Abstract: A substrate ejection detection device is used for substrate processing apparatus configured to process a substrate by continuously rotating a turntable holding the substrate on a concave portion formed in a surface thereof to receive the substrate thereon. In the substrate processing device, the turntable is substantially horizontally provided in a chamber. The substrate ejection detection device includes a substrate ejection determination unit configured to determine whether the substrate is out of the concave portion by determining whether the substrate exists on the concave portion while rotating the turntable.

Abstract: A damping device for use in industrial machinery and tools comprising a housing (102, 602) and a flange member (104, 604) arranged in the housing, wherein at least portions of the flange member apart from the center thereof are composed of an elastic material and inclined with respect to the axial direction or the radial direction of the rotational axis and the flange member is so designed that the peripheral face thereof is brought into contact with the inner wall of the housing. This device can generate a damping force which may be drastically changed depending on the operating directions and thus permits stable damping.

Abstract: A ground contamination detector has a duct (21) having an annular opening (21a). The annular opening blows air toward the ground (1) to form an air curtain that defines an enclosed space (2A) between the duct and the ground. The detector also has a pipe (23) having a nozzle that opens in the enclosed space and jets heated air toward the ground, to promote the evaporation of noxious substance (3) and diffuse the evaporated gas in the enclosed space. The detector also has a suction pipe (24) to suck the evaporated gas from the enclosed space and a sensor (25) to analyze the sucked gas. The enclosed space formed by the air curtain defines a detection area on the ground, and the detector collects and analyzes contaminants in the enclosed space in a noncontact way. The detector is installable on a vehicle, to efficiently detect the presence and position of contaminants on the ground in real time.

Abstract: A ground contamination detector has a duct (21) having an annular opening (21a). The annular opening blows air toward the ground (1) to form an air curtain that defines an enclosed space (2A) between the duct and the ground. The detector also has a pipe (23) having a nozzle that opens in the enclosed space and jets heated air toward the ground, to promote the evaporation of noxious substance (3) and diffuse the evaporated gas in the enclosed space. The detector also has a suction pipe (24) to suck the evaporated gas from the enclosed space and a sensor (25) to analyze the sucked gas. The enclosed space formed by the air curtain defines a detection area on the ground, and the detector collects and analyzes contaminants in the enclosed space in a noncontact way. The detector is installable on a vehicle, to efficiently detect the presence and position of contaminants on the ground in real time.

Abstract: The invention comprises a mulli-wave radar system for obtaining first target position information of a flying object by capturing and tracking the flying object from a maximum detection distance, a stereo-camera system for taking over the tracking of the flying object in the vicinity of a landing point by acquiring the first target position information of the flying object from the milli-wave radar system, and obtaining second target position information having higher precision than the first target position information, and a controller for managing the first target position information of the milli-wave radar system and the second target position information of the stereo-camera system, controlling the milli-wave radar system to capture and track the flying object to the vicinity of the landing point, and controlling the stereo-camera system to capture and track the flying object at the time of landing of the flying object.

Abstract: A diaphragm device utilized, for example, in a vacuum advance mechanism of a distributor of an internal combustion engine is disclosed. The diaphragm device comprises: a housing consisting of two cup-shaped members coupled to each other at the marginal flanges thereof; a diaphragm extending in the housing to define an airtight chamber therein; and a control rod coupled to the diaphragm to transmit the motion thereof. The outer marginal portion of the diaphragm is clamped between the flanges of the two cup-shaped housing members, wherein the distance between the radially extending flanges clamping the diaphragm therebetween is strictly controlled by a distance regulator, which may be constituted by a step formed in the outer portion of one of the flanges toward the other flange, the outer marginal portion of the diaphragm being received in the stepped-down inner portion of the stepped flange.

Abstract: A rotary position detector for an internal combustion engine with a cam shaft, which includes a sleeve to be mounted on the cam shaft for rotation along with the cam shaft; a hermetic housing to be secured to the engine such that the sleeve rotates within the housing; an optical sensor mounted on an inside of the housing; and a perforated shutter disk secured to the sleeve so as to rotate together with the sleeve with respect to the stationary optical sensor to provide a signal corresponding to a rotary position of the engine.

Abstract: This invention relates to an ignition distributor for an internal combustion engine and more specifically relates to a novel reluctor included in an ignition distributor for discriminating between cylinders of an engine. The reluctor has an elongated shape and is arranged relative to the rotating shaft of an ignition distributor so that the gravity center of the reluctor is located exactly on the rotational axis of the shaft. This arrangement enables the rotational movement of the shaft to be concentrated, so that the wear to which the bearings supporting the shaft is subjected is significantly reduced. The reluctor is attached to the governor base of an ignition distributor without any rivets by virtue of the novel configuration thereof, so that a reduction in the number of parts can be achieved, together with reduction in the total production cost.

Abstract: A rotational position sensor device for an internal combustion engine is disclosed, in which a sleeve member penetrating and rotatable in unison with a cam shaft is mounted on a rotational position sensor mounting member secured to an engine body, and a member with a slit for co-operation with a rotational position sensor is mounted on the sleeve. The performance of the device thus can be confirmed without actually assembling the device for use.

Abstract: A distributor cap has external terminals 23, 24 and inner electrodes 25, 26 disposed on a cap main body, and electrical conductors 28, 35 are embedded in the cap main body for sequential power distribution by a rotor of the distributor. Some of the conductors are coated with electrically insulating sheath members 36 which have insulating bridge members 38 bridging the sheath members on adjacent ones of the conductors. The bridge members have formed thereon positioning projections 37 for limiting the movement of the conductors out of predetermined positions during the molding of the cap body, whereby substantially no surface discharge occurs.