Patents by Inventor Marlowe A. Pichel

Marlowe A. Pichel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reflector apparatus for chemical vapor deposition reactors
    Patent number: 4823735
    Abstract: A reflector apparatus with multiple reflecting facets for chemical vapor deposition reactors. For vertical and barrel reactors, the facets are annular and fit around the bell-jar shaped process enclosure. The facets may be adjusted by orienting or curving the reflecting facet surfaces so that the radiant energy from the reactor susceptor may be reflected back to the susceptor and wafers as desired for uniform heating of the processed semiconductor wafers.
    Type: Grant
    Filed: May 12, 1987
    Date of Patent: April 25, 1989
    Assignee: Gemini Research, Inc.
    Inventors: Marlowe A. Pichel, James McDiarmid, Glenn A. Pfefferkorn, Roger P. Cory