Patents by Inventor Mark P. D'Evelyn

Mark P. D'Evelyn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240247406
    Abstract: Embodiments of the disclosure include a free-standing crystal, comprising a group III metal and nitrogen. The free-standing crystal may comprise: a wurtzite crystal structure; a growth direction, the growth direction being selected from one of [0 0 0 ±1], {1 0 ?1 0}, {1 0 ?1 ±1}, or {1 0 ?1 ±2}. A first surface having a dislocation density between 1 cm?2 and 107 cm?2, the dislocations having an orientation within 30 degrees of the growth direction, and an average impurity concentration of H greater than 1017 cm?3. The free-standing crystal having at least four sets of bands, wherein each set of bands includes a first sub-band and a second sub-band, the first sub-band having a concentration of at least one impurity selected from H, O, Li, Na, K, F, Cl, Br, and I; and each of the at least four sets of bands have portions that are substantially parallel.
    Type: Application
    Filed: January 19, 2024
    Publication date: July 25, 2024
    Inventors: Drew W. CARDWELL, Dirk EHRENTRAUT, Mark P. D'EVELYN, Rajeev Tirumala PAKALAPATI
  • Publication number: 20240240352
    Abstract: A method for growth of group Ill metal nitride crystals includes providing one or more transfer vessels, a source vessel containing a condensable mineralizer composition, and a receiving vessel, chilling a metallic surface within the one or more transfer vessels, transferring a quantity of the condensable mineralizer composition to the one or more transfer vessels via a vapor phase and causing condensation of the condensable mineralizer composition within the one or more transfer vessels, measuring the quantity of the condensable mineralizer composition within the at least one transfer vessel, transferring at least a portion of the condensable mineralizer composition to the receiving vessel, and forming at least a portion of a group Ill metal nitride boule by an ammonothermal crystal growth process.
    Type: Application
    Filed: February 6, 2024
    Publication date: July 18, 2024
    Inventors: Mark P. D'EVELYN, Paul M. VON DOLLEN, Lisa M. GAY, Douglas W. POCIUS, Jonathan D. COOK
  • Patent number: 12040417
    Abstract: According to the present disclosure, techniques related to manufacturing and applications of power photodiode structures and devices based on group-III metal nitride and gallium-based substrates are provided. More specifically, embodiments of the disclosure include techniques for fabricating photodiode devices comprising one or more of GaN, AlN, InN, InGaN, AlGaN, and AlInGaN, structures and devices. Such structures or devices can be used for a variety of applications including optoelectronic devices, photodiodes, power-over-fiber receivers, and others.
    Type: Grant
    Filed: November 28, 2022
    Date of Patent: July 16, 2024
    Assignee: SLT Technologies, Inc.
    Inventors: Drew W. Cardwell, Mark P. D'Evelyn
  • Patent number: 12024795
    Abstract: A method for growth of group III metal nitride crystals includes providing a manifold comprising including one or more transfer vessels, a source vessel containing a condensable mineralizer composition, and a receiving vessel, chilling a metallic surface within the one or more transfer vessels, the metallic surface comprising a composition that does not form a reaction product when exposed to the condensable mineralizer composition, transferring a quantity of the condensable mineralizer composition to the one or more transfer vessels via a vapor phase and causing condensation of the condensable mineralizer composition within the one or more transfer vessels, measuring the quantity of the condensable mineralizer composition within the at least one transfer vessel, transferring at least a portion of the condensable mineralizer composition to the receiving vessel, and forming at least a portion of a group III metal nitride boule by an ammonothermal crystal growth process that comprises exposing a seed crystal to
    Type: Grant
    Filed: October 29, 2021
    Date of Patent: July 2, 2024
    Assignee: SLT Technologies, Inc.
    Inventors: Mark P. D'Evelyn, Paul M. Von Dollen, Lisa M. Gay, Douglas W. Pocius, Jonathan D. Cook
  • Patent number: 12027635
    Abstract: According to the present disclosure, techniques related to manufacturing and applications of power photodiode structures and devices based on group-III metal nitride and gallium-based substrates are provided. More specifically, embodiments of the disclosure include techniques for fabricating photodiode devices comprising one or more of GaN, AlN, InN, InGaN, AlGaN, and AlInGaN, structures and devices. Such structures or devices can be used for a variety of applications including optoelectronic devices, photodiodes, power-over-fiber receivers, and others.
    Type: Grant
    Filed: November 28, 2022
    Date of Patent: July 2, 2024
    Assignee: SLT Technologies, Inc.
