Patents by Inventor Manabu Takei
Manabu Takei has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20080153212Abstract: A semiconductor device and method of manufacturing the same includes an n?-single crystal silicon substrate, with an oxide film selectively formed thereon. On the oxide film, gate polysilicon is formed. The surface of the gate polysilicon is covered with a gate oxide film whose surface is covered with a cathode film doped in an n-type with an impurity concentration higher than that of the substrate as an n?-drift layer. In the cathode film, a section in contact with the substrate becomes an n+-buffer region with a high impurity concentration, next to which a p-base region is formed. Next to the p-base region, an n+-source region is formed. On the cathode film, an interlayer insulator film is selectively formed on which an emitter electrode is formed. A semiconductor device such as an IGBT is obtained with a high rate of acceptable products, an excellent on-voltage to turn-off loss tradeoff and an excellent on-voltage to breakdown voltage tradeoff.Type: ApplicationFiled: February 4, 2008Publication date: June 26, 2008Applicant: FUJI ELECTRIC HOLDINGS CO., LTD.Inventor: Manabu TAKEI
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Publication number: 20080102582Abstract: A manufacturing method for a super-junction semiconductor device is disclosed. The methods includes a first step of depositing, on a low-resistivity semiconductor substrate of one conductivity type, at least an epitaxial layer of the one conductivity type which is to become a drift layer; a second step of forming a base region(s) of the other conductivity type and source regions of the one conductivity type to be used for formation of MOS gate structures; a third step of forming, by anisotropic vapor-phase etching using an insulating film mask, trenches that penetrate through the base region(s) and reach the low-resistivity semiconductor substrate or its vicinity; and a fourth step of burying epitaxial layers of the other conductivity type in the respective trenches, the first to fourth steps being executed in this order.Type: ApplicationFiled: September 13, 2007Publication date: May 1, 2008Applicant: FUJI ELECTRIC DEVICE TECHNOLOGY CO., LTD.Inventor: Manabu Takei
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Patent number: 7355263Abstract: A semiconductor device and method of manufacturing the same includes an n?-single crystal silicon substrate, with an oxide film selectively formed thereon. On the oxide film, gate polysilicon is formed. The surface of the gate polysilicon is covered with a gate oxide film whose surface is covered with a cathode film doped in an n-type with an impurity concentration higher than that of the substrate as an n?-drift layer. In the cathode film, a section in contact with the substrate becomes an n+-buffer region with a high impurity concentration, next to which a p-base region is formed. Next to the p-base region, an n+-source region is formed. On the cathode film, an interlayer insulator film is selectively formed on which an emitter electrode is formed. A semiconductor device such as an IGBT is obtained with a high rate of acceptable products, an excellent on-voltage to turn-off loss tradeoff and an excellent on-voltage to breakdown voltage tradeoff.Type: GrantFiled: June 14, 2007Date of Patent: April 8, 2008Assignee: Fuji Electric Holdings Co., Ltd.Inventor: Manabu Takei
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Patent number: 7355571Abstract: A display panel (110) includes a plurality of optical elements (OEL) each having a pair of electrodes and performing an optical operation according to current passing between the pair of electrodes, a current line (DL), a switch circuit (Tr2) that passes a write current (Ia) with a predetermined current value through the current line (DL) during a selection time (Tse) and stops passing current during a nonselection time (Tnse), and a current storage circuit (Tr1, Tr3, Cs, Cp) that stores current data according to the current value of the write current (Ia) passing through the current line (DL) during the selection time (Tse) and that supplies a drive current (Ib) having a current value, which is obtained by subtracting a predetermined offset current (Ioff) from the current value of the stored write current (Ia), to the optical elements (OEL) during the nonselection time (Tnse).Type: GrantFiled: June 9, 2003Date of Patent: April 8, 2008Assignee: Casio Computer Co., Ltd.Inventors: Hiroyasu Yamada, Manabu Takei
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Publication number: 20070292995Abstract: A reverse blocking semiconductor device that shows no adverse effect of an isolation region on reverse recovery peak current, that has a breakdown withstanding structure exhibiting satisfactory soft recovery, that suppresses aggravation of reverse leakage current, which essentially accompanies a conventional reverse blocking IGBT, and that retains satisfactorily low on-state voltage is disclosed. The device includes a MOS gate structure formed on a n? drift layer, the MOS gate structure including a p+ base layer formed in a front surface region of the drift layer, an n+ emitter region formed in a surface region of the base layer, a gate insulation film covering a surface area of the base layer between the emitter region and the drift layer, and a gate electrode formed on the gate insulation film. An emitter electrode is in contact with both the emitter region and the base layer of the MOS gate structure.Type: ApplicationFiled: August 22, 2007Publication date: December 20, 2007Applicant: FUJI ELECTRIC HOLDINGS CO., LTD.Inventors: Michio NEMOTO, Manabu TAKEI, Tatsuya NAITO
