Patents by Inventor Masaaki Nagase

Masaaki Nagase has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220003662
    Abstract: A concentration measurement method is performed using a concentration measurement device comprising: a measurement cell for flowing a fluid to be measured; a light source for generating light incident on the measurement cell; a photodetector for detecting light emitted from the measurement cell; an arithmetic unit for calculating the absorbance and concentration of the fluid to be measured based on an output of the photodetector; and a temperature sensor for measuring the temperature of the fluid to be measured.
    Type: Application
    Filed: September 18, 2019
    Publication date: January 6, 2022
    Applicant: FUJIKIN INCORPORATED
    Inventors: Masaaki NAGASE, Hidekazu ISHII, Kouji NISHINO, Nobukazu IKEDA
  • Patent number: 11215374
    Abstract: A fluid sealing device and a pressure detector calibration device are provided to enable further reducing of errors between a sealing pressure and a set pressure in a fluid flow path.
    Type: Grant
    Filed: May 30, 2019
    Date of Patent: January 4, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Masahiko Takimoto, Masaaki Nagase
  • Publication number: 20210396657
    Abstract: A concentration measurement device 100 includes a light source 22 for generating incident light to a measurement space 10A, a photodetector 24 for receiving light emitted from the measurement space, and an arithmetic control circuit 26 for calculating a concentration of a measurement fluid on the basis of an output of the photodetector, and the light source includes a first light-emitting element 22a for generating light having a first wavelength, and a second light-emitting element 22b for generating light having a second wavelength, and the concentration measurement device is configured so as to calculate the concentration using either light of the first wavelength or the second wavelength on the basis of the pressure or temperature of the measurement fluid.
    Type: Application
    Filed: October 18, 2019
    Publication date: December 23, 2021
    Applicant: FUJIKIN INCORPORATED
    Inventors: Masaaki NAGASE, Hidekazu ISHII, Kouji NISHINO, Nobukazu IKEDA
  • Publication number: 20210310844
    Abstract: A control unit 3 of a flow rate control system 1 comprises: a recording unit 31 for recording measured values of a pressure sensor P and a temperature sensor T, a storage unit 32 for storing volume data between a first valve V1 and a second valve V2 corresponding to the measured value of the pressure sensor P, and an arithmetic unit 33 for calculating a flow rate based on a first pressure value P1 and a first temperature value T1 measured after opening the first valve V1 and the second valve V2 to flow a gas and then closing the first valve V1 and the second valve V2 simultaneously in a state where the gas is flowing; a second pressure value P2 and a second temperature value T2 measured after opening the first valve V1 and the second valve V2 to flow a gas, closing the second valve V2 in a state where the gas is flowing, and then closing the first valve V1 after a predetermined time ?t has elapsed; and a volume value V between the first valve V1 and the second valve V2 which corresponds to the second pressure
    Type: Application
    Filed: July 16, 2019
    Publication date: October 7, 2021
    Applicant: FUJIKIN INCORPORATED
    Inventors: Masaaki NAGASE, Satoru YAMASHITA, Masayoshi KAWASHIMA, Masahiko TAKIMOTO, Kouji NISHINO, Nobukazu IKEDA
  • Patent number: 10976240
    Abstract: A concentration measurement device for measuring the concentration of a measured fluid within a measurement cell by detecting transmitted light that has passed through the measurement cell having a light incidence window and a light emission window disposed opposing to each other, comprising a reflected-light detector for detecting reflected light of the light incidence window.
    Type: Grant
    Filed: August 9, 2016
    Date of Patent: April 13, 2021
    Assignees: TOKUSHIMA UNIVERSITY, FUJIKIN INCORPORATED
    Inventors: Yoshihiro Deguchi, Masaaki Nagase, Michio Yamaji, Nobukazu Ikeda, Kouji Nishino, Masayoshi Kawashima, Kazuteru Tanaka
  • Patent number: 10969259
    Abstract: In a method of calibrating a flow rate control device in which a flow rate is calibrated based on comparison with a flow rate measured by a flow rate reference gauge, a predetermined permissible error range is set for a plurality of flow rate settings, and the permissible error range of at least one specific flow rate setting among the plurality of flow rate settings is set to be smaller than the predetermined permissible error range.
