Patents by Inventor Makoto Namikawa

Makoto Namikawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9131829
    Abstract: A label sheet for cleaning is formed of a label for cleaning including a cleaning layer having a 180° peeling adhesion to a silicon wafer of 0.20 N/10 mm or less after receiving an active energy and an adhesive layer provided on one of surfaces of said cleaning layer, and a separator on which the label is removably provided through the adhesive layer.
    Type: Grant
    Filed: June 30, 2014
    Date of Patent: September 15, 2015
    Assignee: NITTO DENKO CORPORATION
    Inventors: Makoto Namikawa, Yoshio Terada, Jirou Nukaga, Eiji Toyoda
  • Publication number: 20140311666
    Abstract: A label sheet for cleaning is formed of a label for cleaning including a cleaning layer having a 180° peeling adhesion to a silicon wafer of 0.20 N/10 mm or less after receiving an active energy and an adhesive layer provided on one of surfaces of said cleaning layer, and a separator on which the label is removably provided through the adhesive layer.
    Type: Application
    Filed: June 30, 2014
    Publication date: October 23, 2014
    Applicant: NITTO DENKO CORPORATION
    Inventors: Makoto NAMIKAWA, Yoshio TERADA, Jirou NUKAGA, Eiji TOYODA
  • Publication number: 20140311525
    Abstract: A label sheet for cleaning is formed of a label for cleaning including a cleaning layer having a 180° peeling adhesion to a silicon wafer of 0.20 N/10 mm or less after receiving an active energy and an adhesive layer provided on one of surfaces of said cleaning layer, and a separator on which the label is removably provided through the adhesive layer.
    Type: Application
    Filed: June 30, 2014
    Publication date: October 23, 2014
    Applicant: NITTO DENKO CORPORATION
    Inventors: Makoto NAMIKAWA, Yoshio TERADA, Jirou NUKAGA, Eiji TOYODA
  • Publication number: 20140090199
    Abstract: A cleaning sheet comprising a cleaning layer and a releasable protective film laminated on the cleaning layer, wherein each of the relative intensities of the fragment ions of CH3Si+, C3H9Si+, C5H15Si2O+, C5H15Si3O3+, C7H21Si3O2+, CH3SiO?, CH3SiO2? and Si+ in the cleaning layer, when the protective film is peeled off the cleaning layer, is 0.1 or less according to time-of-flight secondary ion mass spectrometry, relative to C2H3+ in the case of positive ion or O? in the case of negative ion.
    Type: Application
    Filed: September 27, 2013
    Publication date: April 3, 2014
    Applicant: NITTO DENKO CORPORATION
    Inventors: Yoshio TERADA, Makoto NAMIKAWA, Daisuke UENDA, Asami FUNATSU
  • Publication number: 20140090196
    Abstract: A cleaning sheet comprising a cleaning layer and a releasable protective film laminated on the cleaning layer, wherein each of the relative intensities of the fragment ions Of CH3Si+, C3H9Si+, C5H15Si2O+, C5H15Si3O3+, CH3SiO?, CH3SiO2? and Si+ in the cleaning layer, when the protective film is peeled off the cleaning layer, is 0.1 or less according to time-of-flight secondary ion mass spectrometry, relative to C2H3+ in the case of positive ion or O? in the case of negative ion.
    Type: Application
    Filed: September 27, 2013
    Publication date: April 3, 2014
    Applicant: NITTO DENKO CORPORATION
    Inventors: Yoshio TERADA, Makoto NAMIKAWA, Daisuke UENDA, Asami FUNATSU
  • Patent number: 8597456
    Abstract: A method for producing an organic EL device includes the steps of: preparing an adhesive sheet on which a resin substrate is laminated, allowing the resin substrate to adhere onto a hard substrate with the adhesive sheet interposed therebetween, forming an organic EL element on the resin substrate, thereby producing an organic EL device including the resin substrate and the organic EL element, and peeling the organic EL device from the hard substrate. The adhesive sheet includes a first adhesive layer for being bonded to the hard substrate, and a second adhesive layer formed on the first adhesive layer and bonded to the resin substrate. A non-adhesive region is defined at an end portion of the resin substrate, the non-adhesive region not overlapping with the second adhesive layer but overlapping with the first adhesive layer when projected in the thickness direction.
    Type: Grant
    Filed: January 10, 2012
    Date of Patent: December 3, 2013
    Assignee: Nitto Denko Corporation
    Inventor: Makoto Namikawa
  • Patent number: 8460783
    Abstract: A cleaning sheet which comprises a porous layer as a cleaning layer; or a cleaning sheet which comprises a sheet material having a porous layer and, formed on one side of the sheet material, an adhesive layer.