    Inventors: Drew W. Cardwell, Mark P. D'Evelyn
  • Publication number: 20240183074
    Abstract: A gallium-containing nitride crystals comprising: a top surface having a crystallographic orientation within 5 degrees of a plane selected from a (0001) +c-plane and a (000-1) ?c-plane; a substantially wurtzite structure; n-type electronic properties; an impurity concentration of hydrogen >5×1017 cm?3; an impurity concentration of oxygen between 2×1017 cm?3 and 1×1020 cm?3; an [H]/[O] ratio of at least 0.3; an impurity concentration of at least one of Li, Na, K, Rb, Cs, Ca, F, and Cl >1×1016 cm?3; a compensation ratio between 1.0 and 4.0; an absorbance per unit thickness of at least 0.01 cm?1 at wavenumbers of 3175 cm?1, 3164 cm?1, and 3150 cm?1; and wherein, at wavenumbers between 3200 cm?1 and 3400 cm?1 and between 3075 cm?1 and 3125 cm?1, said gallium-containing nitride crystal is essentially free of infrared absorption peaks having an absorbance per unit thickness >10% of the absorbance per unit thickness at 3175 cm?1.
    Type: Application
    Filed: February 13, 2024
    Publication date: June 6, 2024
    Inventors: Wenkan JIANG, Dirk EHRENTRAUT, Mark P. D'EVELYN
  • Patent number: 12000063
    Abstract: Embodiments of the present disclosure include techniques related to techniques for processing materials for manufacture of group-III metal nitride and gallium based substrates. More specifically, embodiments of the disclosure include techniques for growing large area substrates using a combination of processing techniques. Merely by way of example, the disclosure can be applied to growing crystals of GaN, AlN, InN, InGaN, AlGaN, and AlInGaN, and others for manufacture of bulk or patterned substrates. Such bulk or patterned substrates can be used for a variety of applications including optoelectronic and electronic devices, lasers, light emitting diodes, solar cells, photo electrochemical water splitting and hydrogen generation, photodetectors, integrated circuits, and transistors, and others.
    Type: Grant
    Filed: February 10, 2021
    Date of Patent: June 4, 2024
    Assignee: SLT Technologies, Inc.
    Inventors: Drew W. Cardwell, Mark P. D'Evelyn
  • Publication number: 20240158951
    Abstract: According to the present disclosure, techniques related to processing of materials for growth of crystals are provided. More particularly, the present disclosure provides apparatus and methods for heating of seed crystals suitable for use in conjunction with a high-pressure vessel for crystal growth of a material having a retrograde solubility in a supercritical fluid, including crystal growth of a group III metal nitride crystal by an ammonobasic or ammonoacidic technique, but there can be others. In other embodiments, the present disclosure provides methods suitable for synthesis of crystalline nitride materials, but it would be recognized that other crystals and materials can also be processed. Such crystals and materials include, but are not limited to, GaN, AlN, InN, InGaN, AlGaN, and AlInGaN, and others for manufacture of bulk or patterned substrates.
    Type: Application
    Filed: November 9, 2023
    Publication date: May 16, 2024
    Inventors: Paul M. VON DOLLEN, Mark P. D'EVELYN
  • Publication number: 20240158950
    Abstract: According to the present disclosure, techniques related to processing of materials for growth of crystals are provided. More particularly, the present disclosure provides apparatus and methods for heating of seed crystals suitable for use in conjunction with a high-pressure vessel for crystal growth of a material having a retrograde solubility in a supercritical fluid, including crystal growth of a group III metal nitride crystal by an ammonobasic or ammonoacidic technique, but there can be others. In other embodiments, the present disclosure provides methods suitable for synthesis of crystalline nitride materials, but it would be recognized that other crystals and materials can also be processed. Such crystals and materials include, but are not limited to, GaN, AlN, InN, InGaN, AlGaN, and AlInGaN, and others for manufacture of bulk or patterned substrates.
    Type: Application
    Filed: November 9, 2023
    Publication date: May 16, 2024
    Inventors: Paul M. VON DOLLEN, Drew W. CARDWELL, Mark P. D'EVELYN, Rajeev Tirumala PAKALAPATI
  • Publication number: 20240133076
    Abstract: A gallium-containing nitride crystals are disclosed, comprising: a top surface having a crystallographic orientation within about 5 degrees of a plane selected from a (0001) +c-plane and a (000-1) ?c-plane; a substantially wurtzite structure; n-type electronic properties; an impurity concentration of hydrogen greater than about 5×1017 cm?3; an impurity concentration of oxygen between about 2×1017 cm?3 and about 1×1020 cm?3; an [H]/[O] ratio of at least 0.3; an impurity concentration of at least one of Li, Na, K, Rb, Cs, Ca, F, and Cl greater than about 1×1016 cm?3; a compensation ratio between about 1.0 and about 4.0; an absorbance per unit thickness of at least 0.
