Patents by Inventor Marinus Augustinus Christiaan VERSCHUREN

Marinus Augustinus Christiaan VERSCHUREN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE RESTRAINING SYSTEM
    Publication number: 20240234196
    Abstract: A substrate restraining system comprising: a substrate table and a plurality of circumferentially arranged restrainers each comprising a spring, wherein the spring has a proximal end and a distal end, wherein the distal end of the spring is radially displacable, and wherein a base of the proximal end of the spring is fixed to the substrate table at a fixing location.
    Type: Application
    Filed: February 3, 2022
    Publication date: July 11, 2024
    Applicant: ASML Netherlands B.V.
    Inventors: Marinus Augustinus Christiaan VERSCHUREN, Thomas POIESZ
  • SUBSTRATE RESTRAINING SYSTEM
    Publication number: 20240136218
    Abstract: A substrate restraining system comprising: a substrate table and a plurality of circumferentially arranged restrainers each comprising a spring, wherein the spring has a proximal end and a distal end, wherein the distal end of the spring is radially displacable, and wherein a base of the proximal end of the spring is fixed to the substrate table at a fixing location.
    Type: Application
    Filed: February 3, 2022
    Publication date: April 25, 2024
    Applicant: ASML Netherlands B.V.
    Inventors: Marinus Augustinus Christiaan VERSCHUREN, Thomas POIESZ
  • OBJECT HOLDER, ELECTROSTATIC SHEET AND METHOD FOR MAKING AN ELECTROSTATIC SHEET
    Publication number: 20230236518
    Abstract: An object holder configured to support an object, the object holder comprising: a core body comprising a plurality of burls having distal ends in a support plane for supporting the object; an electrostatic sheet between the burls, the electrostatic sheet comprising an electrode sandwiched between dielectric layers; and a circumferential barrier for reducing outflow of gas escaping from space between the object and the core body.
    Type: Application
    Filed: June 9, 2021
    Publication date: July 27, 2023
    Applicant: ASML Netherlands B.V.
    Inventors: Bastiaan Lambertus Wilhelmus Marinus VAN DE VEN, Koos VAN BERKEL, Marcus Adrianus VAN DE KERKHOF, Roger Franciscus Mattheus Maria HAMELINCK, Shahab SHERVIN, Marinus Augustinus Christiaan VERSCHUREN, Johannes Bernardus Charles ENGELEN, Matthias KRUIZINGA, Tammo UITTERDIJK, Oleksiy Sergiyovich GALAKTIONOV, Kjeld Gertrudus Hendrikus JANSSEN, Johannes Adrianus Cornelis Maria PIJNENBURG, Peter VAN DELFT