    Type: Grant
    Filed: March 10, 2008
    Date of Patent: June 11, 2013
    Assignee: Nitto Denko Corporation
    Inventors: Makoto Namikawa, Yoshio Terada, Jirou Nukaga
  • Publication number: 20120280706
    Abstract: Provided is a cleaning unit for removing foreign matter adhering to a probe needle of a probe card for a continuity test, the cleaning unit being capable of effectively removing the foreign matter adhering to the probe needle without abrading the probe needle. A cleaning sheet of the present invention is a cleaning sheet, including a cleaning layer for removing foreign matter adhering to a probe needle of a probe card for a continuity test, in which the cleaning layer has an arithmetic average roughness Ra in conformity with JIS-B-0601 of 100 nm or less.
    Type: Application
    Filed: May 4, 2012
    Publication date: November 8, 2012
    Applicant: C/O NITTO DENKO CORPORATION
    Inventors: Daisuke Uenda, Makoto Namikawa, Takeshi Matsumura
  • Publication number: 20120177896
    Abstract: A method for producing an organic EL device includes the steps of: preparing an adhesive sheet on which a resin substrate is laminated, allowing the resin substrate to adhere onto a hard substrate with the adhesive sheet interposed therebetween, forming an organic EL element on the resin substrate, thereby producing an organic EL device including the resin substrate and the organic EL element, and peeling the organic EL device from the hard substrate. The adhesive sheet includes a first adhesive layer for being bonded to the hard substrate, and a second adhesive layer formed on the first adhesive layer and bonded to the resin substrate. A non-adhesive region is defined at an end portion of the resin substrate, the non-adhesive region not overlapping with the second adhesive layer but overlapping with the first adhesive layer when projected in the thickness direction.
    Type: Application
    Filed: January 10, 2012
    Publication date: July 12, 2012
    Applicant: NITTO DENKO CORPORATION
    Inventor: Makoto NAMIKAWA
  • Publication number: 20120160405
    Abstract: A method for producing an organic EL device includes the steps of: preparing an adhesive sheet on which a resin substrate is laminated; allowing the resin substrate to adhere onto a hard substrate with the adhesive sheet interposed therebetween; forming an organic EL element on the resin substrate, thereby producing an organic EL device including the resin substrate and the organic EL element; and peeling the organic EL device from the hard substrate. The adhesive sheet includes a first adhesive layer for being bonded to the hard substrate, and a second adhesive layer formed on the first adhesive layer and bonded to the resin substrate. The adhesive strength of the first adhesive layer is different from the adhesive strength of the second adhesive layer.
    Type: Application
    Filed: December 23, 2011
    Publication date: June 28, 2012
    Applicant: NITTO DENKO CORPORATION
    Inventor: Makoto NAMIKAWA
  • Publication number: 20110229675
    Abstract: A label sheet for cleaning is formed of a label for cleaning including a cleaning layer having a 180° peeling adhesion to a silicon wafer of 0.20 N/10 mm or less after receiving an active energy and an adhesive layer provided on one of surfaces of said cleaning layer, and a separator on which the label is removably provided through the adhesive layer.
    Type: Application
    Filed: May 27, 2011
    Publication date: September 22, 2011
    Applicant: NITTO DENKO CORPORATION
    Inventors: Makoto NAMIKAWA, Yoshio TERADA, Jirou NUKAGA, Eiji TOYODA
  • Publication number: 20110229697
    Abstract: A label sheet for cleaning is formed of a label for cleaning including a cleaning layer having a 180° peeling adhesion to a silicon wafer of 0.20 N/10 mm or less after receiving an active energy and an adhesive layer provided on one of surfaces of said cleaning layer, and a separator on which the label is removably provided through the adhesive layer.
    Type: Application
    Filed: May 27, 2011
    Publication date: September 22, 2011
    Applicant: NITTO DENKO CORPORATION
    Inventors: Makoto NAMIKAWA, Yoshio TERADA, Jirou NUKAGA, Eiji TOYODA
  • Publication number: 20100319151
    Abstract: A cleaning sheet for cleaning foreign matters away from the interior of the substrate processing equipment is provided. The cleaning sheet includes a cleaning layer having substantially no tackiness and having a tensile modulus of not lower than 0.98 N/mm2 as determined according to JIS K7127. Alternatively, the cleaning sheet includes a cleaning layer having a Vickers hardness of not lower than 10 MPa.
    Type: Application
    Filed: August 6, 2010
    Publication date: December 23, 2010
    Applicant: NITTO DENKKO CORPORATION
    Inventors: Makoto Namikawa, Yoshio Terada, Jirou Nukaga, Eiji Toyoda, Hirofumi Fujii, Daisuke Uenda, Asami Funatsu, Nobuaki Maruoka, Hitoshi Ishizaka, Yasuhiro Amano
  • Patent number: 7846258
    Abstract: A cleaning sheet comprises a cleaning layer provided on one side of a base material, from which cleaning layer F?, Cl?, Br?, NO2?, NO3?, PO43?, SO42?, Na+, NH4+ and K+ are extractable with pure water each in an amount of not greater than 20 ppm, when extracted under boiling at 120° C. for 1 hour, and a pressure-sensitive adhesive layer provided on the other side of the base material, a carrying material with cleaning capacity comprising the aforementioned cleaning sheet laminated on a carrying material with a pressure-sensitive adhesive layer. The present disclosure also relates to a method for cleaning a substrate processing equipment which comprises conveying the aforementioned carrying material with cleaning capacity into the substrate processing equipment.