    Type: Grant
    Filed: June 22, 2017
    Date of Patent: April 6, 2021
    Assignee: FUJIKIN INCORPORATED
    Inventors: Yohei Sawada, Masaaki Nagase, Kouji Nishino, Nobukazu Ikeda
  • Patent number: 10962513
    Abstract: A method for detecting the concentration of a specified gas contained in a mixed gas includes, in a pressure-type flow rate control device including a restriction portion, an upstream valve provided upstream of the restriction portion, and a pressure sensor for measuring the pressure between the restriction portion and the upstream valve, a step of flowing the mixed gas from the upstream side of the upstream valve in a state in which the pressure on the downstream side of the restriction portion is lower than the pressure on the upstream side of the restriction portion, a step of determining with a pressure sensor pressure drop characteristics occurring after the upstream valve is changed from an open to a closed state, and a step of determining the concentration of the specified gas in the mixed gas based on the pressure drop characteristics.
    Type: Grant
    Filed: September 27, 2017
    Date of Patent: March 30, 2021
    Assignee: FUJIKIN INCORPORATED
    Inventors: Masaaki Nagase, Kenji Aikawa, Kaoru Hirata, Takahiro Imai, Tetsuo Naritomi, Tsutomu Shinohara, Takahiro Matsuda, Kouji Nishino
  • Patent number: 10928303
    Abstract: A concentration measuring device includes a measuring cell having a flow passage and a translucent window, a light source for emitting light to the measuring cell through the window, a reflective member for reflecting light propagating through the measuring cell to the window, a light detector for detecting the light exiting from the window, a calculation part for calculating the concentration of the fluid on the basis of a detection signal from the light detector, and an optical device for guiding the light from the light source to the window and guiding the light from the window to the light detector.
    Type: Grant
    Filed: July 25, 2017
    Date of Patent: February 23, 2021
    Assignees: TOKUSHIMA UNIVERSITY, FUJIKIN INCORPORATED
    Inventors: Yoshihiro Deguchi, Takashi Fukawa, Taiki Hattori, Masaaki Nagase, Kazuteru Tanaka, Kouji Nishino, Nobukazu Ikeda
  • Patent number: 10928813
    Abstract: A pressure-type flow rate control device includes a restriction part, a control valve disposed upstream of the restriction part, an upstream pressure sensor, a downstream pressure sensor, and a controller that diagnoses flow rate control by using pressure drop data on a flow passage between the control valve and the restriction part and reference pressure drop data, wherein a close command is issued to the control valve and a shutoff valve provided downstream of the downstream pressure sensor, and the controller determines whether a predetermined critical expansion condition is satisfied by using outputs of the upstream pressure sensor and the downstream pressure sensor after the control valve is closed, and diagnoses flow rate control by using the pressure drop data acquired during a period in which the predetermined critical expansion condition is satisfied.
    Type: Grant
    Filed: March 23, 2017
    Date of Patent: February 23, 2021
    Assignee: FUJIKIN INCORPORATED
    Inventors: Masaaki Nagase, Kaoru Hirata, Yohei Sawada, Katsuyuki Sugita, Kouji Nishino, Nobukazu Ikeda
  • Patent number: 10895484
    Abstract: A gas supply system capable of flow measurement includes a flow controller that controls the flow rate of a flowing gas, a first shutoff valve provided downstream of the flow controller, a second shutoff valve provided in a first flow passage communicating with the downstream side of the first shutoff valve, a second flow passage that branches from the first flow passage, a third shutoff valve provided in the second flow passage, a pressure sensing device that detects a pressure in a flow passage controlled by the first, second, and third shutoff valves, a temperature sensing device that detects a temperature in the flow passage controlled by the first, second, and third shutoff valves, a volume measuring tank connected downstream of the third shutoff valve and having a known volume, and an arithmetic and control unit that obtains a passage volume controlled by the first, second, and third shutoff valves by applying Boyle's law to open and closed states of the third shutoff valve and calculates the flow rate
    Type: Grant
    Filed: January 12, 2017
    Date of Patent: January 19, 2021
    Assignee: FUJIKIN INCORPORATED
    Inventors: Yohei Sawada, Nobukazu Ikeda, Kouji Nishino, Masaaki Nagase
  • Patent number: 10884435
    Abstract: A pressure-type flow rate control device 1, while maintaining an upstream pressure P1 of an orifice 5 at approximately at least twice a downstream pressure P2, calculates a flow factor FF of a mixed gas consisting of two types of gases mixed at a mixture ratio of X:(1?X) by FF=(k/?){2/(?+1)}1/(??1)[?/{(?+1)R}]1/2 using an average density ?, an average specific heat ratio ?, and an average gas constant R of the mixed gas that are calculated by weighting the densities, specific heat ratios, and gas constants of the two types of gases at the mixture ratio, and calculates a flow rate Q of the mixed gas passing through the orifice by Q=FF·S·P1(1/T1)1/2, where S is the orifice cross section, and P1 and T1 are respectively the pressure and temperature of the mixed gas on the upstream side of the orifice.
