Patents by Inventor Markus Kahn

Markus Kahn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20160353210
    Abstract: A micromechanical structure comprises a substrate and a functional structure arranged at the substrate. The functional structure comprises a functional region which is deflectable with respect to the substrate responsive to a force acting on the functional region. The functional structure comprises a carbon layer arrangement, wherein a basis material of the carbon layer arrangement is a carbon material.
    Type: Application
    Filed: May 28, 2015
    Publication date: December 1, 2016
    Inventors: Ulrich Schmid, Tobias Frischmuth, Peter Irsigler, Thomas Grille, Daniel Maurer, Ursula Hedenig, Markus Kahn, Guenter Denifl, Michael Schneider
  • Publication number: 20160351413
    Abstract: According to various embodiments, a method for processing a semiconductor layer may include: generating an etch plasma in a plasma chamber of a remote plasma source, wherein the plasma chamber of the remote plasma source is coupled to a processing chamber for processing the semiconductor layer; introducing the etch plasma into the processing chamber to remove a native oxide layer from a surface of the semiconductor layer and at most a negligible amount of semiconductor material of the semiconductor layer; and, subsequently, depositing a dielectric layer directly on the surface of the semiconductor layer.
    Type: Application
    Filed: May 29, 2015
    Publication date: December 1, 2016
    Inventors: Gerhard SCHMIDT, Markus KAHN, Christian MAIER, Philipp KOCH, Juergen STEINBRENNER
  • Patent number: 9478409
    Abstract: In various embodiments, a method for coating a workpiece is provided. The method may include drying a workpiece, the workpiece being coated with at least one oxide layer as an uppermost layer; depositing a dielectric layer over the uppermost layer of the dried workpiece; wherein the workpiece is continuously subject to a pressure which is lower than atmospheric pressure during the drying process and during the depositing process.
    Type: Grant
    Filed: January 12, 2015
    Date of Patent: October 25, 2016
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Juergen Steinbrenner, Markus Kahn, Helmut Schoenherr
  • Patent number: 9455136
    Abstract: A method for depositing an insulating layer includes performing a primary deposition over a sidewall of a feature by depositing a layer of silicate glass using a silicon source at a first flow rate and a dopant source at a second flow rate. A ratio of the flow of the dopant source to the flow of the silicon source is a first ratio. The method further includes performing a secondary deposition over the sidewall of a feature by increasing the flow of the silicon source relative to the flow of the dopant source. The ratio of the flow of the dopant source to the flow of the silicon source is a second ratio lower than the first ratio, and stopping the flow of the silicon source after performing the secondary deposition. A reflow process is performed after stopping the flow. A variation in thickness of the layer of silicate glass over the sidewall of a feature after the reflow process is between 1% to 20%.
    Type: Grant
    Filed: January 23, 2015
    Date of Patent: September 27, 2016
    Assignee: Infineon Technologies Austria AG
    Inventors: Juergen Steinbrenner, Markus Kahn, Helmut Schoenherr, Ravi Joshi, Heimo Hofer, Martin Poelzl, Harald Huetter
  • Publication number: 20160218002
    Abstract: A method for depositing an insulating layer includes performing a primary deposition over a sidewall of a feature by depositing a layer of silicate glass using a silicon source at a first flow rate and a dopant source at a second flow rate. A ratio of the flow of the dopant source to the flow of the silicon source is a first ratio. The method further includes performing a secondary deposition over the sidewall of a feature by increasing the flow of the silicon source relative to the flow of the dopant source. The ratio of the flow of the dopant source to the flow of the silicon source is a second ratio lower than the first ratio, and stopping the flow of the silicon source after performing the secondary deposition. A reflow process is performed after stopping the flow. A variation in thickness of the layer of silicate glass over the sidewall of a feature after the reflow process is between 1% to 20%.
    Type: Application
    Filed: January 23, 2015
    Publication date: July 28, 2016
    Inventors: Juergen Steinbrenner, Markus Kahn, Helmut Schoenherr, Ravi Joshi, Heimo Hofer, Martin Poelzl, Harald Huetter
  • Patent number: 9257342
    Abstract: In one embodiment, a method of forming a semiconductor device includes forming openings in a substrate. The method includes forming a dummy fill material within the openings and thinning the substrate to expose the dummy fill material. The dummy fill material is removed.
    Type: Grant
    Filed: April 24, 2014
    Date of Patent: February 9, 2016
    Assignee: Infineon Technologies AG
    Inventors: Gudrun Stranzl, Martin Zgaga, Markus Kahn, Guenter Denifl
  • Publication number: 20160031701
    Abstract: A micromechanical structure includes a substrate and a functional structure arranged at the substrate. The functional structure has a functional region configured to deflect with respect to the substrate responsive to a force acting on the functional region. The functional structure includes a conductive base layer and a functional structure comprising a stiffening structure having a stiffening structure material arranged at the conductive base layer and only partially covering the conductive base layer at the functional region. The stiffening structure material includes a silicon material and at least a carbon material.
