Abstract: An encapsulated MEMS device and a method for manufacturing the MEMS device are provided. The method comprises providing a cavity structure having an inner volume comprising a plurality of MEMS elements, which are relatively displaceable with respect to each other, and having an opening structure to the inner volume, depositing a Self-Assembled Monolayer (SAM) through the opening structure onto exposed surfaces within the inner volume of the cavity structure, and closing the cavity structure by applying a layer structure on the opening structure for providing a hermetically closed cavity.

Abstract: Method of automatic finishing of a free-form contoured metal or hard die surface, comprising: providing a rotating brush with a central hub carried by a driving spindle for rotation about the hub axis; providing the brush hub with a plurality of closely spaced resilient and independently flexible strands possessing abrasive polishing particles, each strand being secured at one end in the hub and having its other end extending radially away therefrom to present an apparent curved surface of closely spaced strand ends (the series of touching or closely spaced strand ends forming at least a portion of a spherical surface); and rotatingly driving the hub and strands at a constant torque while dragging the ends of said strands across the die surface while in contact therewith to effect the desired degree of polishing. The coating of abrasive polishing particles can be selected from the group of aluminum oxide, silicon oxide or silicon carbide.