    Type: Grant
    Filed: November 10, 2003
    Date of Patent: December 7, 2010
    Assignee: Nitto Denko Corporation
    Inventors: Yoshio Terada, Makoto Namikawa, Eiji Toyoda
  • Patent number: 7793668
    Abstract: A cleaning sheet for cleaning foreign matters away from the interior of the substrate processing equipment is provided. The cleaning sheet includes a cleaning layer having substantially no tackiness and having a tensile modulus of not lower than 0.98 N/mm2 as determined according to JIS K7127. Alternatively, the cleaning sheet includes a cleaning layer having a Vickers hardness of not lower than 10 MPa.
    Type: Grant
    Filed: December 20, 2004
    Date of Patent: September 14, 2010
    Assignee: Nitto Denko Corporation
    Inventors: Makoto Namikawa, Yoshio Terada, Jirou Nukaga, Eiji Toyoda, Hirofumi Fujii, Daisuke Uenda, Asami Funatsu, Nobuaki Maruoka, Hitoshi Ishizaka, Yasuhiro Amano
  • Publication number: 20100175716
    Abstract: Provided is a cleaning member, which is capable of removing minute foreign matter, preferably foreign matter of a submicron level simply, exactly, and sufficiently, without contaminating a cleaning site. Further provided is a delivery member with a cleaning function having the cleaning member and a method of cleaning a substrate processing apparatus using the delivery member with a cleaning function. The cleaning member of the present invention includes a cleaning layer having a plurality of protrusions of a columnar structure on the surface, in which an aspect ratio of the protrusions of a columnar structure is 5 or more.
    Type: Application
    Filed: June 28, 2007
    Publication date: July 15, 2010
    Applicant: NITTO DENKO CORPORATION
    Inventors: Yuki Sugo, Yoshio Terada, Daisuke Uenda, Makoto Namikawa, Yoshinori Yoshida, Youhei Maeno
  • Patent number: 7718255
    Abstract: The invention provides cleaning sheets for use in cleaning, e.g., various substrate-processing apparatus, systems for conveying exposure masks (reticles) in microfabrication, etc., and a method of cleaning these with the cleaning sheets. A cleaning sheet which comprises a sheet material comprising a thermoset resin layer having porosity and, formed on one side of the sheet material, a pressure-sensitive adhesive layer comprising a thermoplastic resin.
    Type: Grant
    Filed: August 19, 2003
    Date of Patent: May 18, 2010
    Assignee: Nitto Denko Corporation
    Inventors: Makoto Namikawa, Yoshio Terada
  • Patent number: 7713356
    Abstract: A cleaning sheet for cleaning foreign matters away from the interior of the substrate processing equipment is provided. The cleaning sheet includes a cleaning layer having substantially no tackiness and having a tensile modulus of not lower than 0.98 N/mm2 as determined according to JIS K7127. Alternatively, the cleaning sheet includes a cleaning layer having a Vickers hardness of not lower than 10.
    Type: Grant
    Filed: May 8, 2001
    Date of Patent: May 11, 2010
    Assignee: Nitto Denko Corporation
    Inventors: Makoto Namikawa, Yoshio Terada, Jirou Nukaga, Eiji Toyoda
  • Patent number: 7615288
    Abstract: A cleaning sheet which comprises a cleaning layer having a tensile stress at 10% strain of from 0.3 to 3,000 N/mm2 or a carrying member with a cleaning function wherein at least one side of the carrying member has a cleaning layer having a tensile stress at 10% strain of from 0.3 to 3,000 N/mm2, particularly, a cleaning sheet or a carrying member with a cleaning function of the aforementioned constructions, wherein the aforementioned cleaning layer comprises a resin layer having been hardened by an active energy source or a polymer resin having heat resistance.
    Type: Grant
    Filed: June 24, 2004
    Date of Patent: November 10, 2009
    Assignee: Nitto Denko Corporation
    Inventors: Yoshio Terada, Eiji Toyoda, Makoto Namikawa
  • Publication number: 20090253891
    Abstract: The present invention provides a cleaning substrate of a substrate processing equipment, which comprises a cleaning layer comprising a heat resistant resin with a storage modulus (1 Hz) at 20° C. up to 150° C. being 5×107 Pa to 1×109 Pa on at least one face of the substrate; and a polyimide resin suitable as the heat resistant resin for the cleaning layer and usable under circumstances possibly involving the generation of serious disadvantages due to silicone contamination, such as for HDD application and some semiconductor applications.
    Type: Application
    Filed: June 15, 2009
    Publication date: October 8, 2009
    Applicant: NITTO DENKO CORPORATION
    Inventors: Yoshio TERADA, Hirofumi FUJII, Makoto NAMIKAWA, Daisuke UENDA, Yasuhiro AMANO