Patents by Inventor Masaaki Nagase

Masaaki Nagase has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240167577
    Abstract: A controller capable of improving the disappearance resistance of a synthetic resin coating of a diaphragm, and a vaporization supply device comprising the controller. The controller includes a body having an inflow passage and an outflow passage, a valve seat provided between the inflow passage and the outflow passage, a diaphragm capable of being seated on or separated from the valve seat, and an actuator for causing the diaphragm to be seated on and separated from the valve seat. The material of the valve seat is nickel-based, and the diaphragm is provided with a synthetic resin coating on a surface of a side to be brought into contact with the valve seat.
    Type: Application
    Filed: March 8, 2022
    Publication date: May 23, 2024
    Applicant: FUJIKIN INCORPORATED
    Inventors: Atsushi HIDAKA, Kazuteru TANAKA, Takatoshi NAKATANI, Kazuyuki MORISAKI, Masafumi KITANO, Kaoru HIRATA, Masaaki NAGASE, Kouji NISHINO, Nobukazu IKEDA
  • Patent number: 11988543
    Abstract: An abnormality detection method is performed in a gas supply system including a flow rate control device having a restriction part, a control valve, a flow rate control pressure sensor for measuring upstream pressure, and a control circuit. The inflow pressure sensor measures the supply pressure. An upstream on/off valve is provided upstream of the inflow pressure sensor. The method includes closing the upstream on/off valve when the gas flows at a controlled flow rate at the downstream of the restriction part by controlling an opening degree of the control valve based on the output of the flow rate control pressure sensor; measuring a drop in supply pressure on the upstream side of the control valve after closing the upstream on/off valve while keeping the control valve open; and detecting the presence or absence of abnormality in the flow rate control device based on the measured supply pressure drop.
    Type: Grant
    Filed: November 26, 2020
    Date of Patent: May 21, 2024
    Assignee: FUJIKIN INCORPORATED
    Inventors: Atsushi Hidaka, Masaaki Nagase, Kouji Nishino, Nobukazu Ikeda, Kaoru Hirata
  • Publication number: 20240160230
    Abstract: The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ?P between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.
    Type: Application
    Filed: January 22, 2024
    Publication date: May 16, 2024
    Applicant: FUJIKIN INCORPORATED
    Inventors: Kaoru HIRATA, Keisuke IDEGUCHI, Shinya OGAWA, Katsuyuki SUGITA, Masaaki NAGASE, Kouji NISHINO, Nobukazu IKEDA, Hiroyuki ITO
  • Patent number: 11976748
    Abstract: A diaphragm valve includes a body (3) having a flow path (2), a seat (4) formed in the flow path (2), a metal diaphragm (5) for opening and closing the flow path (2), a pair of clamping parts (6) and (7) for claiming peripheral edge portions of the metal diaphragm (5) to fix the metal diaphragm (5) to the body (3), and an actuator (8) for abutting the metal diaphragm (5) to the seat (4) or separating the metal diaphragm from the seat (4), wherein a fluorine resin coating is formed on a seat side surface (5a) of the metal diaphragm (5) at least in a contact region (B-A) with the seat (4) in a region (C) surrounded by a clamping region (D-C) between the seat side surface (5a) and one of the pair of clamping portions (6, 7), excluding the clamping region (D-C).
    Type: Grant
    Filed: June 12, 2020
    Date of Patent: May 7, 2024
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kaoru Hirata, Masaaki Nagase, Atsushi Hidaka, Kazuyuki Morisaki, Keisuke Ideguchi, Kosuke Sugimoto, Masafumi Kitano, Kouji Nishino, Nobukazu Ikeda
  • Patent number: 11914407
    Abstract: The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ?P between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.
    Type: Grant
    Filed: April 16, 2020
    Date of Patent: February 27, 2024
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kaoru Hirata, Keisuke Ideguchi, Shinya Ogawa, Katsuyuki Sugita, Masaaki Nagase, Kouji Nishino, Nobukazu Ikeda, Hiroyuki Ito
  • Patent number: 11796458
    Abstract: A Concentration measurement device 100 comprises: a measurement cell 4 having a flow path through which a gas flows, a light source 1 for generating incident light to the measurement cell, a photodetector 7 for detecting light emitted from the measurement cell, a pressure sensor 20 for detecting a pressure of the gas in the measurement cell, a temperature sensor 22 for detecting a temperature of the gas in the measurement cell, and an arithmetic circuit 8 for calculating a concentration of the gas based on an output P of the pressure sensor, an output T of the temperature sensor, an output I of the photodetector, and an extinction coefficient ?, wherein the arithmetic circuit 8 is configured to calculate the concentration using the extinction coefficient ? determined on the basis of the output of the temperature sensor 22.