    Type: Application
    Filed: July 31, 2014
    Publication date: February 4, 2016
    Inventors: Ulrich Schmid, Tobias Frischmuth, Peter Irsigler, Thomas Grille, Daniel Maurer, Ursula Hedenig, Markus Kahn, Günter Denifl
  • Patent number: 9212045
    Abstract: A micro mechanical structure includes a substrate and a functional structure arranged at the substrate. The functional structure includes a functional region which is deflectable with respect to the substrate responsive to a force acting on the functional region. The functional structure further includes a conductive base layer having a conductive base layer material. The conductive base layer material includes sectionally in a stiffening section a carbon material such that a carbon concentration of the carbon material in the conductive base layer material is at least 1014 per cubic cm and at least higher by a factor of 103 than in the conductive base layer material adjacent to the stiffening section.
    Type: Grant
    Filed: July 31, 2014
    Date of Patent: December 15, 2015
    Assignee: Infineon Technologies AG
    Inventors: Ulrich Schmid, Tobias Frischmuth, Peter Irsigler, Thomas Grille, Daniel Maurer, Ursula Hedenig, Markus Kahn, Guenter Denifl
  • Publication number: 20150348824
    Abstract: According to various embodiments, a semiconductor wafer may include: a semiconductor body including an integrated circuit structure; and at least one tetrahedral amorphous carbon layer formed at least one of over or in the integrated circuit structure, the at least one tetrahedral amorphous carbon layer may include a substance amount fraction of sp3-hybridized carbon of larger than approximately 0.4 and a substance amount fraction of hydrogen smaller than approximately 0.1.
    Type: Application
    Filed: May 30, 2014
    Publication date: December 3, 2015
    Applicant: Infineon Technologies AG
    Inventors: Matthias Kuenle, Gerhard Schmidt, Martin Sporn, Markus Kahn, Juergen Steinbrenner, Ravi Joshi
  • Publication number: 20150340224
    Abstract: In various embodiments, a method for coating a workpiece is provided. The method may include drying a workpiece, the workpiece being coated with at least one oxide layer as an uppermost layer; depositing a dielectric layer over the uppermost layer of the dried workpiece; wherein the workpiece is continuously subject to a pressure which is lower than atmospheric pressure during the drying process and during the depositing process.
    Type: Application
    Filed: January 12, 2015
    Publication date: November 26, 2015
    Inventors: Juergen Steinbrenner, Markus Kahn, Helmut Schoenherr
  • Publication number: 20150278937
    Abstract: Systems and methods of providing information associated with a financial instrument via a computer network are provided. Such a method may include receiving, by at least one processing circuit, from a computing device, a request for obtaining key figures of the financial instrument. The request may include a data object comprising a first identifier identifying the financial instrument, a second identifier identifying an entity owning the financial instrument, a third identifier identifying a collection of specifications structuring a body of accounting records, a fourth identifier identifying a fiscal year, a fifth identifier identifying a category of the financial instrument, and a sixth identifier identifying at least one of a posting period and an accounting period. The method may further include determining values of the key figures of the financial instrument based on the data object, and providing the values of the key figures.
    Type: Application
    Filed: March 31, 2014
    Publication date: October 1, 2015
    Inventors: Markus Kahn, Matthias Schwan, Dorothea Mayer, Hermann Haaf, Silvia Harmsen, Markus Fenn, Silke Froese, Gernot Krause, Frank Raebiger, Dirk Endesfelder
  • Publication number: 20150235917
    Abstract: A passivation layer and a method of making a passivation layer are disclosed. In one embodiment the method for manufacturing a passivation layer includes depositing a first silicon based dielectric layer on a workpiece, the first silicon based dielectric layer comprising nitrogen, and depositing in-situ a second silicon based dielectric layer on the first silicon based dielectric layer, the second dielectric layer comprising oxygen.
    Type: Application
    Filed: April 29, 2015
    Publication date: August 20, 2015
    Inventors: Kurt Matoy, Hubert Maier, Christian Krenn, Elfriede Kraxner Wellenzohn, Helmut Schoenherr, Juergen Steinbrenner, Markus Kahn, Silvana Fister, Christoph Brunner, Herbert Gietler, Uwe Hoeckele
  • Patent number: 9076112
    Abstract: A business object model, which reflects data that is used during a given business transaction, is utilized to generate interfaces. This business object model facilitates commercial transactions by providing consistent interfaces that are suitable for use across industries, across businesses, and across different departments within a business during a business transaction. In some operations, software creates, updates, or otherwise processes information related to a financial instrument impairment expected cash flow analytical result business object.
