Abstract: The invention concern an apparatus and a method for manufacturing polycrystalline silicon having a reduced amount of boron compounds. The invention feeds Ar gas in a trichlorosilane line, which connects a trichlorosilane (TCS) tank and a series of distillation units. The distillation units have a pressure transducer and a pressure independent control valve (PIC-V) positioned on a vent gas line for discharging vent gas from the distillation units. Ar gas is fed to the TCS line with higher pressure than the pressure set for opening the PIC-V. The TCS is distilled by the distillation units with continuously discharging vent gas from the distillation units.

Abstract: A manufacturing apparatus of silicon seed rod in which two silicon seed rods are joined into one long silicon seed rod by welding, having: an upper seed rod holding part holding an upper silicon seed rod vertically; an elevating device holding a lower silicon seed rod which faces a lower end of the upper silicon seed rod in a state in which the lower silicon seed rod is movable vertically; an induction-heating coil being arranged around the lower end of the upper silicon seed rod; a preheating ring being disposed below the induction-heating coil; and a moving device of the preheating ring that moves the preheating ring between a heat position in which the preheating ring is induction-heated around an upper end of the lower silicon seed rod by the induction-heating coil and a wait position which is distant from the heat position.

Abstract: The invention concern an apparatus and a method for manufacturing polycrystalline silicon having a reduced amount of boron compounds. The invention feeds Ar gas in a trichlorosilane line, which connects a trichlorosilane (TCS) tank and a series of distillation units. The distillation units have a pressure transducer and a pressure independent control valve (PIC-V) positioned on a vent gas line for discharging vent gas from the distillation units. Ar gas is fed to the TCS line with higher pressure than the pressure set for opening the PIC-V. The TCS is distilled by the distillation units with continuously discharging vent gas from the distillation units.

Abstract: The invention concern an apparatus and a method for manufacturing polycrystalline silicon having a reduced amount of boron compounds. The invention feeds Ar gas in a trichlorosilane line, which connects a trichlorosilane (TCS) tank and a series of distillation units. The distillation units have a pressure transducer and a pressure independent control valve (PIC-V) positioned on a vent gas line for discharging vent gas from the distillation units. Ar gas is fed to the TCS line with higher pressure than the pressure set for opening the PIC-V. The TCS is distilled by the distillation units with continuously discharging vent gas from the distillation units.

Abstract: The invention concern an apparatus and a method for manufacturing polycrystalline silicon having a reduced amount of boron compounds. The invention feeds Ar gas in a trichlorosilane line, which connects a trichlorosilane (TCS) tank and a series of distillation units. The distillation units have a pressure transducer and a pressure independent control valve (PIC-V) positioned on a vent gas line for discharging vent gas from the distillation units. Ar gas is fed to the TCS line with higher pressure than the pressure set for opening the PIC-V. The TCS is distilled by the distillation units with continuously discharging vent gas from the distillation units.

Abstract: A manufacturing apparatus of silicon seed rod in which two silicon seed rods are joined into one long silicon seed rod by welding, having: an upper seed rod holding part holding an upper silicon seed rod vertically; an elevating device holding a lower silicon seed rod which faces a lower end of the upper silicon seed rod in a state in which the lower silicon seed rod is movable vertically; an induction-heating coil being arranged around the lower end of the upper silicon seed rod; a preheating ring being disposed below the induction-heating coil; and a moving device of the preheating ring that moves the preheating ring between a heat position in which the preheating ring is induction-heated around an upper end of the lower silicon seed rod by the induction-heating coil and a wait position which is distant from the heat position.

Abstract: A polycrystalline silicon rod according to present invention has a structure for hanging of polycrystalline silicon rods to each other end-to-end, so that the efficiency of melting polycrystalline silicon can be increased considerably. A polycrystalline silicon rod obtained by entirely or partially removing a peripheral portion from the rod to leave a central portion, and processing the central portion, preferably, the peripheral portion is removed by grinding in an amount corresponding to 10 to 60% of the diameter of the rod, and then subjected to groove-forming processing. This makes annealing unnecessary.

Abstract: A polycrystalline silicon rod according to present invention has a structure for hanging of polycrystalline silicon rods to each other end-to-end, so that the efficiency of melting polycrystalline silicon can be increased considerably. A polycrystalline silicon rod obtained by entirely or partially removing a peripheral portion from the rod to leave a central portion, and processing the central portion, preferably, the peripheral portion is removed by grinding in an amount corresponding to 10 to 60% of the diameter of the rod, and then subjected to groove-forming processing. This makes annealing unnecessary.