    Type: Grant
    Filed: January 21, 2020
    Date of Patent: October 24, 2023
    Assignee: FUJIKIN INCORPORATED
    Inventors: Masaaki Nagase, Kazuteru Tanaka, Masahiko Takimoto, Kouji Nishino, Nobukazu Ikeda
  • Patent number: 11692931
    Abstract: The concentration measurement device 100 includes an electric unit 20 having a light source 22 and a photodetector 24, a fluid unit 10 having a measurement cell 1, optical fibers 11 and 12 for connecting the electric unit 20 and the fluid unit 10 and is configured to measure the concentration of the fluid in the measurement cell by detecting the light incident from the light source 22 to the measurement cell and then emitted from the measurement cell by the photodetector 24, where optical connection parts 32 and 34 connected to the optical fibers 11, 12 and the light source 22 or the photodetector 24 are integrally provided in the electric unit 20.
    Type: Grant
    Filed: March 31, 2020
    Date of Patent: July 4, 2023
    Assignee: FUJIKIN INCORPORATED
    Inventors: Masaaki Nagase, Kazuteru Tanaka, Masahiko Takimoto, Kouji Nishino, Nobukazu Ikeda
  • Patent number: 11686671
    Abstract: A concentration measurement device 100 includes a light source 22 for generating incident light to a measurement space 10A, a photodetector 24 for receiving light emitted from the measurement space, and an arithmetic control circuit 26 for calculating a concentration of a measurement fluid on the basis of an output of the photodetector, and the light source includes a first light-emitting element 22a for generating light having a first wavelength, and a second light-emitting element 22b for generating light having a second wavelength, and the concentration measurement device is configured so as to calculate the concentration using either light of the first wavelength or the second wavelength on the basis of the pressure or temperature of the measurement fluid.
    Type: Grant
    Filed: October 18, 2019
    Date of Patent: June 27, 2023
    Assignee: FUJIKIN INCORPORATED
    Inventors: Masaaki Nagase, Hidekazu Ishii, Kouji Nishino, Nobukazu Ikeda
  • Publication number: 20230124208
    Abstract: A concentration measurement method performed in a concentration measurement device including an electric unit having a light source and a photodetector, a fluid unit having a measurement cell through which a gas flows, and a processing circuit for calculating a concentration of the gas based on an intensity of a light passing through the measurement cell. The concentration measurement method includes a step of determining an absorption coefficient of the measurement gas using a reference absorption coefficient determined in association with the reference gas and a correction factor associated with the measurement gas, and a step of obtaining a concentration of the measurement gas flowing in the measurement cell using the absorption coefficient of the measurement gas.
    Type: Application
    Filed: March 4, 2021
    Publication date: April 20, 2023
    Applicants: TOKUSHIMA UNIVERSITY, FUJIKIN INCORPORATED
    Inventors: Yoshihiro DEGUCHI, Masaaki NAGASE, Kouji NISHINO, Nobukazu IKEDA
  • Publication number: 20230121563
    Abstract: A gas supply amount measurement method is performed in a gas supply system including a vaporization section, a control valve provided downstream of the vaporization section, and a supply pressure sensor for measuring the supply pressure between the vaporization section and the control valve. The method comprises: a step of measuring an initial supply pressure by the supply pressure sensor in a state where the control valve is closed; a step of opening the control valve for only a predetermined time; a step of measuring for a plurality of times of the supply pressure in a period of time between a time at which the pressure starts to fall from the initial supply pressure and a time at which a predetermined time has elapsed when the control valve is open for only a predetermined time, and a step of determining the gas supply amount when the control valve is open for only a predetermined time by calculation based on the measured values of the plurality of supply pressures.
    Type: Application
    Filed: March 18, 2021
    Publication date: April 20, 2023
    Applicant: FUJIKIN INCORPORATED
    Inventors: Takatoshi NAKATANI, Atsushi HIDAKA, Masaaki NAGASE, Kouji NISHINO, Nobukazu IKEDA
  • Patent number: 11630058
    Abstract: A concentration measuring device 100 comprises: a measurement cell 4 having a flow path, a light source 1, a photodetector 7 for detecting light emitted from the measurement cell, and an arithmetic circuit 8 for calculating light absorbance and concentration of a fluid to be measured on the basis of an output of the photodetector, the measurement cell includes a cell body, a window portion 3 fixed to the cell body so as to contact the flow path, and a reflective member 5 for reflecting light incident on the measurement cell through the window portion, the window portion is fixed to the cell body 40 by a window holding member 30 via a gasket 15, an annular sealing protrusion 15a is provided on a first surface of the gasket for supporting the window portion, and an annular sealing protrusion 42a is also provided on a support surface 42 of the cell body for supporting the second surface opposite to the first surface of the gasket.