    Type: Grant
    Filed: August 22, 2012
    Date of Patent: July 7, 2015
    Assignee: SAP SE
    Inventors: Markus Kahn, Silke Froese, Hermann Haaf, Matthias Schwan, Markus Fenn, Silvia Harmsen, Dorothea Mayer
  • Publication number: 20150175467
    Abstract: Various embodiments provide a mold including a pyrolytic carbon film disposed at a surface of the mold. Various embodiments relate to using a low pressure chemical vapor deposition process (LPCVD) or using a physical vapor deposition (PVD) process in order to form a pyrolytic carbon film at a surface of a mold.
    Type: Application
    Filed: December 23, 2013
    Publication date: June 25, 2015
    Applicant: Infineon Technologies Austria AG
    Inventors: Guenter Denifl, Alexander Breymesser, Markus Kahn, Andre Brockmeier
  • Patent number: 9043236
    Abstract: A business object model, which reflects data that is used during a given business transaction, is utilized to generate interfaces. This business object model facilitates commercial transactions by providing consistent interfaces that are suitable for use across industries, across businesses, and across different departments within a business during a business transaction. In some operations, software creates, updates, or otherwise processes information related to a financial instrument impairment attribute values analytical result business object.
    Type: Grant
    Filed: August 22, 2012
    Date of Patent: May 26, 2015
    Assignee: SAP SE
    Inventors: Markus Kahn, Markus Roeckelein, Mathias Vahle, Silvia Harmsen, Dirk Endesfelder, Hermann Haaf, Markus Fenn, Dorothea Mayer, Matthias Schwan, Karola Ludes
  • Publication number: 20140335700
    Abstract: Carbon layers with reduced hydrogen content may be deposited by plasma-enhanced chemical vapor deposition by selecting processing parameters accordingly. Such carbon layers may be subjected to high temperature processing without showing excessive shrinking.
    Type: Application
    Filed: May 10, 2013
    Publication date: November 13, 2014
    Inventors: Guenter Denifl, Markus Kahn, Helmut Schoenherr, Daniel Maurer, Thomas Grille, Joachim Hirschler, Ursula Hedenig, Roland Moennich, Matthias Kuenle
  • Publication number: 20140235035
    Abstract: In one embodiment, a method of forming a semiconductor device includes forming openings in a substrate. The method includes forming a dummy fill material within the openings and thinning the substrate to expose the dummy fill material. The dummy fill material is removed.
    Type: Application
    Filed: April 24, 2014
    Publication date: August 21, 2014
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Gudrun Stranzl, Martin Zgaga, Markus Kahn, Guenter Denifl
  • Patent number: 8748297
    Abstract: In one embodiment, a method of forming a semiconductor device includes forming openings in a substrate. The method includes forming a dummy fill material within the openings and thinning the substrate to expose the dummy fill material. The dummy fill material is removed.
    Type: Grant
    Filed: April 20, 2012
    Date of Patent: June 10, 2014
    Assignee: Infineon Technologies AG
    Inventors: Gudrun Stranzl, Martin Zgaga, Markus Kahn, Guenter Denifl
  • Publication number: 20140143178
    Abstract: A business object model, which reflects data that is used during a given business transaction, is utilized to generate interfaces. This business object model facilitates commercial transactions by providing consistent interfaces that are suitable for use across industries, across businesses, and across different departments within a business during a business transaction. In some operations, software creates, updates, or otherwise processes information related to a credit portfolio model, a credit portfolio analytical result, a credit portfolio management process control, a financial instrument exposure profile analytical result, and/or a material supply and demand allocation business object.
    Type: Application
    Filed: January 27, 2014
    Publication date: May 22, 2014
    Inventors: Hermann Haaf, Markus Kahn, Oliver Klueglich, Dirk Vogel, Manfred Wanninger
  • Publication number: 20140117511
    Abstract: A passivation layer and a method of making a passivation layer are disclosed. In one embodiment the method for manufacturing a passivation layer includes depositing a first silicon based dielectric layer on a workpiece, the first silicon based dielectric layer comprising nitrogen, and depositing in-situ a second silicon based dielectric layer on the first silicon based dielectric layer, the second dielectric layer comprising oxygen.
    Type: Application
    Filed: October 30, 2012
    Publication date: May 1, 2014
    Applicant: Infineon Technologies AG
    Inventors: Kurt Matoy, Hubert Maier, Christian Krenn, Elfriede Kraxner Wellenzohn, Helmut Schoenherr, Juergen Steinbrenner, Markus Kahn, Fister Schlemitz Silvana, Christoph Brunner, Herbert Gietler, Uwe Hoeckele