    Type: Application
    Filed: December 16, 2023
    Publication date: April 25, 2024
    Inventors: Wenkan JIANG, Dirk EHRENTRAUT, Mark P. D'EVELYN
  • Patent number: 11898269
    Abstract: A gallium-containing nitride crystals are disclosed, comprising: a top surface having a crystallographic orientation within about 5 degrees of a plane selected from a (0001)+c-plane and a (000-1)?c-plane; a substantially wurtzite structure; n-type electronic properties; an impurity concentration of hydrogen greater than about 5×1017 cm?3, an impurity concentration of oxygen between about 2×1017 cm?3 and about 1×1020 cm?3, an [H]/[O] ratio of at least 0.3; an impurity concentration of at least one of Li, Na, K, Rb, Cs, Ca, F, and Cl greater than about 1×1016 cm?3, a compensation ratio between about 1.0 and about 4.0; an absorbance per unit thickness of at least 0.
    Type: Grant
    Filed: May 6, 2020
    Date of Patent: February 13, 2024
    Assignee: SLT Technologies, Inc.
    Inventors: Wenkan Jiang, Dirk Ehrentraut, Mark P. D'Evelyn
  • Publication number: 20240026563
    Abstract: Embodiments of the disclosure include a crystal growth apparatus, comprising a cylindrical-shaped enclosure, a primary liner disposed within the cylindrical-shaped enclosure, wherein the primary liner comprises a cylindrical wall that extends between a first end and a second end, and an interior surface of the primary liner defines an interior region, at least one load-bearing annular insulating member disposed between the cylindrical-shaped enclosure and the primary liner, a plurality of heating elements disposed between the primary liner and the at least one load-bearing annular insulating member, at least one end closure member disposed proximate to a first end of the cylindrical-shaped enclosure, and a primary liner lid disposed proximate to the first end of the cylindrical wall of the primary liner.
    Type: Application
    Filed: July 20, 2023
    Publication date: January 25, 2024
    Inventors: Mark P. D'EVELYN, Paul M. VON DOLLEN
  • Publication number: 20240026562
    Abstract: Embodiments of the disclosure can include an apparatus for solvothermal crystal growth. The apparatus can include a cylindrical shaped enclosure, a cylindrical heater, a first end closure member, a load-bearing annular insulating member, and a first end plug. The cylindrical heater includes a first end, a second end and a cylindrical wall that extends between the first end and the second end, wherein an interior surface of the cylindrical wall defines a capsule region. The first end closure member is disposed proximate to the first end of the cylindrical heater, the first end closure member being configured to provide axial support for a capsule disposed within the capsule region. The load-bearing annular insulating member is disposed between an inner surface of the cylindrical shaped enclosure and an outer surface of the cylindrical wall of the cylindrical heater. The first end plug is disposed between the first end of the cylindrical heater and the first end closure.
    Type: Application
    Filed: July 20, 2023
    Publication date: January 25, 2024
    Inventors: Mark P. D'EVELYN, Paul M. VON DOLLEN
  • Publication number: 20230420586
    Abstract: According to the present disclosure, techniques related to manufacturing and applications of power photodiode structures and devices based on group-III metal nitride and gallium-based substrates are provided. More specifically, embodiments of the disclosure include techniques for fabricating photodiode devices comprising one or more of GaN, AlN, InN, InGaN, AlGaN, and AlInGaN, structures and devices. Such structures or devices can be used for a variety of applications including optoelectronic devices, photodiodes, power-over-fiber receivers, and others.
    Type: Application
    Filed: June 27, 2023
    Publication date: December 28, 2023
    Inventors: Islam SAYED, Sang Ho OH, Nathan YOUNG, Drew W. CARDWELL, Mark P. D'EVELYN
  • Publication number: 20230340695
    Abstract: Embodiments of the present disclosure include techniques related to techniques for processing materials for manufacture of group-III metal nitride and gallium based substrates. More specifically, embodiments of the disclosure include techniques for growing large area substrates using a combination of processing techniques. Merely by way of example, the disclosure can be applied to growing crystals of GaN, AlN, InN, InGaN, AlGaN, and AlInGaN, and others for manufacture of bulk or patterned substrates. Such bulk or patterned substrates can be used for a variety of applications including optoelectronic and electronic devices, lasers, light emitting diodes, solar cells, photo electrochemical water splitting and hydrogen generation, photodetectors, integrated circuits, and transistors, and others.