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Patent number: 7307330Abstract: A reverse blocking semiconductor device that shows no adverse effect of an isolation region on reverse recovery peak current, that has a breakdown withstanding structure exhibiting satisfactory soft recovery, that suppresses aggravation of reverse leakage current, which essentially accompanies a conventional reverse blocking IGBT, and that retains satisfactorily low on-state voltage is disclosed. The device includes a MOS gate structure formed on a n? drift layer, the MOS gate structure including a p+ base layer formed in a front surface region of the drift layer, an n+ emitter region formed in a surface region of the base layer, a gate insulation film covering a surface area of the base layer between the emitter region and the drift layer, and a gate electrode formed on the gate insulation film. An emitter electrode is in contact with both the emitter region and the base layer of the MOS gate structure.Type: GrantFiled: April 4, 2006Date of Patent: December 11, 2007Assignee: Fuji Electric Holdings Co., Ltd.Inventors: Michio Nemoto, Manabu Takei, Tatsuya Naito
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Publication number: 20070262362Abstract: A semiconductor device has a MOS gate side surface structure, including a gate electrode filling a trench formed in a semiconductor substrate with an insulator film between the trench and the gate electrode, a gate insulator film covering the surface of the gate electrode, a buffer region of one conductivity type in contact with the semiconductor substrate, a base region of the other conductivity type adjacent to the buffer region on the gate insulator film, and an emitter region of the one conductivity type adjacent to the base region on the side opposite to the buffer region. The semiconductor device and the method of manufacturing thereof can further improve the tradeoff between the on-voltage and the turn-off loss by increasing the amount of electrons injected from a cathode on the surface to increase an amount of carriers on the cathode side in a stable turned-on state of the device.Type: ApplicationFiled: July 20, 2007Publication date: November 15, 2007Applicant: FUJI ELECTRIC HOLDINGS CO., LTD.Inventors: Setsuko WAKIMOTO, Manabu TAKEI, Shinji FUJIKAKE
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Publication number: 20070235755Abstract: A semiconductor device and method of manufacturing the same includes an n?-single crystal silicon substrate, with an oxide film selectively formed thereon. On the oxide film, gate polysilicon is formed. The surface of the gate polysilicon is covered with a gate oxide film whose surface is covered with a cathode film doped in an n-type with an impurity concentration higher than that of the substrate as an n?-drift layer. In the cathode film, a section in contact with the substrate becomes an n+-buffer region with a high impurity concentration, next to which a p-base region is formed. Next to the p-base region, an n+-source region is formed. On the cathode film, an interlayer insulator film is selectively formed on which an emitter electrode is formed. A semiconductor device such as an IGBT is obtained with a high rate of acceptable products, an excellent on-voltage to turn-off loss tradeoff and an excellent on-voltage to breakdown voltage tradeoff.Type: ApplicationFiled: June 14, 2007Publication date: October 11, 2007Applicant: FUJI ELECTRIC HOLDINGS CO., LTD.Inventor: Manabu TAKEI
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Publication number: 20070224769Abstract: A semiconductor device has a MOS gate side surface structure, including a gate electrode filling a trench formed in a semiconductor substrate with an insulator film between the trench and the gate electrode, a gate insulator film covering the surface of the gate electrode, a buffer region of one conductivity type in contact with the semiconductor substrate, a base region of the other conductivity type adjacent to the buffer region on the gate insulator film, and an emitter region of the one conductivity type adjacent to the base region on the side opposite to the buffer region. The semiconductor device and the method of manufacturing thereof can further improve the tradeoff between the on-voltage and the turn-off loss by increasing the amount of electrons injected from a cathode on the surface to increase an amount of carriers on the cathode side in a stable turned-on state of the device.Type: ApplicationFiled: May 29, 2007Publication date: September 27, 2007Applicant: FUJI ELECTRIC HOLDINGS CO., LTD.Inventors: Setsuko Wakimoto, Manabu Takei, Shinji Fujikake
