Abstract: A method for operating a particle beam microscope comprises scanning an object using a particle beam and detecting electrons and x-ray radiation when scanning an object using a particle beam. Improved x-ray radiation information can be generated by combining weighted x-ray radiation information items according to the formula S e ( r ? "\[Rule]" i ) = ? j w ? ( i , j ) · S ? ( r ? "\[Rule]" j ) , wherein S({right arrow over (r)}i) is the detected x-ray radiation intensity assigned to a location {right arrow over (r)}i. The following holds true for the weights, for example: w ? ( i , j ) = e - ( r ? "\[Rule]" i - r ? "\[Rule]" j ) 2 / ? f 2 · e - ( I ? ( r ? "\[Rule]" i ) - I ? ( r ? "\[Rule]" j ) ) 2 / ? g 2 , wherein I({right arrow over (r)}) represents the intensity of the detected electrons that is assigned to the location {right arrow over (r)}, and ?f and ?g are constants.

Abstract: The invention relates to an RFID-transponder, an optical element (150) with an RFID-transponder and an antenna (110) for an RFID-transponder. According to the invention, the antenna (110) is constructed to be optically transparent. The invention additionally relates to a method for producing an antenna (110) for an RFID-transponder. The inventive method for producing an antenna (110) of an RFID-transponder is characterized by the following method steps: a) providing an object (150) having a surface to be equipped with the RFID-transponder, b) application of a transparent conductive coating to the surface, c) lithographic structuring of the transparent conductive coating in order to form the antenna (110).

Abstract: The invention relates to an RFID-transponder, an optical element (150) with an RFID-transponder and an antenna (110) for an RFID-transponder. According to the invention, the antenna (110) is constructed to be optically transparent. The invention additionally relates to a method for producing an antenna (110) for an RFID-transponder. The inventive method for producing an antenna (110) of RFID-transponder is characterized by the following method steps: a) providing an object (150) having a surface to be equipped with the RFID-transponder, b) application of a transparent conductive coating to the surface, c) lithographic structuring of the transparent conductive coating in order to form the antenna (110).

Abstract: An apparatus (3) for determining centering data for eyeglasses (2) comprises a fixation device (5) and a recording unit (4) that can be triggered by a computer, records electronic images, and is disposed behind a divider element (8). The fixation device (5) produces at least one speckle pattern. The speckles can be superposed by different patterns, for example, a cross shape. The invention further relates to a method for determining centering data. The inventive method and apparatus allow to measure for test persons having the most different acuity of vision the relative centering data from a short distance while maintaining their usual posture.

Abstract: An apparatus (3) for determining centering data for eyeglasses (2) comprises a fixation device (5) and a recording unit (4) that can be triggered by a computer, records electronic images, and is disposed behind a divider element (8). The fixation device (5) produces at least one speckle pattern. The speckles can be superposed by different patterns, for example, a cross shape. The invention further relates to a method for determining centering data. The inventive method and apparatus allow test persons having the most different acuity of vision to measure the relative centering data from a short distance while maintaining their usual posture.

Abstract: A mirror arrangement for reflecting electromagnetic radiation, the mirror arrangement comprising: a substrate having a mirror side facing towards the radiation to be reflected and a back side opposite to the mirror side, wherein a mirror surface is provided on the mirror side and wherein an actuator arrangement for generating a deformation of the substrate is mounted on the back side of the substrate, wherein the actuator arrangement comprises at least one active layer having an areal adhering contact with a portion of the back side of the substrate; wherein the at least one active layer has a first layer thickness at a first location within the portion and a second layer thickness at a second location disposed at a distance from the first location within the portion, wherein the first layer thickness differs from the second layer thickness by more than 1%; and wherein the at least one active layer comprises at least one of a ferroelectric material, a piezoelectric material, a magnetostrictive material, an el

Abstract: The invention relates to a tilting table array for micro-positioning objects, preferably for defined generation of oscillating movements of optical objects, such as for instance mirror elements in projection lens arrays, including a tilting table carrying the object and connected to at least one drive element as well as a tilting table housing that is coupled to the tilting table via an elastic connection. According to the invention, the tilting table, the tilting table housing and the elastic connection comprise one monolithic unit.

Abstract: A diffraction-optical component for providing a radiation-diffracting grating structure is proposed, comprising a surface wave device including a substrate 43, a surface wave source 47 excitable with an adjustable frequency for producing surface waves on a surface 45 of the substrate 43 and an interaction region 17 of the substrate surface 45 which is provided for the radiation to interact with a grating structure provided by the surface waves produced.

Abstract: There is provided an optical apparatus for radiation with a wavelength ≦160 nm. The apparatus comprises a mirror with a mirror surface, and a first device for generating elastic oscillations with different acoustic wavelengths on the mirror surface due to surface deformations. Radiation impinging on the mirror surface is diffracted in a predetermined range of angles (&agr;).

Abstract: A spectrometer arrangement is disclosed for the determination of a radiation wavelength of radiation emitted from a radiation source to be measured. The arrangement includes a diffraction grating on which the radiation of the radiation source to be measured is incident at a predetermined angle, wherein the diffraction grating is provided by a reflection grating having a variable lattice constant. The arrangement also includes a radiation detector for receiving from the radiation source to be measured radiation diffracted at a predetermined angle at the diffraction grating.

Abstract: A diffraction-optical component for providing a radiation-diffracting grating structure is proposed, comprising a surface wave device including a substrate 43, a surface wave source 47 excitable with an adjustable frequency for producing surface waves on a surface 45 of the substrate 43 and an interaction region 17 of the substrate surface 45 which is provided for the radiation to interact with a grating structure provided by the surface waves produced.

Abstract: A spectrometer arrangement is disclosed for the determination of a radiation wavelength of radiation emitted from a radiation source to be measured. The arrangement includes a diffraction grating on which the radiation of the radiation source to be measured is incident at a predetermined angle, wherein the diffraction grating is provided by a reflection grating having a variable lattice constant. The arrangement also includes a radiation detector for receiving from the radiation source to be measured radiation diffracted at a predetermined angle at the diffraction grating.

Abstract: The invention concerns an optical device for radiation with a wavelength ≦160 nm, preferably EUV radiation with

Abstract: The invention is directed to an electron-optical imaging system such as for an electron microscope. The imaging system has magnetic lenses, current and voltage sources corresponding thereto, a computer, a permanent memory and a touch panel. The electron microscope is manually calibrated when first taken into use by a discrete sequence of different operating conditions. Polynomes of the second degree are adapted to the experimentally calibrated parameter values for the lens currents. The computer polynome coefficients are stored in a permanent memory. Operating states are adjustable via the touch panel on the operating console of the electron microscope. These operating states lie between the calibrated operating states. The lens currents necessary for these operating states are computed in the computer based on the function coefficients stored in the memory and are subsequently emitted to the current sources by the computer.