    Type: Application
    Filed: June 20, 2023
    Publication date: October 26, 2023
    Inventors: Dirk EHRENTRAUT, Mark P. D'EVELYN, Drew W. CARDWELL
  • Publication number: 20230317444
    Abstract: Embodiments of the present disclosure include techniques related to techniques for processing materials for manufacture of group-III metal nitride and gallium based substrates. More specifically, embodiments of the disclosure include techniques for growing large area substrates using a combination of processing techniques. Merely by way of example, the disclosure can be applied to growing crystals of GaN, AlN, InN, InGaN, AlGaN, and AlInGaN, and others for manufacture of bulk or patterned substrates. Such bulk or patterned substrates can be used for a variety of applications including optoelectronic and electronic devices, lasers, light emitting diodes, solar cells, photo electrochemical water splitting and hydrogen generation, photodetectors, integrated circuits, and transistors, and others.
    Type: Application
    Filed: June 8, 2023
    Publication date: October 5, 2023
    Applicant: SLT Technologies, Inc.
    Inventors: Wenkan JIANG, Mark P. D'EVELYN, Derrick S. KAMBER, Dirk EHRENTRAUT, Jonathan D. COOK, James WENGER
  • Publication number: 20230295839
    Abstract: Embodiments of the present disclosure include techniques related to techniques for processing materials for manufacture of group-III metal nitride and gallium based substrates. More specifically, embodiments of the disclosure include techniques for growing large area substrates using a combination of processing techniques. Merely by way of example, the disclosure can be applied to growing crystals of GaN, AlN, InN, InGaN, AlGaN, and AlInGaN, and others for manufacture of bulk or patterned substrates. Such bulk or patterned substrates can be used for a variety of applications including optoelectronic and electronic devices, lasers, light emitting diodes, solar cells, photo electrochemical water splitting and hydrogen generation, photodetectors, integrated circuits, and transistors, and others.
    Type: Application
    Filed: March 17, 2023
    Publication date: September 21, 2023
    Applicant: SLT Technologies, Inc.
    Inventors: Keiji FUKUTOMI, Wenkan JIANG, Motoi TAMAKI, Mark P. D'EVELYN
  • Patent number: 11721549
    Abstract: Embodiments of the present disclosure include techniques related to techniques for processing materials for manufacture of group-III metal nitride and gallium based substrates. More specifically, embodiments of the disclosure include techniques for growing large area substrates using a combination of processing techniques. Merely by way of example, the disclosure can be applied to growing crystals of GaN, AlN, InN, InGaN, AlGaN, and AlInGaN, and others for manufacture of bulk or patterned substrates. Such bulk or patterned substrates can be used for a variety of applications including optoelectronic and electronic devices, lasers, light emitting diodes, solar cells, photo electrochemical water splitting and hydrogen generation, photodetectors, integrated circuits, and transistors, and others.
    Type: Grant
    Filed: February 10, 2021
    Date of Patent: August 8, 2023
    Assignee: SLT TECHNOLOGIES, INC.
    Inventors: Mark P. D'Evelyn, Wenkan Jiang, Drew W. Cardwell, Dirk Ehrentraut
  • Patent number: 11705322
    Abstract: Embodiments of the present disclosure include techniques related to techniques for processing materials for manufacture of group-III metal nitride and gallium based substrates. More specifically, embodiments of the disclosure include techniques for growing large area substrates using a combination of processing techniques. Merely by way of example, the disclosure can be applied to growing crystals of GaN, AlN, InN, InGaN, AlGaN, and AlInGaN, and others for manufacture of bulk or patterned substrates. Such bulk or patterned substrates can be used for a variety of applications including optoelectronic and electronic devices, lasers, light emitting diodes, solar cells, photo electrochemical water splitting and hydrogen generation, photodetectors, integrated circuits, and transistors, and others.
    Type: Grant
    Filed: May 22, 2020
    Date of Patent: July 18, 2023
    Assignee: SLT TECHNOLOGIES, INC.
    Inventors: Wenkan Jiang, Mark P. D'Evelyn, Derrick S. Kamber, Dirk Ehrentraut, Jonathan D. Cook, James Wenger
  • Patent number: RE49677
    Abstract: Techniques for processing materials for manufacture of gallium-containing nitride substrates are disclosed. More specifically, techniques for fabricating and reusing large area substrates using a combination of processing techniques are disclosed. The methods can be applied to fabricating substrates of GaN, AlN, InN, InGaN, AlGaN, and AlInGaN, and others. Such substrates can be used for a variety of applications including optoelectronic devices, lasers, light emitting diodes, solar cells, photo electrochemical water splitting and hydrogen generation, photo detectors, integrated circuits, transistors, and others.
    Type: Grant
    Filed: September 4, 2020
    Date of Patent: October 3, 2023
    Assignee: SLT Technologies, Inc
    Inventors: Mark P. D'Evelyn, Michael Ragan Krames