    Type: Grant
    Filed: August 24, 2017
    Date of Patent: January 5, 2021
    Assignee: FUJIKIN INCORPORATED
    Inventors: Masaaki Nagase, Kaoru Hirata, Kouji Nishino, Nobukazu Ikeda
  • Patent number: 10876870
    Abstract: A substrate processing system includes a gas supply unit having a first gas flow channel. A second gas flow channel of a flow rate measurement system is connected to the first gas flow channel. The flow rate measurement system further includes a third gas flow channel connected to the second gas flow channel, and a pressure sensor and a temperature sensor that measure a pressure and a temperature, respectively, in the third gas flow channel. In a method, a flow rate of a gas output from a flow rate controller of the gas supply unit is calculated using a build-up method. The flow rate of a gas is calculated without using the total volume of the first gas flow channel and the second gas flow channel and temperatures in the first gas flow channel and the second gas flow channel.
    Type: Grant
    Filed: January 3, 2019
    Date of Patent: December 29, 2020
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Risako Miyoshi, Norihiko Amikura, Kazuyuki Miura, Masaaki Nagase, Satoru Yamashita, Yohei Sawada, Kouji Nishino, Nobukazu Ikeda
  • Publication number: 20200232873
    Abstract: An abnormality detection method performed using a flow rate control device including a restriction portion, a control valve, a first pressure sensor, a second pressure sensor, and a downstream valve, includes a step of changing the control valve and the downstream valve from an open state to a closed state, a step of measuring an upstream pressure or a downstream pressure in the closed state, and at least one step of (a) extracting an upstream pressure at a point when a difference between the upstream pressure and the downstream pressure reaches a predetermined value as an upstream convergence pressure, and extracting the downstream pressure as a downstream convergence pressure, and (b) extracting the time from a point when the control valve are changed to a closed state to a point when a difference between the upstream pressure and the downstream pressure reaches a predetermined value as a convergence time.
    Type: Application
    Filed: December 15, 2016
    Publication date: July 23, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Masaaki NAGASE, Kaoru HIRATA, Yohei SAWADA, Kouji NISHINO, Nobukazu IKEDA
  • Publication number: 20200159257
    Abstract: A fluid control system (1) comprises: a first valve (21) provided downstream of a flow rate controller (10), a flow rate measuring device (30) provided downstream of the first valve (21) and having a second valve (22), an open/close detector (26) provided to the second valve (22), and a controller (25) for controlling an open/close operation of the first valve (21) and the second valve (22), and the controller (25) controls the open/close operation of the first valve (21) in response to a signal output from the open/close detector (26).
    Type: Application
    Filed: July 24, 2018
    Publication date: May 21, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Satoru YAMASHITA, Yohei SAWADA, Masaaki NAGASE, Kouji NISHINO, Nobukazu IKEDA
  • Patent number: 10648572
    Abstract: A valve with a built-in orifice includes a base section having a housing recess and first and second flow passages; a valve seat body; an inner disc; a valve element; and an orifice body, wherein the housing recess has a wide-diameter section and a narrow-diameter section, the first flow passage is connected to a space between a wall surface of the narrow-diameter section and the orifice body to communicate with a valve chamber, and the second flow passage communicates with the valve chamber through a through hole of the orifice body and a through hole of the valve seat body.
