Abstract: The present invention is a pattern forming method of forming a pattern on a substrate using a block copolymer, the pattern forming method including the steps of: forming a film of a block copolymer containing at least two kinds of polymers on the substrate; heating the film of the block copolymer; irradiating the heated film of the block copolymer with ultraviolet light in an atmosphere of an inert gas; and supplying an organic solvent to the film of the block copolymer irradiated with the ultraviolet light.

Abstract: The electric brake actuator with a parking function is provided with: detection unit which is provided in a vehicle in which the electric brake actuator is provided and is capable of detecting movement of the vehicle from a stop state; and determination unit configured to determine whether or not a locking mechanism has shifted to a parking locking state, by using a detection signal outputted from the detection unit, when the locking mechanism is driven by an actuator so as to switch from an unlocking state to the parking locking state.

Abstract: An electric linear motion actuator includes planetary rollers mounted between the radially inner surface of an outer ring member and the radially outer surface of a rotary shaft, and a carrier rotatable about the rotary shaft and including radially movable roller shafts rotatably supporting the respective planetary rollers. Elastic rings each having circumferentially separate ends are each wrapped around the roller shafts to radially inwardly bias the roller shafts, thereby bringing the respective planetary rollers into elastic contact with the radially outer surface of the rotary shaft. Each elastic ring is prevented from rotating relative to the roller shafts, thereby preventing one of the roller shafts from being axially aligned with the gap between the circumferential separate ends, causing the elastic ring to be radially compressed and thus making it impossible for the elastic rings to radially bias the roller shafts.

Abstract: A photoresist pattern used for forming a pattern of a block copolymer is formed on a substrate, and then an acid solution is supplied and an alkaline solution is further supplied to the photoresist pattern so as to slim and smooth the photoresist pattern. A block copolymer solution is applied to the substrate on which the smoothed photoresist pattern has been formed, to form a film of the block copolymer, and the film is heated.

Abstract: An electric brake device includes an electric motor; a braking force application mechanism configured to apply a braking force on a vehicle wheel; a lock mechanism configured to assume one of a locked condition; a temperature sensor configured to measure an ambient temperature of a vehicle; and a freezing preventive power supply unit configured to initiate supply of an electric power to the electric motor or a drive source of the lock mechanism. The freezing preventive power supply unit interrupts the supply of the electric power to the electric motor or the drive source of the lock mechanism when the temperature detected by the temperature sensor exceeds a second preset temperature T2 that is higher than a first preset temperature T1.

Abstract: The present invention, when forming a pattern on a substrate, forms a film of a block copolymer containing at least two polymers on the substrate, heats the film of the block copolymer under a solvent vapor atmosphere to subject the block copolymer to phase separation, and removes one of the polymers in the film of the phase-separated block copolymer, thereby accelerating fluidization of the polymers of the block copolymer to enable acceleration of the phase separation.

Abstract: A linear motion actuator includes an outer ring member mounted in a housing, a rotary shaft rotated by a motor, planetary rollers mounted between the outer ring member and the shaft and supported by a carrier rotatable about the shaft. A helical rib is formed on the inner surface of the outer ring member which is engaged in helical grooves formed in outer surfaces of the planetary rollers. When the shaft rotates, the planetary rollers rotate and revolve, thereby axially moving the outer ring member. Uneven axial loads applied to the planetary rollers from the outer ring member are supported by thrust bearings disposed between the planetary rollers and an inner disk of the carrier. Aligning seats are provided between each opposed pair of the planetary rollers and the thrust bearings such that the contact surfaces of the aligning seats shift relative to each other under the uneven axial loads.

Abstract: A magnetic load sensor unit for use in a linear motion actuator is provided which is less likely to suffer from hysteresis errors during use while being mounted in the linear motion actuator, and which can reduce the axial length of the linear motion actuator. The magnetic load sensor unit is configured to detect the magnitude of an axial load applied to an object from the linear motion actuator. The sensor unit includes a flange member configured to be deflected when a reaction force to the axial load is received through a thrust bearing, a magnetic target which generates magnetic fields; and a magnetic sensor arranged such that its position relative to the magnetic target changes when the flange member is deflected. The flange member has an axial end surface in which a groove is formed with which rolling elements of the thrust bearing are in rolling contact.

