Patents by Inventor Mario E. Bran

Mario E. Bran has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5539995
    Abstract: An apparatus and method for rapidly drying an object, such as a semiconductor wafer, by creating a vapor flow from a liquid, such as isopropyl alcohol, and exposing the object to that flow. The apparatus comprises a heater for vaporizing liquid in a reservoir into a vapor, a condenser for subsequently condensing the vapor, and a treatment chamber into which the object to be dried is placed. The vaporization of the liquid at the reservoir and its subsequent condensation at the condenser creates a pressure gradient between the heater and the condenser, thereby forming a vapor stream. The object to be dried is exposed to this vapor stream, whereby some of the vapor condenses on the object and combines with the liquid on the object to produce a condensate which flows off the object, thereby drying the object. The method comprises the steps of heating a liquid to form a vapor, condensing the vapor to form a vapor stream, and positioning an object to be dried in the vapor stream.
    Type: Grant
    Filed: March 16, 1994
    Date of Patent: July 30, 1996
    Assignee: Verteq, Inc.
    Inventor: Mario E. Bran
  • Patent number: 5534076
    Abstract: A transducer is bonded to a metal carrier that is mounted on an elastomeric frame-like diaphragm. The outer periphery of the diaphragm is mounted on a frame bonded to the bottom of a quartz tank. A vacuum applied to a chamber surrounding the lower portion of the carrier draws the carrier against the tank bottom with a compliant interface between the tank and the carrier. A cover clamps the diaphragm to the support and creates a coolant chamber with the diaphragm and the carrier for cooling the transducer. In other arrangements, resilient material or springs are employed to produce a force to compress the interface against the tank. Also the weight of the tank can produce compressive force on the interface.
    Type: Grant
    Filed: October 3, 1994
    Date of Patent: July 9, 1996
    Assignee: Verteg, Inc.
    Inventor: Mario E. Bran
  • Patent number: 5365960
    Abstract: A thin-walled rigid tube made of aluminum or other strong material that is a good thermal conductor and a good transmitter of megasonic energy is provided with an external sheath of Teflon to shield the tube from fluids used in cleaning semiconductor wafers. Arcuate transducers are coupled to the interior of the tube and energized with megasonic energy to transmit energy through the tube into fluid surrounding the wafers. A partition in the tube divides the tube into two or more chambers. Nitrogen is conducted through a tube end cap and through the chamber containing the transducers. Cooling water is ducted through the other chamber to conduct heat away from the assembly.
    Type: Grant
    Filed: April 5, 1993
    Date of Patent: November 22, 1994
    Assignee: Verteq, Inc.
    Inventor: Mario E. Bran
  • Patent number: 5286657
    Abstract: A semiconductor wafer processing system utilizing a specially constructed wet processing chamber for a single wafer and a megasonic, or high frequency, energy dispensing system. The construction of the container causes megasonic energy to become intensified near the surface of the wafer, thereby providing more cleaning power, and resulting cleaning. The megasonic device may be mounted on a bottom wall dump valve. Also, the energy output may be used to rotate a wafer.
    Type: Grant
    Filed: December 18, 1991
    Date of Patent: February 15, 1994
    Assignee: Verteq, Inc.
    Inventor: Mario E. Bran
  • Patent number: 5148823
    Abstract: A cleaning system for semiconductor wafers wherein a megasonic energy cleaning system is utilized. Megasonic energy cleaning systems comprise a piezo-electric transducer and a transmitter. The transducer emits high frequency energy into the body of the transmitter. The transmitter radiates this energy into a container holding processing fluid. The energy causes the liquid to oscillate, thus vibrating contaminants off the surface of the wafer. The megasonic cleaning system is located atop a table which is mounted on a piston. In retracting the piston, the bottom of the container is removed any any liquid held within is dumped out into a second receptacle. The piston can then be returned to its extending position, and a rinsing agent can be added. Thus the megasonic cleaning system can be employed during the rinse cycle as well as the processing cycle, better cleaning the semiconductor wafer.
    Type: Grant
    Filed: October 16, 1990
    Date of Patent: September 22, 1992
    Assignee: Verteg, Inc.
    Inventor: Mario E. Bran
  • Patent number: 5090432
    Abstract: A semiconductor wafer processing system utilizing a specially constructed wet processing chamber for a single wafer and a megasonic, or high frequency, energy dispensing system. The construction of the container causes megasonic energy to become intensified near the surface of the wafer, thereby providing more cleaning power, and resulting cleaning. The megasonic device may be mounted on a bottom wall dump valve. Also, the energy output may be used to rotate a wafer.
    Type: Grant
    Filed: October 16, 1990
    Date of Patent: February 25, 1992
    Assignee: Verteq, Inc.
    Inventor: Mario E. Bran
  • Patent number: 5037481
    Abstract: A transducer array for use in a megasonic cleaning system including a transmitter element made of a material which will efficiently transmit megasonic energy when bonded to one conductive surface of a transducer. In one form, the transmitter and the transducer are flat plates. In another form, a flat transducer is bonded to a solid semi-cylindrical transmitter which causes the megasonic energy pattern to diverge. In another form, the transmitter is a semi-cylindrical shell or is tubular, and the transducer is bonded to and curved to conform to the transmitter. The transducer extends about 120.degree., and produces a straight line of sight diverging energy pattern.
    Type: Grant
    Filed: February 15, 1990
    Date of Patent: August 6, 1991
    Assignee: Verteq, Inc.
    Inventor: Mario E. Bran
  • Patent number: 4998549
    Abstract: A transducer array for use in a megansonic cleaning system including a transmitter element made of a material which will efficiently transmit megasonic energy when bonded to one conductive surface of a transducer. In one form, the transmitter and the transducer are flat plates. In another form, a flat transducer is bonded to a solid semi-cylindrical transmitter which causes the megasonic energy pattern to diverge. In another form, the transmitter is a semi-cylindrical shell or is tubular, and the transducer is bonded to and curved to conform to the transmitter. The transducer extends about 120.degree., and produces a straight line of sight diverging energy pattern.
    Type: Grant
    Filed: November 16, 1988
    Date of Patent: March 12, 1991
    Assignee: Verteq, Inc.
    Inventor: Mario E. Bran
  • Patent number: 4869278
    Abstract: The transducer array for use in a megasonic cleaning system comprising a flat plate made of quartz or sapphire or boron nitride and a transducer having a conductive flat surface bonded to the flat plate and a conductive surface spaced from the flat plate. In another embodiment the array employs a semi-cylindrical energy transmitter with a transducer attached to the transmitter's flat surface.
    Type: Grant
    Filed: January 15, 1988
    Date of Patent: September 26, 1989
    Inventor: Mario E. Bran
  • Patent number: 4804007
    Abstract: A transducer array for use in a megasonic cleaning system comprising a flat plate made of quartz or sapphire or boron nitride and a transducer having a conductive flat surface bonded to the flat plate and a conductive surface spaced from the flat plate.
    Type: Grant
    Filed: April 29, 1987
    Date of Patent: February 14, 1989
    Assignee: Verteq, Inc.
    Inventor: Mario E. Bran