    Type: Grant
    Filed: July 25, 2017
    Date of Patent: May 12, 2020
    Assignee: FUJIKIN INCORPORATED
    Inventors: Yohei Sawada, Kaoru Hirata, Masaaki Nagase, Kouji Nishino, Nobukazu Ikeda
  • Patent number: 10646844
    Abstract: A vaporization supply apparatus comprises a vaporizer which heats and vaporize a liquid, a flow-rate control device which controls a flow rate of a gas sent out from the vaporizer, a first control valve interposed in a supply channel of a liquid to the vaporizer, a pressure detector for detecting a pressure of a gas vaporized by the vaporizer, a liquid detection part for measuring parameters of a liquid in an amount higher than a predetermined amount in the vaporizer, and a control device which controls the first control valve to supply a predetermined amount of a liquid to the vaporizer based on the pressure value detected by the pressure detector, and to close the first control valve when the liquid detection part detect a liquid in an amount higher than the predetermined amount.
    Type: Grant
    Filed: April 11, 2016
    Date of Patent: May 12, 2020
    Assignee: FUJIKIN INCORPORATED
    Inventors: Atsushi Hidaka, Masaaki Nagase, Kaoru Hirata, Katsuyuki Sugita, Takatoshi Nakatani, Satoru Yamashita, Kouji Nishino, Nobukazu Ikeda, Keiji Hirao
  • Patent number: 10604840
    Abstract: To provide a liquid level indicator and a liquid raw material vaporization feeder, in which the time to detect a switch from the liquid phase to the gas phase has reduced flow rate dependence, and also the detection time can be shortened. The present invention includes a chamber 2 that stores a liquid raw material, at least one protection tube 3 housing a resistance temperature detector for detecting the liquid level L1 in the chamber 2, and a flow controller 4 that controls the flow rate of the gas flowing out from the chamber 2 and feeds the same. The protection tube 3 is horizontally inserted into a sidewall 2a of the chamber 2 and fixed thereto.
    Type: Grant
    Filed: November 2, 2015
    Date of Patent: March 31, 2020
    Assignee: FUJIKIN INCORPORATED
    Inventors: Atsushi Hidaka, Masaaki Nagase, Kaoru Hirata, Satoru Yamashita, Keiji Hirao, Kouji Nishino, Nobukazu Ikeda
  • Publication number: 20200088561
    Abstract: The liquid level meter according to the present invention includes a resistive temperature detector, a temperature measuring body located above it, a temperature detecting unit detecting temperatures of the resistive temperature detector and the temperature measuring body, a current controlling unit determining a current value to be flowed through the resistive temperature detector so that the resistive temperature detector and the temperature measuring body become a predetermined temperature difference, a power supply unit supplying the current of the determined current value to the resistive temperature detector, and a liquid level detecting unit detecting a position of a liquid level.
    Type: Application
    Filed: December 22, 2017
    Publication date: March 19, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Atsushi HIDAKA, Takatoshi NAKATANI, Satoru YAMASHITA, Katsuyuki SUGITA, Kaoru HIRATA, Masaaki NAGASE, Kouji NISHINO, Nobukazu IKEDA
  • Publication number: 20200018736
    Abstract: A method for detecting the concentration of a specified gas contained in a mixed gas includes, in a pressure-type flow rate control device including a restriction portion, an upstream valve provided upstream of the restriction portion, and a pressure sensor for measuring the pressure between the restriction portion and the upstream valve, a step of flowing the mixed gas from the upstream side of the upstream valve in a state in which the pressure on the downstream side of the restriction portion is lower than the pressure on the upstream side of the restriction portion, a step of determining with a pressure sensor pressure drop characteristics occurring after the upstream valve is changed from an open to a closed state, and a step of determining the concentration of the specified gas in the mixed gas based on the pressure drop characteristics.
    Type: Application
    Filed: September 27, 2017
    Publication date: January 16, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Masaaki NAGASE, Kenji AIKAWA, Kaoru HIRATA, Takahiro IMAI, Tetsuo NARITOMI, Tsutomu SHINOHARA, Takahiro MATSUDA, Kouji NISHINO
  • Publication number: 20200011720
    Abstract: The flow rate measuring method is performed in a common gas supply system comprising a plurality of gas supply paths each having a first valve, and a gas measuring device formed downstream side of the plurality of gas supply paths, having a pressure sensor, a temperature sensor, and a downstream side second valve.
    Type: Application
    Filed: February 8, 2018
    Publication date: January 9, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Masaaki NAGASE, Yohei SAWADA, Kouji NISHINO, Nobukazu IKEDA