Abstract: A polycrystalline silicon rod according to present invention has a structure for hanging of polycrystalline silicon rods to each other end-to-end, so that the efficiency of melting polycrystalline silicon can be increased considerably. A polycrystalline silicon rod obtained by entirely or partially removing a peripheral portion from the rod to leave a central portion, and processing the central portion, preferably, the peripheral portion is removed by grinding in an amount corresponding to 10 to 60% of the diameter of the rod, and then subjected to groove-forming processing. This makes annealing unnecessary.

Abstract: A polycrystalline silicon rod according to present invention has a structure for hanging of polycrystalline silicon rods to each other end-to-end, so that the efficiency of melting polycrystalline silicon can be increased considerably. A polycrystalline silicon rod obtained by entirely or partially removing a peripheral portion from the rod to leave a central portion, and processing the central portion, preferably, the peripheral portion is removed by grinding in an amount corresponding to 10 to 60% of the diameter of the rod, and then subjected to groove-forming processing. This makes annealing unnecessary.

Abstract: A load transport equipment having self-propelled trucks travelling on a predetermined route so as to transport a load by the truck, wherein an encoder is connected to a motor and the pulse number from the encoder is counted by a counter, the counted value being optically transmitted toward another self-propelled truck following the front self-propelled truck on the predetermined route, the following self-propelled truck receiving the counted value from the front self-propelled truck to obtain a difference between the received counted value and that of the following truck, so that the travel speed of the rear self-propelled truck is controlled on the basis of the difference so that the running speed is controlled in accordance with the distance between the trucks thereby preventing a rear-end collision.

Abstract: A load transport equipment having self-propelled trucks travelling on a predetermined route so as to transport a load by the truck, wherein an encoder is connected to a motor and the pulse number from the encoder is counted by a counter, the counted value being optically transmitted toward another self-propelled truck following the front self-propelled truck on the predetermined route, the following self-propelled truck receiving the counted value from the front self-propelled truck to obtain a difference between the received counted value and that of the following truck, so that the travel speed of the rear self-propelled truck is controlled on the basis of the difference so that the running speed is controlled in accordance with the distance between the trucks thereby preventing a rear-end collision.

Abstract: A load transport equipment having self-propelled trucks travelling on a predetermined route so as to transport a load by the truck, wherein an encoder is connected to a motor and the pulse number from the encoder is counted by a counter, the counted value being optically transmitted toward another self-propelled truck following the front self-propelled truck on the predetermined route, the following self-propelled truck receiving the counted value from the front self-propelled truck to obtain a difference between the received counted value and that of the following truck, so that the travel speed of the rear self-propelled truck is controlled on the basis of the difference so that the running speed is controlled in accordance with the distance between the trucks thereby preventing a rear-end collision.

Abstract: The present invention relates to a method and apparatus for pulverizing a material to produce a fine powdery material such as silica powder as a material for a filler for sealing semiconductors. It has a shell and a screw shaft mounted in the shell. A disk having an inverted conical bottom surface is coaxially secured to the bottom of the screw shaft. The disk serves to protect the blade of the screw shaft from wear. Also owing to the inverted conical bottom surface, a centripetal force acts on the screw shaft while in rotation, thus preventing it from running out of true. By providing a plurality of screw shafts in the shell, the fluid in the shell flows in a complicated manner, thus increasing the pulverizing efficiency. A partitioning plate formed with a hole in the upper or lower part thereof may be provided between the adjacent screw shafts to minimize the possibility of shortcircuiting of the material from the inlet of the shell to its outlet.

Abstract: A method and apparatus for cutting polycrystalline silicon rods which comprise applying pressing forces at at least two positions on a plane perpendicular to the longitudinal axis of a polycrystalline silicon rod at a plurality of positions symmetrical to said axis.

Abstract: In a cyclone classifier wherein the material to be processed is swirled in a tubular casing having a conical lower portion and classified, a cylindrical body is provided in the casing, so as to surround the lower end of a fluid outlet pipe and extends downwardly below an inlet port for the material to be processed, so that the sectional area of passage for the material to be processed swirled in the casing will be made smaller, thus increasing the classifying point while keeping the pressure loss at a minimum. From another aspect, annular pipes formed with fluid inlet ports are provided around the outer periphery of a lower part of the casing so as to communicate with the casing so that gases or liquids will be blown into the lower part of the casing through these pipes to form a swirling current, thus allowing the material to be processed to be reclassified thereby increasing the classifying point.

Abstract: An improved vertical grinding mill is proposed which comprises a shell, a vertical screw shaft rotatably mounted in the shell, a classifying means, a drive for the screw shaft, and means for forming a current of fluid for taking fine particles out of the shell. The inlet for the fluid is provided in the center of the bottom of the shell directly under the screw shaft. The fluid is uniformly distributed in all directions, carrying up the pulverized fine particles.