitsu Tsuchiya, Koji Kawabe
  • Patent number: 10717439
    Abstract: There is provided a traveling control system. The traveling control system includes a first acquisition unit configured to acquire peripheral information of a self-vehicle, a second acquisition unit configured to acquire predetermined road information, a specifying unit configured to specify, based on the peripheral information acquired by the first acquisition unit, a width of a road on which the self-vehicle travels, and a control unit configured to perform traveling control based on a smaller one of a width of a road indicated by the road information acquired by the second acquisition unit and the width of the road specified by the specifying unit.
    Type: Grant
    Filed: August 31, 2018
    Date of Patent: July 21, 2020
    Assignee: HONDA MOTOR CO., LTD
    Inventors: Hiroshi Miura, Makoto Yuzawa
  • Publication number: 20200144081
    Abstract: A substrate processing method includes a liquid discharging step of discharging liquid through a nozzle toward a predetermined supply region on the main surface of a substrate held on a substrate holding unit within a chamber, a humidified gas supplying step of supplying humidified gas with a humidity higher than the humidity within the chamber onto the main surface of the substrate to remove electrical charges carried on the substrate, and a spin-drying step of rotating the substrate about a predetermined rotational axis after the liquid discharging step to spin off the liquid component from the main surface of the substrate. The humidified gas supplying step is started before the start of the liquid discharging step and ended at a predetermined termination timing after the start of the liquid discharging step and before the spin-drying step.
    Type: Application
    Filed: April 17, 2018
    Publication date: May 7, 2020
    Inventors: Hiroki TSUJIKAWA, Masato TANAKA, Tsuyoshi OKUMURA, Atsuyasu MIURA, Makoto TAKAOKA, Nobuyuki MIYAJI, Kazuhiro FUJITA, Naoki SAWAZAKI, Takashi AKIYAMA, Yuya TSUCHIHASHI
  • Patent number: 10641910
    Abstract: A radiological image conversion panel 2 is provided with a phosphor 18 containing a fluorescent material that emits fluorescence by radiation exposure, in which the phosphor includes, a columnar section 34 formed by a group of columnar crystals which are obtained through columnar growth of crystals of the fluorescent material, and a non-columnar section 36, the columnar section and the non-columnar section are integrally formed to overlap in a crystal growth direction of the columnar crystals, and a thickness of the non-columnar section along the crystal growth direction is non-uniform in a region of at least a part of the non-columnar section.
    Type: Grant
    Filed: October 10, 2018
    Date of Patent: May 5, 2020
    Assignee: FUJIFILM Corporation
    Inventors: Yasuhisa Kaneko, Haruyasu Nakatsugawa, Keiichirou Sato, Makoto Kitada, Kei Miura