    Type: Grant
    Filed: June 10, 2022
    Date of Patent: April 18, 2023
    Assignee: FUJIKIN INCORPORATED
    Inventors: Masaaki Nagase, Kazuteru Tanaka, Keiji Hirao, Tadayuki Yakushijin, Kouji Nishino, Michio Yamaji, Nobukazu Ikeda
  • Publication number: 20220390269
    Abstract: The abnormality detection method of the flow rate control device 10 is performed in the gas supply system 100 including the flow rate control device 10 having the restriction part 12, the control valve 14, the flow rate control pressure sensor 16 for measuring the upstream pressure P1, and the control circuit 19, the inflow pressure sensor 20 for measuring the supply pressure P0, and the upstream on-off valve 2 provided upstream of the inflow pressure sensor, and includes a step of closing the upstream on-off valve in a state in which the gas flows at the controlled flow rate at the downstream of the restriction part by controlling the opening degree of the control valve based on the output of the flow rate control pressure sensor, a step of measuring the drop in the supply pressure P0 on the upstream side of the control valve after closing the upstream on-off valve while keeping the control valve open, and a step of detecting the presence or absence of abnormality in the flow rate control device based on the
    Type: Application
    Filed: November 26, 2020
    Publication date: December 8, 2022
    Applicant: FUJIKIN INCORPORATED
    Inventors: Atsushi HIDAKA, Masaaki NAGASE, Kouji NISHINO, Nobukazu IKEDA, Kaoru HIRATA
  • Patent number: 11519769
    Abstract: A control unit 3 of a flow rate control system 1 comprises: a recording unit 31 for recording measured values of a pressure sensor P and a temperature sensor T, a storage unit 32 for storing volume data between a first valve V1 and a second valve V2 corresponding to the measured value of the pressure sensor P, and an arithmetic unit 33 for calculating a flow rate based on a first pressure value P1 and a first temperature value T1 measured after opening the first valve V1 and the second valve V2 to flow a gas and then closing the first valve V1 and the second valve V2 simultaneously in a state where the gas is flowing; a second pressure value P2 and a second temperature value T2 measured after opening the first valve V1 and the second valve V2 to flow a gas, closing the second valve V2 in a state where the gas is flowing, and then closing the first valve V1 after a predetermined time ?t has elapsed; and a volume value V between the first valve V1 and the second valve V2 which corresponds to the second pressure
    Type: Grant
    Filed: July 16, 2019
    Date of Patent: December 6, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Masaaki Nagase, Satoru Yamashita, Masayoshi Kawashima, Masahiko Takimoto, Kouji Nishino, Nobukazu Ikeda
  • Patent number: 11460396
    Abstract: A concentration measurement method is performed using a concentration measurement device comprising: a measurement cell for flowing a fluid to be measured; a light source for generating light incident on the measurement cell; a photodetector for detecting light emitted from the measurement cell; an arithmetic unit for calculating the absorbance and concentration of the fluid to be measured based on an output of the photodetector; and a temperature sensor for measuring the temperature of the fluid to be measured.
    Type: Grant
    Filed: September 18, 2019
    Date of Patent: October 4, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Masaaki Nagase, Hidekazu Ishii, Kouji Nishino, Nobukazu Ikeda
  • Patent number: 11460869
    Abstract: A fluid control system (1) comprises: a first valve (21) provided downstream of a flow rate controller (10), a flow rate measuring device (30) provided downstream of the first valve (21) and having a second valve (22), an open/close detector (26) provided to the second valve (22), and a controller (25) for controlling an open/close operation of the first valve (21) and the second valve (22), and the controller (25) controls the open/close operation of the first valve (21) in response to a signal output from the open/close detector (26).
    Type: Grant
    Filed: July 24, 2018
    Date of Patent: October 4, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Satoru Yamashita, Yohei Sawada, Masaaki Nagase, Kouji Nishino, Nobukazu Ikeda
  • Publication number: 20220299432
    Abstract: A concentration measuring device 100 comprises: a measurement cell 4 having a flow path, a light source 1, a photodetector 7 for detecting light emitted from the measurement cell, and an arithmetic circuit 8 for calculating light absorbance and concentration of a fluid to be measured on the basis of an output of the photodetector, the measurement cell includes a cell body, a window portion 3 fixed to the cell body so as to contact the flow path, and a reflective member 5 for reflecting light incident on the measurement cell through the window portion, the window portion is fixed to the cell body 40 by a window holding member 30 via a gasket 15, an annular sealing protrusion 15a is provided on a first surface of the gasket for supporting the window portion, and an annular sealing protrusion 42a is also provided on a support surface 42 of the cell body for supporting the second surface opposite to the first surface of the gasket.