Abstract: An electric brake device includes an electric motor, a braking force application mechanism, a lock mechanism, a temperature sensor for measuring an ambient temperature of a vehicle in which the electric brake device is provided, and a freezing preventive power supply unit. The freezing preventive power supply unit initiates the supply of an electric power to the electric motor or a drive source of the lock mechanism in the event that while the braking force application mechanism applies a braking force and the lock mechanism is held in a locked condition, the temperature sensor detects a preset temperature of the electric brake device immediately before freezing.

Abstract: A method is provided for forming a patterned topography on a substrate. The substrate is provided with features formed atop that constitute an existing topography, and a template for directed self-assembly (DSA) is formed surrounding the exposed topography. Further to the method, the exposed template surfaces are chemically treated. In one embodiment, the surfaces are treated with a hydrogen-containing reducing chemistry to alter the surfaces to a less oxidized state. In another embodiment, the surfaces are coated with a first phase of a block copolymer (BCP) to render the surfaces more attractive to the first phase than prior to the coating. The template is then filled with the BCP to cover the exposed topography, and then the BCP is annealed within the template to drive self-assembly in alignment with the topography. Developing the annealed BCP exposes a DSA pattern immediately overlying the topography.

Abstract: An electric linear motion actuator includes: a rotary shaft to be driven by an electric motor; a plurality of planetary rollers kept in rolling contact with a cylindrical surface formed on an outer periphery of the rotary shaft; a carrier which retains the planetary rollers such that the planetary rollers are rotatable about axes thereof while revolving around the rotary shaft, and of which axial movement is restricted; and an outer ring member surrounding the planetary rollers and supported so as to be slidable in an axial direction. Helical ribs are formed on an inner periphery of the outer ring member; and circumferential grooves are formed on an outer periphery of each of the planetary rollers so as to be engaged with the helical ribs. A rotation of the rotary shaft is thus converted to a linear motion of the outer ring member.

Abstract: A parking brake has the function of monitoring a malfunction of the parking brake, thereby preventing accidents. The parking brake includes an electric motor and a linear motion mechanism which are connected together through a speed reduction mechanism. The parking brake further includes a locking pin which can be brought into engagement with the speed reduction mechanism by a solenoid. The parking brake further includes a monitor for detecting a change in reactance of the solenoid. Since the change in reactance as detected corresponds to a displacement of a plunger, it is possible to prevent accidents by monitoring deteriorated sliding properties of the locking pin based on the displacement detected.

Abstract: The electric linear motion actuator includes an electric motor, a drive shaft configured to be rotated by the electric motor, a rotation-to-linear motion converting mechanism configured to convert the rotational motion of the drive shaft to the axial linear motion of an axially movably supported outer ring member, and an electric locking mechanism incorporated in a reduction gear mechanism in which the rotation of a rotor shaft of the electric motor is reduced in speed and transmitted to the drive shaft. When the electric locking mechanism is energized, the power transmission path shifts to the locked state in which power cannot be transmitted, and when the electric locking mechanism is de-energized thereafter, the power transmission path is kept in the locked state. The electric locking mechanism is built in a motor case of the electric motor so that the electric motor and the electric locking mechanism are unitized.

Abstract: An electric parking brake system includes an electric motor; a linear motion mechanism that converts the rotational movement of a rotor shaft of the electric motor to a linear movement of a slide member to operate a brake; a locking mechanism that fixes a position of the slide member; a control device that controls the electric motor and the locking mechanism; a brake load estimation unit that estimates a brake force; and an electric parking brake operation instruction device that is arbitrary operable. The control device automatically executes a parking brake operation when a stop state of the vehicle is detected even if the electric parking brake operation instruction device is not operated. The automatically applied parking brake force is set to a value smaller than the normal parking brake force applied by the parking brake operation instruction device.