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Patent number: 7262100Abstract: A semiconductor device has a MOS gate side surface structure, including a gate electrode filling a trench formed in a semiconductor substrate with an insulator film between the trench and the gate electrode, a gate insulator film covering the surface of the gate electrode, a buffer region of one conductivity type in contact with the semiconductor substrate, a base region of the other conductivity type adjacent to the buffer region on the gate insulator film, and an emitter region of the one conductivity type adjacent to the base region on the side opposite to the buffer region. The semiconductor device and the method of manufacturing thereof can further improve the tradeoff between the on-voltage and the turn-off loss by increasing the amount of electrons injected from a cathode on the surface to increase an amount of carriers on the cathode side in a stable turned-on state of the device.Type: GrantFiled: September 2, 2005Date of Patent: August 28, 2007Assignee: Fuji Electric Holdings Co., Ltd.Inventors: Setsuko Wakimoto, Manabu Takei, Shinji Fujikake
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Patent number: 7262478Abstract: A semiconductor device and method of manufacturing the same includes an n?-single crystal silicon substrate, with an oxide film selectively formed thereon. On the oxide film, gate polysilicon is formed. The surface of the gate polysilicon is covered with a gate oxide film whose surface is covered with a cathode film doped in an n-type with an impurity concentration higher than that of the substrate as an n?-drift layer. In the cathode film, a section in contact with the substrate becomes an n+-buffer region with a high impurity concentration, next to which a p-base region is formed. Next to the p-base region, an n+-source region is formed. On the cathode film, an interlayer insulator film is selectively formed on which an emitter electrode is formed. A semiconductor device such as an IGBT is obtained with a high rate of acceptable products, an excellent on-voltage to turn-off loss tradeoff and an excellent on-voltage to breakdown voltage tradeoff.Type: GrantFiled: September 2, 2005Date of Patent: August 28, 2007Assignee: Fuji Electric Holdings Co., Ltd.Inventor: Manabu Takei
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Publication number: 20070158740Abstract: A semiconductor device including an n-type semiconductor substrate, a p-type channel region and a junction layer provided between the n-type semiconductor substrate and the p-type channel region is disclosed. The junction layer has n-type drift regions and p-type partition regions alternately arranged in the direction in parallel with the principal surface of the n-type semiconductor substrate. The p-type partition region forming the junction layer is made to have a higher impurity concentration than the n-type drift region. This enables the semiconductor device to have an enhanced breakdown voltage and, at the same time, have a reduced on-resistance.Type: ApplicationFiled: November 28, 2006Publication date: July 12, 2007Applicant: FUJI ELECTRIC HOLDINGS CO., LTD.Inventors: Koh Yoshikawa, Akio Sugi, Kouta Takahashi, Manabu Takei, Haruo Nakazawa, Noriyuki Iwamuro
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Publication number: 20070072359Abstract: A semiconductor device is disclosed that reduces the reverse leakage current caused by reverse bias voltage application and reduces the on-voltage of the IGBT. A two-way switching device using the semiconductor devices is provided, and a method of manufacturing the semiconductor device is disclosed. The reverse blocking IGBT reduces the reverse leakage current and the on-voltage by bringing portions of an n?-type drift region 1 that extend between p-type base regions and an emitter electrode into Schottky contact to form Schottky junctions.Type: ApplicationFiled: November 9, 2006Publication date: March 29, 2007Applicant: FUJI ELECTRIC DEVICE TECHNOLOGY CO., LTD.Inventors: Manabu TAKEI, Tatsuya NAITO, Michio NEMOTO
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Patent number: 7157785Abstract: A semiconductor device is disclosed that reduces the reverse leakage current caused by reverse bias voltage application and reduces the on-voltage of the IGBT. A two-way switching device using the semiconductor devices is provided, and a method of manufacturing the semiconductor device is disclosed. The reverse blocking IGBT reduces the reverse leakage current and the on-voltage by bringing portions of an n?-type drift region 1 that extend between p-type base regions and an emitter electrode into Schottky contact to form Schottky junctions.Type: GrantFiled: August 27, 2004Date of Patent: January 2, 2007Assignee: Fuji Electric Device Technology Co., Ltd.Inventors: Manabu Takei, Tatsuya Naito, Michio Nemoto
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Publication number: 20060249797Abstract: On the top surface of a thin semiconductor wafer, top surface structures forming a semiconductor chip are formed. The top surface of the wafer is affixed to a supporting substrate with a double-sided adhesive tape. Then, from the bottom surface of the thin semiconductor wafer, a trench, which becomes a scribing line, is formed by wet anisotropic etching so that side walls of the trench are exposed. On the side walls of the trench with the crystal face exposed, an isolation layer with a conductivity type different from that of the semiconductor wafer for holding a reverse breakdown voltage is formed simultaneously with a collector region of the bottom surface diffused layer by ion implantation, followed by annealing with laser irradiation. The side walls form a substantially V-shaped or trapezoidal-shaped cross section, with an angle of the side wall relative to the supporting substrate being 30-70°. The double-sided adhesive tape is then removed from the top surface to produce semiconductor chips.Type: ApplicationFiled: March 27, 2006Publication date: November 9, 2006Applicant: FUJI ELECTRIC HOLDING CO., LTD.Inventors: Haruo Nakazawa, Kazuo Shimoyama, Manabu Takei