    Type: Application
    Filed: June 10, 2022
    Publication date: September 22, 2022
    Applicant: FUJIKIN INCORPORATED
    Inventors: Masaaki NAGASE, Kazuteru Tanaka, Keiji Hirao, Tadayuki Yakushijin, Kouji Nishino, Michio Yamaji, Nobukazu Ikeda
  • Publication number: 20220283081
    Abstract: The concentration measurement device 100 includes an electric unit 20 having a light source 22 and a photodetector 24, a fluid unit 10 having a measurement cell 1, a first light-transmission member 11 for transmitting light from the light source to the measurement cell, a second light transmission member 12 for transmitting light from the measurement cell to the photodetector, a lens 3A provided in the fluid unit, the lens 3A being arranged such that light from the first light transmission member is to be incident on the first position and light is to be emitted from the second position to the second light transmission member, a pressure sensor 5 for measuring pressure of fluid flowing through the measurement cell, and an arithmetic circuit 28 for detecting concentration of the fluid flowing through the measurement cell, the arithmetic circuit being configured to calculate the fluid concentration based on the output of the photodetector and a correction factor related to the pressure output by the pressure se
    Type: Application
    Filed: August 31, 2020
    Publication date: September 8, 2022
    Applicant: FUJIKIN INCORPORATED
    Inventors: Masaaki NAGASE, Masahiko TAKIMOTO, Kazuteru TANAKA, Kouji NISHINO, Nobukazu IKEDA
  • Publication number: 20220268365
    Abstract: A diaphragm valve includes a body 3 having a flow path 2 formed therein, a sheet 4 formed in the flow path 2, a metal diaphragm 5 for opening and closing the flow path 2 by abutting on or separating from the sheet 4, a pair of clamping parts 6 and 7 for claiming peripheral edge portions of both side surfaces of the metal diaphragm 5 respectively to fix the metal diaphragm 5 to the body 3, and an actuator 8 for abutting the metal diaphragm 5 on the sheet 4 or separating the metal diaphragm from the sheet 4, wherein a fluorine resin coating is formed on a sheet side surface 5a of the metal diaphragm 5 in a region excluding a clamping region D-C between the sheet side surface 5a and the clamping part 7, and at least in a contact region B-A with the sheet 4 in a region C surrounded by the clamping region D-C.
    Type: Application
    Filed: June 12, 2020
    Publication date: August 25, 2022
    Applicant: FUJIKIN INCORPORATED
    Inventors: Kaoru HIRATA, Masaaki NAGASE, Atsushi HIDAKA, Kazuyuki MORISAKI, Keisuke IDEGUCHI, Kosuke SUGIMOTO, Masafumi KITANO, Kouji NISHINO, Nobukazu IKEDA
  • Patent number: 11402250
    Abstract: The liquid level meter according to the present invention includes a resistive temperature detector, a temperature measuring body located above it, a temperature detecting unit detecting temperatures of the resistive temperature detector and the temperature measuring body, a current controlling unit determining a current value to be flowed through the resistive temperature detector so that the resistive temperature detector and the temperature measuring body become a predetermined temperature difference, a power supply unit supplying the current of the determined current value to the resistive temperature detector, and a liquid level detecting unit detecting a position of a liquid level.
    Type: Grant
    Filed: December 22, 2017
    Date of Patent: August 2, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Atsushi Hidaka, Takatoshi Nakatani, Satoru Yamashita, Katsuyuki Sugita, Kaoru Hirata, Masaaki Nagase, Kouji Nishino, Nobukazu Ikeda
  • Patent number: 11391668
    Abstract: A concentration measuring device 100 comprises: a measurement cell 4 having a flow path, a light source 1, a photodetector 7 for detecting light emitted from the measurement cell, and an arithmetic circuit 8 for calculating light absorbance and concentration of a fluid to be measured on the basis of an output of the photodetector, the measurement cell includes a cell body, a window portion 3 fixed to the cell body so as to contact the flow path, and a reflective member 5 for reflecting light incident on the measurement cell through the window portion, the window portion is fixed to the cell body 40 by a window holding member 30 via a gasket 15, an annular sealing protrusion 15a is provided on a first surface of the gasket for supporting the window portion, and an annular sealing protrusion 42a is also provided on a support surface 42 of the cell body for supporting the second surface opposite to the first surface of the gasket.
    Type: Grant
    Filed: September 17, 2019
    Date of Patent: July 19, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Masaaki Nagase, Kazuteru Tanaka, Keiji Hirao, Tadayuki Yakushijin, Kouji Nishino, Michio Yamaji, Nobukazu Ikeda