Patents by Inventor Manuel Stompe

Manuel Stompe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Facet mirror for an illumination optical unit of a projection exposure apparatus
    Patent number: 11789367
    Abstract: A facet mirror for an illumination optical unit of a projection exposure apparatus has a large number of displaceable individual facets with a facet main body and a reflection surface arranged on it. At least some of the individual facets have a displacement range such that they come into contact with a stop surface in one or more displacement positions.
    Type: Grant
    Filed: March 15, 2022
    Date of Patent: October 17, 2023
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Willi Anderl, Christian Körner, Hubert Holderer, Markus Holz, Manuel Stompe, Stefan Seitz
  • FACET MIRROR FOR AN ILLUMINATION OPTICAL UNIT OF A PROJECTION EXPOSURE APPARATUS
    Publication number: 20220206398
    Abstract: A facet mirror for an illumination optical unit of a projection exposure apparatus has a large number of displaceable individual facets with a facet main body and a reflection surface arranged on it. At least some of the individual facets have a displacement range such that they come into contact with a stop surface in one or more displacement positions.
    Type: Application
    Filed: March 15, 2022
    Publication date: June 30, 2022
    Inventors: Willi Anderl, Christian Körner, Hubert Holderer, Markus Holz, Manuel Stompe, Stefan Seitz