Patents by Inventor Mark J. Esposito

Mark J. Esposito has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Void monitoring device for measurement of wafer temperature variations
    Patent number: 9543219
    Abstract: A method of monitoring a temperature of a plurality of regions in a substrate during a deposition process, the monitoring of the temperature including: forming, in the monitored plurality of regions, a plurality of metal structures each with a different metal pattern density, where each metal pattern density corresponds to a threshold temperature at or above which metal voids and surface roughness are formed in the plurality of metal structures, and detecting metal voids and surface roughness in the plurality of metal structures to determine the temperature of the monitored plurality of regions.
    Type: Grant
    Filed: December 2, 2014
    Date of Patent: January 10, 2017
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Shawn A. Adderly, Samantha D. DiStefano, Mark J. Esposito, Jeffrey P. Gambino, Prakash Periasamy
  • VOID MONITORING DEVICE FOR MEASUREMENT OF WAFER TEMPERATURE VARIATIONS
    Publication number: 20160155675
    Abstract: A method of monitoring a temperature of a plurality of regions in a substrate during a deposition process, the monitoring of the temperature including: forming, in the monitored plurality of regions, a plurality of metal structures each with a different metal pattern density, where each metal pattern density corresponds to a threshold temperature at or above which metal voids and surface roughness are formed in the plurality of metal structures, and detecting metal voids and surface roughness in the plurality of metal structures to determine the temperature of the monitored plurality of regions.
    Type: Application
    Filed: December 2, 2014
    Publication date: June 2, 2016
    Inventors: Shawn A. Adderly, Samantha D. DiStefano, Mark J. Esposito, Jeffrey P. Gambino, Prakash Periasamy