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Publication number: 20060192204Abstract: A thin film transistor panel including: a transparent substrate; scanning lines made of a light blocking electroconductive material to be formed on the transparent substrate; data lines formed on the transparent substrate to be perpendicular to the scanning lines and made of a light blocking electroconductive material; thin film transistors, each provided with a transparent gate electrode connected to one of the scanning lines, a transparent drain electrode connected to one of the data lines, a transparent source electrode and a transparent semiconductor thin film; and transparent pixel electrodes connected to the thin film transistors, wherein each of the pixel electrodes is formed to cover at least a part of the gate electrode of each of the thin film transistors.Type: ApplicationFiled: February 16, 2006Publication date: August 31, 2006Applicant: Casio Computer Co., Ltd.Inventors: Ikuhiro Yamaguchi, Manabu Takei, Motohiko Yoshida
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Publication number: 20060186508Abstract: A reverse blocking semiconductor device that shows no adverse effect of an isolation region on reverse recovery peak current, that has a breakdown withstanding structure exhibiting satisfactory soft recovery, that suppresses aggravation of reverse leakage current, which essentially accompanies a conventional reverse blocking IGBT, and that retains satisfactorily low on-state voltage is disclosed. The device includes a MOS gate structure formed on a n? drift layer, the MOS gate structure including a p+ base layer formed in a front surface region of the drift layer, an n+ emitter region formed in a surface region of the base layer, a gate insulation film covering a surface area of the base layer between the emitter region and the drift layer, and a gate electrode formed on the gate insulation film. An emitter electrode is in contact with both the emitter region and the base layer of the MOS gate structure.Type: ApplicationFiled: April 4, 2006Publication date: August 24, 2006Applicant: Fuji Electric Holdings Co., Ltd.Inventors: Michio Nemoto, Manabu Takei, Tatsuya Naito
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Patent number: 7049674Abstract: A reverse blocking semiconductor device that shows no adverse effect of an isolation region on reverse recovery peak current, that has a breakdown withstanding structure exhibiting satisfactory soft recovery, that suppresses aggravation of reverse leakage current, which essentially accompanies a conventional reverse blocking IGBT, and that retains satisfactorily low on-state voltage is disclosed. The device includes a MOS gate structure formed on a n? drift layer, the MOS gate structure including a p+ base layer formed in a front surface region of the drift layer, an n+ emitter region formed in a surface region of the base layer, a gate insulation film covering a surface area of the base layer between the emitter region and the drift layer, and a gate electrode formed on the gate insulation film. An emitter electrode is in contact with both the emitter region and the base layer of the MOS gate structure.Type: GrantFiled: April 12, 2004Date of Patent: May 23, 2006Assignee: Fuji Electric Holdings Co., Ltd.Inventors: Michio Nemoto, Manabu Takei, Tatsuya Naito
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Publication number: 20060076583Abstract: A semiconductor device has a MOS gate side surface structure, including a gate electrode filling a trench formed in a semiconductor substrate with an insulator film between the trench and the gate electrode, a gate insulator film covering the surface of the gate electrode, a buffer region of one conductivity type in contact with the semiconductor substrate, a base region of the other conductivity type adjacent to the buffer region on the gate insulator film, and an emitter region of the one conductivity type adjacent to the base region on the side opposite to the buffer region. The semiconductor device and the method of manufacturing thereof can further improve the tradeoff between the on-voltage and the turn-off loss by increasing the amount of electrons injected from a cathode on the surface to increase an amount of carriers on the cathode side in a stable turned-on state of the device.Type: ApplicationFiled: September 2, 2005Publication date: April 13, 2006Applicant: Fuji Electric Holdings Co., Ltd.Inventors: Setsuko Wakimoto, Manabu Takei, Shinji Fujikake
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Publication number: 20060066219Abstract: A display panel includes a transistor array substrate which has a plurality of transistors including at least a driving transistor, and a plurality of pixel electrodes electrically connected to the driving transistor of the plurality of transistors. A plurality of light-emitting layers are provided on the pixel electrodes. A counter electrode is provided on the light-emitting layers. Each of a plurality of interconnections is arranged between the pixel electrodes adjacent to each other and electrically connected to the counter electrode.Type: ApplicationFiled: September 26, 2005Publication date: March 30, 2006Applicant: Casio Computer Co., Ltd.Inventors: Satoru Shimoda, Manabu Takei, Tomoyuki Shirasaki, Jun Ogura