Abstract: A substrate treatment method includes: a polymer separation step of phase-separating a block copolymer into a hydrophilic polymer and a hydrophobic polymer; and a polymer removal step of selectively removing the hydrophilic polymer from the phase-separated block copolymer, wherein in the polymer removal step, the hydrophilic polymer is removed by: irradiating the phase-separated block copolymer with an energy ray; then supplying a first polar organic solvent having a first degree of dissolving the hydrophilic polymer, being lower in boiling point than water and capable of dissolving water, and not dissolving the hydrophobic polymer, to the block copolymer; and then supplying a second polar organic solvent having a second dissolving degree lower than the first dissolving degree, being higher in boiling point than water, and not dissolving the hydrophobic polymer, to the block copolymer.

Abstract: An electric linear motion actuator includes a locking mechanism for locking and unlocking the rotor shaft of an electric motor. The locking mechanism includes circumferentially arranged locking holes provided in a gear of a reduction gear mechanism, a locking pin moved toward and away from the locking holes, and engaged in one locking hole to lock the gear when the locking pin is moved toward the gear, and a linear solenoid for moving the locking pin toward and away from the gear. The plunger of the linear solenoid and the locking pin are formed as separate parts, and disposed coaxial with each other with their end faces axially facing each other. This prevents the moment load applied from the gear to the locking pin from acting on the plunger, thereby preventing damage to a bobbin slidably supporting the radially inner surface of the plunger.

Abstract: An electric linear motion actuator includes planetary rollers mounted between the radially inner surface of an outer ring member and the radially outer surface of a rotary shaft, and a carrier rotatable about the rotary shaft and including radially movable roller shafts rotatably supporting the respective planetary rollers. Elastic rings each having circumferentially separate ends are each wrapped around the roller shafts to radially inwardly bias the roller shafts, thereby bringing the respective planetary rollers into elastic contact with the radially outer surface of the rotary shaft. Each elastic ring is prevented from rotating relative to the roller shafts, thereby preventing one of the roller shafts from being axially aligned with the gap between the circumferential separate ends, causing the elastic ring to be radially compressed and thus making it impossible for the elastic rings to radially bias the roller shafts.

Abstract: An electric linear motion actuator is provided which can set the clearance during normal braking operation of an electric brake system. The linear motion actuator includes a load sensor for detecting the magnitude of the load with which a friction pad is pressed against the brake disk, a temperature sensor for compensating for the influence of temperature on the load sensor, and an electronic control unit. The electronic control unit is adapted to calculate a target rotational angle from the position of the electric motor corresponding to the magnitude of the load detected by the load sensor to the position of the electric motor where the clearance is at a predetermined value, and control the electric motor to rotate the electric motor by the target rotational angle.

Abstract: An electric linear motion actuator includes planetary rollers mounted between the radially inner surface of an outer ring member and the radially outer surface of a rotary shaft, and a carrier rotatable about the rotary shaft and including radially movable roller shafts rotatably supporting the respective planetary rollers. Elastic rings each having circumferentially separate ends are each wrapped around the roller shafts to radially inwardly bias the roller shafts, thereby bringing the respective planetary rollers into elastic contact with the radially outer surface of the rotary shaft. Each elastic ring is prevented from rotating relative to the roller shafts, thereby preventing one of the roller shafts from being axially aligned with the gap between the circumferential separate ends, causing the elastic ring to be radially compressed and thus making it impossible for the elastic rings to radially bias the roller shafts.

Abstract: A ball ramp mechanism is configured such that a driving-side rotor and a driven-side rotor are located on the same axis in opposing relationship with each other; three opposed pairs of arc-shaped ramp grooves are provided on the respective opposing faces of the two rotors at uniform intervals in the circumferential direction, with the depth thereof being changed gradually in the circumferential direction and the direction of the change being made opposite therebetween; a ball is incorporated between each set of the opposing paired ramp grooves; the balls are retained by the cage; and flexibility is imparted to pillar sections defined between pockets of the cage so as to make the pillar sections elastically deformable; dimensional variations due to manufacturing tolerances of the ramp grooves are absorbed via elastic deformation of the pillar sections so that each of the plurality of balls is enabled to contact the ramp grooves uniformly.